DK3267208T3 - Piezoelektrisk transducer med temparaturkompensation - Google Patents

Piezoelektrisk transducer med temparaturkompensation Download PDF

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Publication number
DK3267208T3
DK3267208T3 DK17170415.8T DK17170415T DK3267208T3 DK 3267208 T3 DK3267208 T3 DK 3267208T3 DK 17170415 T DK17170415 T DK 17170415T DK 3267208 T3 DK3267208 T3 DK 3267208T3
Authority
DK
Denmark
Prior art keywords
piezoelectric transducer
temporary compensation
compensation
temporary
piezoelectric
Prior art date
Application number
DK17170415.8T
Other languages
English (en)
Inventor
Andrew Cook
Original Assignee
Kistler Holding Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kistler Holding Ag filed Critical Kistler Holding Ag
Application granted granted Critical
Publication of DK3267208T3 publication Critical patent/DK3267208T3/da

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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/30Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/304Beam type
    • H10N30/306Cantilevers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/16Measuring force or stress, in general using properties of piezoelectric devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/26Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0915Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the shear mode type
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00Testing or calibrating of apparatus or devices covered by the preceding groups
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/54Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58Multiple crystal filters
    • H03H9/581Multiple crystal filters comprising ceramic piezoelectric layers
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00Piezoelectric transducers; Electrostrictive transducers
    • H04R17/10Resonant transducers, i.e. adapted to produce maximum output at a predetermined frequency
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/03Assembling devices that include piezoelectric or electrostrictive parts
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/85Piezoelectric or electrostrictive active materials
    • H10N30/853Ceramic compositions
    • H10N30/8548Lead-based oxides
    • H10N30/8554Lead-zirconium titanate [PZT] based

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Ceramic Engineering (AREA)
  • Signal Processing (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Gyroscopes (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
DK17170415.8T 2016-06-28 2017-05-10 Piezoelektrisk transducer med temparaturkompensation DK3267208T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201662355538P 2016-06-28 2016-06-28

Publications (1)

Publication Number Publication Date
DK3267208T3 true DK3267208T3 (da) 2019-10-07

Family

ID=58701473

Family Applications (1)

Application Number Title Priority Date Filing Date
DK17170415.8T DK3267208T3 (da) 2016-06-28 2017-05-10 Piezoelektrisk transducer med temparaturkompensation

Country Status (7)

Country Link
US (1) US10620233B2 (da)
EP (1) EP3267208B1 (da)
JP (1) JP6959768B2 (da)
KR (1) KR102353711B1 (da)
CN (1) CN107543637B (da)
DK (1) DK3267208T3 (da)
ES (1) ES2746355T3 (da)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH711008A1 (de) * 2015-04-30 2016-10-31 Kistler Holding Ag Kontaktkraft-Prüfvorrichtung, Verwendung einer solchen Kontaktkraft-Prüfvorrichtung und Verfahren zur Herstellung einer solchen Kontaktkraft-Prüfvorrichtung.
CN110174205B (zh) * 2019-04-02 2021-01-12 济南大学 一种机器人关节用压电六维力传感器的测量方法
DE102019206997B4 (de) * 2019-05-14 2021-11-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. System zur zerstörungsfreien Prüfung von Bauteilen
EP3757536A1 (de) * 2019-06-25 2020-12-30 Kistler Holding AG Kontaktkraftmessvorrichtung und verfahren zum messen einer kontaktkraft mit einer solchen kontaktkraftmessvorrichtung
EP4220190A3 (de) * 2020-11-02 2023-11-01 Kistler Holding AG Beschleunigungsaufnehmer
CN112729526A (zh) * 2020-12-21 2021-04-30 苏州长风航空电子有限公司 一种高温压电式振动传感器及提高其稳定性的方法
KR102921623B1 (ko) 2023-02-15 2026-02-02 탱크테크 (주) 워터 드릴 랜스 높이 조절용 리프팅 폴 장치
KR102761008B1 (ko) 2023-02-15 2025-02-03 탱크테크 (주) 컨테이너 화재 진압용 워터 드릴 랜스
CN116859082B (zh) * 2023-09-05 2023-12-15 山东利恩斯智能科技有限公司 一种双轴加速度传感器及其安装、测量方法
CN119321843B (zh) * 2024-09-26 2026-01-30 西安近代化学研究所 一种爆炸场压电式压力传感器

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH399021A (de) 1964-02-19 1966-03-31 Kistler Instrumente Ag Beschleunigungs-Messgerät
US3349259A (en) * 1965-05-27 1967-10-24 Kistler Instr Corp Piezoelectric pressure transducer
DE2605809C2 (de) 1976-02-12 1986-11-13 Minnesota Mining And Manufacturing Co., Saint Paul, Minn. Sensoreinrichtung zur Erfassung einer Temperaturänderung oder einer Biegespannungsänderung
US5115161A (en) * 1989-12-04 1992-05-19 Nec Corporation Ultrasonic motor
AT401201B (de) 1994-03-03 1996-07-25 Avl Verbrennungskraft Messtech Piezoelektrisches messelement
WO2005026678A1 (de) * 2003-09-17 2005-03-24 Kistler Holding Ag Mehrschichtiges piezoelektrisches messelement und ein druck- oder kraftsensor umfassend ein solches messelement
AT500829B1 (de) 2004-10-07 2007-03-15 Piezocryst Ges Fuer Piezoelek Sensorelement mit zumindest einem messelement, welches piezoelektrische und pyroelektrische eigenschaften aufweist
WO2009154658A1 (en) * 2008-02-22 2009-12-23 Piezolnnovations Ultrasonic torsional mode and longitudinal-torsional mode transducer systems
CN101644615B (zh) * 2008-08-04 2011-08-10 绵阳市奇石缘科技有限公司 一种可变管径夹持式压力传感器
US8870325B2 (en) * 2011-04-28 2014-10-28 Hewlett-Packard Development Company, L.P. Compensating for capacitance changes in piezoelectric printhead elements
CN103278671A (zh) * 2012-05-04 2013-09-04 唐智川 一种提高正负电荷检验器灵敏度的电路和装置
TWI500465B (zh) * 2012-05-09 2015-09-21 中原大學 複合式壓電系統
CN103706260B (zh) * 2012-09-28 2016-03-02 纳米新能源(唐山)有限责任公司 利用压电聚合物的反渗透膜及其制备方法
CN203101420U (zh) * 2013-03-18 2013-07-31 厦门乃尔电子有限公司 一种超高温压电式加速度传感器
AU2015100011B4 (en) 2014-01-13 2015-07-16 Apple Inc. Temperature compensating transparent force sensor

Also Published As

Publication number Publication date
JP2018025544A (ja) 2018-02-15
EP3267208B1 (en) 2019-07-17
US10620233B2 (en) 2020-04-14
KR102353711B1 (ko) 2022-01-19
CN107543637A (zh) 2018-01-05
EP3267208A1 (en) 2018-01-10
CN107543637B (zh) 2021-01-29
US20170370962A1 (en) 2017-12-28
JP6959768B2 (ja) 2021-11-05
ES2746355T3 (es) 2020-03-05
KR20180002031A (ko) 2018-01-05

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