DE69403115D1 - Verfahren zur Herstellung eines Entladungsgefässes - Google Patents

Verfahren zur Herstellung eines Entladungsgefässes

Info

Publication number
DE69403115D1
DE69403115D1 DE69403115T DE69403115T DE69403115D1 DE 69403115 D1 DE69403115 D1 DE 69403115D1 DE 69403115 T DE69403115 T DE 69403115T DE 69403115 T DE69403115 T DE 69403115T DE 69403115 D1 DE69403115 D1 DE 69403115D1
Authority
DE
Germany
Prior art keywords
production
discharge vessel
vessel
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69403115T
Other languages
English (en)
Other versions
DE69403115T2 (de
Inventor
Shigeki Miyazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Publication of DE69403115D1 publication Critical patent/DE69403115D1/de
Application granted granted Critical
Publication of DE69403115T2 publication Critical patent/DE69403115T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/13334—Plasma addressed liquid crystal cells [PALC]
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
    • G09G3/3611—Control of matrices with row and column drivers
    • G09G3/3648—Control of matrices with row and column drivers using an active matrix
    • G09G3/3662—Control of matrices with row and column drivers using an active matrix using plasma-addressed liquid crystal displays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/10—AC-PDPs with at least one main electrode being out of contact with the plasma
    • H01J11/16—AC-PDPs with at least one main electrode being out of contact with the plasma with main electrodes provided inside or on the side face of the spacers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/20—Constructional details
    • H01J11/34—Vessels, containers or parts thereof, e.g. substrates
    • H01J11/36—Spacers, barriers, ribs, partitions or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/38—Cold-cathode tubes
    • H01J17/48—Cold-cathode tubes with more than one cathode or anode, e.g. sequence-discharge tube, counting tube, dekatron
    • H01J17/485—Plasma addressed liquid crystal displays [PALC]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
    • H01J9/142—Manufacture of electrodes or electrode systems of non-emitting electrodes of shadow-masks for colour television tubes
    • H01J9/146—Surface treatment, e.g. blackening, coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/241—Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
    • H01J9/242—Spacers between faceplate and backplate
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133374—Constructional arrangements; Manufacturing methods for displaying permanent signs or marks

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Optics & Photonics (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Liquid Crystal (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
DE69403115T 1993-02-24 1994-02-23 Verfahren zur Herstellung eines Entladungsgefässes Expired - Fee Related DE69403115T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5966793 1993-02-24

Publications (2)

Publication Number Publication Date
DE69403115D1 true DE69403115D1 (de) 1997-06-19
DE69403115T2 DE69403115T2 (de) 1997-12-18

Family

ID=13119779

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69403115T Expired - Fee Related DE69403115T2 (de) 1993-02-24 1994-02-23 Verfahren zur Herstellung eines Entladungsgefässes

Country Status (4)

Country Link
US (1) US5667705A (de)
EP (1) EP0613165B1 (de)
KR (1) KR100318022B1 (de)
DE (1) DE69403115T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3360490B2 (ja) * 1995-05-12 2002-12-24 ソニー株式会社 表示装置
JPH08313884A (ja) * 1995-05-12 1996-11-29 Sony Corp 放電パネル
US5764001A (en) * 1995-12-18 1998-06-09 Philips Electronics North America Corporation Plasma addressed liquid crystal display assembled from bonded elements
US6236440B1 (en) * 1998-07-22 2001-05-22 U.S. Philips Corporation Display device in which one of the two electrodes of a pixel is coated with a dipole material to equalize the electrode work functions
US6271810B1 (en) * 1998-07-29 2001-08-07 Lg Electronics Inc. Plasma display panel using radio frequency and method and apparatus for driving the same
JP3523142B2 (ja) * 1999-03-16 2004-04-26 エルジー電子株式会社 高周波プラズマディスプレーパネル及びその駆動方法
JP2002025453A (ja) * 2000-06-15 2002-01-25 Koninkl Philips Electronics Nv ドーパントガス分圧制御機能を有するプラズマアドレス表示装置
KR100444512B1 (ko) * 2002-01-25 2004-08-16 엘지전자 주식회사 플라즈마 디스플레이 패널의 불순물 제거방법
KR100474277B1 (ko) * 2002-10-29 2005-03-10 엘지전자 주식회사 전계 방출 소자의 에이징 구동 장치 및 방법
US7008877B2 (en) * 2003-05-05 2006-03-07 Unaxis Usa Inc. Etching of chromium layers on photomasks utilizing high density plasma and low frequency RF bias
KR100596364B1 (ko) * 2004-05-31 2006-07-03 주식회사 엘지화학 감광성 수지 조성물 및 이를 이용하여 제조된 액정표시소자
KR100844375B1 (ko) 2007-01-16 2008-07-07 (주)아이씨디 알에프 차폐 구조를 갖는 플라즈마 처리 장치

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR910020783A (ko) * 1990-05-25 1991-12-20 김정배 플라즈마 표시패널과 그 제조 방법
US5102510A (en) * 1990-08-23 1992-04-07 Ensr Corporation Process for electrochemical dehalogenation of organic contaminants
JP3013470B2 (ja) * 1991-02-20 2000-02-28 ソニー株式会社 画像表示装置
KR940006301B1 (ko) * 1991-10-29 1994-07-14 삼성전관 주식회사 프라즈마 어드레스 방식의 액정표시소자와 그 제조방법
CA2085967C (en) * 1991-12-24 1997-11-11 Kazuhiro Nobutoki Polarized relay
JPH05216415A (ja) * 1992-02-04 1993-08-27 Sony Corp プラズマアドレス電気光学装置
JP3271083B2 (ja) * 1992-04-21 2002-04-02 ソニー株式会社 プラズマアドレス電気光学装置
US5298748A (en) * 1992-06-15 1994-03-29 California Institute Of Technology Uncooled tunneling infrared sensor

Also Published As

Publication number Publication date
DE69403115T2 (de) 1997-12-18
US5667705A (en) 1997-09-16
KR940020145A (ko) 1994-09-15
EP0613165A1 (de) 1994-08-31
KR100318022B1 (ko) 2002-08-27
EP0613165B1 (de) 1997-05-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee