DK0613535T3 - Mikromekanisk ventil til mikromekaniske doseringsindretninger - Google Patents

Mikromekanisk ventil til mikromekaniske doseringsindretninger

Info

Publication number
DK0613535T3
DK0613535T3 DK92923356.7T DK92923356T DK0613535T3 DK 0613535 T3 DK0613535 T3 DK 0613535T3 DK 92923356 T DK92923356 T DK 92923356T DK 0613535 T3 DK0613535 T3 DK 0613535T3
Authority
DK
Denmark
Prior art keywords
micromechanical
valve
dosing devices
dosing
devices
Prior art date
Application number
DK92923356.7T
Other languages
English (en)
Inventor
Juergen Joswig
Original Assignee
Juergen Joswig
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Juergen Joswig filed Critical Juergen Joswig
Application granted granted Critical
Publication of DK0613535T3 publication Critical patent/DK0613535T3/da

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0044—Electric operating means therefor using thermo-electric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0051—Electric operating means therefor using electrostatic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0059—Operating means specially adapted for microvalves actuated by fluids actuated by a pilot fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0086—Medical applications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Micromachines (AREA)
  • Reciprocating Pumps (AREA)
  • Multiple-Way Valves (AREA)
DK92923356.7T 1991-11-23 1992-11-19 Mikromekanisk ventil til mikromekaniske doseringsindretninger DK0613535T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4138491A DE4138491C2 (de) 1991-11-23 1991-11-23 Mikromechanisches Ventil für mikromechanische Dosiereinrichtungen

Publications (1)

Publication Number Publication Date
DK0613535T3 true DK0613535T3 (da) 1996-03-04

Family

ID=6445391

Family Applications (1)

Application Number Title Priority Date Filing Date
DK92923356.7T DK0613535T3 (da) 1991-11-23 1992-11-19 Mikromekanisk ventil til mikromekaniske doseringsindretninger

Country Status (7)

Country Link
US (1) US5538221A (da)
EP (1) EP0613535B1 (da)
JP (1) JPH07501124A (da)
DE (2) DE4138491C2 (da)
DK (1) DK0613535T3 (da)
ES (1) ES2080526T3 (da)
WO (1) WO1993010385A1 (da)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4342849A1 (de) * 1993-12-10 1995-06-14 Rainer Dr Habil Hintsche Anordnung und Verfahren zur Mikrodosierung
DE19511022C1 (de) * 1995-03-28 1996-06-20 Hahn Schickard Ges Mikromechanisches Ventil für Mikrodosiereinrichtungen
US6126140A (en) * 1997-12-29 2000-10-03 Honeywell International Inc. Monolithic bi-directional microvalve with enclosed drive electric field
EP1573416A4 (en) 2000-07-07 2010-01-27 Fenwal Inc MEDICAL SYSTEM, METHOD AND DEVICE USING MEMS
DE10048376C2 (de) * 2000-09-29 2002-09-19 Fraunhofer Ges Forschung Mikroventil mit einem normalerweise geschlossenen Zustand
US20040120836A1 (en) * 2002-12-18 2004-06-24 Xunhu Dai Passive membrane microvalves
JP2008539090A (ja) * 2005-04-26 2008-11-13 アビザ テクノロジー リミティド マイクロ流体構造およびその製造方法
JP4871413B2 (ja) * 2007-08-08 2012-02-08 エージェンシー フォー サイエンス，テクノロジー アンド リサーチ 電気光学デバイスおよび電気光学デバイス製造方法
DE102009007317A1 (de) * 2009-02-03 2010-08-12 Continental Automotive Gmbh Ventil
DE102016014947A1 (de) 2016-12-14 2018-06-14 Dürr Systems Ag Druckkopf zur Applikation eines Beschichtungsmittels
DE102016014946A1 (de) 2016-12-14 2018-06-14 Dürr Systems Ag Druckkopf zur Applikation eines Beschichtungsmittels auf ein Bauteil
DE102016014919A1 (de) 2016-12-14 2018-06-14 Dürr Systems Ag Applikationsvorrichtung und Verfahren zum Applizieren eines Beschichtungsmittels
DE102016014944A1 (de) 2016-12-14 2018-06-14 Dürr Systems Ag Beschichtungsverfahren und entsprechende Beschichtungseinrichtung
DE102016014956A1 (de) 2016-12-14 2018-06-14 Dürr Systems Ag Beschichtungseinrichtung und zugehöriges Betriebsverfahren
DE102016014943A1 (de) 2016-12-14 2018-06-14 Dürr Systems Ag Druckkopf mit Temperiereinrichtung
DE102016014951A1 (de) 2016-12-14 2018-06-14 Dürr Systems Ag Beschichtungseinrichtung und zugehöriges Betriebsverfahren
DE102016014920A1 (de) 2016-12-14 2018-06-14 Dürr Systems Ag Druckkopf mit Verschiebe- und/oder Drehmechanik für zumindest eine Düsenreihe
DE102016014948A1 (de) 2016-12-14 2018-06-14 Dürr Systems Ag Druckkopf und zugehöriges Betriebsverfahren
DE102016014952A1 (de) 2016-12-14 2018-06-14 Dürr Systems Ag Beschichtungseinrichtung zur Beschichtung von Bauteilen
DE102016014953A1 (de) 2016-12-14 2018-06-14 Dürr Systems Ag Lackieranlage und entsprechendes Lackierverfahren
DE102016014955A1 (de) 2016-12-14 2018-06-14 Dürr Systems Ag Beschichtungseinrichtung und entsprechendes Beschichtungsverfahren
WO2021108421A1 (en) 2019-11-25 2021-06-03 Aita Bio Inc. Micropump and method of fabricating the same

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3814150A1 (de) * 1988-04-27 1989-11-09 Draegerwerk Ag Ventilanordnung aus mikrostrukturierten komponenten
US4826131A (en) * 1988-08-22 1989-05-02 Ford Motor Company Electrically controllable valve etched from silicon substrates
CH679555A5 (da) * 1989-04-11 1992-03-13 Westonbridge Int Ltd
DE3919876A1 (de) * 1989-06-19 1990-12-20 Bosch Gmbh Robert Mikroventil
DE3936647C1 (da) * 1989-11-03 1990-10-31 Jas Ag Jet Age Systems, Kloten, Ch
DE4035852A1 (de) * 1990-11-10 1992-05-14 Bosch Gmbh Robert Mikroventil in mehrschichtenaufbau
US5176358A (en) * 1991-08-08 1993-01-05 Honeywell Inc. Microstructure gas valve control

Also Published As

Publication number Publication date
DE4138491A1 (de) 1993-05-27
DE59204154D1 (de) 1995-11-30
ES2080526T3 (es) 1996-02-01
EP0613535A1 (de) 1994-09-07
US5538221A (en) 1996-07-23
DE4138491C2 (de) 1995-07-20
JPH07501124A (ja) 1995-02-02
EP0613535B1 (de) 1995-10-25
WO1993010385A1 (de) 1993-05-27

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