DK3077328T3 - Indretning til mekanisk tilvejebringelse af en spænding på en tyndfilm - Google Patents
Indretning til mekanisk tilvejebringelse af en spænding på en tyndfilm Download PDFInfo
- Publication number
- DK3077328T3 DK3077328T3 DK14825252.1T DK14825252T DK3077328T3 DK 3077328 T3 DK3077328 T3 DK 3077328T3 DK 14825252 T DK14825252 T DK 14825252T DK 3077328 T3 DK3077328 T3 DK 3077328T3
- Authority
- DK
- Denmark
- Prior art keywords
- thin film
- piezo elements
- application portion
- pairs
- tension
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title claims description 47
- 239000000758 substrate Substances 0.000 claims description 13
- 239000012528 membrane Substances 0.000 description 12
- 230000003287 optical effect Effects 0.000 description 5
- 230000000704 physical effect Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical class [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000011133 lead Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Claims (3)
1. Indretning til mekanisk påføring af en spænding på en tyndfilm (5), der er tilvejebragt på et substrat (1) og har en applikations sektion (6), hvilken applikations sektion er omgivet af en piezoelektrisk aktuator, der er forbundet med tyndefilmen (5) på en forskydningsbestandig måde, kendetegnet ved, at aktuatoren omfatter piezoelementer (2), der parvis ligger modsat hinanden i forhold til applikationssektionen (6), og at elementerne løber radialt i forhold til deres aktive retning i forhold til applikationssektionen (6), og at applikationssektionen (6) af tyndfilmen (5) er forbundet med den øvrige tyndfilm (5) over radiale broer, der er forbundet med piezoelementer (2) i en forskydningsbestandig måde.
2. Indretning ifølge krav 1, kendetegnet ved, at substratet (1) danner piezoelementer-ne (2) der parvis ligger modsat hinanden.
3. Indretning ifølge krav 1 eller 2, kendetegnet ved, at tre par af piezoelementer (2) der parvis ligger modsat hinanden er tilvejebragt hver forskudt om ca. 60° mod hinanden.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ATA50789/2013A AT515192B1 (de) | 2013-12-02 | 2013-12-02 | Vorrichtung zur mechanischen Spannungsbeaufschlagung einer Dünnschicht |
| PCT/AT2014/050289 WO2015081361A1 (de) | 2013-12-02 | 2014-12-02 | Vorrichtung zur mechanischen spannungsbeaufschlagung einer dünnschicht |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DK3077328T3 true DK3077328T3 (da) | 2018-11-19 |
Family
ID=52344900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK14825252.1T DK3077328T3 (da) | 2013-12-02 | 2014-12-02 | Indretning til mekanisk tilvejebringelse af en spænding på en tyndfilm |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP3077328B8 (da) |
| AT (1) | AT515192B1 (da) |
| DK (1) | DK3077328T3 (da) |
| WO (1) | WO2015081361A1 (da) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4226507A (en) * | 1979-07-09 | 1980-10-07 | The Perkin-Elmer Corporation | Three actuator deformable specimen |
| DE10046379A1 (de) | 2000-09-20 | 2002-03-28 | Zeiss Carl | System zur gezielten Deformation von optischen Elementen |
| US6515791B1 (en) * | 2001-04-06 | 2003-02-04 | Read-Rite Corporation | Active reflection and anti-reflection optical switch |
| US7369723B1 (en) | 2001-11-09 | 2008-05-06 | The Charles Stark Draper Laboratory, Inc. | High speed piezoelectric optical system with tunable focal length |
| JP2007233153A (ja) * | 2006-03-02 | 2007-09-13 | Funai Electric Co Ltd | 形状可変ミラー及びそれを備えた光ピックアップ装置 |
| FR2919073B1 (fr) * | 2007-07-19 | 2010-10-15 | Commissariat Energie Atomique | Dispositif optique a moyens d'actionnement d'une membrane deformable compacts |
-
2013
- 2013-12-02 AT ATA50789/2013A patent/AT515192B1/de not_active IP Right Cessation
-
2014
- 2014-12-02 DK DK14825252.1T patent/DK3077328T3/da active
- 2014-12-02 EP EP14825252.1A patent/EP3077328B8/de active Active
- 2014-12-02 WO PCT/AT2014/050289 patent/WO2015081361A1/de not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| AT515192A1 (de) | 2015-06-15 |
| EP3077328A1 (de) | 2016-10-12 |
| AT515192B1 (de) | 2021-08-15 |
| EP3077328B1 (de) | 2018-08-01 |
| WO2015081361A1 (de) | 2015-06-11 |
| EP3077328B8 (de) | 2018-12-26 |
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