DD134654A1 - Reinigungsverfahren fuer masken fotolithografischer prozesse - Google Patents

Reinigungsverfahren fuer masken fotolithografischer prozesse

Info

Publication number
DD134654A1
DD134654A1 DD20295477A DD20295477A DD134654A1 DD 134654 A1 DD134654 A1 DD 134654A1 DD 20295477 A DD20295477 A DD 20295477A DD 20295477 A DD20295477 A DD 20295477A DD 134654 A1 DD134654 A1 DD 134654A1
Authority
DD
German Democratic Republic
Prior art keywords
fotolithographic
masks
processes
cleaning procedure
cleaning
Prior art date
Application number
DD20295477A
Other languages
English (en)
Inventor
Albrecht Lerm
Horst Porwol
Bernd Roennefarth
Antje Wiegand
Original Assignee
Albrecht Lerm
Horst Porwol
Bernd Roennefarth
Antje Wiegand
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Albrecht Lerm, Horst Porwol, Bernd Roennefarth, Antje Wiegand filed Critical Albrecht Lerm
Priority to DD20295477A priority Critical patent/DD134654A1/de
Publication of DD134654A1 publication Critical patent/DD134654A1/de

Links

DD20295477A 1977-12-27 1977-12-27 Reinigungsverfahren fuer masken fotolithografischer prozesse DD134654A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DD20295477A DD134654A1 (de) 1977-12-27 1977-12-27 Reinigungsverfahren fuer masken fotolithografischer prozesse

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD20295477A DD134654A1 (de) 1977-12-27 1977-12-27 Reinigungsverfahren fuer masken fotolithografischer prozesse

Publications (1)

Publication Number Publication Date
DD134654A1 true DD134654A1 (de) 1979-03-14

Family

ID=5511066

Family Applications (1)

Application Number Title Priority Date Filing Date
DD20295477A DD134654A1 (de) 1977-12-27 1977-12-27 Reinigungsverfahren fuer masken fotolithografischer prozesse

Country Status (1)

Country Link
DD (1) DD134654A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0865070A1 (de) * 1997-03-10 1998-09-16 Applied Materials, Inc. Verfahren und Gerät zur Behandlung eines keramischen Teiles durch Zerstäubungsätzen

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0865070A1 (de) * 1997-03-10 1998-09-16 Applied Materials, Inc. Verfahren und Gerät zur Behandlung eines keramischen Teiles durch Zerstäubungsätzen

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