DK131619B - Fremgangsmåde til forøgelse af indholdet af tri- og tetrachlorsilan mest muligt i en blanding af monosilan og dets chlorderivater. - Google Patents

Fremgangsmåde til forøgelse af indholdet af tri- og tetrachlorsilan mest muligt i en blanding af monosilan og dets chlorderivater.

Info

Publication number
DK131619B
DK131619B DK489970AA DK489970A DK131619B DK 131619 B DK131619 B DK 131619B DK 489970A A DK489970A A DK 489970AA DK 489970 A DK489970 A DK 489970A DK 131619 B DK131619 B DK 131619B
Authority
DK
Denmark
Prior art keywords
tetrachlorosilane
monosilane
tri
much
mixture
Prior art date
Application number
DK489970AA
Other languages
English (en)
Other versions
DK131619C (da
Inventor
H-J Kotzsch
H-J Vahlensieck
Original Assignee
Dynamit Nobel Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dynamit Nobel Ag filed Critical Dynamit Nobel Ag
Publication of DK131619B publication Critical patent/DK131619B/da
Application granted granted Critical
Publication of DK131619C publication Critical patent/DK131619C/da

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
DK489970A 1969-09-27 1970-09-25 Fremgangsmade til forogelse af indholdet af tri- og tetrachlorsilan mest muligt i en blanding af monosilan og dets chlorderivater DK131619C (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1948911A DE1948911C3 (de) 1969-09-27 1969-09-27 Verfahren zur Entfernung von Hydrogensilanen aus Chlorsilanen

Publications (2)

Publication Number Publication Date
DK131619B true DK131619B (da) 1975-08-11
DK131619C DK131619C (da) 1976-01-12

Family

ID=5746694

Family Applications (1)

Application Number Title Priority Date Filing Date
DK489970A DK131619C (da) 1969-09-27 1970-09-25 Fremgangsmade til forogelse af indholdet af tri- og tetrachlorsilan mest muligt i en blanding af monosilan og dets chlorderivater

Country Status (14)

Country Link
US (1) US3790459A (da)
JP (1) JPS4943199B1 (da)
AT (1) AT303070B (da)
BE (1) BE756657A (da)
CA (1) CA937026A (da)
CH (1) CH540197A (da)
DE (1) DE1948911C3 (da)
DK (1) DK131619C (da)
FI (1) FI50407C (da)
FR (1) FR2062686A5 (da)
GB (1) GB1298738A (da)
NL (1) NL167658C (da)
NO (1) NO130903C (da)
SE (1) SE361297B (da)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3502367A1 (de) * 1985-01-25 1986-07-31 Philips Patentverwaltung Gmbh, 2000 Hamburg Verfahren zum entfernen von wasserstoff aus in siliziumtetrachlorid oder germaniumtetrachlorid geloesten wasserstoffhaltigen verbindungen
JPS6440301U (da) * 1987-08-29 1989-03-10
DE3805282A1 (de) * 1988-02-19 1989-08-31 Wacker Chemitronic Verfahren zur entfernung von n-dotierenden verunreinigungen aus bei der gasphasenabscheidung von silicium anfallenden fluessigen oder gasfoermigen stoffen
JP2867696B2 (ja) * 1990-11-29 1999-03-08 信越化学工業株式会社 四塩化ケイ素の精製方法
DE19616556A1 (de) * 1996-04-25 1997-10-30 Wacker Chemie Gmbh Verfahren zur Stabilisierung von hydridischen Silanen
CN116854099B (zh) * 2023-06-20 2025-12-30 中船(邯郸)派瑞特种气体股份有限公司 一种电子级六氯乙硅烷的合成及精制的方法
WO2025217341A1 (en) * 2024-04-09 2025-10-16 Agc Carbon Inc. Low temperature trichlorosilane hydrogenation

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE632835A (da) * 1962-06-04

Also Published As

Publication number Publication date
FR2062686A5 (da) 1971-06-25
SE361297B (da) 1973-10-29
GB1298738A (en) 1972-12-06
NL167658B (nl) 1981-08-17
DE1948911C3 (de) 1985-12-05
US3790459A (en) 1974-02-05
CA937026A (en) 1973-11-20
NO130903B (da) 1974-11-25
FI50407B (da) 1975-12-01
NO130903C (da) 1975-03-05
JPS4943199B1 (da) 1974-11-19
AT303070B (de) 1972-11-10
DE1948911B2 (de) 1978-06-01
BE756657A (fr) 1971-03-01
DE1948911A1 (de) 1971-04-15
DK131619C (da) 1976-01-12
FI50407C (fi) 1976-03-10
NL167658C (nl) 1982-01-18
CH540197A (de) 1973-08-15
NL7014170A (da) 1971-03-30

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