DK4979A - Fremgangsmaade og apparat til at stabilisere og understoette en krystal-halvlederstand under dens fremstilling - Google Patents

Fremgangsmaade og apparat til at stabilisere og understoette en krystal-halvlederstand under dens fremstilling

Info

Publication number
DK4979A
DK4979A DK4979A DK4979A DK4979A DK 4979 A DK4979 A DK 4979A DK 4979 A DK4979 A DK 4979A DK 4979 A DK4979 A DK 4979A DK 4979 A DK4979 A DK 4979A
Authority
DK
Denmark
Prior art keywords
semifier
stabilizing
crystal
procedure
manufacture
Prior art date
Application number
DK4979A
Other languages
English (en)
Inventor
J M Ross
K P Gupta
H G Kramer
J W Burd
Original Assignee
Monsanto Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Monsanto Co filed Critical Monsanto Co
Publication of DK4979A publication Critical patent/DK4979A/da

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating
    • C30B13/285—Crystal holders, e.g. chucks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/911—Seed or rod holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1056—Seed pulling including details of precursor replenishment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/1084—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone having details of a stabilizing feature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
DK4979A 1978-01-06 1979-01-05 Fremgangsmaade og apparat til at stabilisere og understoette en krystal-halvlederstand under dens fremstilling DK4979A (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/867,640 US4257841A (en) 1978-01-06 1978-01-06 Stabilizing and supporting apparatus for float zone refined semiconductor crystal rod

Publications (1)

Publication Number Publication Date
DK4979A true DK4979A (da) 1979-07-07

Family

ID=25350170

Family Applications (1)

Application Number Title Priority Date Filing Date
DK4979A DK4979A (da) 1978-01-06 1979-01-05 Fremgangsmaade og apparat til at stabilisere og understoette en krystal-halvlederstand under dens fremstilling

Country Status (5)

Country Link
US (1) US4257841A (da)
JP (1) JPS54116391A (da)
BE (1) BE873334A (da)
DK (1) DK4979A (da)
IT (1) IT1110663B (da)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4532000A (en) * 1983-09-28 1985-07-30 Hughes Aircraft Company Fabrication of single crystal fibers from congruently melting polycrystalline fibers
JPS63270383A (ja) * 1987-04-27 1988-11-08 Shin Etsu Handotai Co Ltd 半導体結晶棒の支持装置
US5092956A (en) * 1987-09-30 1992-03-03 The United States Of America As Represented By The United States National Aeronautics And Space Administration Device for mechanically stabilizing web ribbon buttons during growth initiation

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1061527B (de) * 1953-02-14 1959-07-16 Siemens Ag Verfahren zum zonenweisen Umschmelzen von Staeben und anderen langgestreckten Werkstuecken
US3233984A (en) * 1963-03-11 1966-02-08 Bell Telephone Labor Inc Support assembly for materials processing and method
DE1519901A1 (de) * 1966-09-23 1970-02-12 Siemens Ag Verfahren zum tiegelfreien Zonenschmelzen eines kristallinen Stabes
DE2322969C3 (de) * 1973-05-07 1980-10-16 Siemens Ag, 1000 Berlin Und 8000 Muenchen Vorrichtung zum Haltern der Stabenden beim tiegelfreien Zonenschmelzen
DE2349799C3 (de) * 1973-10-04 1980-07-24 Schering Ag, 1000 Berlin Und 4619 Bergkamen Klebstoffe auf Basis von a - Cyanacrylsäure-Estern
US3988197A (en) * 1973-11-22 1976-10-26 Siemens Aktiengesellschaft Crucible-free zone melting of semiconductor crystal rods including oscillation dampening
US3996011A (en) * 1973-11-22 1976-12-07 Siemens Aktiengesellschaft Apparatus for crucible-free zone melting of semiconductor crystal rods
BE811057A (fr) * 1974-02-15 1974-08-16 Elphiac Sa Machine universelle pour l'elaboration de monocristaux de materiaux semiconducteurs ou autres suivant les methodes classiques.
US4078897A (en) * 1975-04-11 1978-03-14 Leybold-Heraeus Gmbh & Co. Kg Apparatus for producing monocrystals
DE2652199C3 (de) * 1976-11-16 1982-05-19 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen Vorrichtung zum Abstützen des Kristallstabes beim tiegelfreien Zonenziehen
DE2712506C2 (de) * 1977-03-22 1986-06-12 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zum Haltern des mit dem Keimkristall versehenen Stabendes beim tiegelfreien Zonenschmelzen von Halbleiterkristallstäben

Also Published As

Publication number Publication date
IT7919103A0 (it) 1979-01-05
JPS54116391A (en) 1979-09-10
US4257841A (en) 1981-03-24
BE873334A (fr) 1979-07-05
IT1110663B (it) 1985-12-23

Similar Documents

Publication Publication Date Title
DK282779A (da) Apparat og fremgangsmaade til tilberedning af en eventuelt bicarbonatholdig hemodialyseoploesning
DK153314C (da) Fremgangsmaade og apparat til emballering
DK63580A (da) Fremgangsmaade og apparat til destillation
DK339780A (da) Fremgangsmaade og apparat til diagnostisering
DK32480A (da) Fremgangsmaade apparat og omsaetter til dimensionsmaaling
DK463579A (da) Drivrem fremgangsmaade og apparat til fremstilling heraf
DK549675A (da) Fremgangsmade og apparat til i hovedsagen kinematisk styring af et fartoj
DK158405C (da) Fremgangsmaade og apparat til maaling af vaeskerumfang
DK234180A (da) Fremgangsmaade og apparat til kontinuerlig aetanolgaering
DK360075A (da) Fremgangsmade til kontinuerlig fermentering af en kultur og apparat til udovelse af fremgangsmaden
DK146270C (da) Fremgangsmaade og apparat til at korrigere farverenheden i et katodestraaleroer
DK378279A (da) Fremgangsmaade og apparat til fremstilling af cylindriske roer
DK276981A (da) Fremgangsmaade og apparat til oparbejdning af bundvand
DK410376A (da) Fremgangsmade til kontinuerlig ekstrudering og apparat til udovelse af fremgangsmaden
DK316578A (da) Fremgangsmaade og apparat til koeling af roegroerskrumninger
DK376779A (da) Fremgangsmaade og apparat til emballering af varer
DK14880A (da) Fremgangsmaade og apparat til meknnisk oplykning af groent planteraamateriale
DK409777A (da) Fremgangsmaade til vakuumballering og apparat til udoevelse af fremgangsmaaden
DK11078A (da) Fremgangsmaade og apparat til at impraegnere fluidmmpermeable legemer
DK151843C (da) Fremgangsmaade og apparat til temperering af chokolademasse
DK486980A (da) Fremgangsmaade og apparat til fotokopiering
DK301079A (da) Fremgangsmaade og apparat til forarbejdning af braendingsgods
DK154575C (da) Flammegarn samt fremgangsmaade og apparat til fremstilling heraf
DK307778A (da) Fremgangsmaade og apparat til materialefjernende bearbdning
GB2011509B (en) Support apparatus for transportable bridge

Legal Events

Date Code Title Description
AHB Application shelved due to non-payment