DE69920355D1 - Vakuumpumpe mit fanglageranordnung - Google Patents

Vakuumpumpe mit fanglageranordnung

Info

Publication number
DE69920355D1
DE69920355D1 DE69920355T DE69920355T DE69920355D1 DE 69920355 D1 DE69920355 D1 DE 69920355D1 DE 69920355 T DE69920355 T DE 69920355T DE 69920355 T DE69920355 T DE 69920355T DE 69920355 D1 DE69920355 D1 DE 69920355D1
Authority
DE
Germany
Prior art keywords
vacuum pump
bearing arrangement
fishing
fishing bearing
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69920355T
Other languages
English (en)
Other versions
DE69920355T2 (de
Inventor
Fausto Casaro
Larry Hawkins
Patrick Mcmullen
Crawford Meeks
Don O'leary
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Inc
Original Assignee
Varian Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Inc filed Critical Varian Inc
Publication of DE69920355D1 publication Critical patent/DE69920355D1/de
Application granted granted Critical
Publication of DE69920355T2 publication Critical patent/DE69920355T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0442—Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C39/00—Relieving load on bearings
    • F16C39/02—Relieving load on bearings using mechanical means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
DE69920355T 1998-03-10 1999-03-09 Vakuumpumpe mit fanglageranordnung Expired - Lifetime DE69920355T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/037,744 US6071092A (en) 1998-03-10 1998-03-10 Vacuum pump with improved back-up bearing assembly
US37744 1998-03-10
PCT/US1999/005048 WO1999046509A1 (en) 1998-03-10 1999-03-09 Vacuum pump with back-up bearing assembly

Publications (2)

Publication Number Publication Date
DE69920355D1 true DE69920355D1 (de) 2004-10-28
DE69920355T2 DE69920355T2 (de) 2006-02-16

Family

ID=21896068

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69920355T Expired - Lifetime DE69920355T2 (de) 1998-03-10 1999-03-09 Vakuumpumpe mit fanglageranordnung

Country Status (5)

Country Link
US (1) US6071092A (de)
EP (1) EP0981691B1 (de)
JP (1) JP3847796B2 (de)
DE (1) DE69920355T2 (de)
WO (1) WO1999046509A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6196813B1 (en) * 1999-07-06 2001-03-06 Flowserve Management Company Pump assembly including integrated adapter
DE19951954A1 (de) * 1999-10-28 2001-05-03 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
FR2831621B1 (fr) * 2001-10-25 2004-02-13 Cit Alcatel Utilisation des billes en zircone pour les roulements d'atterrissage des pompes turbomoleculaires sur palier magnetique
US7717684B2 (en) * 2003-08-21 2010-05-18 Ebara Corporation Turbo vacuum pump and semiconductor manufacturing apparatus having the same
US7872387B2 (en) * 2004-11-03 2011-01-18 Asia Vital Components Co., Ltd. Motor with single bearing
US7226277B2 (en) * 2004-12-22 2007-06-05 Pratt & Whitney Canada Corp. Pump and method
DE102005036942A1 (de) * 2005-08-05 2007-02-15 Leybold Vacuum Gmbh Turbomaschine
CN101268282B (zh) * 2005-09-19 2013-10-16 英格索尔-兰德公司 流体压缩系统
DE102009024337A1 (de) * 2009-06-09 2010-12-16 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102010032111A1 (de) 2010-07-23 2012-01-26 Schaeffler Technologies Gmbh & Co. Kg Fanglager für einen berührungslos gelagerten Rotor
US9985502B2 (en) 2015-06-04 2018-05-29 Calnetix Technologies, Llc Reducing high frequency losses in an electric machine
DE102019210005A1 (de) * 2019-07-08 2021-01-14 Aktiebolaget Skf Achszapfeneinheit
GB2588146A (en) * 2019-10-09 2021-04-21 Edwards Ltd Vacuum pump

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3071691A (en) * 1960-05-31 1963-01-01 Curtiss Wright Corp Shaft support
DE1933031C3 (de) * 1969-06-30 1978-10-26 Karl 5170 Juelich Boden Magnetische Lagerung
DE2349033C3 (de) * 1973-09-29 1984-08-30 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
US4312628A (en) * 1979-05-21 1982-01-26 Cambridge Thermionic Corporation Turbomolecular vacuum pump having virtually zero power magnetic bearing assembly with single axis servo control
DE3818556A1 (de) * 1988-06-01 1989-12-07 Pfeiffer Vakuumtechnik Magnetlager fuer eine schnell rotierende vakuumpumpe
DE3931661A1 (de) * 1989-08-25 1991-04-04 Leybold Ag Magnetgelagerte vakuumpumpe
US5238362A (en) * 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
IT1241431B (it) * 1990-03-09 1994-01-17 Varian Spa Pompa turbomolecolare perfezionata.
JPH0472497A (ja) * 1990-07-10 1992-03-06 Daikin Ind Ltd 真空ポンプ
DE4232163C3 (de) * 1992-09-25 2001-09-06 Koenig & Bauer Ag Vorrichtung zum Aufrechterhalten einer eingestellten Anpressung einer Farbauftragswalze an einem Formzylinder einer Rotationsdruckmaschine
US5823097A (en) 1997-06-10 1998-10-20 Dirck; Ronald L. Device for storing and transferring waste cooking oil

Also Published As

Publication number Publication date
JP2001525035A (ja) 2001-12-04
JP3847796B2 (ja) 2006-11-22
DE69920355T2 (de) 2006-02-16
EP0981691B1 (de) 2004-09-22
EP0981691A1 (de) 2000-03-01
WO1999046509A1 (en) 1999-09-16
US6071092A (en) 2000-06-06

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