EP0023065A1 - Anode tournante pour tubes à rayons X - Google Patents

Anode tournante pour tubes à rayons X Download PDF

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Publication number
EP0023065A1
EP0023065A1 EP80200678A EP80200678A EP0023065A1 EP 0023065 A1 EP0023065 A1 EP 0023065A1 EP 80200678 A EP80200678 A EP 80200678A EP 80200678 A EP80200678 A EP 80200678A EP 0023065 A1 EP0023065 A1 EP 0023065A1
Authority
EP
European Patent Office
Prior art keywords
layer
rhenium
intermediate layer
base body
sub
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP80200678A
Other languages
German (de)
English (en)
Other versions
EP0023065B1 (fr
Inventor
Horst Dr. Dipl.-Phys. Hübner
Bernhard Dr. Dipl.-Phys. Lersmacher
Hans Dr. Dipl.-Ing. Lydtin
Rolf Ing. Grad. Wilden
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Intellectual Property and Standards GmbH
Koninklijke Philips NV
Original Assignee
Philips Patentverwaltung GmbH
Philips Gloeilampenfabrieken NV
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Patentverwaltung GmbH, Philips Gloeilampenfabrieken NV, Koninklijke Philips Electronics NV filed Critical Philips Patentverwaltung GmbH
Priority to AT80200678T priority Critical patent/ATE3600T1/de
Publication of EP0023065A1 publication Critical patent/EP0023065A1/fr
Application granted granted Critical
Publication of EP0023065B1 publication Critical patent/EP0023065B1/fr
Expired legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
    • H01J35/108—Substrates for and bonding of emissive target, e.g. composite structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/083—Bonding or fixing with the support or substrate
    • H01J2235/084—Target-substrate interlayers or structures, e.g. to control or prevent diffusion or improve adhesion

Definitions

  • the invention relates to a rotating anode for X-ray tubes with a base body made of carbon, an electron collecting layer made of a heavy metal and an intermediate layer consisting of several layers of rhenium, which is arranged between the base body and the electron collecting layer.
  • the basic body of the rotating anode is e.g. made of graphite, in particular electrographite, of pyrolytic graphite or of foamed carbon, such as those e.g. are described in DE-OS 24 53 204 and 26 48 900.
  • the base body can also consist of sub-elements made of these materials, e.g. be composed of electrographite and pyrolytic graphite.
  • the electron collecting layer is also referred to in the literature as an electron impact part (DE-PS 21 15 896), an X-ray active layer or an anti-cathode or baffle electrode layer (DE-OS 27 48 566). It consists e.g. made of tungsten, molybdenum, tantalum or alloys of these metals with each other or with rhenium.
  • a rotary anode is known from AT-PS 281 215, in which an intermediate layer made of rhenium is arranged between the base body made of graphite and the electron collecting layer made of tungsten or a tungsten alloy which contains, for example, osmium or iridium.
  • a diffusion of the graphite into the electron trapping layer is practically completely prevented by this intermediate layer.
  • the desired diffusion inhibition was above of 1500 K for a sufficiently long time can only be achieved with more than 10 ⁇ m thick and therefore expensive intermediate layers made of rhenium.
  • an intermediate layer containing rhenium and molybdenum is arranged between the base body made of graphite and the electron collecting layer made of tungsten or a tungsten alloy.
  • the intermediate layer consists of two layers, the layer in contact with the base body containing a large amount of rhenium, e.g. Contains 70 to 90% by weight of rhenium, based on the total weight of rhenium and molybdenum, while the layer in contact with the electron collecting layer contains a large amount of molybdenum.
  • Intermediate layers containing molybdenum give good adhesion.
  • molybdenum forms with the graphite of the base body at temperatures of or more than 1500 K molybdenum carbide, which has a relatively poor thermal conductivity and also the adhesion between the electron trapping layer, e.g. made of tungsten, on the one hand, and the base body made of graphite, on the other hand, so that, with prolonged exposure to the electron beam, the electron-collecting layer can completely detach from the base body.
  • the electron trapping layer e.g. made of tungsten
  • the invention has for its object to provide a barrier against carbon diffusion below the electron trapping layer, which has almost the heat conduction properties of metals and which also offers sufficient protection against the penetration of carbon into the electron trapping layer at temperatures above 1500 K.
  • the layer of the intermediate layer adjoining the base body and the layer adjoining the electron-collecting layer the intermediate layer consist of pure rhenium and that between these two layers there is a further layer of an alloy of rhenium with at least one carbide-forming metal.
  • the alloy preferably contains 1 to 25 mol% of carbide-forming metals.
  • Carbide-forming metals are e.g. Titanium, zirconium, hafnium, vanadium, niobium, tantalum, chromium, molybdenum, tungsten and some rare earths (US Pat. No. 2,979,813) and NicKel and iron (German Pat. No. 896,234).
  • Rhenium alloys with 1 to 25 mol% tungsten or 1 to 5 mol% tantalum or 1 to 3 mol% hafnium are preferred.
  • the layer of pure rhenium adjoining the base body is preferably 1 to 20 ⁇ m, in particular 5 ⁇ m, thick.
  • the layer consisting of the rehnium alloy is preferably 1 to 30 ⁇ m, in particular 4 ⁇ m, thick.
  • the layer of pure rhenium adjoining the electron collecting layer is preferably 1 to 20 ⁇ m, in particular 2 ⁇ m, thick.
  • the individual layers of the intermediate layer are e.g. produced by deposition from the gas phase.
  • the pure rhenium layers are preferably obtained by reducing rhenium halides with hydrogen.
  • gaseous mixtures of rhenium halides and halides of the desired metal additives are reduced with hydrogen.
  • the multilayer structure according to the invention ensures that at temperatures of the intermediate layer below 1500 K - as occurs in rotating anodes in about 80% of the loading time - the diffusion-inhibiting effect of the layer of pure rhenium adjoining the base body is sufficient. At temperatures above 1500 K - which occur in about 20% of the load times - the hin maldiffundierenden by the aforementioned layer of carbon atoms of the k arbidrelienden metals are collected. Because of the low concentration of K arbidrelienden metals in the group consisting of the alloy layer of the intermediate layer, the carbide hardly adverse Auswir- K has Ungen to the conduction or adhesion. Finally, the rhenium layer adjacent to the electron-collecting layer ensures that the carbon exchange between the carbides in the intermediate layer and the metal, for example tungsten, of the electron-collecting layer is largely prevented.
  • the inventive structure of the intermediate layer acting as a diffusion barrier with outer layers made of pure rhenium also enables the already known good mechanical properties of rhenium intermediate layers to be maintained.
  • the effectiveness of the multilayer rhenium intermediate layer is further improved by the fact that the average diffusion coefficient becomes smaller with the progressive carbide formation in the central part of the barriers, which leads to an increased service life.
  • the base body 1 consists of electrographite.
  • the metal layers 2 to 5 are formed by deposition from the gas phase only applied to the bevelled end face of the base body of the rotating anode.
  • the rhenium layer 2 is 5 ⁇ m thick.
  • the layer 3, which consists of rhenium doped with 5 mol% tantalum, has a thickness of 4 ⁇ m.
  • the layer 4 made of pure rhenium is 2 ⁇ m thick and the electron collecting layer 5 made of tungsten has a thickness of 200 ⁇ m.

Landscapes

  • Physical Vapour Deposition (AREA)
  • X-Ray Techniques (AREA)
  • Electrolytic Production Of Metals (AREA)
  • Solid Thermionic Cathode (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
EP80200678A 1979-07-19 1980-07-11 Anode tournante pour tubes à rayons X Expired EP0023065B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT80200678T ATE3600T1 (de) 1979-07-19 1980-07-11 Drehanode fuer roentgenroehren.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19792929136 DE2929136A1 (de) 1979-07-19 1979-07-19 Drehanode fuer roentgenroehren
DE2929136 1979-07-19

Publications (2)

Publication Number Publication Date
EP0023065A1 true EP0023065A1 (fr) 1981-01-28
EP0023065B1 EP0023065B1 (fr) 1983-05-25

Family

ID=6076091

Family Applications (1)

Application Number Title Priority Date Filing Date
EP80200678A Expired EP0023065B1 (fr) 1979-07-19 1980-07-11 Anode tournante pour tubes à rayons X

Country Status (5)

Country Link
US (1) US4352041A (fr)
EP (1) EP0023065B1 (fr)
JP (1) JPS5618356A (fr)
AT (1) ATE3600T1 (fr)
DE (2) DE2929136A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0037956A1 (fr) * 1980-04-11 1981-10-21 Kabushiki Kaisha Toshiba Anode tournante pour tube radiogène et procédé pour sa fabrication
FR2593324A1 (fr) * 1986-01-17 1987-07-24 Thomson Cgr Anode tournante avec graphite pour tube radiogene
EP0399621A1 (fr) * 1989-05-26 1990-11-28 Metallwerk Plansee Gesellschaft M.B.H. Composite de graphite et d'un métal à haut point de fusion
US10622182B2 (en) 2015-05-08 2020-04-14 Plansee Se X-ray anode

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USH547H (en) 1986-11-13 1988-11-01 General Electric Company X-ray tube target
NL8101697A (nl) * 1981-04-07 1982-11-01 Philips Nv Werkwijze voor het vervaardigen van een anode en zo verkregen anode.
AT376064B (de) * 1982-02-18 1984-10-10 Plansee Metallwerk Roentgenroehren-drehanode
JPS598252A (ja) * 1982-07-07 1984-01-17 Hitachi Ltd Ｘ線管用回転ターゲットの製造法
US4573185A (en) * 1984-06-27 1986-02-25 General Electric Company X-Ray tube with low off-focal spot radiation
US4641334A (en) * 1985-02-15 1987-02-03 General Electric Company Composite rotary anode for X-ray tube and process for preparing the composite
US4700882A (en) * 1985-02-15 1987-10-20 General Electric Company Composite rotary anode for X-ray tube and process for preparing the composite
US4978051A (en) * 1986-12-31 1990-12-18 General Electric Co. X-ray tube target
JPH0731993B2 (ja) * 1987-03-18 1995-04-10 株式会社日立製作所 Ｘ線管用ターゲット及びそれを用いたｘ線管
FR2655191A1 (fr) * 1989-11-28 1991-05-31 Genral Electric Cgr Sa Anode pour tube a rayons x.
US5204891A (en) * 1991-10-30 1993-04-20 General Electric Company Focal track structures for X-ray anodes and method of preparation thereof
US5148463A (en) * 1991-11-04 1992-09-15 General Electric Company Adherent focal track structures for X-ray target anodes having diffusion barrier film therein and method of preparation thereof
US6400800B1 (en) * 2000-12-29 2002-06-04 Ge Medical Systems Global Technology Company, Llc Two-step brazed x-ray target assembly
DE102005049519B4 (de) * 2005-01-31 2014-10-30 Medicoat Ag Drehanodenteller für Röntgenröhren
US8165269B2 (en) * 2008-09-26 2012-04-24 Varian Medical Systems, Inc. X-ray target with high strength bond
DE102009007871B4 (de) * 2009-02-06 2012-04-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Röntgentarget, Röntgenröhre und Verfahren zur Erzeugung von Röntgenstrahlung
FR2962591B1 (fr) 2010-07-06 2017-04-14 Acerde Anode pour l'emission de rayons x et procede de fabrication d'une telle anode

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1913793A1 (de) * 1969-03-19 1970-10-01 Ct D Etudes Et De Rech S Des E Drehanode fuer Roentgenroehre und Bearbeitungsverfahren hierzu
US3579022A (en) * 1967-08-28 1971-05-18 Schwarzkopf Dev Co Rotary anode for x-ray tube
FR2204041A1 (fr) * 1972-10-20 1974-05-17 Siemens Ag
US3875444A (en) * 1972-12-06 1975-04-01 Philips Corp Rotating x-ray anode having a target area made of a tungsten rhenium tantalum alloy
US3890521A (en) * 1971-12-31 1975-06-17 Thomson Csf X-ray tube target and X-ray tubes utilising such a target

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL215843A (fr) * 1956-03-30
AT346981B (de) * 1976-03-18 1978-12-11 Plansee Metallwerk Roentgendrehanode und verfahren zu deren herstellung
US4145632A (en) * 1977-04-18 1979-03-20 General Electric Company Composite substrate for rotating x-ray anode tube

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3579022A (en) * 1967-08-28 1971-05-18 Schwarzkopf Dev Co Rotary anode for x-ray tube
DE1913793A1 (de) * 1969-03-19 1970-10-01 Ct D Etudes Et De Rech S Des E Drehanode fuer Roentgenroehre und Bearbeitungsverfahren hierzu
US3890521A (en) * 1971-12-31 1975-06-17 Thomson Csf X-ray tube target and X-ray tubes utilising such a target
FR2204041A1 (fr) * 1972-10-20 1974-05-17 Siemens Ag
US3875444A (en) * 1972-12-06 1975-04-01 Philips Corp Rotating x-ray anode having a target area made of a tungsten rhenium tantalum alloy

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0037956A1 (fr) * 1980-04-11 1981-10-21 Kabushiki Kaisha Toshiba Anode tournante pour tube radiogène et procédé pour sa fabrication
FR2593324A1 (fr) * 1986-01-17 1987-07-24 Thomson Cgr Anode tournante avec graphite pour tube radiogene
EP0234967A1 (fr) * 1986-01-17 1987-09-02 General Electric Cgr S.A. Anode tournante avec graphite pour tube radiogène
US4799250A (en) * 1986-01-17 1989-01-17 Thomson-Cgr Rotating anode with graphite for X-ray tube
EP0399621A1 (fr) * 1989-05-26 1990-11-28 Metallwerk Plansee Gesellschaft M.B.H. Composite de graphite et d'un métal à haut point de fusion
US5122422A (en) * 1989-05-26 1992-06-16 Schwarzkopf Technologies Corporation Composite body made of graphite and high-melting metal
US10622182B2 (en) 2015-05-08 2020-04-14 Plansee Se X-ray anode

Also Published As

Publication number Publication date
EP0023065B1 (fr) 1983-05-25
JPS6232573B2 (fr) 1987-07-15
DE3063487D1 (en) 1983-07-07
DE2929136A1 (de) 1981-02-05
JPS5618356A (en) 1981-02-21
US4352041A (en) 1982-09-28
ATE3600T1 (de) 1983-06-15

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