EP0186776A1 - Dispositif de production d'un vide - Google Patents

Dispositif de production d'un vide Download PDF

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Publication number
EP0186776A1
EP0186776A1 EP85114893A EP85114893A EP0186776A1 EP 0186776 A1 EP0186776 A1 EP 0186776A1 EP 85114893 A EP85114893 A EP 85114893A EP 85114893 A EP85114893 A EP 85114893A EP 0186776 A1 EP0186776 A1 EP 0186776A1
Authority
EP
European Patent Office
Prior art keywords
separator
gas
auxiliary liquid
liquid
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP85114893A
Other languages
German (de)
English (en)
Other versions
EP0186776B1 (fr
Inventor
Siegfried Dipl.-Ing. Schönwald
Hans-Georg Trojahn
Norbert Dipl.-Ing. Schmid
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Priority to AT85114893T priority Critical patent/ATE40583T1/de
Publication of EP0186776A1 publication Critical patent/EP0186776A1/fr
Application granted granted Critical
Publication of EP0186776B1 publication Critical patent/EP0186776B1/fr
Expired legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation

Definitions

  • the invention relates to a device for generating a vacuum, which contains a vacuum pump working with an auxiliary liquid and driven by an electric motor, in which device the vacuum pump is followed by a pre-separator provided with a storage space for separating the conveyed gas from the auxiliary liquid, the auxiliary liquid being a vacuum cooler and the gas, which is still loaded with a remainder of the auxiliary liquid, is fed to the storage space from a liquid cooler to a fine separator arranged downstream of the pre-separator, which is provided with a return line for the auxiliary liquid separated in it.
  • a cooler is arranged, through which the gas-oil mixture emerging from the compressor is cooled before it gets into the pre-separator. Doing so the 01 cooled to relatively lower temperatures, which necessitated a correspondingly large cooler.
  • the invention has for its object to improve a device of the type described in such a way that the liquid separation is significantly improved by appropriate cooling without condensation of the moisture contained in the sucked gas within the pump and the pre-separator must be accepted. This task should also be solved with the least possible design effort.
  • the pre-separator and the fine separator are arranged spatially separate and the gas still loaded with a remainder of the auxiliary liquid is fed to the fine separator via a gas cooler arranged separately from the liquid cooler, the two coolers being dimensioned such that the Gas is cooled to a lower temperature than the outlet temperature of the auxiliary liquid.
  • the spatially separate arrangement of the two separators achieves a thermal decoupling of the fine separator from the pre-separator, which is strongly heated by the auxiliary liquid and the compressed gas. Only the auxiliary liquid flowing back to the vacuum pump is cooled above the liquid cooler, it being possible for the liquid cooler to be designed such that a favorable operating temperature of the auxiliary liquid is achieved.
  • the liquid cooler can be dimensioned accordingly small.
  • the between that The pre-separator and the fine separator arranged gas cooler need only apply the smaller cooling capacity necessary for cooling the gas. It can be dimensioned such that a favorable low temperature necessary for separating the auxiliary liquid is reached.
  • a separate fan for the liquid cooler and the gas cooler can be avoided by arranging these coolers in the cooling air flow of the electric motor.
  • an embodiment of the liquid cooler which does not take up any additional space results from the fact that it is designed as a coiled tube which is arranged concentrically around the electric motor or between it and the vacuum pump. Additional space is also not claimed if a double-walled fan hood is provided as a gas cooler on the electric motor, surrounding the fan, through the cavity of which the gas is passed.
  • the described design of the two coolers therefore has the advantage that they are inevitably in the cooling air flow of the fan of the electric motor, the gas cooler being acted upon by the fresh air which has not yet been heated.
  • both the pre-separator and the fine separator are each installed in a tubular housing part and the two housing parts are arranged with their longitudinal axes parallel to the longitudinal axis of the electric motor. It is particularly advantageous here that both the inlet and outlet ports of the vacuum pump are directed upward and the two separators are each attached to one of the two ports lying above the electric motor.
  • Such an arrangement of the separators above the engine is particularly favorable for the lateral connection of the gas lines to the fan cover.
  • the gas lines led out from the side of the fan hood are led laterally into the pre-separator or fine separator, so that there is a very short and simple pipe guide for the gas lines.
  • both the separators and the gas lines are at least partially coated by the cooling air flow from the engine fan.
  • the attachment of the two separators to the inlet and outlet ports of the vacuum pump is expediently carried out in such a way that the pre-separator is attached with its inlet opening to a pipe extension of the outlet connection facing the engine and forming the outlet opening of the vacuum pump, and the fine separator to a lateral pipe extension of the inlet connection.
  • the feed elements of the pre-separator also serve to secure the same.
  • the pre-separator and the fine separator each consist of a head part containing the connection points for the lines to be connected and a head part that can be connected to this head part and contains the elements of the respective separator.
  • An easily detachable connection of the container parts to the head parts is possible in that the container parts are cylindrical bushings, which have on their open side a radially outwardly protruding beaded edge with which they are fastened to the head portion by means of a tension lock which engages over this beaded edge and a corresponding beaded edge formed on the head part.
  • a simple structure of the pre-separator is characterized in that a gas guide line connected to the head part runs parallel to the upper boundary wall of the container part, which ends near the bottom of the container part and that the lower region of the container part forms the storage space which has a opening is connected to a drain opening of the head part connected to the liquid cooler.
  • a hollow roller-shaped filter is arranged in the fine separator and its cavity is connected to the gas supply opening of the head part. This means that no further line elements for the gas between the feed opening of the head part and the filter are necessary.
  • a return of the auxiliary liquid accumulating in the fine separator to the pump circuit is possible without separate return lines by providing a bore in the head part of the fine separator which is below the level of the surface of the auxiliary liquid collecting in the fine separator and opens into the lateral tube attachment of the suction nozzle of the vacuum pump. If, on the other hand, a return line is provided, it is expedient that this leads into the inlet connection of the vacuum pump or into the sector between the inlet and outlet opening of the working space of the vacuum pump. Due to the higher pressure prevailing in the container part of the fine separator in relation to the mouth into the vacuum pump, the auxiliary liquid is conveyed to the vacuum pump in both cases.
  • a condensate separator When using a separate return line, it is possible to arrange a condensate separator in this. In this separator, any condensates contained in the auxiliary liquid are separated from the latter. By means of the return line, the auxiliary liquid can be introduced into the working area of the pump at such a point where the suction process has already been completed. The intake volume flow is then only slightly influenced by the evaporating condensate. In such a case, a separate condensate separator is not necessary if the accumulation of condensate is only occasional and limited.
  • a return of the auxiliary liquid accumulating in the fan cover without a separate conveying device is possible in that a discharge line of small cross-section is connected to the lowest point of the fan cover and is guided into the fine separator above the level of the auxiliary liquid accumulating in the fine separator.
  • a pressure drop arises between the interior thereof and the container space surrounding the hollow roller-shaped filter. This pressure drop is effective on the discharge line leading from the fan cover to the fine separator and ensures that the auxiliary liquid is conveyed from the fan cover into the fine separator.
  • a liquid ring pump 2 is mounted as a vacuum pump.
  • an upward inlet connection 4 and an outlet connection 5 are each formed.
  • a pipe extension 6 is connected to the outlet nozzle 5, to which a pre-separator 7 is connected.
  • the pre-separator 7 has a head part 8 serving to connect various pipelines and a container part 9 receiving the separator elements.
  • the head and container parts 8 and 9 are detachably connected to one another by means of a tension lock 10.
  • a gas line 11 leads from the head part 8 of the pre-separator 7 to a fan hood 13 which encloses the fan 12 of the electric motor 1 and which forms a gas cooler.
  • the fan cover 13 is double-walled, so that the gas supplied via the gas line 11 connected laterally to the fan cover 13 can flow through the cavity 16 existing between the walls 14 and 15 of the fan cover 13.
  • the gas is introduced into the head part 18 of a fine separator 19 via a further gas line 17 connected laterally to the circumference of the fan cover 13.
  • a container part 20 is connected to the head part 18 of the fine separator 19, in the same way as for the pre-separator 7, by means of a tension lock 10.
  • An outlet opening 21 for the gas is present in the head part 18 of the fine separator 19.
  • the head part 18 itself is screwed onto a tubular extension 22 of the inlet connector 4 and is carried by the latter.
  • a liquid cooler 23 designed as a tube coil is between the electric motor 1 and the housing of the liquid keitsringpumpe 2 arranged concentrically to the housing of the electric motor 1. Depending on the size of the liquid cooler 23, it can extend more or less over the length of the motor housing.
  • the liquid cooler 23 is connected at its one end 24 to the head part 8 of the pre-separator 7.
  • the other end 25 of the liquid cooler 23 either opens into the inlet connection 4 or into the sector between the inlet and outlet opening of the working space of the liquid ring pump 2.
  • a discharge line 26 is connected, which is led into the fine separator 19 from the end face of the head part 18 of the fine separator 19 above the level of the surface of the auxiliary liquid 33 accumulating in the fine separator 19.
  • a return line 27 connected to a drain hole 43 of the head part 18 also leads from the head part 18 to the inlet connection 4 of the liquid ring pump 2.
  • the pre-separator 7 shown in a slightly schematic representation in FIG. 5 is screwed with an inlet opening 28 provided in its head part 8 onto the pipe socket 6 of the outlet connection 5 of the liquid ring pump 2.
  • a gas guide line 29 is connected to the inlet bore 28.
  • the gas guide line 29 runs parallel to the boundary wall of the container part 9 and ends shortly before the bottom 30 of the container part 9.
  • a shield 31 pointing downward is arranged on the gas guide line 29 and a deflection plate 32 extending perpendicularly from the bottom 30 is arranged on the bottom of the container part 9.
  • the gas emerging from the gas guide line 29 and loaded with auxiliary liquid 33 is deflected twice by the screen 31 and the deflection plate 32 by 90 ° each.
  • the major part of the auxiliary liquid 33 is separated out and collects in the lower region of the container part 9.
  • a further part of the Auxiliary liquid 33 excreted from the gas.
  • the gas flows behind the separating filter 34 to an outlet bore 35, whereby it is again deflected by a transverse wall 36. During this redirection, another part of the auxiliary liquid 33 can precipitate on the transverse wall 36 and flow down from here.
  • the gas line 11 leading to the fan cover 13 is connected to the outlet bore 35.
  • a drain opening 37 is provided, to which the liquid cooler 23 is connected at one end 24.
  • the fine separator 19 shown schematically in FIG. 7 also has a gas feed opening 38, to which a hollow roller-shaped filter 40 is connected by means of a tube 39.
  • the gas still loaded with a residual auxiliary liquid 33 enters the cavity of the filter 40 via the gas supply opening 38 and flows through it from the inside to the outside. Since the gas in the fan cover 13 has been cooled to a relatively low temperature after leaving the pre-separator 7, a high degree of separation is achieved in the filter 40. After flowing through the filter 40, the gas leaves the fine separator 19 via a post-filter 42 via the outlet opening 21.
  • a drain hole 43 is provided below the surface of the auxiliary liquid 33 that accumulates in the lower area of the fine separator 19, to which the return line 27 is connected.
  • a hole 44 leading into the lateral pipe socket 22 can also be provided, via which the auxiliary liquid 33 flows into the pipe socket 22 and from here into the inlet connection 4 of the liquid ring pump.
  • the return line 27 must be provided if, prior to the return of the auxiliary liquid 33 into the liquid ring pump 2, a condensate present in the auxiliary liquid 33 by means of a Separated condensate separator or when the auxiliary liquid 33 is to be reintroduced into the pump at a specific point located between the inlet and outlet openings of the working space of the vacuum pump.
  • head parts 8 and 18 shown in FIGS. 6 and 8 show that these head parts have the same shape and size. Appropriate finish bores are then used to prepare the head sections either for use on the pre-separator or fine separator. So at d'em. Head part 8 for the pre-separator 7 only the inlet bore 28 and the outlet opening 37 and on the head part 18 for the fine separator 19 the outlet opening 21 and the outlet bore 43 or the bore 44 are produced.
  • the air After flowing through the filter 40, the air leaves the fine separator 19 through the outlet opening 21.
  • the auxiliary liquid 33 that accumulates in the fine separator 19 is returned to the circuit of the device via the drain hole 43 and the return line 27 or the hole 44 connected to it.
  • the auxiliary liquid 33 By cooling the gas in the fan cover 13, part of the auxiliary liquid 33 can already condense here and collects at the lowest point of the fan cover 13. From here, the auxiliary liquid 33 is conveyed into the fine separator 19 via the discharge line 26. Since the discharge line 26 opens into the fine separator behind the filter 40, there is a pressure difference between their connection to the fan cover 13 and the opening in the fine separator 19, which pressure difference is sufficient to convey the auxiliary liquid 33 from the fan cover 13 into the fine separator. As a result of this arrangement of the discharge line 26, a separate conveying device for the discharge of the the auxiliary liquid 33 from the fan cover 13.
  • a liquid ring pump 2 as a vacuum pump is particularly advantageous.
  • a relatively large amount of auxiliary liquid 33 is expelled together with the compressed gas. This means that a large mass of liquid is available for the removal of the heat lost in the pump. It is therefore sufficient to have a relatively small temperature difference in the cooling of the auxiliary liquid in the liquid cooler in order to dissipate the heat loss to the outside.
  • a relatively small gas cooler 13 is required to cool this gas.
  • This gas cooler 13 is dimensioned such that the gas is cooled in the liquid cooler 23 by a substantially greater temperature difference than the auxiliary liquid 33.
  • the respective coolers Due to the separate cooling of the auxiliary liquid 33 and the gas, the respective coolers can be designed specifically for the cooling capacity required in each case. Overall, this leads to less cooling effort.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Motor Or Generator Cooling System (AREA)
  • Compressor (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Extrusion Moulding Of Plastics Or The Like (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
EP85114893A 1984-12-07 1985-11-25 Dispositif de production d'un vide Expired EP0186776B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT85114893T ATE40583T1 (de) 1984-12-07 1985-11-25 Vorrichtung zur erzeugung eines vakuums.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3444731 1984-12-07
DE3444731 1984-12-07

Publications (2)

Publication Number Publication Date
EP0186776A1 true EP0186776A1 (fr) 1986-07-09
EP0186776B1 EP0186776B1 (fr) 1989-02-01

Family

ID=6252194

Family Applications (1)

Application Number Title Priority Date Filing Date
EP85114893A Expired EP0186776B1 (fr) 1984-12-07 1985-11-25 Dispositif de production d'un vide

Country Status (8)

Country Link
US (1) US4657487A (fr)
EP (1) EP0186776B1 (fr)
JP (1) JPS61138897A (fr)
CN (1) CN1005642B (fr)
AT (1) ATE40583T1 (fr)
DE (1) DE3568071D1 (fr)
ES (1) ES8701917A1 (fr)
IN (1) IN162159B (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5087178A (en) * 1990-01-04 1992-02-11 Rogers Machinery Company, Inc. Oil flooded screw compressor system with moisture separation and heated air dryer regeneration, and method
US5492461A (en) * 1992-02-14 1996-02-20 Cash Engineering Research Pty. Ltd. Separator vessel

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US4761166A (en) * 1986-01-21 1988-08-02 Cash Engineering Research Pty. Ltd. Compressor system
US5320501A (en) * 1991-04-18 1994-06-14 Vickers, Incorporated Electric motor driven hydraulic apparatus with an integrated pump
US5181837A (en) * 1991-04-18 1993-01-26 Vickers, Incorporated Electric motor driven inline hydraulic apparatus
US5355901A (en) * 1992-10-27 1994-10-18 Autoclave Engineers, Ltd. Apparatus for supercritical cleaning
US5345771A (en) * 1993-03-25 1994-09-13 John Zink Company, A Division Of Koch Engineering Company, Inc. Process for recovering condensable compounds from inert gas-condensable compound vapor mixtures
DE4417607C1 (de) * 1994-05-19 1995-10-19 Siemens Ag Pumpenaggregat
EP0716232B1 (fr) * 1994-12-06 1997-08-13 Siemens Aktiengesellschaft Dispositif de compression
US7871249B2 (en) * 1998-04-16 2011-01-18 Air Liquide Electronics U.S. Lp Systems and methods for managing fluids using a liquid ring pump
US7980753B2 (en) 1998-04-16 2011-07-19 Air Liquide Electronics U.S. Lp Systems and methods for managing fluids in a processing environment using a liquid ring pump and reclamation system
US20070119816A1 (en) * 1998-04-16 2007-05-31 Urquhart Karl J Systems and methods for reclaiming process fluids in a processing environment
US20070109912A1 (en) * 2005-04-15 2007-05-17 Urquhart Karl J Liquid ring pumping and reclamation systems in a processing environment
US8056182B2 (en) * 2005-08-30 2011-11-15 Tacony Corporation Heating system for a portable carpet extractor
US8235580B2 (en) 2006-10-12 2012-08-07 Air Liquide Electronics U.S. Lp Reclaim function for semiconductor processing systems
DE102010061494A1 (de) * 2010-12-22 2012-06-28 Herborner Pumpenfabrik J. H. Hoffmann Gmbh & Co. Kg Pumpvorrichtung
WO2015188266A1 (fr) 2014-06-10 2015-12-17 Vmac Global Technology Inc. Procédés et appareil pour simultanément refroidir et séparer un mélange de gaz chaud et de liquide
CN105257546B (zh) * 2015-09-08 2017-06-30 无锡压缩机股份有限公司 用于喷油螺杆真空泵的油气分离系统
US20160296902A1 (en) 2016-06-17 2016-10-13 Air Liquide Electronics U.S. Lp Deterministic feedback blender
US10940423B2 (en) * 2018-04-19 2021-03-09 Ingersoll-Rand Industrial U.S., Inc. Compressor system and filter housing
CN110821832A (zh) * 2019-10-28 2020-02-21 佛山百策机电设备有限公司 一种中央吸引真空机组
DE102020208731A1 (de) * 2020-07-13 2022-01-13 BSH Hausgeräte GmbH Wäschepflegegerät mit einer Flüssigkeitsring-Pumpe
GB2603971A (en) * 2021-02-19 2022-08-24 Leybold Tianjin Int Trade Co Ltd Filtering module for use with a vacuum pump
CN116838610B (zh) * 2023-08-29 2023-11-17 泉州市中力机电有限公司 一种螺杆式空压机散热和热能回收装置
KR102939878B1 (ko) * 2025-09-02 2026-03-17 주식회사 지피이엔지 리퀴드 세퍼레이터 및 오일 회수 기능이 포함된 저전력 운전 진공펌프 시스템

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DE677399C (de) * 1936-11-27 1939-06-24 Otto Becker Aus mehreren Einzelgeblaesen bestehendes, von einer gemeinsamen Grundplatte getragenes Drehkolbengeblaese zum Erzeugen von Saug- und Blasluft
FR81597E (fr) * 1962-05-11 1963-10-11 Perfectionnements aux compresseurs à piston rotatif
DE1628327A1 (de) * 1966-09-29 1970-12-17 Wittig Gmbh Maschf Karl Vorrichtung zur Aussetz- bzw. Leerlaufregelung von Drehkolbenverdichtern
FR2164224A5 (fr) * 1971-12-01 1973-07-27 Airfina Ets
FR2180332A5 (fr) * 1972-04-08 1973-11-23 Sihi Gmbh & Co Kg

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FR1329699A (fr) * 1962-05-04 1963-06-14 Perfectionnements aux compresseurs à piston rotatif
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DE2841906C2 (de) * 1978-09-26 1980-02-21 Siemens Ag, 1000 Berlin Und 8000 Muenchen Flüssigkeitsringverdichter oder -vakuumpumpe
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Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE677399C (de) * 1936-11-27 1939-06-24 Otto Becker Aus mehreren Einzelgeblaesen bestehendes, von einer gemeinsamen Grundplatte getragenes Drehkolbengeblaese zum Erzeugen von Saug- und Blasluft
FR81597E (fr) * 1962-05-11 1963-10-11 Perfectionnements aux compresseurs à piston rotatif
DE1628327A1 (de) * 1966-09-29 1970-12-17 Wittig Gmbh Maschf Karl Vorrichtung zur Aussetz- bzw. Leerlaufregelung von Drehkolbenverdichtern
FR2164224A5 (fr) * 1971-12-01 1973-07-27 Airfina Ets
FR2180332A5 (fr) * 1972-04-08 1973-11-23 Sihi Gmbh & Co Kg

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5087178A (en) * 1990-01-04 1992-02-11 Rogers Machinery Company, Inc. Oil flooded screw compressor system with moisture separation and heated air dryer regeneration, and method
US5492461A (en) * 1992-02-14 1996-02-20 Cash Engineering Research Pty. Ltd. Separator vessel

Also Published As

Publication number Publication date
ATE40583T1 (de) 1989-02-15
IN162159B (fr) 1988-04-09
US4657487A (en) 1987-04-14
ES8701917A1 (es) 1986-12-01
CN1005642B (zh) 1989-11-01
JPS61138897A (ja) 1986-06-26
ES549668A0 (es) 1986-12-01
EP0186776B1 (fr) 1989-02-01
DE3568071D1 (en) 1989-03-09
CN85106797A (zh) 1986-06-10

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