CS826885A1 - Sposob vytvrdzovania polymernych rezistov pre elektronovu litografiu - Google Patents

Sposob vytvrdzovania polymernych rezistov pre elektronovu litografiu

Info

Publication number
CS826885A1
CS826885A1 CS858268A CS826885A CS826885A1 CS 826885 A1 CS826885 A1 CS 826885A1 CS 858268 A CS858268 A CS 858268A CS 826885 A CS826885 A CS 826885A CS 826885 A1 CS826885 A1 CS 826885A1
Authority
CS
Czechoslovakia
Prior art keywords
vytvrdzovania
rezistov
polymernych
litografiu
elektronovu
Prior art date
Application number
CS858268A
Other languages
Czech (cs)
Other versions
CS252035B1 (en
Inventor
Vasilij Rndr Smatko
Jaroslav Ing Csc Schilder
Stefan Rndr Csc Benacka
Original Assignee
Vasilij Rndr Smatko
Jaroslav Ing Csc Schilder
Benacka Stefan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vasilij Rndr Smatko, Jaroslav Ing Csc Schilder, Benacka Stefan filed Critical Vasilij Rndr Smatko
Priority to CS858268A priority Critical patent/CS252035B1/en
Publication of CS826885A1 publication Critical patent/CS826885A1/en
Publication of CS252035B1 publication Critical patent/CS252035B1/en

Links

CS858268A 1985-11-16 1985-11-16 A method of curing polymer resists for electron lithography CS252035B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CS858268A CS252035B1 (en) 1985-11-16 1985-11-16 A method of curing polymer resists for electron lithography

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS858268A CS252035B1 (en) 1985-11-16 1985-11-16 A method of curing polymer resists for electron lithography

Publications (2)

Publication Number Publication Date
CS826885A1 true CS826885A1 (en) 1986-11-13
CS252035B1 CS252035B1 (en) 1987-08-13

Family

ID=5433056

Family Applications (1)

Application Number Title Priority Date Filing Date
CS858268A CS252035B1 (en) 1985-11-16 1985-11-16 A method of curing polymer resists for electron lithography

Country Status (1)

Country Link
CS (1) CS252035B1 (en)

Also Published As

Publication number Publication date
CS252035B1 (en) 1987-08-13

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