CS815681A1 - Vstrikovaci latka k ziskani vrstev z kyslicniku kremnateho ve vakuove technice - Google Patents

Vstrikovaci latka k ziskani vrstev z kyslicniku kremnateho ve vakuove technice

Info

Publication number
CS815681A1
CS815681A1 CS818156A CS815681A CS815681A1 CS 815681 A1 CS815681 A1 CS 815681A1 CS 818156 A CS818156 A CS 818156A CS 815681 A CS815681 A CS 815681A CS 815681 A1 CS815681 A1 CS 815681A1
Authority
CS
Czechoslovakia
Prior art keywords
ziskani
vstrikovaci
vrstev
vakuove
technice
Prior art date
Application number
CS818156A
Other languages
Czech (cs)
Inventor
Heinz Dipl Chem Schicht
Hagen Hildebrand
Ulrich Dipl Phys Szymanski
Manfred Dipl Ing Dr Krueger
Hans-Joachim Dipl Ing Becker
Hans Joachim Dipl Ing Becker
Rudolf Dipl Chem Dr Tuemmler
Wolfgang Dipl Phys Engemann
Dieter Dipl Ing Lambrecht
Original Assignee
Schicht Heinz
Hagen Hildebrand
Szymanski Ulrich
Krueger Manfred
Becker Hans Joachim
Tuemmler Rudolf
Engemann Wolfgang
Lambrecht Dieter
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schicht Heinz, Hagen Hildebrand, Szymanski Ulrich, Krueger Manfred, Becker Hans Joachim, Tuemmler Rudolf, Engemann Wolfgang, Lambrecht Dieter filed Critical Schicht Heinz
Publication of CS815681A1 publication Critical patent/CS815681A1/en

Links

CS818156A 1981-02-12 1981-11-05 Vstrikovaci latka k ziskani vrstev z kyslicniku kremnateho ve vakuove technice CS815681A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD22759181A DD159003A3 (en) 1981-02-12 1981-02-12 METHOD FOR PRODUCING PURIFYING MATERIAL FOR PRODUCING SILICON MONOXIDE LAYERS BY VACUUM EVAPORATION

Publications (1)

Publication Number Publication Date
CS815681A1 true CS815681A1 (en) 1985-04-16

Family

ID=5529078

Family Applications (1)

Application Number Title Priority Date Filing Date
CS818156A CS815681A1 (en) 1981-02-12 1981-11-05 Vstrikovaci latka k ziskani vrstev z kyslicniku kremnateho ve vakuove technice

Country Status (4)

Country Link
BG (1) BG40863A1 (en)
CS (1) CS815681A1 (en)
DD (1) DD159003A3 (en)
HU (1) HU192077B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2900759B2 (en) * 1993-07-20 1999-06-02 信越化学工業株式会社 Silicon oxide deposition material and deposition film
FR2803289B1 (en) * 1999-12-30 2002-06-14 Norbert Couget PROCESS FOR PREPARING AN OPTICAL COATING ON A SUBSTRATE BY VACUUM EVAPORATION OF A POWDER

Also Published As

Publication number Publication date
BG40863A1 (en) 1987-03-14
DD159003A3 (en) 1983-02-16
HU192077B (en) 1987-05-28

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