Classifications

• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
  • G02B6/02—Optical fibres with cladding with or without a coating
  • G02B6/02295—Microstructured optical fibre
  • G02B6/02314—Plurality of longitudinal structures extending along optical fibre axis, e.g. holes
  • G02B6/02319—Plurality of longitudinal structures extending along optical fibre axis, e.g. holes characterised by core or core-cladding interface features
  • G02B6/02323—Core having lower refractive index than cladding, e.g. photonic band gap guiding
  • G02B6/02328—Hollow or gas filled core
• • C—CHEMISTRY; METALLURGY
  • C03—GLASS; MINERAL OR SLAG WOOL
  • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
  • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
  • C03B37/10—Non-chemical treatment
  • C03B37/14—Re-forming fibres or filaments, i.e. changing their shape
  • C03B37/15—Re-forming fibres or filaments, i.e. changing their shape with heat application, e.g. for making optical fibres
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
  • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
  • G02B6/0096—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the lights guides being of the hollow type
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
  • G02B6/02—Optical fibres with cladding with or without a coating
  • G02B6/02295—Microstructured optical fibre
  • G02B6/02314—Plurality of longitudinal structures extending along optical fibre axis, e.g. holes
  • G02B6/02342—Plurality of longitudinal structures extending along optical fibre axis, e.g. holes characterised by cladding features, i.e. light confining region
  • G02B6/02347—Longitudinal structures arranged to form a regular periodic lattice, e.g. triangular, square, honeycomb unit cell repeated throughout cladding
• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
  • G03F7/70—Microphotolithographic exposure; Apparatus therefor
  • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
  • G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
  • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
  • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
  • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
  • G03F9/7034—Leveling
• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
  • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
  • G03F9/7065—Production of alignment light, e.g. light source, control of coherence, polarization, pulse length, wavelength
• • C—CHEMISTRY; METALLURGY
  • C03—GLASS; MINERAL OR SLAG WOOL
  • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
  • C03B2203/00—Fibre product details, e.g. structure, shape
  • C03B2203/10—Internal structure or shape details
  • C03B2203/14—Non-solid, i.e. hollow products, e.g. hollow clad or with core-clad interface
  • C03B2203/16—Hollow core
• • C—CHEMISTRY; METALLURGY
  • C03—GLASS; MINERAL OR SLAG WOOL
  • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
  • C03B2203/00—Fibre product details, e.g. structure, shape
  • C03B2203/42—Photonic crystal fibres, e.g. fibres using the photonic bandgap PBG effect, microstructured or holey optical fibres

Landscapes

• Physics & Mathematics (AREA)
• General Physics & Mathematics (AREA)
• Optics & Photonics (AREA)
• Engineering & Computer Science (AREA)
• Chemical & Material Sciences (AREA)
• Geochemistry & Mineralogy (AREA)
• Health & Medical Sciences (AREA)
• Epidemiology (AREA)
• Life Sciences & Earth Sciences (AREA)
• General Life Sciences & Earth Sciences (AREA)
• Environmental & Geological Engineering (AREA)
• Manufacturing & Machinery (AREA)
• Public Health (AREA)
• Materials Engineering (AREA)
• Organic Chemistry (AREA)
• Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
• Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
• Length Measuring Devices By Optical Means (AREA)
• Microscoopes, Condenser (AREA)
• Optical Couplings Of Light Guides (AREA)
• Spinning Methods And Devices For Manufacturing Artificial Fibers (AREA)

Applications Claiming Priority (2)

Publications (1)

Family

ID=72826915

Family Applications (1)

Country Status (8)

Families Citing this family (11)

Family Cites Families (62)

• 2020
  • 2020-10-19 DK DK20202598.7T patent/DK3812807T3/da active
  • 2020-10-19 IL IL291957A patent/IL291957A/en unknown
  • 2020-10-19 JP JP2022523942A patent/JP7528206B2/ja active Active
  • 2020-10-19 WO PCT/EP2020/079383 patent/WO2021078690A1/en not_active Ceased
  • 2020-10-19 EP EP20202598.7A patent/EP3812807B1/en active Active
  • 2020-10-19 KR KR1020257018746A patent/KR20250090370A/ko active Pending
  • 2020-10-19 EP EP24166014.1A patent/EP4365653A3/en active Pending
  • 2020-10-19 KR KR1020227013438A patent/KR102819211B1/ko active Active
  • 2020-10-22 US US17/077,756 patent/US11774671B2/en active Active
  • 2020-10-23 TW TW109136821A patent/TWI769564B/zh active
• 2023
  • 2023-08-15 US US18/234,096 patent/US12306433B2/en active Active
• 2025
  • 2025-05-12 US US19/205,901 patent/US20250271611A1/en active Pending

Also Published As

Similar Documents