DD229865B1 - Breitstrahlionenquelle - Google Patents

Breitstrahlionenquelle

Info

Publication number
DD229865B1
DD229865B1 DD27109484A DD27109484A DD229865B1 DD 229865 B1 DD229865 B1 DD 229865B1 DD 27109484 A DD27109484 A DD 27109484A DD 27109484 A DD27109484 A DD 27109484A DD 229865 B1 DD229865 B1 DD 229865B1
Authority
DD
German Democratic Republic
Prior art keywords
ion source
beam ion
extensive beam
extensive
source
Prior art date
Application number
DD27109484A
Other languages
English (en)
Other versions
DD229865A1 (de
Inventor
Horst Neumann
Axel Schindler
Frieder Bigl
Jutta Silbermann
Original Assignee
Akad Wissenschaften Ddr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akad Wissenschaften Ddr filed Critical Akad Wissenschaften Ddr
Priority to DD27109484A priority Critical patent/DD229865B1/de
Publication of DD229865A1 publication Critical patent/DD229865A1/de
Publication of DD229865B1 publication Critical patent/DD229865B1/de

Links

DD27109484A 1984-12-19 1984-12-19 Breitstrahlionenquelle DD229865B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DD27109484A DD229865B1 (de) 1984-12-19 1984-12-19 Breitstrahlionenquelle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD27109484A DD229865B1 (de) 1984-12-19 1984-12-19 Breitstrahlionenquelle

Publications (2)

Publication Number Publication Date
DD229865A1 DD229865A1 (de) 1985-11-20
DD229865B1 true DD229865B1 (de) 1989-07-05

Family

ID=5563561

Family Applications (1)

Application Number Title Priority Date Filing Date
DD27109484A DD229865B1 (de) 1984-12-19 1984-12-19 Breitstrahlionenquelle

Country Status (1)

Country Link
DD (1) DD229865B1 (de)

Also Published As

Publication number Publication date
DD229865A1 (de) 1985-11-20

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Legal Events

Date Code Title Description
RPI Change in the person, name or address of the patentee (searches according to art. 11 and 12 extension act)
ASS Change of applicant or owner

Owner name: HOCHVAKUUM DRESDEN GMBH, DRESDEN

Effective date: 19930922

Owner name: INSTITUT FUER OBERFLAECHENMODIFIZIERUNG E.V.

Effective date: 19930922

IF04 In force in the year 2004

Expiry date: 20041220