DK0437603T3 - Varieret afstandsdiffraktionsgitter og i fokus monochromator - Google Patents

Varieret afstandsdiffraktionsgitter og i fokus monochromator

Info

Publication number
DK0437603T3
DK0437603T3 DK90914802.5T DK90914802T DK0437603T3 DK 0437603 T3 DK0437603 T3 DK 0437603T3 DK 90914802 T DK90914802 T DK 90914802T DK 0437603 T3 DK0437603 T3 DK 0437603T3
Authority
DK
Denmark
Prior art keywords
monochromator
focus
diffraction grating
varied distance
distance diffraction
Prior art date
Application number
DK90914802.5T
Other languages
English (en)
Inventor
Michael C Hettrick
Original Assignee
Michael C Hettrick
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Michael C Hettrick filed Critical Michael C Hettrick
Application granted granted Critical
Publication of DK0437603T3 publication Critical patent/DK0437603T3/da

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/06—Scanning arrangements arrangements for order-selection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/06—Scanning arrangements arrangements for order-selection
    • G01J2003/069—Complex motion, e.g. rotation of grating and correcting translation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J2003/1842—Types of grating
    • G01J2003/1847—Variable spacing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J2003/1842—Types of grating
    • G01J2003/1852—Cylindric surface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1804—Plane gratings

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
DK90914802.5T 1989-08-10 1990-08-06 Varieret afstandsdiffraktionsgitter og i fokus monochromator DK0437603T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/392,428 US4991934A (en) 1989-08-10 1989-08-10 Varied space diffraction grating and in-focus monochromator

Publications (1)

Publication Number Publication Date
DK0437603T3 true DK0437603T3 (da) 1995-10-30

Family

ID=23550554

Family Applications (1)

Application Number Title Priority Date Filing Date
DK90914802.5T DK0437603T3 (da) 1989-08-10 1990-08-06 Varieret afstandsdiffraktionsgitter og i fokus monochromator

Country Status (7)

Country Link
US (1) US4991934A (da)
EP (1) EP0437603B1 (da)
JP (1) JPH04501472A (da)
AU (1) AU6503990A (da)
DE (1) DE69019943T2 (da)
DK (1) DK0437603T3 (da)
WO (1) WO1991002954A1 (da)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69128786T2 (de) * 1990-06-06 1998-08-20 Kol Ohr Corp., Wilmington, Del. Abstimmbare Lichtquelle und faseroptische Systeme mit abstimmbarer Lichtquelle
US5274435A (en) * 1992-02-26 1993-12-28 Hettrick Michael C Grating monochromators and spectrometers based on surface normal rotation
US5227625A (en) * 1992-09-16 1993-07-13 International Business Machines Corporation Retro-reflective variable-pitch diffraction grating for use in a rotary actuator disk file
US7248667B2 (en) * 1999-05-04 2007-07-24 Carl Zeiss Smt Ag Illumination system with a grating element
US6587196B1 (en) * 2000-01-26 2003-07-01 Sensys Medical, Inc. Oscillating mechanism driven monochromator
US7463828B2 (en) * 2001-06-01 2008-12-09 John Moon Optical channel monitor
US7253897B2 (en) 2001-06-01 2007-08-07 Cidra Corporation Optical spectrum analyzer
JP5170488B2 (ja) * 2001-07-10 2013-03-27 独立行政法人日本原子力研究開発機構 円錐回折斜入射分光器及び該分光器用回折格子
US20050180013A1 (en) * 2002-03-21 2005-08-18 Carl Zeiss Smt Ag Grating element for filtering wavelengths < 100 nm
US20040145810A1 (en) * 2003-01-23 2004-07-29 Ranalli Eliseo R. Method and apparatus for realizing an optical filter with an arbitrary narrow band impulse response
US7619820B2 (en) * 2005-02-09 2009-11-17 I Win Technology Co., Ltd. Dot matrix holograms with spatially varying period
CN103226244A (zh) * 2013-04-22 2013-07-31 中国科学院长春光学精密机械与物理研究所 高分辨率高纯度光栅单色仪分光结构
CN106605163A (zh) 2014-09-05 2017-04-26 船井电机株式会社 激光光学装置和图像投影装置
US10422508B2 (en) * 2016-03-28 2019-09-24 Kla-Tencor Corporation System and method for spectral tuning of broadband light sources
CN109764962B (zh) * 2019-01-23 2021-04-09 中国科学院上海应用物理研究所 一种光栅单色器的优化方法
EP4100721B1 (de) 2020-02-05 2024-01-10 Carl Zeiss SMT GmbH Euv-reflektometer

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2125114B1 (da) * 1971-02-11 1973-12-07 Nal Etu Spatia Es Centre
GB1510108A (en) * 1974-05-28 1978-05-10 Nat Res Dev Spectrometers
US4241999A (en) * 1978-08-24 1980-12-30 Agence Nationale De Valorisation De La Recherche (Anvar) Monochromators
US4192994A (en) * 1978-09-18 1980-03-11 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Diffractoid grating configuration for X-ray and ultraviolet focusing
JPS55136918A (en) * 1979-04-13 1980-10-25 Hitachi Ltd Aberration correcting recess diffraction grating
DE3113984C2 (de) * 1981-04-07 1983-12-01 Bodenseewerk Perkin-Elmer & Co GmbH, 7770 Überlingen Doppelmonochromator
US4398823A (en) * 1981-06-01 1983-08-16 Baker Manufacturing Company Extended range monochromator
US4492466A (en) * 1982-06-28 1985-01-08 At&T Bell Laboratories Cylindrical grating monochromator for synchrotron radiation
US4578804A (en) * 1984-05-30 1986-03-25 The United States Of America As Represented By The Secretary Of The Navy Polynomial grating
US4776696A (en) * 1987-03-20 1988-10-11 Michael C. Hettrick Optical system for high resolution spectrometer/monochromator

Also Published As

Publication number Publication date
EP0437603B1 (en) 1995-06-07
JPH04501472A (ja) 1992-03-12
US4991934A (en) 1991-02-12
DE69019943D1 (de) 1995-07-13
WO1991002954A1 (en) 1991-03-07
DE69019943T2 (de) 1995-11-16
AU6503990A (en) 1991-04-03
EP0437603A1 (en) 1991-07-24

Similar Documents

Publication Publication Date Title
DE3855529D1 (de) Hologramme und Beugungsgitter
DE68928711D1 (de) Beugungsgitter
DE69125678D1 (de) Abstimmbares Beugungsgitter
DE69029358D1 (de) Beugevorrichtung
DE69117369D1 (de) Holographische Beugungsgitterstrukturen und Herstellungsverfahren
DK0413939T3 (da) Forbedret gitter-spektrometer
DK0437603T3 (da) Varieret afstandsdiffraktionsgitter og i fokus monochromator
DE69022922D1 (de) Beugungslinse.
DE3751800D1 (de) Diskretes optisches Gitter und Vorrichtung
BR8907881A (pt) Esmerilador excentrico
DE68914067D1 (de) Dispersionskompensierendes Diffraktionsgitter.
DE69429598D1 (de) Asymmetrischer 4-Kristallmonochromator
DK0426484T3 (da) Forbedringer på og ved anhænger-bærestolper
GB8919220D0 (en) Diffraction grating assembly
FI901819A7 (fi) Monokromaattori
DE69312266D1 (de) Beugungsgitter
DK161414C (da) Solur
IT220629Z2 (it) Portacipria
KR910000130U (ko) 콤팩트
KR910000136U (ko) 콤팩트
KR900014588U (ko) 그레이팅(Grating)
KR970050375U (ko) 회절격자를 이용한 라인 포인터
KR900015530U (ko) 휴대용 인장
SG107994G (en) Spectrometer using concave holographic diffraction grating
GB9001546D0 (en) Diffraction grating