EP0102874A1 - Bad zum chemischen Abscheiden von Nickel- oder Kobaltüberzügen unter Verwendung eines Reduktionmittels auf der Basis von Bor oder Phosphor - Google Patents
Bad zum chemischen Abscheiden von Nickel- oder Kobaltüberzügen unter Verwendung eines Reduktionmittels auf der Basis von Bor oder Phosphor Download PDFInfo
- Publication number
- EP0102874A1 EP0102874A1 EP83401550A EP83401550A EP0102874A1 EP 0102874 A1 EP0102874 A1 EP 0102874A1 EP 83401550 A EP83401550 A EP 83401550A EP 83401550 A EP83401550 A EP 83401550A EP 0102874 A1 EP0102874 A1 EP 0102874A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- stabilizer
- bath
- bath according
- chosen
- nickel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 title claims abstract description 36
- 239000003638 chemical reducing agent Substances 0.000 title claims abstract description 28
- 229910052759 nickel Inorganic materials 0.000 title claims abstract description 19
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 title claims abstract description 11
- 229910052796 boron Inorganic materials 0.000 title claims abstract description 11
- 229910017052 cobalt Inorganic materials 0.000 title claims abstract description 11
- 239000010941 cobalt Substances 0.000 title claims abstract description 11
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 title claims abstract description 11
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 title claims abstract description 10
- 239000000126 substance Substances 0.000 title description 4
- 238000007747 plating Methods 0.000 title 1
- 239000003381 stabilizer Substances 0.000 claims abstract description 48
- 229910052751 metal Inorganic materials 0.000 claims abstract description 32
- 239000002184 metal Substances 0.000 claims abstract description 32
- 239000008139 complexing agent Substances 0.000 claims abstract description 15
- 150000001875 compounds Chemical class 0.000 claims abstract description 15
- 238000005234 chemical deposition Methods 0.000 claims abstract description 12
- 125000000623 heterocyclic group Chemical group 0.000 claims abstract description 12
- 150000003839 salts Chemical class 0.000 claims abstract description 11
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910052698 phosphorus Inorganic materials 0.000 claims abstract description 9
- 239000011574 phosphorus Substances 0.000 claims abstract description 9
- 229910052717 sulfur Inorganic materials 0.000 claims abstract description 9
- 239000011593 sulfur Substances 0.000 claims abstract description 9
- 150000002739 metals Chemical class 0.000 claims abstract description 7
- 125000003118 aryl group Chemical group 0.000 claims abstract description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 6
- 239000001301 oxygen Substances 0.000 claims abstract description 6
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 claims description 21
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 16
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 claims description 12
- 229910052757 nitrogen Inorganic materials 0.000 claims description 12
- 239000002253 acid Substances 0.000 claims description 7
- 125000004429 atom Chemical group 0.000 claims description 7
- 229910052752 metalloid Inorganic materials 0.000 claims description 6
- 150000002738 metalloids Chemical class 0.000 claims description 6
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 claims description 6
- 125000004433 nitrogen atom Chemical group N* 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 4
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 4
- YLQBMQCUIZJEEH-UHFFFAOYSA-N Furan Chemical compound C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 claims description 4
- SIKJAQJRHWYJAI-UHFFFAOYSA-N Indole Chemical compound C1=CC=C2NC=CC2=C1 SIKJAQJRHWYJAI-UHFFFAOYSA-N 0.000 claims description 4
- KYQCOXFCLRTKLS-UHFFFAOYSA-N Pyrazine Chemical compound C1=CN=CC=N1 KYQCOXFCLRTKLS-UHFFFAOYSA-N 0.000 claims description 4
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 239000000460 chlorine Substances 0.000 claims description 4
- 229910052801 chlorine Inorganic materials 0.000 claims description 4
- 150000002170 ethers Chemical class 0.000 claims description 4
- 229910052731 fluorine Inorganic materials 0.000 claims description 4
- 239000011737 fluorine Substances 0.000 claims description 4
- 230000000087 stabilizing effect Effects 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- PCNDJXKNXGMECE-UHFFFAOYSA-N Phenazine Natural products C1=CC=CC2=NC3=CC=CC=C3N=C21 PCNDJXKNXGMECE-UHFFFAOYSA-N 0.000 claims description 2
- WTKZEGDFNFYCGP-UHFFFAOYSA-N Pyrazole Chemical compound C=1C=NNC=1 WTKZEGDFNFYCGP-UHFFFAOYSA-N 0.000 claims description 2
- CZPWVGJYEJSRLH-UHFFFAOYSA-N Pyrimidine Chemical compound C1=CN=CN=C1 CZPWVGJYEJSRLH-UHFFFAOYSA-N 0.000 claims description 2
- WCZVZNOTHYJIEI-UHFFFAOYSA-N cinnoline Chemical compound N1=NC=CC2=CC=CC=C21 WCZVZNOTHYJIEI-UHFFFAOYSA-N 0.000 claims description 2
- 125000005842 heteroatom Chemical group 0.000 claims description 2
- PZOUSPYUWWUPPK-UHFFFAOYSA-N indole Natural products CC1=CC=CC2=C1C=CN2 PZOUSPYUWWUPPK-UHFFFAOYSA-N 0.000 claims description 2
- RKJUIXBNRJVNHR-UHFFFAOYSA-N indolenine Natural products C1=CC=C2CC=NC2=C1 RKJUIXBNRJVNHR-UHFFFAOYSA-N 0.000 claims description 2
- PBMFSQRYOILNGV-UHFFFAOYSA-N pyridazine Chemical compound C1=CC=NN=C1 PBMFSQRYOILNGV-UHFFFAOYSA-N 0.000 claims description 2
- 150000003536 tetrazoles Chemical class 0.000 claims description 2
- 150000003852 triazoles Chemical class 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- KDCGOANMDULRCW-UHFFFAOYSA-N 7H-purine Chemical compound N1=CNC2=NC=NC2=C1 KDCGOANMDULRCW-UHFFFAOYSA-N 0.000 claims 2
- 229910001385 heavy metal Inorganic materials 0.000 abstract description 5
- 235000013305 food Nutrition 0.000 abstract description 4
- 239000011248 coating agent Substances 0.000 abstract description 3
- 238000000576 coating method Methods 0.000 abstract description 3
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 abstract 1
- 238000000151 deposition Methods 0.000 description 15
- 230000008021 deposition Effects 0.000 description 15
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 14
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 12
- 239000007864 aqueous solution Substances 0.000 description 10
- 229910021529 ammonia Inorganic materials 0.000 description 7
- LAIZPRYFQUWUBN-UHFFFAOYSA-L nickel chloride hexahydrate Chemical compound O.O.O.O.O.O.[Cl-].[Cl-].[Ni+2] LAIZPRYFQUWUBN-UHFFFAOYSA-L 0.000 description 7
- 125000001424 substituent group Chemical group 0.000 description 7
- KWSLGOVYXMQPPX-UHFFFAOYSA-N 5-[3-(trifluoromethyl)phenyl]-2h-tetrazole Chemical compound FC(F)(F)C1=CC=CC(C2=NNN=N2)=C1 KWSLGOVYXMQPPX-UHFFFAOYSA-N 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 229910001379 sodium hypophosphite Inorganic materials 0.000 description 6
- KDYFGRWQOYBRFD-UHFFFAOYSA-N succinic acid Chemical compound OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 5
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 4
- AEMRFAOFKBGASW-UHFFFAOYSA-N Glycolic acid Chemical compound OCC(O)=O AEMRFAOFKBGASW-UHFFFAOYSA-N 0.000 description 4
- YPTUAQWMBNZZRN-UHFFFAOYSA-N dimethylaminoboron Chemical compound [B]N(C)C YPTUAQWMBNZZRN-UHFFFAOYSA-N 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 125000004432 carbon atom Chemical group C* 0.000 description 3
- LJAOOBNHPFKCDR-UHFFFAOYSA-K chromium(3+) trichloride hexahydrate Chemical compound O.O.O.O.O.O.[Cl-].[Cl-].[Cl-].[Cr+3] LJAOOBNHPFKCDR-UHFFFAOYSA-K 0.000 description 3
- GFHNAMRJFCEERV-UHFFFAOYSA-L cobalt chloride hexahydrate Chemical compound O.O.O.O.O.O.[Cl-].[Cl-].[Co+2] GFHNAMRJFCEERV-UHFFFAOYSA-L 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- XPFVYQJUAUNWIW-UHFFFAOYSA-N furfuryl alcohol Chemical compound OCC1=CC=CO1 XPFVYQJUAUNWIW-UHFFFAOYSA-N 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- GCMNJUJAKQGROZ-UHFFFAOYSA-N 1,2-Dihydroquinolin-2-imine Chemical compound C1=CC=CC2=NC(N)=CC=C21 GCMNJUJAKQGROZ-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- PVNIIMVLHYAWGP-UHFFFAOYSA-N Niacin Chemical compound OC(=O)C1=CC=CN=C1 PVNIIMVLHYAWGP-UHFFFAOYSA-N 0.000 description 2
- AUNGANRZJHBGPY-SCRDCRAPSA-N Riboflavin Chemical compound OC[C@@H](O)[C@@H](O)[C@@H](O)CN1C=2C=C(C)C(C)=CC=2N=C2C1=NC(=O)NC2=O AUNGANRZJHBGPY-SCRDCRAPSA-N 0.000 description 2
- DZBUGLKDJFMEHC-UHFFFAOYSA-N acridine Chemical compound C1=CC=CC2=CC3=CC=CC=C3N=C21 DZBUGLKDJFMEHC-UHFFFAOYSA-N 0.000 description 2
- 235000019270 ammonium chloride Nutrition 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000006555 catalytic reaction Methods 0.000 description 2
- 150000001768 cations Chemical class 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- HUQOFZLCQISTTJ-UHFFFAOYSA-N diethylaminoboron Chemical compound CCN([B])CC HUQOFZLCQISTTJ-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- -1 nickel anion Chemical class 0.000 description 2
- NSVFPFUROXFZJS-UHFFFAOYSA-N nickel;hexahydrate Chemical compound O.O.O.O.O.O.[Ni] NSVFPFUROXFZJS-UHFFFAOYSA-N 0.000 description 2
- 150000002829 nitrogen Chemical group 0.000 description 2
- 239000012279 sodium borohydride Substances 0.000 description 2
- 229910000033 sodium borohydride Inorganic materials 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000001384 succinic acid Substances 0.000 description 2
- HBOQGLPIIBWNMC-UHFFFAOYSA-K tetrasodium 2-hydroxypropane-1,2,3-tricarboxylate Chemical compound [Na+].[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O HBOQGLPIIBWNMC-UHFFFAOYSA-K 0.000 description 2
- 229910052716 thallium Inorganic materials 0.000 description 2
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 description 2
- 231100000701 toxic element Toxicity 0.000 description 2
- QAIGYXWRIHZZAA-UHFFFAOYSA-M 1-methylpyridin-1-ium;chloride Chemical compound [Cl-].C[N+]1=CC=CC=C1 QAIGYXWRIHZZAA-UHFFFAOYSA-M 0.000 description 1
- VUUQKPQPCTVBFR-UHFFFAOYSA-N 1h-imidazole;7h-purine Chemical compound C1=CNC=N1.C1=NC=C2NC=NC2=N1 VUUQKPQPCTVBFR-UHFFFAOYSA-N 0.000 description 1
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- DJHGAFSJWGLOIV-UHFFFAOYSA-N Arsenic acid Chemical compound O[As](O)(O)=O DJHGAFSJWGLOIV-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- AUNGANRZJHBGPY-UHFFFAOYSA-N D-Lyxoflavin Natural products OCC(O)C(O)C(O)CN1C=2C=C(C)C(C)=CC=2N=C2C1=NC(=O)NC2=O AUNGANRZJHBGPY-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 description 1
- VMHLLURERBWHNL-UHFFFAOYSA-M Sodium acetate Chemical compound [Na+].CC([O-])=O VMHLLURERBWHNL-UHFFFAOYSA-M 0.000 description 1
- QXZUUHYBWMWJHK-UHFFFAOYSA-N [Co].[Ni] Chemical compound [Co].[Ni] QXZUUHYBWMWJHK-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- TVJORGWKNPGCDW-UHFFFAOYSA-N aminoboron Chemical compound N[B] TVJORGWKNPGCDW-UHFFFAOYSA-N 0.000 description 1
- 150000003863 ammonium salts Chemical class 0.000 description 1
- 229940000488 arsenic acid Drugs 0.000 description 1
- 150000001495 arsenic compounds Chemical class 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- UORVGPXVDQYIDP-UHFFFAOYSA-N borane Chemical compound B UORVGPXVDQYIDP-UHFFFAOYSA-N 0.000 description 1
- 229910010277 boron hydride Inorganic materials 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 150000001845 chromium compounds Chemical class 0.000 description 1
- 238000004581 coalescence Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000003487 electrochemical reaction Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 150000004687 hexahydrates Chemical class 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 235000010755 mineral Nutrition 0.000 description 1
- 150000002815 nickel Chemical group 0.000 description 1
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 1
- 235000001968 nicotinic acid Nutrition 0.000 description 1
- 229960003512 nicotinic acid Drugs 0.000 description 1
- 239000011664 nicotinic acid Substances 0.000 description 1
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 1
- 125000000018 nitroso group Chemical group N(=O)* 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- ACVYVLVWPXVTIT-UHFFFAOYSA-M phosphinate Chemical compound [O-][PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-M 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 235000019192 riboflavin Nutrition 0.000 description 1
- 239000002151 riboflavin Substances 0.000 description 1
- 229960002477 riboflavin Drugs 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000001632 sodium acetate Substances 0.000 description 1
- 235000017281 sodium acetate Nutrition 0.000 description 1
- 239000001509 sodium citrate Substances 0.000 description 1
- NLJMYIDDQXHKNR-UHFFFAOYSA-K sodium citrate Chemical compound O.O.[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NLJMYIDDQXHKNR-UHFFFAOYSA-K 0.000 description 1
- 235000011121 sodium hydroxide Nutrition 0.000 description 1
- 229940074404 sodium succinate Drugs 0.000 description 1
- ZDQYSKICYIVCPN-UHFFFAOYSA-L sodium succinate (anhydrous) Chemical compound [Na+].[Na+].[O-]C(=O)CCC([O-])=O ZDQYSKICYIVCPN-UHFFFAOYSA-L 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 150000003463 sulfur Chemical class 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- YWYZEGXAUVWDED-UHFFFAOYSA-N triammonium citrate Chemical compound [NH4+].[NH4+].[NH4+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O YWYZEGXAUVWDED-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
- C23C18/34—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents
Definitions
- the invention relates to a bath for the chemical deposition of nickel and / or cobalt using a boron or phosphorus-based reducing agent.
- All the baths currently used for the deposition by chemical that is to say by auto-catalytic, nickel and / or cobalt, whether acid baths or alkaline baths, use a reducing agent based on boron or phosphorus in the form of alkali hypophosphite or derivative hydro- ge born boron.
- a reducing agent based on boron or phosphorus in the form of alkali hypophosphite or derivative hydro- ge born boron.
- the role of the complexing agent is to keep the metal in solution and to release it as the deposition reaction proceeds.
- the stabilizer is essential for a self-catalyzed reaction such as that occurring here, in order to slow down the speed of the deposition reaction and therefore allow the desired regular deposition to be obtained on the part.
- the stabilizers used industrially are, for acid baths, mineral or organic derivatives of sulfur and, for alkaline baths, compounds of metals or metalloids of groups IIIa, IVa and Va of the Periodic Table of Elements, and in particular thallium.
- He is concerned, among other things, with the development of metal parts, for example turbine blades, intended to operate at very high temperatures and in highly corrosive gases, in particular sulfur gases, and has made good progress.
- a surface treatment process for protecting such alloys by chromaluminization (French Patent No. 74 24694), which thermochemical treatment must be carried out on parts previously coated with a nickel deposit, advantageously produced chemically.
- French patent application 2 329 762 proposes a type of stabilizer different from those usually used, consisting of an iodized organic compound. These compounds do not eliminate the drawbacks of the usual stabilizers because the presence of iodine has effects comparable to the presence of sulfur. The same can be said of other halogens.
- the Applicant has therefore sought to develop a chemical nickel and / or cobalt deposition bath comprising a stabilizer which does not lead to the drawbacks, mentioned above, of the previously known stabilizers.
- the bath for the chemical deposition of nickel and / or cobalt according to the invention comprising a salt of the metal to be deposited, one or more complexing agents of this metal, a reducing agent based on boron or phosphorus and a stabilizer, is characterized in that the stabilizer is a water-soluble compound comprising no sulfur, no metal or metalloid of groups IIIa (boron and aluminum excepted), IVa (carbon excepted), Va (nitrogen and phosphorus excepted), VIa (oxygen excepted) and V IIa (except fluorine and chlorine) and having an easily accessible electronic doublet.
- the stabilizer is a water-soluble compound comprising no sulfur, no metal or metalloid of groups IIIa (boron and aluminum excepted), IVa (carbon excepted), Va (nitrogen and phosphorus excepted), VIa (oxygen excepted) and V IIa (except fluorine and chlorine) and having an easily accessible electronic doublet.
- Boron, aluminum, carbon, nitrogen, phosphorus, oxygen, fluorine and chlorine are acceptable constituents of the stabilizer, either because they are not included in the deposit, or because 'they can be eliminated, either because they do not cause a corrosive or toxic effect.
- Nickel for example, has a 3d layer which, instead of having 10 electrons, has 8, and a 4s layer which has two electrons and is therefore saturated. To find a certain electronic stability, nickel tends to lose the two electrons of its 4s layer (by oxidative attacks thus leading to the Ni 2+ cation) or to capture two electrons to saturate its 3d layer (chemisorption). During chemical deposition, the reducing agent tends to oxidize on contact with nickel, which in turn tends to reduce.
- the electrons released by the oxidation of the reducing agent then come to saturate the 3d layer of nickel, but as the existence of a nickel anion is physically impossible, the metal then gives up its excess electrons to the cation which is closest to it, which hastens to take these additional electrons to be included in the deposit. It is thus an electrochemical reaction catalyzed by the deposit itself.
- heterocycles of aromatic nature comprising one or more heteroatoms of nitrogen and / or oxygen.
- the stabilizer can thus be chosen from nitrogen heterocycles with 5 atoms comprising one or more nitrogen atoms, for example pyrrole, indole, purine imidazole, pyrazole, triazole, tetrazole and similar compounds.
- They can also be chosen from nitrogen heterocycles with 6 atoms comprising one or more nitrogen atoms in the ring, for example pyridine, cinnoline, pyridazine, pyrimidine, pyrazine and the like.
- heterocycles can be substituted on one or more of their carbon atoms, the substituent possibly being in particular a hydrocarbon radical, an alcohol, carboxylic acid, ether, ester or amine, an aliphatic or aromatic derivative, a halogen atom, or a nitro or nitroso type substituent.
- substituents may be present on at least one of them, provided that at least one unsubstituted nitrogen atom remains, otherwise the easily accessible electronic doublet would disappear.
- N-methylpyridinium chloride does not have stabilizing properties and that a chemical deposition bath containing this compound decomposes very quickly, which is explained by the masking of the electronic doublet by the substituent .
- heterocycles in which at least two adjacent atoms (carbon or nitrogen) carry substituents which together form an aromatic ring, provided that at least one unsubstituted nitrogen atom remains.
- substituted nitrogen heterocycles examples include nicotinic acid ( ⁇ -pyridinecarboxylic), cinnolic acid ( ⁇ , ⁇ -pyridinedicarboxylic), 2-aminoquinoline, riboflavin, acridine.
- Another type of compound which can be used as substituent for a nickel and / or cobalt chemical deposition bath according to the invention consists of oxygenated heterocycles of aromatic nature and their substitution derivatives. Mention may be made of heterocycles with 5 atoms, for example furan, unsubstituted or substituted on one or more carbon atoms of the ring by substituents analogous to those defined above for nitrogen heterocycles.
- a third type of compound which can be used as stabilizers consists of heavy ethers of the R-O-R 'type, soluble in water, in which R and R' are aliphatic radicals.
- R and R' are aliphatic radicals.
- Particularly suitable are the ethers in which the radicals R and R 'each contain at least 3 carbon atoms.
- the stabilizers according to the invention which have no sulfur, unwanted heavy metal or metalloid, are very satisfactory, in particular for coating parts of alloys intended to operate at very high temperatures or for the manufacture of parts intended to enter into contact with food products.
- the type of stabilizer according to the invention acts directly on the metal of the deposit and can therefore be used whatever the reducing agent used.
- a boron hydride reducing agent for example an alkaline borohydride, such as NaBH 4 or KBH 4 or an aminoborane such as BH 3 , R 2 NH where R is an aliphatic radical, l
- a secondary stabilizer is made necessary in order to slow down the activity of the reducing agent, as usual in the chemical deposition baths hitherto used employing primary sulfur or heavy metal stabilizers.
- a chromium compound is advantageously used for weakly acidic or moderately alkaline baths and an arsenic compound for strongly alkaline baths.
- the baths according to the invention can comprise a single compound or a mixture of stabilizing compounds.
- the stabilizer content is between limits varying according to the operating conditions. If the bath contains too small a quantity of stabilizer, spontaneous decomposition of the bath takes place and if, on the other hand, it contains an excess of stabilizer, the speed is then practically zero.
- the concentration of the bath stabilizer is between about 5, 7. 1 0 -3 and 6.9.AO -3 M and that it is preferably of the order of 6.3.10 M.
- the stabilizer concentration is advantageously between approximately 2.5.10 -4 and 3.5.10 M, and it is preferably of the order of 3.10 -4 M.
- the invention is illustrated below by a few examples of baths which are in no way to be considered as limiting.
- the concentrations indicated are expressed in mole / liter (molar concentration).
- Examples are given of weakly acid baths, weakly alkaline baths and alkaline baths, using boron-based or phosphorus-based reducing agents.
- the pH is adjusted between 5.0 and 5.5 using dilute ammonia.
- the temperature for using such a bath is between 50 and 80 ° C.
- a deposition rate of the order of 10 ⁇ m / h was obtained for a diethylaminoborane concentration of 2.5 g / l at a bath temperature of 72 ° C.
- the pH of the bath is adjusted between 6.0 and 6.5 using dilute ammonia.
- the temperature for using such a bath is between 70 and 80 ° C.
- Example 2 A bath identical to that of Example 2 is prepared, except that cobalt chloride hexahydrate in a concentration of 0.2 M is used in place of nickel chloride hexahydrate.
- the temperature for using such a bath is between 70 and 80 ° C.
- This bath was tested using an aqueous solution of dimethylaminoborane as a reducing agent.
- Example 2 A bath identical to that of Example 2 is prepared, except that nickel chloride hexahydrate in a concentration of 0.17 M and cobalt chloride hexahydrate in a concentration of 0.042 M are used instead. only nickel chloride hexahydrate.
- the temperature of use of this bath is between 70 and 80 ° C.
- the pH of the bath is adjusted between 5.8 and 6.2 using dilute ammonia.
- This bath is used between 85 and 90 ° C.
- a deposition rate of the order of 15 ⁇ m / h was obtained for a sodium hypophosphite concentration of 10 g / 1 at a bath temperature of 88 ° C.
- good complexing agents consist of ammonium salts.
- the pH of the bath is adjusted between 7.0 and 8.0 using dilute ammonia.
- the bath is tested with, as reducing agent, an aqueous solution of dimethylaminoborane.
- the pH of the bath is adjusted between 8.9 and 9.5 using concentrated ammonia.
- This bath is used between 85 and 90 ° C.
- a deposition rate of the order of 15 ⁇ m / h was obtained for a sodium hypophosphite concentration of 10 g / l. at a bath temperature of 88 ° C.
- the pH of the bath is adjusted between 8.9 and 9.5 using concentrated ammonia.
- This bath is used between 90 and 95 ° C.
- a deposition rate of the order of 15 ⁇ m / h was obtained for a sodium hypophosphite concentration of 10 g / l at a bath temperature of 93 ° C.
- the pH is then between 13 and 14.
- This bath was used with, as a reducing agent, an aqueous solution of sodium borohydride.
- the operating temperature is maintained between 92 and 95 ° C.
- Example 9 A bath identical to that of Example 9 is prepared, with the exception that 2.9.10 -4 M furfuryl alcohol is used as the primary stabilizer in place of imidazole.
- This bath is tested with, as a reducing agent, also an aqueous solution of sodium borohydride.
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemically Coating (AREA)
- Electroplating And Plating Baths Therefor (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8213431 | 1982-07-30 | ||
| FR8213431A FR2531103B1 (fr) | 1982-07-30 | 1982-07-30 | Bain pour le depot chimique de nickel et/ou de cobalt utilisant un reducteur a base de bore ou de phosphore |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP0102874A1 true EP0102874A1 (de) | 1984-03-14 |
| EP0102874B1 EP0102874B1 (de) | 1986-12-03 |
Family
ID=9276523
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP83401550A Expired EP0102874B1 (de) | 1982-07-30 | 1983-07-27 | Bad zum chemischen Abscheiden von Nickel- oder Kobaltüberzügen unter Verwendung eines Reduktionmittels auf der Basis von Bor oder Phosphor |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4486233A (de) |
| EP (1) | EP0102874B1 (de) |
| JP (1) | JPS5943857A (de) |
| DE (1) | DE3368088D1 (de) |
| FR (1) | FR2531103B1 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1306465A3 (de) * | 2001-10-24 | 2004-05-12 | Shipley Co. L.L.C. | Stabilisatoren für Lösungen zur stromlosen Metallisierung und Verfahren zu deren Anwendung |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4624865A (en) * | 1984-05-21 | 1986-11-25 | Carolina Solvents, Inc. | Electrically conductive microballoons and compositions incorporating same |
| US5017410A (en) * | 1988-05-23 | 1991-05-21 | United Technologies Corporation | Wear resistant electroless nickel-boron coating compositions |
| US5196053A (en) * | 1991-11-27 | 1993-03-23 | Mcgean-Rohco, Inc. | Complexing agent for displacement tin plating |
| JP2968147B2 (ja) * | 1993-04-07 | 1999-10-25 | 日本パーカライジング株式会社 | 亜鉛含有金属めっき鋼板用酸性置換めっき液組成物 |
| US5624480A (en) * | 1993-04-07 | 1997-04-29 | Henkel Corporation | Composition and process for substitutionally plating zinciferous surfaces |
| CA2178146C (en) * | 1995-06-06 | 2002-01-15 | Mark W. Zitko | Electroless nickel cobalt phosphorous composition and plating process |
| US6183546B1 (en) | 1998-11-02 | 2001-02-06 | Mccomas Industries International | Coating compositions containing nickel and boron |
| FR2787472B1 (fr) | 1998-12-16 | 2001-03-09 | Onera (Off Nat Aerospatiale) | Procede pour produire une poudre d'alliage metallique de type mcraly et revetements obtenus avec cette poudre |
| KR100859259B1 (ko) * | 2005-12-29 | 2008-09-18 | 주식회사 엘지화학 | 캡층 형성을 위한 코발트 계열 합금 무전해 도금 용액 및이를 이용하는 무전해 도금 방법 |
| JP2019210501A (ja) * | 2018-06-01 | 2019-12-12 | 奥野製薬工業株式会社 | 無電解ニッケルめっき液用安定剤、並びにそれを用いためっき液、めっき方法及び分析方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2329762A1 (fr) * | 1975-11-03 | 1977-05-27 | Shipley Co | Solution de nickelage chimique |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3147154A (en) * | 1961-05-25 | 1964-09-01 | Texaco Inc | Method of depositing metal-containing material onto an extended surface |
| JPS56108869A (en) * | 1980-01-31 | 1981-08-28 | Asahi Glass Co Ltd | Nickel coat forming method |
| US4368223A (en) * | 1981-06-01 | 1983-01-11 | Asahi Glass Company, Ltd. | Process for preparing nickel layer |
| DE3172414D1 (en) * | 1981-06-02 | 1985-10-31 | Asahi Glass Co Ltd | Process for preparing nickel layer |
-
1982
- 1982-07-30 FR FR8213431A patent/FR2531103B1/fr not_active Expired
-
1983
- 1983-07-27 EP EP83401550A patent/EP0102874B1/de not_active Expired
- 1983-07-27 DE DE8383401550T patent/DE3368088D1/de not_active Expired
- 1983-07-29 US US06/518,431 patent/US4486233A/en not_active Expired - Fee Related
- 1983-07-29 JP JP58137922A patent/JPS5943857A/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2329762A1 (fr) * | 1975-11-03 | 1977-05-27 | Shipley Co | Solution de nickelage chimique |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1306465A3 (de) * | 2001-10-24 | 2004-05-12 | Shipley Co. L.L.C. | Stabilisatoren für Lösungen zur stromlosen Metallisierung und Verfahren zu deren Anwendung |
| KR100930879B1 (ko) * | 2001-10-24 | 2009-12-10 | 롬 앤드 하스 일렉트로닉 머트어리얼즈, 엘.엘.씨 | 무전해 도금액용 안정화제 및 그의 사용방법 |
| EP2339050A1 (de) | 2001-10-24 | 2011-06-29 | Rohm and Haas Electronic Materials LLC | Stabilisatoren für Lösungen zur stromlosen Metallisierung und Verfahren zu deren Anwendung |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2531103B1 (fr) | 1985-11-22 |
| EP0102874B1 (de) | 1986-12-03 |
| FR2531103A1 (fr) | 1984-02-03 |
| JPS5943857A (ja) | 1984-03-12 |
| US4486233A (en) | 1984-12-04 |
| DE3368088D1 (en) | 1987-01-15 |
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