DK2143307T3 - Plasmadyse - Google Patents

Plasmadyse

Info

Publication number
DK2143307T3
DK2143307T3 DK08716278.0T DK08716278T DK2143307T3 DK 2143307 T3 DK2143307 T3 DK 2143307T3 DK 08716278 T DK08716278 T DK 08716278T DK 2143307 T3 DK2143307 T3 DK 2143307T3
Authority
DK
Denmark
Prior art keywords
die
electrode unit
channel
plasma
insulated
Prior art date
Application number
DK08716278.0T
Other languages
English (en)
Inventor
Martin Willimzik
Original Assignee
Abc Coron Electronic Entwicklungs Und Konstruktionsgmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Abc Coron Electronic Entwicklungs Und Konstruktionsgmbh filed Critical Abc Coron Electronic Entwicklungs Und Konstruktionsgmbh
Application granted granted Critical
Publication of DK2143307T3 publication Critical patent/DK2143307T3/da

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/44—Plasma torches using an arc using more than one torch

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Arc Welding In General (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
DK08716278.0T 2007-03-05 2008-03-05 Plasmadyse DK2143307T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007010996A DE102007010996A1 (de) 2007-03-05 2007-03-05 Plasmadüse
PCT/EP2008/001761 WO2008107180A1 (de) 2007-03-05 2008-03-05 Plasmadüse

Publications (1)

Publication Number Publication Date
DK2143307T3 true DK2143307T3 (da) 2011-10-10

Family

ID=39474054

Family Applications (1)

Application Number Title Priority Date Filing Date
DK08716278.0T DK2143307T3 (da) 2007-03-05 2008-03-05 Plasmadyse

Country Status (6)

Country Link
EP (1) EP2143307B1 (da)
AT (1) ATE514319T1 (da)
DE (1) DE102007010996A1 (da)
DK (1) DK2143307T3 (da)
ES (1) ES2368189T3 (da)
WO (1) WO2008107180A1 (da)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012103938A1 (de) 2012-05-04 2013-11-07 Reinhausen Plasma Gmbh Plasmamodul für eine Plasmaerzeugungsvorrichtung und Plasmaerzeugungsvorrichtung

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE685455C (de) 1934-02-11 1939-12-18 Siemens Schuckertwerke Akt Ges Lichtbogengeblaese
US3770935A (en) * 1970-12-25 1973-11-06 Rikagaku Kenkyusho Plasma jet generator
JPS5546266A (en) * 1978-09-28 1980-03-31 Daido Steel Co Ltd Plasma torch
WO1989009110A1 (fr) * 1988-03-24 1989-10-05 Kabushiki Kaisha Komatsu Seisakusho Machine de coupe a l'arc de plasma et procede de commande
US4982067A (en) * 1988-11-04 1991-01-01 Marantz Daniel Richard Plasma generating apparatus and method
US5008511C1 (en) * 1990-06-26 2001-03-20 Univ British Columbia Plasma torch with axial reactant feed
DE19532412C2 (de) 1995-09-01 1999-09-30 Agrodyn Hochspannungstechnik G Vorrichtung zur Oberflächen-Vorbehandlung von Werkstücken
US6534921B1 (en) * 2000-11-09 2003-03-18 Samsung Electronics Co., Ltd. Method for removing residual metal-containing polymer material and ion implanted photoresist in atmospheric downstream plasma jet system
DE50200894D1 (de) 2002-02-09 2004-09-30 Plasma Treat Gmbh Plasmadüse
DE60308341T2 (de) * 2002-03-28 2007-05-03 Apit Corp. Sa Verfahren zur oberflächenbehandlung durch atmosphärisches plasma und vorrichtung zu seiner herstellung

Also Published As

Publication number Publication date
ES2368189T3 (es) 2011-11-15
WO2008107180A1 (de) 2008-09-12
DE102007010996A1 (de) 2008-09-11
EP2143307A1 (de) 2010-01-13
EP2143307B1 (de) 2011-06-22
WO2008107180A8 (de) 2009-11-26
ATE514319T1 (de) 2011-07-15

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