CS66585A1 - Zpusob vyroby fotolitograficke nasky vykonove polovodicove soucastky - Google Patents

Zpusob vyroby fotolitograficke nasky vykonove polovodicove soucastky

Info

Publication number
CS66585A1
CS66585A1 CS85665A CS66585A CS66585A1 CS 66585 A1 CS66585 A1 CS 66585A1 CS 85665 A CS85665 A CS 85665A CS 66585 A CS66585 A CS 66585A CS 66585 A1 CS66585 A1 CS 66585A1
Authority
CS
Czechoslovakia
Prior art keywords
vykonove
soucastky
polovodicove
nasky
fotolitograficke
Prior art date
Application number
CS85665A
Other languages
Czech (cs)
Other versions
CS243318B1 (en
Inventor
Josef Rndr Pich
Marie Ing Ubikova
Pavel Ing Pojman
Jaroslav Rndr Zamastil
Original Assignee
Josef Rndr Pich
Marie Ing Ubikova
Pojman Pavel
Zamastil Jaroslav
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Josef Rndr Pich, Marie Ing Ubikova, Pojman Pavel, Zamastil Jaroslav filed Critical Josef Rndr Pich
Priority to CS85665A priority Critical patent/CS243318B1/en
Publication of CS66585A1 publication Critical patent/CS66585A1/en
Publication of CS243318B1 publication Critical patent/CS243318B1/en

Links

CS85665A 1985-01-31 1985-01-31 A method for producing a photolithographic mask of a power semiconductor device CS243318B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CS85665A CS243318B1 (en) 1985-01-31 1985-01-31 A method for producing a photolithographic mask of a power semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS85665A CS243318B1 (en) 1985-01-31 1985-01-31 A method for producing a photolithographic mask of a power semiconductor device

Publications (2)

Publication Number Publication Date
CS66585A1 true CS66585A1 (en) 1985-08-15
CS243318B1 CS243318B1 (en) 1986-06-12

Family

ID=5339195

Family Applications (1)

Application Number Title Priority Date Filing Date
CS85665A CS243318B1 (en) 1985-01-31 1985-01-31 A method for producing a photolithographic mask of a power semiconductor device

Country Status (1)

Country Link
CS (1) CS243318B1 (en)

Also Published As

Publication number Publication date
CS243318B1 (en) 1986-06-12

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