DK131619B - Fremgangsmåde til forøgelse af indholdet af tri- og tetrachlorsilan mest muligt i en blanding af monosilan og dets chlorderivater. - Google Patents
Fremgangsmåde til forøgelse af indholdet af tri- og tetrachlorsilan mest muligt i en blanding af monosilan og dets chlorderivater.Info
- Publication number
- DK131619B DK131619B DK489970AA DK489970A DK131619B DK 131619 B DK131619 B DK 131619B DK 489970A A DK489970A A DK 489970AA DK 489970 A DK489970 A DK 489970A DK 131619 B DK131619 B DK 131619B
- Authority
- DK
- Denmark
- Prior art keywords
- tetrachlorosilane
- monosilane
- tri
- much
- mixture
- Prior art date
Links
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 title 1
- 125000001309 chloro group Chemical class Cl* 0.000 title 1
- 239000000203 mixture Substances 0.000 title 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 title 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE1948911A DE1948911C3 (de) | 1969-09-27 | 1969-09-27 | Verfahren zur Entfernung von Hydrogensilanen aus Chlorsilanen |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DK131619B true DK131619B (da) | 1975-08-11 |
| DK131619C DK131619C (da) | 1976-01-12 |
Family
ID=5746694
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK489970A DK131619C (da) | 1969-09-27 | 1970-09-25 | Fremgangsmade til forogelse af indholdet af tri- og tetrachlorsilan mest muligt i en blanding af monosilan og dets chlorderivater |
Country Status (14)
| Country | Link |
|---|---|
| US (1) | US3790459A (da) |
| JP (1) | JPS4943199B1 (da) |
| AT (1) | AT303070B (da) |
| BE (1) | BE756657A (da) |
| CA (1) | CA937026A (da) |
| CH (1) | CH540197A (da) |
| DE (1) | DE1948911C3 (da) |
| DK (1) | DK131619C (da) |
| FI (1) | FI50407C (da) |
| FR (1) | FR2062686A5 (da) |
| GB (1) | GB1298738A (da) |
| NL (1) | NL167658C (da) |
| NO (1) | NO130903C (da) |
| SE (1) | SE361297B (da) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3502367A1 (de) * | 1985-01-25 | 1986-07-31 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Verfahren zum entfernen von wasserstoff aus in siliziumtetrachlorid oder germaniumtetrachlorid geloesten wasserstoffhaltigen verbindungen |
| JPS6440301U (da) * | 1987-08-29 | 1989-03-10 | ||
| DE3805282A1 (de) * | 1988-02-19 | 1989-08-31 | Wacker Chemitronic | Verfahren zur entfernung von n-dotierenden verunreinigungen aus bei der gasphasenabscheidung von silicium anfallenden fluessigen oder gasfoermigen stoffen |
| JP2867696B2 (ja) * | 1990-11-29 | 1999-03-08 | 信越化学工業株式会社 | 四塩化ケイ素の精製方法 |
| DE19616556A1 (de) * | 1996-04-25 | 1997-10-30 | Wacker Chemie Gmbh | Verfahren zur Stabilisierung von hydridischen Silanen |
| CN116854099B (zh) * | 2023-06-20 | 2025-12-30 | 中船(邯郸)派瑞特种气体股份有限公司 | 一种电子级六氯乙硅烷的合成及精制的方法 |
| WO2025217341A1 (en) * | 2024-04-09 | 2025-10-16 | Agc Carbon Inc. | Low temperature trichlorosilane hydrogenation |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE632835A (da) * | 1962-06-04 |
-
0
- BE BE756657D patent/BE756657A/xx not_active IP Right Cessation
-
1969
- 1969-09-27 DE DE1948911A patent/DE1948911C3/de not_active Expired
-
1970
- 1970-09-22 CH CH1403070A patent/CH540197A/de not_active IP Right Cessation
- 1970-09-25 FR FR7034881A patent/FR2062686A5/fr not_active Expired
- 1970-09-25 FI FI702623A patent/FI50407C/fi active
- 1970-09-25 NO NO3659/70A patent/NO130903C/no unknown
- 1970-09-25 CA CA094157A patent/CA937026A/en not_active Expired
- 1970-09-25 NL NL7014170A patent/NL167658C/xx not_active IP Right Cessation
- 1970-09-25 DK DK489970A patent/DK131619C/da active
- 1970-09-25 AT AT867470A patent/AT303070B/de not_active IP Right Cessation
- 1970-09-25 SE SE13088/70A patent/SE361297B/xx unknown
- 1970-09-25 GB GB45905/70A patent/GB1298738A/en not_active Expired
- 1970-09-28 JP JP45084935A patent/JPS4943199B1/ja active Pending
- 1970-09-28 US US00076253A patent/US3790459A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| AT303070B (de) | 1972-11-10 |
| DE1948911A1 (de) | 1971-04-15 |
| SE361297B (da) | 1973-10-29 |
| JPS4943199B1 (da) | 1974-11-19 |
| NL7014170A (da) | 1971-03-30 |
| CA937026A (en) | 1973-11-20 |
| DE1948911B2 (de) | 1978-06-01 |
| FR2062686A5 (da) | 1971-06-25 |
| FI50407B (da) | 1975-12-01 |
| DK131619C (da) | 1976-01-12 |
| FI50407C (fi) | 1976-03-10 |
| BE756657A (fr) | 1971-03-01 |
| NL167658C (nl) | 1982-01-18 |
| NO130903C (da) | 1975-03-05 |
| CH540197A (de) | 1973-08-15 |
| NL167658B (nl) | 1981-08-17 |
| DE1948911C3 (de) | 1985-12-05 |
| NO130903B (da) | 1974-11-25 |
| GB1298738A (en) | 1972-12-06 |
| US3790459A (en) | 1974-02-05 |
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