CZ2016661A3 - Kompaktní systém pro charakterizaci spektra a profilu intenzity svazku krátkovlnného záření - Google Patents

Kompaktní systém pro charakterizaci spektra a profilu intenzity svazku krátkovlnného záření

Info

Publication number
CZ2016661A3
CZ2016661A3 CZ2016-661A CZ2016661A CZ2016661A3 CZ 2016661 A3 CZ2016661 A3 CZ 2016661A3 CZ 2016661 A CZ2016661 A CZ 2016661A CZ 2016661 A3 CZ2016661 A3 CZ 2016661A3
Authority
CZ
Czechia
Prior art keywords
characterization
spectrum
profile
radiation beam
beam intensity
Prior art date
Application number
CZ2016-661A
Other languages
English (en)
Other versions
CZ307169B6 (cs
Inventor
Jaroslav Nejdl
Original Assignee
Fyzikální Ústav Av Čr, V. V. I.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fyzikální Ústav Av Čr, V. V. I. filed Critical Fyzikální Ústav Av Čr, V. V. I.
Priority to CZ2016-661A priority Critical patent/CZ2016661A3/cs
Priority to PCT/CZ2017/050050 priority patent/WO2018072766A1/en
Priority to EP17797852.5A priority patent/EP3529572B8/en
Publication of CZ307169B6 publication Critical patent/CZ307169B6/cs
Publication of CZ2016661A3 publication Critical patent/CZ2016661A3/cs
Priority to US16/386,302 priority patent/US10914628B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/429—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to measurement of ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0237—Adjustable, e.g. focussing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0262—Constructional arrangements for removing stray light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0289—Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
    • G01N23/2076—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions for spectrometry, i.e. using an analysing crystal, e.g. for measuring X-ray fluorescence spectrum of a sample with wavelength-dispersion, i.e. WDXFS
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J2003/1842—Types of grating
    • G01J2003/1847—Variable spacing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/10—Different kinds of radiation or particles
    • G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
    • G01N2223/1016—X-ray

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
CZ2016-661A 2016-10-21 2016-10-21 Kompaktní systém pro charakterizaci spektra a profilu intenzity svazku krátkovlnného záření CZ2016661A3 (cs)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CZ2016-661A CZ2016661A3 (cs) 2016-10-21 2016-10-21 Kompaktní systém pro charakterizaci spektra a profilu intenzity svazku krátkovlnného záření
PCT/CZ2017/050050 WO2018072766A1 (en) 2016-10-21 2017-10-21 Apparatus for spectrum and intensity profile characterization of a beam, use thereof and method thereof
EP17797852.5A EP3529572B8 (en) 2016-10-21 2017-10-21 Apparatus for spectrum and intensity profile characterization of a beam, use thereof and method thereof
US16/386,302 US10914628B2 (en) 2016-10-21 2019-04-17 Apparatus for spectrum and intensity profile characterization of a beam, use thereof and method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CZ2016-661A CZ2016661A3 (cs) 2016-10-21 2016-10-21 Kompaktní systém pro charakterizaci spektra a profilu intenzity svazku krátkovlnného záření

Publications (2)

Publication Number Publication Date
CZ307169B6 CZ307169B6 (cs) 2018-02-14
CZ2016661A3 true CZ2016661A3 (cs) 2018-02-14

Family

ID=60327011

Family Applications (1)

Application Number Title Priority Date Filing Date
CZ2016-661A CZ2016661A3 (cs) 2016-10-21 2016-10-21 Kompaktní systém pro charakterizaci spektra a profilu intenzity svazku krátkovlnného záření

Country Status (4)

Country Link
US (1) US10914628B2 (cs)
EP (1) EP3529572B8 (cs)
CZ (1) CZ2016661A3 (cs)
WO (1) WO2018072766A1 (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4051997A4 (en) * 2019-10-31 2023-11-15 Wi-Charge Ltd. OPTICAL POWER METER FOR SAFE OPERATION OF OPTICAL WIRELESS POWER SYSTEMS

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3045931C2 (de) * 1980-12-05 1983-01-20 Berliner Elektronenspeicherring-Gesellschaft für Synchrotronstrahlung mbH, 1000 Berlin Bei streifendem Einfall arbeitender Plangitter-Monochromator
DE19927325B4 (de) * 1999-06-15 2013-06-20 Ulrich Gerhardt Stigmatisch abbildender Toroidspiegel-Plangitter-Monochromator
DE10141958B4 (de) * 2001-08-28 2006-06-08 Bruker Axs Gmbh Röntgen-Diffraktometer
JP3757199B2 (ja) * 2002-09-03 2006-03-22 株式会社リガク Ｘ線小角散乱光学系
EP1882916A1 (en) * 2006-07-20 2008-01-30 Interuniversitair Microelektronica Centrum Compact catadioptric spectrometer
DE102008019600B4 (de) * 2008-04-18 2021-03-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optische Vorrichtung in gestapelter Bauweise und Verfahren zur Herstellung derselben
EP2382507A1 (en) 2009-01-26 2011-11-02 Centre National De La Recherche Scientifique CNRS Coherent ultra-short ultraviolet or extended ultraviolet pulse generating systems
JP5816440B2 (ja) 2011-02-23 2015-11-18 ギガフォトン株式会社 光学装置、レーザ装置および極端紫外光生成装置
JP6210526B2 (ja) 2011-07-06 2017-10-11 ギガフォトン株式会社 波長検出器、波長較正システム
JP5820689B2 (ja) 2011-10-28 2015-11-24 ギガフォトン株式会社 レーザ装置
US10295485B2 (en) * 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
EP3076208B1 (en) 2015-04-04 2019-06-12 Fyzikální ústav AV CR, v.v.i. Multi-layer reflective diffraction grating and use thereof
US10422508B2 (en) * 2016-03-28 2019-09-24 Kla-Tencor Corporation System and method for spectral tuning of broadband light sources

Also Published As

Publication number Publication date
EP3529572B8 (en) 2023-04-05
WO2018072766A1 (en) 2018-04-26
CZ307169B6 (cs) 2018-02-14
EP3529572B1 (en) 2023-03-01
US20190242746A1 (en) 2019-08-08
US10914628B2 (en) 2021-02-09
EP3529572A1 (en) 2019-08-28

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