DD154146B1 - Einrichtung zur piezoelektrischen positionierung - Google Patents

Einrichtung zur piezoelektrischen positionierung

Info

Publication number
DD154146B1
DD154146B1 DD22560280A DD22560280A DD154146B1 DD 154146 B1 DD154146 B1 DD 154146B1 DD 22560280 A DD22560280 A DD 22560280A DD 22560280 A DD22560280 A DD 22560280A DD 154146 B1 DD154146 B1 DD 154146B1
Authority
DD
German Democratic Republic
Prior art keywords
piezoelectric positioning
piezoelectric
positioning
Prior art date
Application number
DD22560280A
Other languages
English (en)
Other versions
DD154146A1 (de
Inventor
Peter Dr-Ing Dittrich
Lothar Dipl-Ing Mueller
Werner Dipl-Ing Scheler
Udo Battig
Original Assignee
Dittrich Peter Dr Ing
Mueller Lothar Dipl Ing
Scheler Werner Dipl Ing
Udo Battig
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dittrich Peter Dr Ing, Mueller Lothar Dipl Ing, Scheler Werner Dipl Ing, Udo Battig filed Critical Dittrich Peter Dr Ing
Priority to DD22560280A priority Critical patent/DD154146B1/de
Publication of DD154146A1 publication Critical patent/DD154146A1/de
Publication of DD154146B1 publication Critical patent/DD154146B1/de

Links

DD22560280A 1980-12-01 1980-12-01 Einrichtung zur piezoelektrischen positionierung DD154146B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DD22560280A DD154146B1 (de) 1980-12-01 1980-12-01 Einrichtung zur piezoelektrischen positionierung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD22560280A DD154146B1 (de) 1980-12-01 1980-12-01 Einrichtung zur piezoelektrischen positionierung

Publications (2)

Publication Number Publication Date
DD154146A1 DD154146A1 (de) 1982-02-24
DD154146B1 true DD154146B1 (de) 1988-07-27

Family

ID=5527534

Family Applications (1)

Application Number Title Priority Date Filing Date
DD22560280A DD154146B1 (de) 1980-12-01 1980-12-01 Einrichtung zur piezoelektrischen positionierung

Country Status (1)

Country Link
DD (1) DD154146B1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0727042B2 (ja) * 1986-12-02 1995-03-29 キヤノン株式会社 ステ−ジ装置
DE102010007970A1 (de) 2010-02-15 2011-08-18 Suss MicroTec Lithography GmbH, 85748 Verfahren und Vorrichtung zum aktiven Keilfehlerausgleich zwischen zwei im wesentlichen zueinander parallel positionierbaren Gegenständen

Also Published As

Publication number Publication date
DD154146A1 (de) 1982-02-24

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Legal Events

Date Code Title Description
B1 Economic patent (sect. 18(1))
ENJ Ceased due to non-payment of renewal fee