DE1589946C3 - Verfahren zum Herstellen eines Halbleiterbauelementes - Google Patents

Verfahren zum Herstellen eines Halbleiterbauelementes

Info

Publication number
DE1589946C3
DE1589946C3 DE1589946A DE1589946A DE1589946C3 DE 1589946 C3 DE1589946 C3 DE 1589946C3 DE 1589946 A DE1589946 A DE 1589946A DE 1589946 A DE1589946 A DE 1589946A DE 1589946 C3 DE1589946 C3 DE 1589946C3
Authority
DE
Germany
Prior art keywords
plate
areas
semiconductor
polished
conductivity type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE1589946A
Other languages
German (de)
English (en)
Other versions
DE1589946A1 (de
DE1589946B2 (de
Inventor
Harold Van Nuys Calif. Weinstein (V.St.A.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infineon Technologies Americas Corp
Original Assignee
International Rectifier Corp USA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Rectifier Corp USA filed Critical International Rectifier Corp USA
Publication of DE1589946A1 publication Critical patent/DE1589946A1/de
Publication of DE1589946B2 publication Critical patent/DE1589946B2/de
Application granted granted Critical
Publication of DE1589946C3 publication Critical patent/DE1589946C3/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/18—Controlling or regulating
    • C30B31/185—Pattern diffusion, e.g. by using masks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/122—Polycrystalline
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/965—Shaped junction formation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
DE1589946A 1966-05-12 1967-05-11 Verfahren zum Herstellen eines Halbleiterbauelementes Expired DE1589946C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US549723A US3396456A (en) 1966-05-12 1966-05-12 Process for diffusion of contoured junction

Publications (3)

Publication Number Publication Date
DE1589946A1 DE1589946A1 (de) 1970-11-12
DE1589946B2 DE1589946B2 (de) 1971-04-22
DE1589946C3 true DE1589946C3 (de) 1976-01-02

Family

ID=24194146

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1589946A Expired DE1589946C3 (de) 1966-05-12 1967-05-11 Verfahren zum Herstellen eines Halbleiterbauelementes

Country Status (8)

Country Link
US (1) US3396456A (2)
BE (1) BE698316A (2)
CH (1) CH506886A (2)
DE (1) DE1589946C3 (2)
FR (1) FR1522733A (2)
GB (1) GB1167266A (2)
NL (1) NL6706294A (2)
SE (1) SE324352B (2)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3791882A (en) * 1966-08-31 1974-02-12 K Ogiue Method of manufacturing semiconductor devices utilizing simultaneous deposition of monocrystalline and polycrystalline regions
US3770520A (en) * 1968-06-26 1973-11-06 Kyodo Denshi Gijutsu Kenkyusho Production of semiconductor integrated-circuit devices
GB1250377A (2) * 1968-08-24 1971-10-20
US4018626A (en) * 1975-09-10 1977-04-19 International Business Machines Corporation Impact sound stressing for semiconductor devices
JP4831709B2 (ja) * 2010-05-21 2011-12-07 シャープ株式会社 半導体装置および半導体装置の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3009841A (en) * 1959-03-06 1961-11-21 Westinghouse Electric Corp Preparation of semiconductor devices having uniform junctions

Also Published As

Publication number Publication date
GB1167266A (en) 1969-10-15
NL6706294A (2) 1967-11-13
CH506886A (de) 1971-04-30
DE1589946A1 (de) 1970-11-12
SE324352B (2) 1970-06-01
FR1522733A (fr) 1968-04-26
DE1589946B2 (de) 1971-04-22
BE698316A (2) 1967-11-13
US3396456A (en) 1968-08-13

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
E77 Valid patent as to the heymanns-index 1977
EHJ Ceased/non-payment of the annual fee