EA201400222A1 - Способ и устройство для формирования слоистой системы с низкой излучательной способностью - Google Patents
Способ и устройство для формирования слоистой системы с низкой излучательной способностьюInfo
- Publication number
- EA201400222A1 EA201400222A1 EA201400222A EA201400222A EA201400222A1 EA 201400222 A1 EA201400222 A1 EA 201400222A1 EA 201400222 A EA201400222 A EA 201400222A EA 201400222 A EA201400222 A EA 201400222A EA 201400222 A1 EA201400222 A1 EA 201400222A1
- Authority
- EA
- Eurasian Patent Office
- Prior art keywords
- base substrate
- layered system
- low emissivity
- forming
- low
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 3
- 239000000758 substrate Substances 0.000 abstract 4
- 238000010438 heat treatment Methods 0.000 abstract 3
- 230000005670 electromagnetic radiation Effects 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 238000002310 reflectometry Methods 0.000 abstract 1
- 238000001771 vacuum deposition Methods 0.000 abstract 1
Classifications
-
- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
- E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
- E04B1/62—Insulation or other protection; Elements or use of specified material therefor
- E04B1/74—Heat, sound or noise insulation, absorption, or reflection; Other building methods affording favourable thermal or acoustical conditions, e.g. accumulating of heat within walls
- E04B1/76—Heat, sound or noise insulation, absorption, or reflection; Other building methods affording favourable thermal or acoustical conditions, e.g. accumulating of heat within walls specifically with respect to heat only
- E04B1/78—Heat insulating elements
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/06—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/366—Low-emissivity or solar control coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/001—Other surface treatment of glass not in the form of fibres or filaments by irradiation by infrared light
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/0015—Other surface treatment of glass not in the form of fibres or filaments by irradiation by visible light
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/32—After-treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physics & Mathematics (AREA)
- Architecture (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Optics & Photonics (AREA)
- Civil Engineering (AREA)
- Acoustics & Sound (AREA)
- Electromagnetism (AREA)
- Structural Engineering (AREA)
- Thermal Sciences (AREA)
- Surface Treatment Of Glass (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Предлагаемое изобретение относится к способу формирования слоистой системы с низкой отражательной способностью, при котором осуществляют следующие операции: формируют по меньшей мере один слой с низкой излучательной способностью по меньшей мере на одной стороне подложки-основания путем вакуумного осаждения, и затем выполняют кратковременную термическую обработку нанесенного слоя с низкой излучательной способностью с помощью электромагнитного излучения без непосредственного нагревания подложки-основания. Кроме того, предлагаемое изобретение относится к устройству для реализации предложенного способа, которое решает проблему улучшения оптических и термических свойств слоистой системы с низкой излучательной способностью без дорогостоящей термической обработки всей подложки-основания при сохранении возможности последующего реконфигурирования подложки-основания, на которую нанесено покрытие с низкой излучательной способностью.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102011081281 | 2011-08-19 | ||
| DE102012200665.6A DE102012200665B4 (de) | 2011-08-19 | 2012-01-18 | Verfahren zur Herstellung eines niedrigemittierenden Schichtsystems |
| PCT/EP2012/066172 WO2013026817A1 (de) | 2011-08-19 | 2012-08-20 | Verfahren und vorrichtung zur herstellung eines niedrigemittierenden schichtsystems |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EA201400222A1 true EA201400222A1 (ru) | 2014-08-29 |
Family
ID=47625162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EA201400222A EA201400222A1 (ru) | 2011-08-19 | 2012-08-20 | Способ и устройство для формирования слоистой системы с низкой излучательной способностью |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US20140197350A1 (ru) |
| EP (2) | EP2744764A1 (ru) |
| CN (2) | CN103987674A (ru) |
| DE (2) | DE102011089884B4 (ru) |
| EA (1) | EA201400222A1 (ru) |
| RU (1) | RU2577562C2 (ru) |
| WO (2) | WO2013026819A1 (ru) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8815059B2 (en) * | 2010-08-31 | 2014-08-26 | Guardian Industries Corp. | System and/or method for heat treating conductive coatings using wavelength-tuned infrared radiation |
| DE102014105300A1 (de) * | 2014-03-12 | 2015-09-17 | Von Ardenne Gmbh | Prozessieranordnung und Verfahren zum Betreiben einer Prozessieranordnung |
| FR3022904B1 (fr) | 2014-06-27 | 2016-07-01 | Saint Gobain | Procede d'activation de couche sur substrat verrier |
| DE102014116244A1 (de) * | 2014-07-07 | 2016-01-07 | Von Ardenne Gmbh | Beschichtungsanordnung |
| FR3025936B1 (fr) * | 2014-09-11 | 2016-12-02 | Saint Gobain | Procede de recuit par lampes flash |
| US20170226631A1 (en) * | 2014-10-22 | 2017-08-10 | Agc Glass Europe | Manufacturing of substrates coated with a conductive layer |
| DE102015105203A1 (de) * | 2015-04-07 | 2016-10-13 | Von Ardenne Gmbh | Verfahren zum Bearbeiten einer Schichtenstruktur und Verfahren zum Herstellen einer elektrisch hochleitfähigen Kupferschicht auf einem lichtdurchlässigen Substrat |
| US10011524B2 (en) * | 2015-06-19 | 2018-07-03 | Guardian Glass, LLC | Coated article with sequentially activated low-E coating, and/or method of making the same |
| US12032124B2 (en) | 2017-08-04 | 2024-07-09 | Vitro Flat Glass Llc | Flash annealing of transparent conductive oxide and semiconductor coatings |
| US11220455B2 (en) | 2017-08-04 | 2022-01-11 | Vitro Flat Glass Llc | Flash annealing of silver coatings |
| FR3070387A1 (fr) * | 2017-08-30 | 2019-03-01 | Saint-Gobain Glass France | Dispositif de traitement thermique ameliore |
| US10822270B2 (en) * | 2018-08-01 | 2020-11-03 | Guardian Glass, LLC | Coated article including ultra-fast laser treated silver-inclusive layer in low-emissivity thin film coating, and/or method of making the same |
| DE102019134818A1 (de) * | 2019-02-16 | 2020-08-20 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | Verfahren zum Erhöhen der Festigkeit eines Glassubstrates |
| FR3105212A1 (fr) | 2019-12-20 | 2021-06-25 | Saint-Gobain Glass France | Procédé de traitement thermique rapide de couches minces sur substrats en verre trempé |
| FR3111842A1 (fr) | 2020-06-26 | 2021-12-31 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procede d’elaboration et de controle de la qualite d’un empilement oxyde/metal/oxyde |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6294219B1 (en) * | 1998-03-03 | 2001-09-25 | Applied Komatsu Technology, Inc. | Method of annealing large area glass substrates |
| US6408649B1 (en) * | 2000-04-28 | 2002-06-25 | Gyrotron Technology, Inc. | Method for the rapid thermal treatment of glass and glass-like materials using microwave radiation |
| US6673462B2 (en) * | 2001-04-27 | 2004-01-06 | Central Glass Company, Limited | Frequency selective plate and method for producing same |
| US7232615B2 (en) * | 2001-10-22 | 2007-06-19 | Ppg Industries Ohio, Inc. | Coating stack comprising a layer of barrier coating |
| JP2004172331A (ja) * | 2002-11-20 | 2004-06-17 | Ushio Inc | 電気伝導性制御方法 |
| US6835657B2 (en) | 2002-12-02 | 2004-12-28 | Applied Materials, Inc. | Method for recrystallizing metal in features of a semiconductor chip |
| US7582161B2 (en) * | 2006-04-07 | 2009-09-01 | Micron Technology, Inc. | Atomic layer deposited titanium-doped indium oxide films |
| DE102006047472A1 (de) * | 2006-10-05 | 2008-04-10 | Fhr Anlagenbau Gmbh | Verfahren und Vorrichtung zur oberflächennahen Behandlung von flächigen Substraten |
| FR2911130B1 (fr) * | 2007-01-05 | 2009-11-27 | Saint Gobain | Procede de depot de couche mince et produit obtenu |
| US20080169064A1 (en) * | 2007-01-11 | 2008-07-17 | Ushio Denki Kabushiki Kaisha | Surface-treating apparatus |
| US7800081B2 (en) * | 2007-11-08 | 2010-09-21 | Applied Materials, Inc. | Pulse train annealing method and apparatus |
| US20090263944A1 (en) * | 2008-04-17 | 2009-10-22 | Albert Chin | Method for making low Vt gate-first light-reflective-layer covered dual metal-gates on high-k CMOSFETs |
| CN104894538A (zh) * | 2008-10-17 | 2015-09-09 | Ncc纳诺责任有限公司 | 还原低温基底上的薄膜的方法 |
| DE102009033417C5 (de) * | 2009-04-09 | 2022-10-06 | Interpane Entwicklungs-Und Beratungsgesellschaft Mbh | Verfahren und Anlage zur Herstellung eines beschichteten Gegenstands mittels Tempern |
| FR2946639B1 (fr) * | 2009-06-12 | 2011-07-15 | Saint Gobain | Procede de depot de couche mince et produit obtenu. |
| FR2950878B1 (fr) * | 2009-10-01 | 2011-10-21 | Saint Gobain | Procede de depot de couche mince |
| WO2011066256A1 (en) | 2009-11-25 | 2011-06-03 | E. I. Du Pont De Nemours And Company | Screen-printable quaternary chalcogenide compositions |
| US8658262B2 (en) * | 2010-01-16 | 2014-02-25 | Cardinal Cg Company | High quality emission control coatings, emission control glazings, and production methods |
| US10000411B2 (en) * | 2010-01-16 | 2018-06-19 | Cardinal Cg Company | Insulating glass unit transparent conductivity and low emissivity coating technology |
| US10060180B2 (en) * | 2010-01-16 | 2018-08-28 | Cardinal Cg Company | Flash-treated indium tin oxide coatings, production methods, and insulating glass unit transparent conductive coating technology |
| US10000965B2 (en) * | 2010-01-16 | 2018-06-19 | Cardinal Cg Company | Insulating glass unit transparent conductive coating technology |
| FR2963342B1 (fr) * | 2010-07-27 | 2012-08-03 | Saint Gobain | Procede d'obtention d'un materiau comprenant un substrat muni d'un revetement |
| US20120156827A1 (en) * | 2010-12-17 | 2012-06-21 | General Electric Company | Method for forming cadmium tin oxide layer and a photovoltaic device |
| FR2969391B1 (fr) * | 2010-12-17 | 2013-07-05 | Saint Gobain | Procédé de fabrication d'un dispositif oled |
| FR2972447B1 (fr) * | 2011-03-08 | 2019-06-07 | Saint-Gobain Glass France | Procede d'obtention d'un substrat muni d'un revetement |
| TWI566300B (zh) * | 2011-03-23 | 2017-01-11 | 斯克林集團公司 | 熱處理方法及熱處理裝置 |
| FR2981346B1 (fr) * | 2011-10-18 | 2014-01-24 | Saint Gobain | Procede de traitement thermique de couches d'argent |
-
2011
- 2011-12-23 DE DE102011089884.0A patent/DE102011089884B4/de not_active Expired - Fee Related
-
2012
- 2012-01-18 DE DE102012200665.6A patent/DE102012200665B4/de active Active
- 2012-08-20 EP EP12756405.2A patent/EP2744764A1/de not_active Ceased
- 2012-08-20 RU RU2014110367/03A patent/RU2577562C2/ru active
- 2012-08-20 WO PCT/EP2012/066174 patent/WO2013026819A1/de not_active Ceased
- 2012-08-20 CN CN201280040499.8A patent/CN103987674A/zh active Pending
- 2012-08-20 EP EP12756404.5A patent/EP2744763A1/de not_active Withdrawn
- 2012-08-20 US US14/238,742 patent/US20140197350A1/en not_active Abandoned
- 2012-08-20 WO PCT/EP2012/066172 patent/WO2013026817A1/de not_active Ceased
- 2012-08-20 US US14/237,951 patent/US9453334B2/en not_active Expired - Fee Related
- 2012-08-20 CN CN201280040483.7A patent/CN103889915A/zh active Pending
- 2012-08-20 EA EA201400222A patent/EA201400222A1/ru unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO2013026819A1 (de) | 2013-02-28 |
| EP2744764A1 (de) | 2014-06-25 |
| CN103987674A (zh) | 2014-08-13 |
| CN103889915A (zh) | 2014-06-25 |
| US20140199496A1 (en) | 2014-07-17 |
| DE102011089884B4 (de) | 2016-03-10 |
| RU2014110367A (ru) | 2015-09-27 |
| DE102012200665B4 (de) | 2016-06-02 |
| US20140197350A1 (en) | 2014-07-17 |
| DE102011089884A1 (de) | 2013-02-21 |
| EP2744763A1 (de) | 2014-06-25 |
| RU2577562C2 (ru) | 2016-03-20 |
| DE102012200665A1 (de) | 2013-02-21 |
| WO2013026817A1 (de) | 2013-02-28 |
| US9453334B2 (en) | 2016-09-27 |
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