EP0104593A2 - Procédé de mise en évidence d'un domaine d'un objet dans un microscope à balayage - Google Patents

Procédé de mise en évidence d'un domaine d'un objet dans un microscope à balayage Download PDF

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Publication number
EP0104593A2
EP0104593A2 EP83109343A EP83109343A EP0104593A2 EP 0104593 A2 EP0104593 A2 EP 0104593A2 EP 83109343 A EP83109343 A EP 83109343A EP 83109343 A EP83109343 A EP 83109343A EP 0104593 A2 EP0104593 A2 EP 0104593A2
Authority
EP
European Patent Office
Prior art keywords
step size
image
image recording
recording device
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP83109343A
Other languages
German (de)
English (en)
Other versions
EP0104593A3 (fr
Inventor
Peter Dipl.-Ing. Fazekas
Johann Dipl.-Ing. Otto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=6174267&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0104593(A2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of EP0104593A2 publication Critical patent/EP0104593A2/fr
Publication of EP0104593A3 publication Critical patent/EP0104593A3/fr
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors

Definitions

  • the invention relates to a method for highlighting at least one object area in a scanning microscope according to the preamble of claim 1.
  • the present invention has for its object to provide a method of the type mentioned, in which an object area of interest can be found much more quickly and reliably than is possible according to the prior art and in which an object section of interest can be viewed both enlarged and embedded in the object to be examined.
  • Fig. 2 explains the different magnification of the object on a screen.
  • the electron probe is guided over the sample in the xy plane by a digital raster generator.
  • the electron probe is guided over the object with a variable step size ⁇ x, ⁇ y.
  • appropriate control of the digital raster generator ensures that this variable step size ⁇ x, ⁇ y is in the xy- during scanning.
  • the plane from the edge to the center of the scanning field is continuously reduced both in the x-direction and in the y-direction and in conversely, from the center of the scanning field to the other edge towards the outside it continuously increases again.
  • the edge regions of the scanning field in the xy plane are scanned with a large step width ⁇ x, ⁇ y, but the center of the scanning field to be imaged in the xy plane is scanned with a small step width ⁇ x, ⁇ y.
  • FIG. 2 explains the reproduction of the scanning field scanned with a method according to FIG.
  • the image is displayed on a screen, the electron beam of which is scanned across the screen with a constant step size.
  • the object that has been scanned with the electron probe in the electron microscope according to FIG. 1 appears in the center of the image in a larger magnification ß than at the edge of the image.
  • the magnification ß of the object on the edge of the screen is smaller than in the center of the screen.
  • This magnifying glass effect greatly enlarges the object area of interest, while at the same time the surroundings and thus the embedding of the object area of interest in the object is shown on the scanning field of the scanning electron microscope.
  • an object area of interest can be shown enlarged and at the same time its embedding in the surroundings can be checked.
  • Such a differently magnified image on an image display device can also be achieved in that the step size with which the electron probe is held over the object, is kept constant and the step size, with which the image is displayed on the image display device, is varied.
  • both the step size with which the electron probe is guided over an object can be designed variably, and the step size with which the image is displayed on the image display device can also be variably adapted to the variable step size of the electron probe that a desired different magnification of the object image is achieved on the image display device.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
EP83109343A 1982-09-27 1983-09-20 Procédé de mise en évidence d'un domaine d'un objet dans un microscope à balayage Ceased EP0104593A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3235727 1982-09-27
DE19823235727 DE3235727A1 (de) 1982-09-27 1982-09-27 Verfahren zum hervorheben eines objektbereichs in einem rastermikroskop

Publications (2)

Publication Number Publication Date
EP0104593A2 true EP0104593A2 (fr) 1984-04-04
EP0104593A3 EP0104593A3 (fr) 1985-09-11

Family

ID=6174267

Family Applications (1)

Application Number Title Priority Date Filing Date
EP83109343A Ceased EP0104593A3 (fr) 1982-09-27 1983-09-20 Procédé de mise en évidence d'un domaine d'un objet dans un microscope à balayage

Country Status (4)

Country Link
US (1) US4611119A (fr)
EP (1) EP0104593A3 (fr)
JP (1) JPS5979944A (fr)
DE (1) DE3235727A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0533330B1 (fr) * 1991-09-17 1998-04-22 Hitachi, Ltd. Microscope à balayage et méthode de mise en oeuvre d'un tel microscope à balayage

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5426302A (en) * 1993-04-28 1995-06-20 Board Of Regents, University Of Texas Optically guided macroscopic-scan-range/nanometer resolution probing system
US8332895B2 (en) 2002-09-16 2012-12-11 Touchtunes Music Corporation Digital downloading jukebox system with user-tailored music management, communications, and other tools
US7940972B2 (en) * 2007-05-16 2011-05-10 General Electric Company System and method of extended field of view image acquisition of an imaged subject
US8207499B2 (en) * 2008-09-24 2012-06-26 Applied Materials Israel, Ltd. Variable rate scanning in an electron microscope
US8952717B2 (en) * 2009-02-20 2015-02-10 Qmc Co., Ltd. LED chip testing device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3628012A (en) * 1969-04-03 1971-12-14 Graham Stuart Plows Scanning stereoscopic electron microscope
GB1398513A (en) * 1971-05-18 1975-06-25 Drayton W B D Electron probe instruments
GB1560722A (en) * 1975-04-23 1980-02-06 Jeol Ltd Scanning electron microscope
JPS5275261A (en) * 1975-12-19 1977-06-24 Jeol Ltd Test piece image dispaly unit
JPS5788659A (en) * 1980-11-21 1982-06-02 Jeol Ltd Electron ray device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0533330B1 (fr) * 1991-09-17 1998-04-22 Hitachi, Ltd. Microscope à balayage et méthode de mise en oeuvre d'un tel microscope à balayage

Also Published As

Publication number Publication date
US4611119A (en) 1986-09-09
JPS5979944A (ja) 1984-05-09
DE3235727A1 (de) 1984-03-29
EP0104593A3 (fr) 1985-09-11

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PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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RIN1 Information on inventor provided before grant (corrected)

Inventor name: FAZEKAS, PETER, DIPL.-ING.

Inventor name: OTTO, JOHANN, DIPL.-ING.