DK1359593T3 - SPM-sensor og fremgangsmåde til dens fremstilling - Google Patents

SPM-sensor og fremgangsmåde til dens fremstilling

Info

Publication number
DK1359593T3
DK1359593T3 DK02006227T DK02006227T DK1359593T3 DK 1359593 T3 DK1359593 T3 DK 1359593T3 DK 02006227 T DK02006227 T DK 02006227T DK 02006227 T DK02006227 T DK 02006227T DK 1359593 T3 DK1359593 T3 DK 1359593T3
Authority
DK
Denmark
Prior art keywords
manufacture
spm sensor
spm
sensor
Prior art date
Application number
DK02006227T
Other languages
English (en)
Inventor
Stefan Lutter
Original Assignee
Nanoworld Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanoworld Ag filed Critical Nanoworld Ag
Application granted granted Critical
Publication of DK1359593T3 publication Critical patent/DK1359593T3/da

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/16—Probe manufacture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Pressure Sensors (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Weting (AREA)
DK02006227T 2002-03-20 2002-03-20 SPM-sensor og fremgangsmåde til dens fremstilling DK1359593T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP02006227A EP1359593B1 (de) 2002-03-20 2002-03-20 SPM-Sensor und Verfahren zur Herstellung desselben

Publications (1)

Publication Number Publication Date
DK1359593T3 true DK1359593T3 (da) 2004-08-09

Family

ID=28799633

Family Applications (1)

Application Number Title Priority Date Filing Date
DK02006227T DK1359593T3 (da) 2002-03-20 2002-03-20 SPM-sensor og fremgangsmåde til dens fremstilling

Country Status (5)

Country Link
US (1) US6958124B2 (da)
EP (1) EP1359593B1 (da)
JP (1) JP3813591B2 (da)
DE (1) DE50200467D1 (da)
DK (1) DK1359593T3 (da)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1347264B1 (de) * 2002-03-20 2004-12-15 Nanoworld AG Verfahren zur Herstellung eines SPM-Sensors
KR100624434B1 (ko) * 2004-09-07 2006-09-19 삼성전자주식회사 저항성 팁을 구비한 반도체 탐침 및 그 제조방법
TWI264542B (en) * 2005-03-22 2006-10-21 Nat Applied Res Laboratories Front-wing probe cantilever of electrical scanning probe microscopy
US9423693B1 (en) 2005-05-10 2016-08-23 Victor B. Kley In-plane scanning probe microscopy tips and tools for wafers and substrates with diverse designs on one wafer or substrate
US7571638B1 (en) 2005-05-10 2009-08-11 Kley Victor B Tool tips with scanning probe microscopy and/or atomic force microscopy applications
DE602005009285D1 (de) * 2005-06-14 2008-10-09 Nat Applied Res Laboratories Biegebalken mit vorderen Flügeln für die leitfähige Sonde eines elektrischen Rastersondenmikroskops.
CN101501785A (zh) * 2006-06-02 2009-08-05 维克托·B·克利 针对米到亚纳米长度范围内的高速测量、分析和成像的系统及方法
US7784107B2 (en) 2006-06-02 2010-08-24 Victor B. Kley High speed measurement, analysis and imaging systems and methods for length scales from meter to sub-nanometer
US8062535B2 (en) 2007-01-31 2011-11-22 Chung Hoon Lee Video rate-enabling probes for atomic force microscopy
EP2104111A1 (de) 2008-03-20 2009-09-23 Nanoworld AG SPM-Sonde mit verkürztem Federbalken
US8828243B2 (en) 2010-09-02 2014-09-09 Applied Nanostructures, Inc. Scanning probe having integrated silicon tip with cantilever
US8307461B2 (en) 2011-01-20 2012-11-06 Primenano, Inc. Fabrication of a microcantilever microwave probe
EP2502876B1 (de) * 2011-03-24 2014-11-19 NanoWorld AG Mikromechanisches Bauelement mit Federbalken und integriertem elektrischen Funktionselement
US9778572B1 (en) 2013-03-15 2017-10-03 Victor B. Kley In-plane scanning probe microscopy tips and tools for wafers and substrates with diverse designs on one wafer or substrate

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0413042B1 (en) * 1989-08-16 1992-12-16 International Business Machines Corporation Method of producing micromechanical sensors for the afm/stm profilometry and micromechanical afm/stm sensor head
US5580827A (en) * 1989-10-10 1996-12-03 The Board Of Trustees Of The Leland Stanford Junior University Casting sharpened microminiature tips
EP0468071B1 (en) 1990-07-25 1994-09-14 International Business Machines Corporation Method of producing micromechanical sensors for the AFM/STM/MFM profilometry and micromechanical AFM/STM/MFM sensor head
US5923033A (en) * 1994-09-14 1999-07-13 Olympus Optical Co., Ltd. Integrated SPM sensor having a photodetector mounted on a probe on a free end of a supported cantilever
US5466948A (en) * 1994-10-11 1995-11-14 John M. Baker Monolithic silicon opto-coupler using enhanced silicon based LEDS
US5948972A (en) * 1994-12-22 1999-09-07 Kla-Tencor Corporation Dual stage instrument for scanning a specimen
EP0726444B1 (en) * 1995-02-10 2001-10-31 Bruker Analytik Gmbh Magnetic resonance method and apparatus for detecting an atomic structure of a sample along a surface thereof
JPH08262040A (ja) 1995-03-17 1996-10-11 Olympus Optical Co Ltd Ａｆｍカンチレバー
JPH08313541A (ja) 1995-05-16 1996-11-29 Olympus Optical Co Ltd 走査型プローブ顕微鏡用カンチレバー及びその製造方法
US6000280A (en) * 1995-07-20 1999-12-14 Cornell Research Foundation, Inc. Drive electrodes for microfabricated torsional cantilevers
JPH09105755A (ja) * 1995-10-11 1997-04-22 Olympus Optical Co Ltd Ａｆｍカンチレバー及びその製造方法
US5744799A (en) 1996-05-20 1998-04-28 Ohara; Tetsuo Apparatus for and method of real-time nanometer-scale position measurement of the sensor of a scanning tunneling microscope or other sensor scanning atomic or other undulating surfaces
JP3883699B2 (ja) * 1997-11-20 2007-02-21 エスアイアイ・ナノテクノロジー株式会社 自己検知型ｓｐｍプローブ及びｓｐｍ装置
US6666075B2 (en) * 1999-02-05 2003-12-23 Xidex Corporation System and method of multi-dimensional force sensing for scanning probe microscopy
EP1197726A1 (en) * 2000-10-04 2002-04-17 Eidgenössische Technische Hochschule Zürich Multipurpose Sensor and cantilever for it
US6888135B2 (en) * 2000-10-18 2005-05-03 Nec Corporation Scanning probe microscope with probe formed by single conductive material
EP1347264B1 (de) * 2002-03-20 2004-12-15 Nanoworld AG Verfahren zur Herstellung eines SPM-Sensors
EP1359388B1 (de) * 2002-05-03 2004-12-08 Nanoworld AG SPM-Sensor und Verfahren zu dessen Herstellung

Also Published As

Publication number Publication date
US6958124B2 (en) 2005-10-25
JP2003302328A (ja) 2003-10-24
JP3813591B2 (ja) 2006-08-23
DE50200467D1 (de) 2004-06-24
EP1359593A1 (de) 2003-11-05
US20040046119A1 (en) 2004-03-11
EP1359593B1 (de) 2004-05-19

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