DK236386D0 - Maalehoved til et varmelednings-vakuummeter - Google Patents

Maalehoved til et varmelednings-vakuummeter

Info

Publication number
DK236386D0
DK236386D0 DK236386A DK236386A DK236386D0 DK 236386 D0 DK236386 D0 DK 236386D0 DK 236386 A DK236386 A DK 236386A DK 236386 A DK236386 A DK 236386A DK 236386 D0 DK236386 D0 DK 236386D0
Authority
DK
Denmark
Prior art keywords
measuring head
vacuum meter
heating vacuum
heating
meter
Prior art date
Application number
DK236386A
Other languages
English (en)
Other versions
DK236386A (da
Inventor
Guenter Reich
Rudolf Flosbach
Original Assignee
Leybold Heraeus Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Gmbh & Co Kg filed Critical Leybold Heraeus Gmbh & Co Kg
Publication of DK236386D0 publication Critical patent/DK236386D0/da
Publication of DK236386A publication Critical patent/DK236386A/da

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
DK236386A 1985-05-22 1986-05-21 Maalehoved til et varmelednings-vakuummeter DK236386A (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19853518388 DE3518388A1 (de) 1985-05-22 1985-05-22 Messkopf

Publications (2)

Publication Number Publication Date
DK236386D0 true DK236386D0 (da) 1986-05-21
DK236386A DK236386A (da) 1986-11-23

Family

ID=6271360

Family Applications (1)

Application Number Title Priority Date Filing Date
DK236386A DK236386A (da) 1985-05-22 1986-05-21 Maalehoved til et varmelednings-vakuummeter

Country Status (5)

Country Link
US (1) US4729242A (da)
EP (1) EP0202547A3 (da)
JP (1) JPH0766480B2 (da)
DE (1) DE3518388A1 (da)
DK (1) DK236386A (da)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01313728A (ja) * 1988-06-13 1989-12-19 Seiko Electronic Components Ltd 水晶式真空計
DE4205551A1 (de) * 1992-02-24 1993-08-26 Leybold Ag Schaltung zur temperaturkompensation eines geregelten waermeleitungsvakuummeters
DE4308433A1 (de) * 1993-03-17 1994-09-22 Leybold Ag Wärmeleitungsvakuummeter mit Meßzelle, Meßgerät und Verbindungskabel
DE4308434A1 (de) * 1993-03-17 1994-09-22 Leybold Ag Temperaturkompensation bei einem geregelten Wärmeleitungsvakuummeter
US5557972A (en) * 1994-09-13 1996-09-24 Teledyne Industries, Inc. Miniature silicon based thermal vacuum sensor and method of measuring vacuum pressures
US7331237B2 (en) * 2006-02-01 2008-02-19 Brooks Automation, Inc. Technique for improving Pirani gauge temperature compensation over its full pressure range
JP4831670B2 (ja) * 2006-02-24 2011-12-07 富士通株式会社 試料抵抗測定装置
US9429479B2 (en) * 2012-07-18 2016-08-30 Millar Instruments Methods, devices, and systems which determine a parameter value of an object or an environment from a voltage reading associated with a common mode signal of a balanced circuit
DE102018007884A1 (de) * 2018-10-05 2020-04-09 Heinz Plöchinger Sensor zur komparativen Druckmessung

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2121101C2 (de) * 1971-04-29 1982-09-16 Dynamit Nobel Ag, 5210 Troisdorf Spannvorrichtung für Sicherheitsgurte
US4369661A (en) * 1980-08-15 1983-01-25 Gibb Owen L Automatic nulling circuit for transient pressure rate changes
DE3130817A1 (de) * 1981-08-04 1983-02-24 Leybold-Heraeus GmbH, 5000 Köln Waermeleitungsvakuummeter
DE3131506A1 (de) * 1981-08-08 1983-03-17 Leybold-Heraeus GmbH, 5000 Köln Verfahren zum betrieb eines geregelten pirani-vakuummeters und dafuer geeignetes pirani-vakuummeter

Also Published As

Publication number Publication date
US4729242A (en) 1988-03-08
DK236386A (da) 1986-11-23
DE3518388A1 (de) 1986-11-27
EP0202547A2 (de) 1986-11-26
JPH0766480B2 (ja) 1995-07-19
EP0202547A3 (de) 1988-02-10
JPS6224121A (ja) 1987-02-02

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