DK1466500T3 - Silicium mikrofon - Google Patents

Silicium mikrofon

Info

Publication number
DK1466500T3
DK1466500T3 DK02797046T DK02797046T DK1466500T3 DK 1466500 T3 DK1466500 T3 DK 1466500T3 DK 02797046 T DK02797046 T DK 02797046T DK 02797046 T DK02797046 T DK 02797046T DK 1466500 T3 DK1466500 T3 DK 1466500T3
Authority
DK
Denmark
Prior art keywords
silicon microphone
microphone
silicon
Prior art date
Application number
DK02797046T
Other languages
English (en)
Inventor
Sung Bok Lee
Peter V Loeppert
Original Assignee
Knowles Electronics Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Knowles Electronics Llc filed Critical Knowles Electronics Llc
Application granted granted Critical
Publication of DK1466500T3 publication Critical patent/DK1466500T3/da

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0072—For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/02—Casings; Cabinets ; Supports therefor; Mountings therein
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/02—Loudspeakers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Pressure Sensors (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
DK02797046T 2001-11-20 2002-10-15 Silicium mikrofon DK1466500T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/989,513 US7023066B2 (en) 2001-11-20 2001-11-20 Silicon microphone
PCT/US2002/032749 WO2003045110A1 (en) 2001-11-20 2002-10-15 Silicon microphone

Publications (1)

Publication Number Publication Date
DK1466500T3 true DK1466500T3 (da) 2009-05-25

Family

ID=25535177

Family Applications (1)

Application Number Title Priority Date Filing Date
DK02797046T DK1466500T3 (da) 2001-11-20 2002-10-15 Silicium mikrofon

Country Status (9)

Country Link
US (1) US7023066B2 (da)
EP (1) EP1466500B1 (da)
JP (1) JP4381144B2 (da)
KR (1) KR100909351B1 (da)
CN (1) CN100539740C (da)
AU (1) AU2002361569A1 (da)
DE (1) DE60231151D1 (da)
DK (1) DK1466500T3 (da)
WO (1) WO2003045110A1 (da)

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US9036231B2 (en) 2010-10-20 2015-05-19 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
US10551613B2 (en) 2010-10-20 2020-02-04 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
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TWI596957B (zh) * 2013-02-18 2017-08-21 國立清華大學 電容式麥克風
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US9794661B2 (en) 2015-08-07 2017-10-17 Knowles Electronics, Llc Ingress protection for reducing particle infiltration into acoustic chamber of a MEMS microphone package
US9401158B1 (en) 2015-09-14 2016-07-26 Knowles Electronics, Llc Microphone signal fusion
US9779716B2 (en) 2015-12-30 2017-10-03 Knowles Electronics, Llc Occlusion reduction and active noise reduction based on seal quality
US9830930B2 (en) 2015-12-30 2017-11-28 Knowles Electronics, Llc Voice-enhanced awareness mode
US9812149B2 (en) 2016-01-28 2017-11-07 Knowles Electronics, Llc Methods and systems for providing consistency in noise reduction during speech and non-speech periods
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Also Published As

Publication number Publication date
EP1466500A1 (en) 2004-10-13
AU2002361569A1 (en) 2003-06-10
CN1589587A (zh) 2005-03-02
WO2003045110A1 (en) 2003-05-30
KR100909351B1 (ko) 2009-07-24
CN100539740C (zh) 2009-09-09
DE60231151D1 (de) 2009-03-26
JP2005535152A (ja) 2005-11-17
US7023066B2 (en) 2006-04-04
JP4381144B2 (ja) 2009-12-09
KR20040063964A (ko) 2004-07-15
EP1466500B1 (en) 2009-02-11
US20060006483A1 (en) 2006-01-12

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