DK4087373T3 - Fremgangsmåde og anordning til generering af stråling med kort bølgelængde - Google Patents
Fremgangsmåde og anordning til generering af stråling med kort bølgelængdeInfo
- Publication number
- DK4087373T3 DK4087373T3 DK21171798.8T DK21171798T DK4087373T3 DK 4087373 T3 DK4087373 T3 DK 4087373T3 DK 21171798 T DK21171798 T DK 21171798T DK 4087373 T3 DK4087373 T3 DK 4087373T3
- Authority
- DK
- Denmark
- Prior art keywords
- wavelength radiation
- generating short
- generating
- short
- wavelength
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—Production of X-ray radiation generated from plasma
- H05G2/008—Production of X-ray radiation generated from plasma involving an energy-carrying beam in the process of plasma generation
- H05G2/0082—Production of X-ray radiation generated from plasma involving an energy-carrying beam in the process of plasma generation the energy-carrying beam being a laser beam
- H05G2/0088—Production of X-ray radiation generated from plasma involving an energy-carrying beam in the process of plasma generation the energy-carrying beam being a laser beam for preconditioning the plasma generating material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/10038—Amplitude control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/10038—Amplitude control
- H01S3/10046—Pulse repetition rate control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1106—Mode locking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2308—Amplifier arrangements, e.g. MOPA
- H01S3/2325—Multi-pass amplifiers, e.g. regenerative amplifiers
- H01S3/235—Regenerative amplifiers
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Electromagnetism (AREA)
- Plasma & Fusion (AREA)
- X-Ray Techniques (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP21171798.8A EP4087373B1 (en) | 2021-05-03 | 2021-05-03 | Method and device for generating short-wavelength radiation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DK4087373T3 true DK4087373T3 (da) | 2026-03-16 |
Family
ID=75801406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK21171798.8T DK4087373T3 (da) | 2021-05-03 | 2021-05-03 | Fremgangsmåde og anordning til generering af stråling med kort bølgelængde |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP4087373B1 (da) |
| DK (1) | DK4087373T3 (da) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115842282A (zh) * | 2022-11-16 | 2023-03-24 | 中国科学院上海光学精密机械研究所 | 一种高功率euv光刻光源的双脉冲驱动光源 |
| DE102023107702A1 (de) * | 2023-03-27 | 2024-10-02 | Trumpf Laser Gmbh | Verfahren und Lasersystem zur Erzeugung von Sekundärstrahlung |
| DE102023107701A1 (de) * | 2023-03-27 | 2024-10-02 | Trumpf Laser Gmbh | Verfahren und Lasersystem zur Erzeugung von Sekundärstrahlung |
| DE102024114973A1 (de) | 2024-05-28 | 2025-12-04 | TRUMPF Laser SE | Vorrichtung und Verfahren zum Erzeugen eines Bursts in einer Sekundärstrahlung |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6513025B2 (ja) | 2013-09-17 | 2019-05-15 | ギガフォトン株式会社 | 極端紫外光生成装置 |
| GB2562236A (en) | 2017-05-08 | 2018-11-14 | Uab Mgf Sviesos Konversija | Device and method for generation of high repetition rate laser pulse bursts |
| RU2706713C1 (ru) | 2019-04-26 | 2019-11-20 | Общество С Ограниченной Ответственностью "Эуф Лабс" | Источник коротковолнового излучения высокой яркости |
| US10743397B2 (en) | 2018-09-12 | 2020-08-11 | ETH Zürich | Method and device for generating electromagnetic radiation by means of a laser-produced plasma |
| NL2025013A (en) | 2019-03-07 | 2020-09-11 | Asml Netherlands Bv | Laser system for source material conditioning in an euv light source |
| JP7261683B2 (ja) * | 2019-07-23 | 2023-04-20 | ギガフォトン株式会社 | 極端紫外光生成システム及び電子デバイスの製造方法 |
-
2021
- 2021-05-03 EP EP21171798.8A patent/EP4087373B1/en active Active
- 2021-05-03 DK DK21171798.8T patent/DK4087373T3/da active
Also Published As
| Publication number | Publication date |
|---|---|
| EP4087373A1 (en) | 2022-11-09 |
| EP4087373B1 (en) | 2026-01-07 |
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