DD262551A3 - Verdampfer - Google Patents

Verdampfer

Info

Publication number
DD262551A3
DD262551A3 DD85280960A DD28096085A DD262551A3 DD 262551 A3 DD262551 A3 DD 262551A3 DD 85280960 A DD85280960 A DD 85280960A DD 28096085 A DD28096085 A DD 28096085A DD 262551 A3 DD262551 A3 DD 262551A3
Authority
DD
German Democratic Republic
Prior art keywords
evaporator
Prior art date
Application number
DD85280960A
Other languages
English (en)
Inventor
Georgij T. Su Levcenko
Aleksandr N. Su Radzikovskij
Original Assignee
Kpi,Su
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to SU823440428A priority Critical patent/SU1257115A1/ru
Application filed by Kpi,Su filed Critical Kpi,Su
Priority to BG71807A priority patent/BG46223A1/xx
Priority to DD85280960A priority patent/DD262551A3/de
Publication of DD262551A3 publication Critical patent/DD262551A3/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DD85280960A 1982-05-19 1985-09-25 Verdampfer DD262551A3 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
SU823440428A SU1257115A1 (ru) 1982-05-19 1982-05-19 Испаритель
BG71807A BG46223A1 (en) 1982-05-19 1985-09-25 Evaporator
DD85280960A DD262551A3 (de) 1982-05-19 1985-09-25 Verdampfer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SU823440428A SU1257115A1 (ru) 1982-05-19 1982-05-19 Испаритель
DD85280960A DD262551A3 (de) 1982-05-19 1985-09-25 Verdampfer

Publications (1)

Publication Number Publication Date
DD262551A3 true DD262551A3 (de) 1988-12-07

Family

ID=25747998

Family Applications (1)

Application Number Title Priority Date Filing Date
DD85280960A DD262551A3 (de) 1982-05-19 1985-09-25 Verdampfer

Country Status (3)

Country Link
BG (1) BG46223A1 (de)
DD (1) DD262551A3 (de)
SU (1) SU1257115A1 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996004410A1 (de) * 1994-08-01 1996-02-15 Franz Hehmann Industrieller dampftransport und -abscheidung
EP1505167A3 (de) * 2003-08-04 2005-03-02 LG Electronics Inc. Verdampfungsquelle
US7671532B2 (en) 2004-10-21 2010-03-02 Lg Display Co., Ltd. Organic electroluminescent device and method of manufacturing the same

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5016566A (en) * 1988-05-31 1991-05-21 Levchenko Georgy T Apparatus for forming films by evaporation in vacuum
RU2121522C1 (ru) * 1997-02-05 1998-11-10 Научно-исследовательский институт измерительных систем Испаритель
RU2530073C1 (ru) * 2013-09-23 2014-10-10 Федеральное государственное бюджетное учреждение науки Институт лазерной физики Сибирского отделения Российской академии наук Вакуумный дуговой испаритель металлов

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996004410A1 (de) * 1994-08-01 1996-02-15 Franz Hehmann Industrieller dampftransport und -abscheidung
EP1505167A3 (de) * 2003-08-04 2005-03-02 LG Electronics Inc. Verdampfungsquelle
US7359630B2 (en) 2003-08-04 2008-04-15 Lg Electronics Inc. Evaporation source for evaporating an organic electroluminescent layer
US7641737B2 (en) 2003-08-04 2010-01-05 Lg Display Co., Ltd. Evaporation source for evaporating an organic
EP2381011A1 (de) * 2003-08-04 2011-10-26 LG Display Co., Ltd. Verdampfungsquelle zum Verdampfen einer organischen elektrolumineszenten Schicht
US8562741B2 (en) 2003-08-04 2013-10-22 Lg Display Co., Ltd. Evaporation source for evaporating an organic electroluminescent layer
US7671532B2 (en) 2004-10-21 2010-03-02 Lg Display Co., Ltd. Organic electroluminescent device and method of manufacturing the same

Also Published As

Publication number Publication date
SU1257115A1 (ru) 1986-09-15
BG46223A1 (en) 1989-11-15

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Legal Events

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ENJ Ceased due to non-payment of renewal fee