Classifications

• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
  • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
  • G01N23/20058—Measuring diffraction of electrons, e.g. low energy electron diffraction [LEED] method or reflection high energy electron diffraction [RHEED] method
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
  • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
  • H01J2237/25—Tubes for localised analysis using electron or ion beams
  • H01J2237/2505—Tubes for localised analysis using electron or ion beams characterised by their application
  • H01J2237/2538—Low energy electron microscopy [LEEM]
  • H01J2237/2544—Diffraction [LEED]

Landscapes

• Chemical & Material Sciences (AREA)
• Analytical Chemistry (AREA)
• Crystallography & Structural Chemistry (AREA)
• Physics & Mathematics (AREA)
• Health & Medical Sciences (AREA)
• Life Sciences & Earth Sciences (AREA)
• Biochemistry (AREA)
• General Health & Medical Sciences (AREA)
• General Physics & Mathematics (AREA)
• Immunology (AREA)
• Pathology (AREA)
• Analysing Materials By The Use Of Radiation (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

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Family Applications (1)

Country Status (3)

Families Citing this family (1)

Family Cites Families (2)

• 1998
  • 1998-12-24 DE DE1998159906 patent/DE19859906C1/de not_active Expired - Fee Related
• 1999
  • 1999-11-02 DK DK99121800T patent/DK1014077T3/da active
  • 1999-11-02 EP EP19990121800 patent/EP1014077B1/de not_active Expired - Lifetime

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