CS801984A1 - Katodovy terc pro reaktivi magnetronove naprasovani - Google Patents

Katodovy terc pro reaktivi magnetronove naprasovani

Info

Publication number
CS801984A1
CS801984A1 CS848019A CS801984A CS801984A1 CS 801984 A1 CS801984 A1 CS 801984A1 CS 848019 A CS848019 A CS 848019A CS 801984 A CS801984 A CS 801984A CS 801984 A1 CS801984 A1 CS 801984A1
Authority
CS
Czechoslovakia
Prior art keywords
reaktivi
naprasovani
magnetronove
katodovy
terc
Prior art date
Application number
CS848019A
Other languages
Czech (cs)
Other versions
CS245243B1 (en
Inventor
Vaclav Dr Ing Drsc Husa
Vaclav Ing Csc Klabik
Vaclav Ing Csc Landa
Jindrich Ing Drsc Musil
Jaromir Rndr Sladky
Jaroslav Ing Csc Smrcka
Original Assignee
Vaclav Dr Ing Drsc Husa
Vaclav Ing Csc Klabik
Landa Vaclav
Jindrich Ing Drsc Musil
Jaromir Rndr Sladky
Smrcka Jaroslav
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaclav Dr Ing Drsc Husa, Vaclav Ing Csc Klabik, Landa Vaclav, Jindrich Ing Drsc Musil, Jaromir Rndr Sladky, Smrcka Jaroslav filed Critical Vaclav Dr Ing Drsc Husa
Priority to CS848019A priority Critical patent/CS245243B1/en
Publication of CS801984A1 publication Critical patent/CS801984A1/en
Publication of CS245243B1 publication Critical patent/CS245243B1/en

Links

CS848019A 1984-10-22 1984-10-22 Cathode target for reactive magnetron sputtering CS245243B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CS848019A CS245243B1 (en) 1984-10-22 1984-10-22 Cathode target for reactive magnetron sputtering

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS848019A CS245243B1 (en) 1984-10-22 1984-10-22 Cathode target for reactive magnetron sputtering

Publications (2)

Publication Number Publication Date
CS801984A1 true CS801984A1 (en) 1985-07-16
CS245243B1 CS245243B1 (en) 1986-09-18

Family

ID=5430229

Family Applications (1)

Application Number Title Priority Date Filing Date
CS848019A CS245243B1 (en) 1984-10-22 1984-10-22 Cathode target for reactive magnetron sputtering

Country Status (1)

Country Link
CS (1) CS245243B1 (en)

Also Published As

Publication number Publication date
CS245243B1 (en) 1986-09-18

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