CZ310683B6 - Zařízení pro uchycení kazety s držákem lamel - Google Patents

Zařízení pro uchycení kazety s držákem lamel

Info

Publication number
CZ310683B6
CZ310683B6 CZ2023-483A CZ2023483A CZ310683B6 CZ 310683 B6 CZ310683 B6 CZ 310683B6 CZ 2023483 A CZ2023483 A CZ 2023483A CZ 310683 B6 CZ310683 B6 CZ 310683B6
Authority
CZ
Czechia
Prior art keywords
lamellas
cassette
attach
holder
equipment
Prior art date
Application number
CZ2023-483A
Other languages
English (en)
Other versions
CZ2023483A3 (cs
Inventor
Radi Zsolt
Jiří DLUHOŠ
Josef POKORNÝ
Original Assignee
Tescan Group, A.S.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tescan Group, A.S. filed Critical Tescan Group, A.S.
Priority to CZ2023-483A priority Critical patent/CZ310683B6/cs
Priority to PCT/CZ2024/050082 priority patent/WO2025124626A1/en
Publication of CZ2023483A3 publication Critical patent/CZ2023483A3/cs
Publication of CZ310683B6 publication Critical patent/CZ310683B6/cs

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/208—Elements or methods for movement independent of sample stage for influencing or moving or contacting or transferring the sample or parts thereof, e.g. prober needles or transfer needles in FIB/SEM systems

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

Předmětem vynálezu je zařízení pro uchycení kazety (4) s držákem (5) lamel a zařízení se svazkem nabitých částic obsahující zařízení pro uchycení kazety (4) s držákem (5) lamel. Zařízení pro uchycení kazety (4) s držákem (5) lamel využívá ramene (3) otočně spojeného s tělem (1), jehož konec, jež se při otáčení ramene (3) vzdaluje od těla (1) je uzpůsoben pro uchycení kazety (4) s držákem lamel (5).
CZ2023-483A 2023-12-13 2023-12-13 Zařízení pro uchycení kazety s držákem lamel CZ310683B6 (cs)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CZ2023-483A CZ310683B6 (cs) 2023-12-13 2023-12-13 Zařízení pro uchycení kazety s držákem lamel
PCT/CZ2024/050082 WO2025124626A1 (en) 2023-12-13 2024-12-11 Device for mounting a cassette with a lamellae holder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CZ2023-483A CZ310683B6 (cs) 2023-12-13 2023-12-13 Zařízení pro uchycení kazety s držákem lamel

Publications (2)

Publication Number Publication Date
CZ2023483A3 CZ2023483A3 (cs) 2025-06-25
CZ310683B6 true CZ310683B6 (cs) 2026-04-29

Family

ID=94383576

Family Applications (1)

Application Number Title Priority Date Filing Date
CZ2023-483A CZ310683B6 (cs) 2023-12-13 2023-12-13 Zařízení pro uchycení kazety s držákem lamel

Country Status (2)

Country Link
CZ (1) CZ310683B6 (cs)
WO (1) WO2025124626A1 (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CZ309523B6 (cs) * 2020-08-27 2023-03-22 Tescan Brno, S.R.O. Naklápěcí prvek manipulačního stolku

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110204226A1 (en) * 2007-04-23 2011-08-25 Omniprobe, Inc. Apparatus for stem sample inspection in a charged particle beam instrument
US11658001B1 (en) * 2022-12-07 2023-05-23 Institute Of Geology And Geophysics, Chinese Academy Of Sciences Ion beam cutting calibration system and method
CZ309656B6 (cs) * 2018-10-10 2023-06-21 Tescan Brno, S.R.O. Zařízení s alespoň jedním polohovatelným držákem vzorků a způsob změny úhlu náklonu držáku a způsob přípravy lamely

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5545287B2 (ja) * 2011-10-17 2014-07-09 日新イオン機器株式会社 エネルギー線照射装置及びワーク搬送機構

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110204226A1 (en) * 2007-04-23 2011-08-25 Omniprobe, Inc. Apparatus for stem sample inspection in a charged particle beam instrument
CZ309656B6 (cs) * 2018-10-10 2023-06-21 Tescan Brno, S.R.O. Zařízení s alespoň jedním polohovatelným držákem vzorků a způsob změny úhlu náklonu držáku a způsob přípravy lamely
US11658001B1 (en) * 2022-12-07 2023-05-23 Institute Of Geology And Geophysics, Chinese Academy Of Sciences Ion beam cutting calibration system and method

Also Published As

Publication number Publication date
WO2025124626A1 (en) 2025-06-19
CZ2023483A3 (cs) 2025-06-25

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