EP0163130A2 - Procédé d'électroformage et mandrin utilisé - Google Patents
Procédé d'électroformage et mandrin utilisé Download PDFInfo
- Publication number
- EP0163130A2 EP0163130A2 EP85105029A EP85105029A EP0163130A2 EP 0163130 A2 EP0163130 A2 EP 0163130A2 EP 85105029 A EP85105029 A EP 85105029A EP 85105029 A EP85105029 A EP 85105029A EP 0163130 A2 EP0163130 A2 EP 0163130A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- conductive film
- photoresist
- pattern
- substrate
- mandrel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005323 electroforming Methods 0.000 title claims abstract description 51
- 238000000034 method Methods 0.000 title claims abstract description 41
- 239000011521 glass Substances 0.000 claims abstract description 43
- 239000000758 substrate Substances 0.000 claims abstract description 43
- 229920002120 photoresistant polymer Polymers 0.000 claims description 77
- 230000005855 radiation Effects 0.000 claims description 23
- 229910052751 metal Inorganic materials 0.000 claims description 22
- 239000002184 metal Substances 0.000 claims description 22
- 229910003437 indium oxide Inorganic materials 0.000 claims description 15
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 15
- 229910052709 silver Inorganic materials 0.000 claims description 12
- 239000004332 silver Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 8
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- 238000004070 electrodeposition Methods 0.000 claims description 6
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 5
- KERTUBUCQCSNJU-UHFFFAOYSA-L nickel(2+);disulfamate Chemical compound [Ni+2].NS([O-])(=O)=O.NS([O-])(=O)=O KERTUBUCQCSNJU-UHFFFAOYSA-L 0.000 claims description 5
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 5
- 229910001887 tin oxide Inorganic materials 0.000 claims description 5
- 239000002904 solvent Substances 0.000 claims description 4
- 239000005315 stained glass Substances 0.000 claims description 4
- 238000010030 laminating Methods 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 claims 3
- 239000000203 mixture Substances 0.000 claims 3
- 230000000873 masking effect Effects 0.000 claims 2
- 239000010410 layer Substances 0.000 description 11
- 238000010438 heat treatment Methods 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 8
- -1 silver halide Chemical class 0.000 description 7
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 5
- 238000009713 electroplating Methods 0.000 description 5
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 4
- 239000000839 emulsion Substances 0.000 description 4
- 239000011135 tin Substances 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- DMYOHQBLOZMDLP-UHFFFAOYSA-N 1-[2-(2-hydroxy-3-piperidin-1-ylpropoxy)phenyl]-3-phenylpropan-1-one Chemical compound C1CCCCN1CC(O)COC1=CC=CC=C1C(=O)CCC1=CC=CC=C1 DMYOHQBLOZMDLP-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical class O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- 229920001079 Thiokol (polymer) Polymers 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229940028356 diethylene glycol monobutyl ether Drugs 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 230000005012 migration Effects 0.000 description 2
- 238000013508 migration Methods 0.000 description 2
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000011133 lead Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000011417 postcuring Methods 0.000 description 1
- 230000003362 replicative effect Effects 0.000 description 1
- 238000012958 reprocessing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/10—Moulds; Masks; Masterforms
Definitions
- The.present invention relates generally to the art of electroplating, and more particularly to the art of electroforming on a patterned mandrel.
- precision mesh patterns have been produced by electroplating onto a master pattern of lines formed by etching or ruling lines into a glass substrate and depositing a conductive material into the etched or ruled lines to form a conductive master pattern for electroplating.
- a major disadvantage of this method is the limitation on the fineness and precision of etching glass.
- Photolithographic techniques have also been used to produce patterned electroforming mandrels.
- a conductive substrate such as a polished metal plate, is coated with a layer of photoresist.
- 'A patterned photomask is placed over the photoresist, which is then exposed to actinic radiation through the mask, thereby creating a pattern of exposed and unexposed photoresist which is further developed.
- Either the exposed or the unexposed portions of the photoresist are removed, depending on whether a positive or negative pattern is desired, resulting in a conductive pattern on the substrate.
- An electroplating process is then carried out to form a replica of the conductive pattern which can thereafter be removed from the substrate.
- This method is also restricted in the uniformity and precision of lines which can be formed, as well as requiring reprocessing of the master pattern after limited-usage.
- U.S. Patent No. 3,703,450 to Bakewell discloses a method of fabricating precision conductive mesh patterns on a repetitively reusable master plate comprising a conductive pattern formed on a nonconductive substrate and a nonconductive pattern formed in the interstices of the conductive pattern.
- a reproduction of the master pattern is formed by plating of a conductive pattern onto the master pattern within a matrix defined by the nonconductive pattern.
- the conductive metal master pattern is typically deposited onto a glass plate by evaporation of a metal such as chromium through a ruled pattern formed on a stencil material.
- the nonconductive pattern is formed by depositing a layer of photoresist over the conductive pattern coted side of the glass plate.
- the present invention provides an alternative process for producing an electroforming mandrel.
- a substrate transparent to actinic radiation is provided with a desired pattern for electroforming an article.
- the surface of the substrate is then coated with a continuous conductive film.
- a continuous layer of photoresist is deposited over the conductive film.
- the photoresist is exposed to actinic radiation through the substrate, the pattern acting to mask portions of the photoresist from exposure.
- the photoresist is then developed, and the unexposed portions removed to yield a conductive pattern of the underlying conductive film corresponding to the pattern on the substrate.
- the exposed portions of the photoresist may be removed to yield a conductive pattern which is a negative image of the pattern on the substrate.
- either the exposed or unexposed photoresist may be removed and the conductive film in the areas underlying the removed photoresist may be etched away. Removing the remaining photoresist exposes a pattern of the conductive film on the glass surface in either a positive or negative image of the pattern on the substrate.
- the resultant article is employed as a mandrel for the electroforming of metallic parts.
- the present invention provides an alternative process for producing a heater element grid.
- a substrate transparent to-actinic radiation is provided with a desired pattern for the heater element grid to form a photomask.
- a substrate to be used as the electroforming mandrel is coated with a continuous conductive film.
- a continuous layer of photoresist is deposited over the conductive film.
- the photoresist is exposed to actinic radiation through the photomask, the pattern acting to mask portions of the photoresist from exposure.
- the photoresist is then developed, and the unexposed portions removed to yield a conductive pattern of the underlying conductive film corresponding to the pattern of the photomask.
- the exposed portions of the photoresist may be removed to yield a conductive pattern which is a negative image of the pattern of the photomask.
- the resultant article is employed as a mandrel for the electroforming of a metallic heater element grid.
- the mandrel is immersed in an electroforming solution, and current is applied to effect the electrodeposition of metal onto the conductive pattern area on the mandrel. When a sufficiently thick deposit is obtained, the remaining photoresist is removed, and the electroformed heating grid is separated from the mandrel.
- a glass plate is provided with a pattern representing the configuration of the article to be produced by electroforming. While the pattern may be formed by a coating, a most preferred embodiment of the present invention utilizes a glass photomask to provide the pattern, preferably a glass photomask having a pattern formed by stain producing metal infused into the glass. Preferred techniques for producing stained glass photomasks are described in detail in U.S. Patents 4,144,066 and 4,155,735 to Ernsberger, the disclosures of which are incorporated herein by reference.
- a continuous conductive film is deposited on the surface of a substrate to be used as the electroforming mandrel.
- the conductive film may be a metal or an electroconductive metal oxide such as tin oxide or indium oxide.
- the conductive film may be deposited by any conventional coating technique such as vacuum deposition, cathode sputtering, chemical vapor deposition or pyrolytic coating techniques.
- a conductive film comprising indium oxide is deposited by magnetron sputtering.
- the conductive film is preferably deposited on a glass substrate.
- a conductive film is sputtered from a cathode comprising 80 to 90 percent indium and 10 to 20 percent tin.
- a continuous, transparent conductive film is deposited on the stained surface of a stained glass photomask.
- the conductive film is preferably an electroconductive metal oxide such as tin oxide or indium oxide.
- the conductive film may be deposited by any conventional coating technique such as vacuum deposition, cathode sputtering, chemical vapor deposition or pyrolytic coating techniques.
- a conductive film comprising indium oxide is deposited by magnetron sputtering.
- the conductive film is preferably deposited on the stained surface of the photomask in order to optimize resolution of the pattern.
- a continuous layer of photoresist is applied over the conductive film. Any conventional photoresist with sufficient resolution is acceptable.
- photoresist in sheet form is laminated to the conductive film.
- the photoresist is exposed to actinic radiation through the glass plate and conductive film, which transmit sufficient radiation to cure the exposed portions of the photoresist.
- the photomask pattern masks portions of the photoresist from exposure, and these portions remain uncured. Following exposure of the photoresist, and a post-curing cycle if necessary, the photoresist is developed.
- the photoresist is contacted with a chemical solution which dissolves and removes the unexposed-, uncured portions of the photoresist, thereby providing a pattern of the underlying conductive film which is a positive image of the pattern in the glass photomask.
- the remaining exposed, cured portions-of the photoresist surrounding the conductive pattern form walls within which the electroformed part is subsequently formed.
- a positive working photoresist may be employed to form a conductive film pattern which is a negative image of the photomask pattern.
- the resulting article is employed as a mandrel for the electroforming of metallic parts replicating the pattern on the conductive film.
- the glass photomask substrate bearing a conductive film having a pattern defined by the photoresist is contacted with a conventional metal-containing electrodeposition solution.
- An electrical circuit is established, using the conductive film as the cathode and an electrode of the metal to be deposited as the anode.
- An electrical potential is applied, and metal is deposited on the conductive film in the pattern defined by the photoresist. Electrodeposition is continued until the desired thickness is obtained for the electroformed part.
- the substrate bearing the conductive film, photoresist, and electroformed part is removed from the electrodeposition solution.
- Separation of the electroformed part from the photomask mandrel may be effected by various means such as alternately heating and chilling. If the part is thick enough, it may be stripped from the mandrel with the photoresist intact. In this embodiment, the mandrel is immediately reusable. However, in applications wherein the electroformed part is very thin and/or comprises very fine lines, the remaining photoresist is first removed, preferably by dissolution. Then the electroformed part is lifted off the photomask mandrel. If the electroformed part is strong enough, it may be simply stripped from the conductive film.
- a preferred method for separating the electroformed part from the photomask mandrel is to contact the electroformed part with a tacky tape to which the part adheres, and to remove the part with the tape.
- the part is preferably removed from the tape by dissolution of the adhesive.
- a preferred method for separating the electroformed heating element from the mandrel is to remove the photoresist, contact the electroformed part with a polymeric material to which the part adheres, and remove the heating grid element attached to the polymeric material.
- the polymeric material is an interlayer sheet to be laminated to a rigid sheet to form an aircraft transparency.
- the polymeric material is a sheet of polyvinyl butyral, a surface of which is chemically treated to soften the surface. The tacky surface is used to pick the heating grid off the mandrel. The polyvinyl butyral sheet is then laminated to a second polymer sheet with the heating grid between them.
- Various solvents may be used to soften the polyvinyl butyral; diethylene glycol monobutyl ether is preferred.
- a glass photomask electroforming mandrel is prepared by coating a glass plate with a photographic emulsion comprising silver nalide which is exposed to actinic radiation through a master pattern which defines the shape of the part to be electroformed. Exposed areas of the photographic emulsion form a latent image which is developed by immersion in developing solutions which convert the silver halide to colloidal silver.
- the coated glass plate is subjected to an electric field which induces migration of the silver ions into the glass.
- the silver ions are reduced to elemental silver which agglomerates into colloidal, microcrystalline color centers which form a stained pattern within the glass which corresponds with the master pattern of the article to be electroformed.
- the stained glass surface is then coated with a continuous conductive film by magnetron sputtering of a cathode comprising 90 percent indium and 10 percent tin.
- the preferred indium oxide film has a surface resistivity less than about 20 ohms per square.
- a continuous layer of photoresist is applied over the conductive film by laminating a sheet of photoresist to the indium oxide at a temperature of 235°F. (about 113°C.).
- a photoresist layer having a thickness of 0.001 inch (about 0.025 millimeter) is available from Thiokol/Dynachem Corp. of Tustin, California.
- the photoresist is exposed to actinic radiation (Colight M-218) through the glass photomask for 20 seconds and cured.
- the photoresist is developed with a solvent which removes the unexposed portions of the photoresist thereby providing a pattern of the underlying indium oxide in the shape of the article to be electroformed.
- the resultant article is used as an electroforming mandrel in the following process.
- the glass photomask electroforming mandrel of Example I is prepared for electroforming by sequential dipping into a dilute solution of hydrochloric and nitric acids, and isopropanol, each followed by a water rinse to clean and wet the electroforming surface.
- the glass photomask is dipped into the electroforming solution several times to completely wet the surface and remove air bubbles before the electroforming process commences.
- the electroforming solution comprises nickel sulfamate, and is maintained at a temperature of 110°F. (about 43°C.).
- a cathode contact is applied to the indium oxide film of the glass photomask electroforming mandrel.
- An anode contact is applied to a depolarized nickel plate.
- Both the mandrel and the plate are immersed into the nickel sulfamate solution.
- electroforming proceeds at a rate of 0.001 inch (0.025 millimeter) per 100 minutes.
- the electroformed part reaches the desired thickness, the mandrel is removed from the solution, the remaining photoresist is dissolved and removed with sodium hydroxide solution, and the electro formed part is removed from the mandrel with tack tape.
- a glass photomask is prepared by coating a glass plate with a photographic emulsion comprising silver halide which is exposed to actinic radiation through a master pattern in the shape of the part to be electroformed. Exposed areas of the photographic emulsion form a latent image which is developed by immersion in developing solutions which convert the silver halide to colloidal silver.
- the coated glass plate is subjected to an electric field which induces migration of the silver ions into the glass.
- the silver ions are reduced to elemental silver which agglomerates into colloidal, microcrystalline color centers which form a stained pattern within the glass which corresponds with the master pattern of the article to be electroformed.
- An electroforming mandrel is prepared by coating a glass substrate surface with a continuous conductive film by magnetron sputtering of a cathode comprising 90 percent indium and 10 percent tin.
- the preferred indium oxide film has a surface resistivity less than 20 ohms per square.
- a continuous layer of photoresist is applied over the conductive film by laminating a sheet of photoresist to the indium oxide at a temperature of 235°F. (about 113°C.).
- a photoresist layer having a thickness of 0.001 inch (about 0.025 millimeter) is available from Thiokol/Dynachem Corp. of Tustin, California.
- the photoresist is exposed to actinic radiation (Colight M-218) through the glass photomask for 20 seconds and cured.
- the photoresist is developed with a solvent which removes the unexposed portions of the photoresist thereby providing a pattern of the underlying indium oxide corresponding with the pattern in the photomask which in turn corresponds with the master pattern in the shape of the article to be electroformed.
- the resultant article is used as an electroforming mandrel in the following process.
- a glass mandrel 3 by 7 inches (about 7.6 by 17.8 centimeters) is prepared as in Example I having a screen pattern comprising lines 0.0012 inch (about 0.03 millimeter) wide spaced 0.022 inches (about 0.56 millimeters) apart.
- the mandrel is prepared for electroforming by sequential dipping into a dilute solution of hydrochloric and nitric acids, and isopropanol, each followed by a water rinse to clean and wet the electroforming surface.
- the glass mandrel is dipped into the electroforming solution several times to completely wet the surface and remove air bubbles before the electroforming process commences.
- the electroforming solution comprises nickel sulfamate, and is maintained at a temperature of 110°F. (about 43°C.).
- a cathode contact is applied to the indium oxide film of the glass electroforming mandrel.
- An anode contact is applied to a depolarized nickel plate. Both the mandrel and the plate are immersed into the nickel sulfamate solution.
- electroforming proceeds at a rate of 0.001 inch (0.025 millimeter) per 100 minutes.
- the mandrel is removed from the solution. The remaining photoresist is dissolved and removed with sodium hydroxide solution at 150°F. (about 66°C.).
- the electroformed heating grid is removed from i the mandrel by contacting the surface with a sheet of polyvinyl butyral, the contacting surface of which has been treated with diethylene glycol monobutyl ether to produce an adhesive surface.
- the grid remains attached to the tacky surface of the polyvinyl butyral.
- the polyvinyl butyral sheet bearing the heating grid is laminated to another polymeric sheet with the heating grid between the sheets.
- An optical grid is produced by electroforming as in Example II, except that the conductive pattern on the mandrel comprises finer lines more closely spaced.
- An optical grid is produced comprising lines 0.001 inch (about 0.025 millimeter) wide spaced 0.003 inch (about 0.076 millimeter) apart.
- metallic substrates may be used for the electroforming mandrel, and other metals may be deposited by electroforming, such as copper, iron, lead, tin and zinc.
- electroformed elements of the present invention need not be grid patterns, but may be produced in any shape or configuration, limited only by the artwork. The scope of the present invention is defined by the following claims.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Surface Treatment Of Glass (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US60550584A | 1984-04-30 | 1984-04-30 | |
| US605506 | 1984-04-30 | ||
| US06/605,506 US4549939A (en) | 1984-04-30 | 1984-04-30 | Photoelectroforming mandrel and method of electroforming |
| US605505 | 1984-04-30 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP0163130A2 true EP0163130A2 (fr) | 1985-12-04 |
| EP0163130A3 EP0163130A3 (en) | 1986-05-07 |
| EP0163130B1 EP0163130B1 (fr) | 1989-07-12 |
Family
ID=27084968
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP19850105029 Expired EP0163130B1 (fr) | 1984-04-30 | 1985-04-25 | Procédé d'électroformage et mandrin utilisé |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0163130B1 (fr) |
| BR (1) | BR8501941A (fr) |
| DE (1) | DE3571514D1 (fr) |
| ES (3) | ES8606680A1 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2432847A (en) * | 2005-12-02 | 2007-06-06 | Microstencil Ltd | Electroformed component manufacture |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3900359A (en) * | 1973-02-26 | 1975-08-19 | Dynamics Res Corp | Method and apparatus for television tube shadow mask |
| DE2828625C2 (de) * | 1978-06-29 | 1980-06-19 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zur galvanoplastischen Herstellung von Präzisionsflachteilen |
-
1985
- 1985-04-24 BR BR8501941A patent/BR8501941A/pt not_active IP Right Cessation
- 1985-04-25 DE DE8585105029T patent/DE3571514D1/de not_active Expired
- 1985-04-25 EP EP19850105029 patent/EP0163130B1/fr not_active Expired
- 1985-04-29 ES ES542661A patent/ES8606680A1/es not_active Expired
- 1985-04-29 ES ES542662A patent/ES8700456A1/es not_active Expired
- 1985-09-23 ES ES547207A patent/ES8703539A1/es not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2432847A (en) * | 2005-12-02 | 2007-06-06 | Microstencil Ltd | Electroformed component manufacture |
Also Published As
| Publication number | Publication date |
|---|---|
| ES8703539A1 (es) | 1987-02-16 |
| EP0163130A3 (en) | 1986-05-07 |
| BR8501941A (pt) | 1985-12-24 |
| DE3571514D1 (en) | 1989-08-17 |
| ES542661A0 (es) | 1986-04-16 |
| ES8700456A1 (es) | 1986-09-16 |
| ES547207A0 (es) | 1987-02-16 |
| ES8606680A1 (es) | 1986-04-16 |
| ES542662A0 (es) | 1986-09-16 |
| EP0163130B1 (fr) | 1989-07-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4772760A (en) | Nonorthogonal EMP shielding elements | |
| EP0273552B2 (fr) | Procédé de fabriquer des matrices pour procédés de placage | |
| US4549939A (en) | Photoelectroforming mandrel and method of electroforming | |
| US2443119A (en) | Process of producing predetermined metallic patterns | |
| US4845310A (en) | Electroformed patterns for curved shapes | |
| US5147519A (en) | Method of manufacturing elastomers containing fine line conductors | |
| US3443915A (en) | High resolution patterns for optical masks and methods for their fabrication | |
| US3703450A (en) | Method of making precision conductive mesh patterns | |
| CA1269342A (fr) | Methode d'electroformage d'article, avec un mandrin a photomasque | |
| US4762595A (en) | Electroforming elements | |
| EP0297231B1 (fr) | Electroformage des écrans contre les pulsations électromagnétiques | |
| EP0185998A1 (fr) | Fabrication de circuits d'interconnexion par électroformage de transfert | |
| EP0410274B1 (fr) | Procédé de fabrication d'un patron fin | |
| US3637380A (en) | Methods for electrochemically making metallic patterns by means of radiation-sensitive elements | |
| US3877810A (en) | Method for making a photomask | |
| US4565616A (en) | Method for producing a photoelectroforming mandrel | |
| JP3697859B2 (ja) | 微細パターンの製造方法 | |
| EP0163130B1 (fr) | Procédé d'électroformage et mandrin utilisé | |
| JP2800476B2 (ja) | 凹版の製造方法 | |
| JP3821868B2 (ja) | 絶縁基材上にめっきする方法及びその方法にて得られるめっき付与物 | |
| JPH11251722A (ja) | 耐熱性配線基板 | |
| US3702808A (en) | Process for the production of star tracklng reticles | |
| TW503170B (en) | Method for producing injection molded mold with reflective light guide | |
| KR100275372B1 (ko) | 회로기판 제조방법 | |
| US3510409A (en) | Method of making precision masks |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
| AK | Designated contracting states |
Designated state(s): DE FR GB IT NL SE |
|
| PUAL | Search report despatched |
Free format text: ORIGINAL CODE: 0009013 |
|
| AK | Designated contracting states |
Kind code of ref document: A3 Designated state(s): DE FR GB IT NL SE |
|
| 17P | Request for examination filed |
Effective date: 19860923 |
|
| 17Q | First examination report despatched |
Effective date: 19871203 |
|
| GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
| AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): DE FR GB IT NL SE |
|
| REF | Corresponds to: |
Ref document number: 3571514 Country of ref document: DE Date of ref document: 19890817 |
|
| ET | Fr: translation filed | ||
| ITF | It: translation for a ep patent filed | ||
| PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
| 26N | No opposition filed | ||
| ITTA | It: last paid annual fee | ||
| GBPC | Gb: european patent ceased through non-payment of renewal fee | ||
| REG | Reference to a national code |
Ref country code: GB Ref legal event code: 728C |
|
| REG | Reference to a national code |
Ref country code: GB Ref legal event code: 728A |
|
| EAL | Se: european patent in force in sweden |
Ref document number: 85105029.4 |
|
| REG | Reference to a national code |
Ref country code: FR Ref legal event code: TP |
|
| NLS | Nl: assignments of ep-patents |
Owner name: PPG INDUSTRIES OHIO, INC. |
|
| REG | Reference to a national code |
Ref country code: GB Ref legal event code: 732E |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: FR Payment date: 20010330 Year of fee payment: 17 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: SE Payment date: 20010402 Year of fee payment: 17 Ref country code: DE Payment date: 20010402 Year of fee payment: 17 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 20010403 Year of fee payment: 17 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: NL Payment date: 20010412 Year of fee payment: 17 |
|
| REG | Reference to a national code |
Ref country code: GB Ref legal event code: IF02 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20020425 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: SE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20020426 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: NL Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20021101 Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20021101 |
|
| EUG | Se: european patent has lapsed |
Ref document number: 85105029.4 |
|
| GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 20020425 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20021231 |
|
| NLV4 | Nl: lapsed or anulled due to non-payment of the annual fee |
Effective date: 20021101 |
|
| REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST |