DK0707781T3 - Faststofkondensator og mikrofonanordninger - Google Patents

Faststofkondensator og mikrofonanordninger

Info

Publication number
DK0707781T3
DK0707781T3 DK95919010T DK95919010T DK0707781T3 DK 0707781 T3 DK0707781 T3 DK 0707781T3 DK 95919010 T DK95919010 T DK 95919010T DK 95919010 T DK95919010 T DK 95919010T DK 0707781 T3 DK0707781 T3 DK 0707781T3
Authority
DK
Denmark
Prior art keywords
solid state
microphone devices
state condenser
condenser
microphone
Prior art date
Application number
DK95919010T
Other languages
English (en)
Inventor
Peter V Loeppert
Original Assignee
Knowles Electronics Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Knowles Electronics Llc filed Critical Knowles Electronics Llc
Application granted granted Critical
Publication of DK0707781T3 publication Critical patent/DK0707781T3/da

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0072—For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R25/00—Electric hearing aids
    • H04R25/60—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles
    • H04R25/604—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles of acoustic or vibrational transducers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Pressure Sensors (AREA)
DK95919010T 1994-05-05 1995-05-05 Faststofkondensator og mikrofonanordninger DK0707781T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/238,965 US5490220A (en) 1992-03-18 1994-05-05 Solid state condenser and microphone devices
PCT/US1995/005642 WO1995031082A1 (en) 1994-05-05 1995-05-05 Solid state condenser and microphone devices

Publications (1)

Publication Number Publication Date
DK0707781T3 true DK0707781T3 (da) 2000-01-31

Family

ID=22900067

Family Applications (1)

Application Number Title Priority Date Filing Date
DK95919010T DK0707781T3 (da) 1994-05-05 1995-05-05 Faststofkondensator og mikrofonanordninger

Country Status (6)

Country Link
US (1) US5490220A (da)
EP (1) EP0707781B1 (da)
AU (1) AU2472595A (da)
DE (1) DE69511207T2 (da)
DK (1) DK0707781T3 (da)
WO (1) WO1995031082A1 (da)

Families Citing this family (141)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5740261A (en) * 1996-11-21 1998-04-14 Knowles Electronics, Inc. Miniature silicon condenser microphone
JP3360558B2 (ja) * 1997-01-06 2002-12-24 株式会社村田製作所 圧電型電気音響変換器
US5870482A (en) * 1997-02-25 1999-02-09 Knowles Electronics, Inc. Miniature silicon condenser microphone
DE19741046C1 (de) * 1997-09-18 1999-05-06 Sennheiser Electronic Verfahren zur Herstellung eines Ein-Chip-Mikrophons
US6249586B1 (en) * 1998-01-21 2001-06-19 Fachhochschule Furtwangen Slot microphone
WO1999063652A1 (en) * 1998-06-05 1999-12-09 Knowles Electronics, Inc. Solid-state receiver
FI105880B (fi) 1998-06-18 2000-10-13 Nokia Mobile Phones Ltd Mikromekaanisen mikrofonin kiinnitys
JP3992840B2 (ja) * 1998-06-22 2007-10-17 北陸電気工業株式会社 圧電発音器及びその製造方法
US6088463A (en) 1998-10-30 2000-07-11 Microtronic A/S Solid state silicon-based condenser microphone
AU5030100A (en) * 1999-05-19 2000-12-05 California Institute Of Technology High performance mems thin-film teflon electret microphone
US6522762B1 (en) 1999-09-07 2003-02-18 Microtronic A/S Silicon-based sensor system
WO2001019134A2 (en) * 1999-09-06 2001-03-15 Microtronic A/S Silicon-based sensor system
US6857501B1 (en) * 1999-09-21 2005-02-22 The United States Of America As Represented By The Secretary Of The Navy Method of forming parylene-diaphragm piezoelectric acoustic transducers
US6532293B1 (en) * 2000-02-08 2003-03-11 Knowles Electronics Llc Acoustical transducer with reduced parasitic capacitance
JP4057212B2 (ja) * 2000-02-15 2008-03-05 三菱電機株式会社 マイクロフォン装置
WO2001067810A1 (en) * 2000-03-07 2001-09-13 George Raicevich A double-capacitor microphone
US6535460B2 (en) 2000-08-11 2003-03-18 Knowles Electronics, Llc Miniature broadband acoustic transducer
US6987859B2 (en) 2001-07-20 2006-01-17 Knowles Electronics, Llc. Raised microstructure of silicon based device
US7434305B2 (en) 2000-11-28 2008-10-14 Knowles Electronics, Llc. Method of manufacturing a microphone
US8623709B1 (en) 2000-11-28 2014-01-07 Knowles Electronics, Llc Methods of manufacture of top port surface mount silicon condenser microphone packages
US7439616B2 (en) * 2000-11-28 2008-10-21 Knowles Electronics, Llc Miniature silicon condenser microphone
US7166910B2 (en) 2000-11-28 2007-01-23 Knowles Electronics Llc Miniature silicon condenser microphone
US6741709B2 (en) * 2000-12-20 2004-05-25 Shure Incorporated Condenser microphone assembly
US6847090B2 (en) 2001-01-24 2005-01-25 Knowles Electronics, Llc Silicon capacitive microphone
US6859542B2 (en) 2001-05-31 2005-02-22 Sonion Lyngby A/S Method of providing a hydrophobic layer and a condenser microphone having such a layer
US7298856B2 (en) * 2001-09-05 2007-11-20 Nippon Hoso Kyokai Chip microphone and method of making same
US7065224B2 (en) * 2001-09-28 2006-06-20 Sonionmicrotronic Nederland B.V. Microphone for a hearing aid or listening device with improved internal damping and foreign material protection
WO2003037212A2 (en) 2001-10-30 2003-05-08 Lesinski George S Implantation method for a hearing aid microactuator implanted into the cochlea
US7023066B2 (en) * 2001-11-20 2006-04-04 Knowles Electronics, Llc. Silicon microphone
WO2003047307A2 (en) * 2001-11-27 2003-06-05 Corporation For National Research Initiatives A miniature condenser microphone and fabrication method therefor
US6870939B2 (en) * 2001-11-28 2005-03-22 Industrial Technology Research Institute SMT-type structure of the silicon-based electret condenser microphone
US6781231B2 (en) * 2002-09-10 2004-08-24 Knowles Electronics Llc Microelectromechanical system package with environmental and interference shield
US6667189B1 (en) 2002-09-13 2003-12-23 Institute Of Microelectronics High performance silicon condenser microphone with perforated single crystal silicon backplate
US7142682B2 (en) * 2002-12-20 2006-11-28 Sonion Mems A/S Silicon-based transducer for use in hearing instruments and listening devices
US7184563B2 (en) * 2003-03-04 2007-02-27 Knowles Electronics Llc. Electret condenser microphone
JP2004356708A (ja) * 2003-05-27 2004-12-16 Hosiden Corp 音響検出機構及びその製造方法
JP4181580B2 (ja) * 2003-11-20 2008-11-19 松下電器産業株式会社 エレクトレット及びエレクトレットコンデンサー
CN100581032C (zh) * 2003-12-01 2010-01-13 音频专用集成电路公司 具有电压泵的麦克风
US7165647B2 (en) * 2003-12-18 2007-01-23 Pei-Chau Lee Mechanical acoustic filter by erosion etching
JP4264103B2 (ja) * 2004-03-03 2009-05-13 パナソニック株式会社 エレクトレットコンデンサーマイクロホン
EP1722595A4 (en) * 2004-03-05 2010-07-28 Panasonic Corp ELECTRET condenser
DE102004011149B3 (de) * 2004-03-08 2005-11-10 Infineon Technologies Ag Mikrophon und Verfahren zur Herstellung eines Mikrophons
WO2005086535A1 (ja) * 2004-03-09 2005-09-15 Matsushita Electric Industrial Co., Ltd. エレクトレットコンデンサーマイクロホン
SG121923A1 (en) * 2004-10-18 2006-05-26 Sensfab Pte Ltd Silicon microphone
US7329933B2 (en) * 2004-10-29 2008-02-12 Silicon Matrix Pte. Ltd. Silicon microphone with softly constrained diaphragm
US7346178B2 (en) * 2004-10-29 2008-03-18 Silicon Matrix Pte. Ltd. Backplateless silicon microphone
US7415121B2 (en) * 2004-10-29 2008-08-19 Sonion Nederland B.V. Microphone with internal damping
DE102004058879B4 (de) * 2004-12-06 2013-11-07 Austriamicrosystems Ag MEMS-Mikrophon und Verfahren zur Herstellung
US7936894B2 (en) * 2004-12-23 2011-05-03 Motorola Mobility, Inc. Multielement microphone
US7795695B2 (en) 2005-01-27 2010-09-14 Analog Devices, Inc. Integrated microphone
DE102005008514B4 (de) * 2005-02-24 2019-05-16 Tdk Corporation Mikrofonmembran und Mikrofon mit der Mikrofonmembran
DE102005008512B4 (de) 2005-02-24 2016-06-23 Epcos Ag Elektrisches Modul mit einem MEMS-Mikrofon
DE102005008511B4 (de) * 2005-02-24 2019-09-12 Tdk Corporation MEMS-Mikrofon
DE102005016243B3 (de) 2005-04-08 2006-09-28 Austriamicrosystems Ag Mikromechanisches Bauelement, Verfahren zur Herstellung und Verwendung
US7885423B2 (en) * 2005-04-25 2011-02-08 Analog Devices, Inc. Support apparatus for microphone diaphragm
US20070071268A1 (en) * 2005-08-16 2007-03-29 Analog Devices, Inc. Packaged microphone with electrically coupled lid
US7825484B2 (en) * 2005-04-25 2010-11-02 Analog Devices, Inc. Micromachined microphone and multisensor and method for producing same
US7449356B2 (en) * 2005-04-25 2008-11-11 Analog Devices, Inc. Process of forming a microphone using support member
SG127754A1 (en) * 2005-05-16 2006-12-29 Sensfab Pte Ltd Silicon microphone
EP1742506B1 (en) * 2005-07-06 2013-05-22 Epcos Pte Ltd Microphone assembly with P-type preamplifier input stage
US20070040231A1 (en) * 2005-08-16 2007-02-22 Harney Kieran P Partially etched leadframe packages having different top and bottom topologies
US8130979B2 (en) * 2005-08-23 2012-03-06 Analog Devices, Inc. Noise mitigating microphone system and method
US7961897B2 (en) * 2005-08-23 2011-06-14 Analog Devices, Inc. Microphone with irregular diaphragm
US8351632B2 (en) * 2005-08-23 2013-01-08 Analog Devices, Inc. Noise mitigating microphone system and method
WO2007024909A1 (en) * 2005-08-23 2007-03-01 Analog Devices, Inc. Multi-microphone system
US20080247572A1 (en) * 2005-09-09 2008-10-09 Nxp B.V. Micro-Electro-Mechanical System (Mems) Capacitor Microphone and Method of Manufacturing Thereof
US20070121972A1 (en) * 2005-09-26 2007-05-31 Yamaha Corporation Capacitor microphone and diaphragm therefor
DE102005053765B4 (de) * 2005-11-10 2016-04-14 Epcos Ag MEMS-Package und Verfahren zur Herstellung
DE102005053767B4 (de) * 2005-11-10 2014-10-30 Epcos Ag MEMS-Mikrofon, Verfahren zur Herstellung und Verfahren zum Einbau
US7469461B2 (en) * 2005-12-09 2008-12-30 Taiwan Carol Electronics Co., Ltd. Method for making a diaphragm unit of a condenser microphone
TWI315643B (en) * 2006-01-06 2009-10-01 Ind Tech Res Inst Micro acoustic transducer and manufacturing method thereof
US7992283B2 (en) * 2006-01-31 2011-08-09 The Research Foundation Of State University Of New York Surface micromachined differential microphone
JP4966370B2 (ja) * 2006-03-30 2012-07-04 パルス・エムイーエムエス・アンパルトセルスカブ シングルダイ型ｍｅｍｓ音響トランスデューサおよび製造方法
US8081783B2 (en) * 2006-06-20 2011-12-20 Industrial Technology Research Institute Miniature acoustic transducer
WO2008003051A2 (en) * 2006-06-29 2008-01-03 Analog Devices, Inc. Stress mitigation in packaged microchips
EP2044802B1 (en) * 2006-07-25 2013-03-27 Analog Devices, Inc. Multiple microphone system
MX2009001504A (es) * 2006-08-10 2009-08-31 California Inst Of Techn Valvula microfluidica con un miembro de libre flotacion y su metodo de fabricacion.
US20080042223A1 (en) * 2006-08-17 2008-02-21 Lu-Lee Liao Microelectromechanical system package and method for making the same
US20080075308A1 (en) * 2006-08-30 2008-03-27 Wen-Chieh Wei Silicon condenser microphone
DE102006047203B4 (de) * 2006-10-05 2013-01-31 Austriamicrosystems Ag Mikrophonanordnung und Verfahren zu deren Herstellung
US20080083957A1 (en) * 2006-10-05 2008-04-10 Wen-Chieh Wei Micro-electromechanical system package
US8569850B2 (en) 2006-10-11 2013-10-29 Sensfab Pte Ltd Ultra low pressure sensor
US7894622B2 (en) 2006-10-13 2011-02-22 Merry Electronics Co., Ltd. Microphone
US8165323B2 (en) 2006-11-28 2012-04-24 Zhou Tiansheng Monolithic capacitive transducer
US20080175425A1 (en) * 2006-11-30 2008-07-24 Analog Devices, Inc. Microphone System with Silicon Microphone Secured to Package Lid
US8705775B2 (en) 2007-04-25 2014-04-22 University Of Florida Research Foundation, Inc. Capacitive microphone with integrated cavity
US7694610B2 (en) * 2007-06-27 2010-04-13 Siemens Medical Solutions Usa, Inc. Photo-multiplier tube removal tool
JP2009038732A (ja) * 2007-08-03 2009-02-19 Panasonic Corp 電子部品とその製造方法及び該電子部品を備える電子装置
TWI380456B (en) 2008-04-30 2012-12-21 Pixart Imaging Inc Micro-electro-mechanical device and method for making same
CN101580222B (zh) * 2008-05-15 2011-11-16 原相科技股份有限公司 微机电元件与制作方法
US7812418B2 (en) * 2008-07-29 2010-10-12 Fortemedia, Inc Chip-scaled MEMS microphone package
US7951636B2 (en) * 2008-09-22 2011-05-31 Solid State System Co. Ltd. Method for fabricating micro-electro-mechanical system (MEMS) device
US8134215B2 (en) 2008-10-09 2012-03-13 United Microelectronics Corp. MEMS diaphragm
US8238018B2 (en) 2009-06-01 2012-08-07 Zhou Tiansheng MEMS micromirror and micromirror array
US8897470B2 (en) 2009-07-31 2014-11-25 Macronix International Co., Ltd. Method of fabricating integrated semiconductor device with MOS, NPN BJT, LDMOS, pre-amplifier and MEMS unit
TWI444052B (zh) * 2009-12-17 2014-07-01 Ind Tech Res Inst 電容式傳感器及其製造方法
DE102011050040B4 (de) 2010-05-14 2016-10-06 National Tsing Hua University Kapazitives Mikrosystem-Mikrofon
US8436435B2 (en) 2010-07-27 2013-05-07 National Tsing Hua University MEMS capacitive microphone
EP2616727B1 (en) 2010-09-15 2016-04-13 MiniPumps, LLC Molded and packaged elastomeric check valve
US10551613B2 (en) 2010-10-20 2020-02-04 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
US9036231B2 (en) 2010-10-20 2015-05-19 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
CN103563399B (zh) * 2011-03-11 2017-06-09 歌尔股份有限公司 Cmos兼容的硅差分电容器麦克风及其制造方法
US8503699B2 (en) 2011-06-01 2013-08-06 Infineon Technologies Ag Plate, transducer and methods for making and operating a transducer
US9031266B2 (en) * 2011-10-11 2015-05-12 Infineon Technologies Ag Electrostatic loudspeaker with membrane performing out-of-plane displacement
EP2774390A4 (en) 2011-11-04 2015-07-22 Knowles Electronics Llc EMBEDDED DIELEKTRIKUM AS A BARRIER IN AN ACOUSTIC DEVICE AND METHOD OF MANUFACTURING
US9385634B2 (en) 2012-01-26 2016-07-05 Tiansheng ZHOU Rotational type of MEMS electrostatic actuator
KR101379680B1 (ko) 2012-05-09 2014-04-01 이화여자대학교 산학협력단 듀얼 백플레이트를 갖는 ｍｅｍｓ 마이크로폰 및 제조방법
US9491539B2 (en) 2012-08-01 2016-11-08 Knowles Electronics, Llc MEMS apparatus disposed on assembly lid
US9078063B2 (en) 2012-08-10 2015-07-07 Knowles Electronics, Llc Microphone assembly with barrier to prevent contaminant infiltration
US9181086B1 (en) 2012-10-01 2015-11-10 The Research Foundation For The State University Of New York Hinged MEMS diaphragm and method of manufacture therof
WO2014110507A2 (en) 2013-01-11 2014-07-17 Minipumps, Llc Diaphragm check valves and methods of manufacture thereof
US9676614B2 (en) 2013-02-01 2017-06-13 Analog Devices, Inc. MEMS device with stress relief structures
JP6127600B2 (ja) * 2013-03-12 2017-05-17 オムロン株式会社 静電容量型センサ、音響センサ及びマイクロフォン
US9264833B2 (en) 2013-03-14 2016-02-16 Taiwan Semiconductor Manufacturing Company, Ltd. Structure and method for integrated microphone
US9338559B2 (en) 2013-04-16 2016-05-10 Invensense, Inc. Microphone system with a stop member
DE102013106353B4 (de) * 2013-06-18 2018-06-28 Tdk Corporation Verfahren zum Aufbringen einer strukturierten Beschichtung auf ein Bauelement
US9179221B2 (en) * 2013-07-18 2015-11-03 Infineon Technologies Ag MEMS devices, interface circuits, and methods of making thereof
US9344808B2 (en) * 2014-03-18 2016-05-17 Invensense, Inc. Differential sensing acoustic sensor
DE102014108984B4 (de) 2014-06-26 2017-04-06 Tdk Corporation Wandlerelement
CN204046818U (zh) 2014-07-28 2014-12-24 瑞声声学科技(深圳)有限公司 电容mems麦克风
KR101550633B1 (ko) * 2014-09-23 2015-09-07 현대자동차 주식회사 마이크로폰 및 그 제조 방법
US10167189B2 (en) 2014-09-30 2019-01-01 Analog Devices, Inc. Stress isolation platform for MEMS devices
US9743191B2 (en) 2014-10-13 2017-08-22 Knowles Electronics, Llc Acoustic apparatus with diaphragm supported at a discrete number of locations
US9872116B2 (en) 2014-11-24 2018-01-16 Knowles Electronics, Llc Apparatus and method for detecting earphone removal and insertion
KR101610149B1 (ko) * 2014-11-26 2016-04-08 현대자동차 주식회사 마이크로폰 제조방법, 마이크로폰, 및 그 제어방법
FR3033468B1 (fr) * 2015-03-02 2018-04-13 Commissariat A L'energie Atomique Et Aux Energies Alternatives Dispositif a membranes actionnables et haut-parleur digital comportant au moins un tel dispositif
US9794661B2 (en) 2015-08-07 2017-10-17 Knowles Electronics, Llc Ingress protection for reducing particle infiltration into acoustic chamber of a MEMS microphone package
US9401158B1 (en) 2015-09-14 2016-07-26 Knowles Electronics, Llc Microphone signal fusion
US10131538B2 (en) 2015-09-14 2018-11-20 Analog Devices, Inc. Mechanically isolated MEMS device
US9830930B2 (en) 2015-12-30 2017-11-28 Knowles Electronics, Llc Voice-enhanced awareness mode
US9779716B2 (en) 2015-12-30 2017-10-03 Knowles Electronics, Llc Occlusion reduction and active noise reduction based on seal quality
US9812149B2 (en) 2016-01-28 2017-11-07 Knowles Electronics, Llc Methods and systems for providing consistency in noise reduction during speech and non-speech periods
CN108702574B (zh) 2016-02-04 2021-05-25 美商楼氏电子有限公司 差分mems麦克风
ITUA20163571A1 (it) * 2016-05-18 2017-11-18 St Microelectronics Srl Trasduttore acustico mems con elettrodi interdigitati e relativo procedimento di fabbricazione
KR101807069B1 (ko) * 2016-10-21 2017-12-08 현대자동차 주식회사 마이크로폰 및 그 제조방법
JP2019201263A (ja) 2018-05-15 2019-11-21 凸版印刷株式会社 Ｍｅｍｓマイクロフォン
JP7410935B2 (ja) 2018-05-24 2024-01-10 ザ リサーチ ファウンデーション フォー ザ ステイト ユニバーシティー オブ ニューヨーク 容量性センサ
US11417611B2 (en) 2020-02-25 2022-08-16 Analog Devices International Unlimited Company Devices and methods for reducing stress on circuit components
US11981560B2 (en) 2020-06-09 2024-05-14 Analog Devices, Inc. Stress-isolated MEMS device comprising substrate having cavity and method of manufacture
CN114390384A (zh) * 2021-12-31 2022-04-22 瑞声声学科技(深圳)有限公司 麦克风及其制造方法
US20250118715A1 (en) 2022-01-25 2025-04-10 Analog Devices, Inc. Microelectromechanical systems (mems) and related packages

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH466376A (de) * 1968-03-01 1968-12-15 Ibm Anordnung zur Umwandlung von Drücken in digitale elektrische Signale
US3663768A (en) * 1971-01-15 1972-05-16 Northern Electric Co Electret transducer
US3772133A (en) * 1971-11-08 1973-11-13 Industrial Research Prod Inc Backplate construction for electret transducer
NL7313455A (nl) * 1973-10-01 1975-04-03 Philips Nv Mikrofoon met elektrostatische capsule.
JPS57193198A (en) * 1981-05-22 1982-11-27 Toshiba Corp Electrostatic microphone
SE428081B (sv) * 1981-10-07 1983-05-30 Ericsson Telefon Ab L M Tilledningsram for en elektretmikrofon
US4651120A (en) * 1985-09-09 1987-03-17 Honeywell Inc. Piezoresistive pressure sensor
US4771638A (en) * 1985-09-30 1988-09-20 Kabushiki Kaisha Toyota Chuo Kenkyusho Semiconductor pressure sensor
US4783821A (en) * 1987-11-25 1988-11-08 The Regents Of The University Of California IC processed piezoelectric microphone
JPH0748564B2 (ja) * 1988-05-07 1995-05-24 シャープ株式会社 シリコンマイクロセンサ
JP2681207B2 (ja) * 1989-02-01 1997-11-26 株式会社 オーディオテクニカ 静電型電気音響変換器の振動板
US4993072A (en) * 1989-02-24 1991-02-12 Lectret S.A. Shielded electret transducer and method of making the same
US5146435A (en) * 1989-12-04 1992-09-08 The Charles Stark Draper Laboratory, Inc. Acoustic transducer
DE69325732T2 (de) * 1992-03-18 2000-04-27 Knowles Electronics, Inc. Festkörper-Kondensatormikrofon
US5208789A (en) * 1992-04-13 1993-05-04 Lectret S. A. Condenser microphones based on silicon with humidity resistant surface treatment

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DE69511207T2 (de) 2000-02-03
DE69511207D1 (de) 1999-09-09
AU2472595A (en) 1995-11-29
US5490220A (en) 1996-02-06
WO1995031082A1 (en) 1995-11-16
EP0707781B1 (en) 1999-08-04
EP0707781A1 (en) 1996-04-24

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