EP0268152A2 - Scie à tronçonner intérieure - Google Patents

Scie à tronçonner intérieure Download PDF

Info

Publication number
EP0268152A2
EP0268152A2 EP87116283A EP87116283A EP0268152A2 EP 0268152 A2 EP0268152 A2 EP 0268152A2 EP 87116283 A EP87116283 A EP 87116283A EP 87116283 A EP87116283 A EP 87116283A EP 0268152 A2 EP0268152 A2 EP 0268152A2
Authority
EP
European Patent Office
Prior art keywords
blade
sheet
outside
diamond coating
diamond
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP87116283A
Other languages
German (de)
English (en)
Other versions
EP0268152B1 (fr
EP0268152A3 (en
Inventor
Jürgen Balck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Diamantwerkzeuge GmbH and Co KG
Original Assignee
Ernst Winter and Sohn Diamantwekzeuge GmbH and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ernst Winter and Sohn Diamantwekzeuge GmbH and Co filed Critical Ernst Winter and Sohn Diamantwekzeuge GmbH and Co
Publication of EP0268152A2 publication Critical patent/EP0268152A2/fr
Publication of EP0268152A3 publication Critical patent/EP0268152A3/de
Application granted granted Critical
Publication of EP0268152B1 publication Critical patent/EP0268152B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
    • B24D5/12—Cut-off wheels
    • B24D5/126—Cut-off wheels having an internal cutting edge

Definitions

  • the invention relates to an inner hole saw, in particular for separating thin slices from a monocrystalline silicon rod, consisting of a thin sheet provided in the middle with an inner hole, which has a coating in the edge region of the inner hole, which consists of diamond or boron nitride grains, which are in a galvanic Binding are held, the covering covering the inner cylindrical peripheral surface of the inner hole and the adjacent edge portions on the two outer sides of the sheet.
  • a corresponding inner hole saw has a core sheet for this purpose, which has a thickness of, for example, 0.12 mm or 120 ⁇ m.
  • This sheet has an inner hole, the edge of which is provided all around with a galvanically applied diamond coating, which is usually thickened like a bead on the immediate inner edge.
  • the blade has a diamond coating of approximately 2 mm in width on both sides at the two edge regions adjoining the hole.
  • the thin blade is clamped in a clamping ring in order to bring about high rigidity.
  • This clamping ring is arranged in a machine and set in rotation. The distance from the inner edge of the inner hole to the clamping ring allows a rod of the appropriate diameter to be cut.
  • Such a saw is particularly advantageous when it comes to cutting a very expensive material, such as monocrystalline silicon, because the effective cutting width and thus the resulting waste are only small.
  • a problem with the use of internal hole saws for cutting extremely thin panes arises from the fact that a pane can bend during the cutting process. This is due to the fact that during the cutting process a stable side arises on the side of the rod to be sawn and an unstable side on the side of the disc 1 to be cut off. In this context, one speaks of the stable side, because even relatively large forces on this side do not cause any elastic or plastic deformation. On the unstable side, on the other hand, even relatively small forces, particularly depending on the thickness of the pane to be separated, can cause elastic but also plastic deformations due to crystal destruction on the surface. In an unfavorable case, such deformations lead to the disc to be separated coming close to the blade of the internal hole saw or even to contact with the internal hole saw.
  • the object of the invention is to provide an internal hole saw, which leads to a reduced scrap rate on separate discs and saw material while still having a narrow cutting width of the saw.
  • the thickness of the diamond coating on the side of the disc to be separated ie on the unstable side, is greater than on the opposite so-called stable side of the saw blade.
  • the saw blade may bend when it is tensioned. If the saw blade is stretched a lot during commissioning, the diameter of the inner hole is stretched. As a result of such stretching, the covering in the edge region of the inner hole can lead to a lateral deflection, in particular if it is arranged on both outer sides of the blade in different thicknesses. This is due to the fact that the differently thick layers of material on the core produce different counter-forces during tensioning and, as a result, a balance of forces occurs by tilting the stronger to the weaker side, so that the width of cut increases.
  • this is remedied by the fact that, in addition to the different thicknesses of the diamond coating on the two outer sides of the blade, provision is made for the total proportions of the diamond coating to be approximately the same on both sides of the blade.
  • the edge area of the diamond coating on one outside of the blade can be wider than on the other outside, which is on the unstable side.
  • the one on the stable side can be thicker than that on the stable side if the diamond coating in the head region is additionally widened on the unstable side.
  • the proposed solutions have the advantage that, while maintaining the usual cutting widths by lateral displacement of the covering projections, they improve the functional reliability of the internal hole saw and reduce material waste on separated discs.
  • FIG. 1 shows a rod 1 made of monocrystalline silicon, from which extremely thin slices 2 are to be separated.
  • an inner hole saw is provided, which consists of a thin metal sheet 3, which is provided with an inner hole 4 in the middle.
  • the sheet 3, which can consist of a chrome-nickel steel, has a thickness of only 0.12 mm.
  • the edge area of the inner hole 4 is surrounded by a diamond coating 5.
  • the single ones Diamond grains are held in a metallic bond.
  • the diamond coating 5 surrounds the cylindrical inner edge of the inner hole 4 and the adjoining edge section on both sides of the sheet 3.
  • the rod 1 is inserted into the inner hole 4 to separate a disk 2.
  • a disc 2 is separated from the rod 1 with the sheet 3 and its inner hole 4.
  • the diamond coating 5 is more strongly formed on the side of the disk 2, that is to say the so-called unstable side, in particular in the head region 9 than on the opposite side 7, which is the stable side. This reduces the risk of the disk 2 touching the sheet 3.
  • the larger covering overhang of the diamond layer 5 on the outside of the sheet 3 is designated in FIG. 1 as in FIG. 2 by "X2".
  • the lower covering overhang on the stable side 7 is labeled "X1".
  • FIG. 2 shows the size relationships of the edge area at the inner hole of a blade 3 of an inner hole saw in terms of size.
  • the edge region has a width of 2.0 mm on the unstable side and a length "L2" of 2.5 mm on the stable side.
  • the total covering thickness in the head area is 270 ⁇ m.
  • the length L 1 of the covering 5 is less than the covering length L 2 on the opposite side.
  • the coating on the unstable side 6 is made stronger, so that there is a total of equal diamond coating proportion on both sides of the axis of the blade 3.
  • the diamond coating thickness is greater in the head region on the unstable side than on the stable side 7.
  • the lengths in the edge region are the same on both sides.
  • the covering 5 on side 6 is thinner than on side 7.
  • the invention is not restricted to the use of an internal hole saw for cutting a monocrystalline silicon rod, but can also be used for the processing of polycrystalline materials and materials other than silicon, such as for example germanium.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
EP87116283A 1986-11-20 1987-11-05 Scie à tronçonner intérieure Expired - Lifetime EP0268152B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3639700 1986-11-20
DE19863639700 DE3639700A1 (de) 1986-11-20 1986-11-20 Innenlochsaege

Publications (3)

Publication Number Publication Date
EP0268152A2 true EP0268152A2 (fr) 1988-05-25
EP0268152A3 EP0268152A3 (en) 1990-01-17
EP0268152B1 EP0268152B1 (fr) 1992-05-06

Family

ID=6314396

Family Applications (1)

Application Number Title Priority Date Filing Date
EP87116283A Expired - Lifetime EP0268152B1 (fr) 1986-11-20 1987-11-05 Scie à tronçonner intérieure

Country Status (4)

Country Link
US (1) US4850331A (fr)
EP (1) EP0268152B1 (fr)
JP (1) JPS63200971A (fr)
DE (2) DE3639700A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5218948A (en) * 1988-03-11 1993-06-15 Mitsubishi Kinzoku Kabushiki Kaisha Inside diameter blade
DE3836587A1 (de) * 1988-10-27 1990-05-03 Winter & Sohn Ernst Innenlochsaege
EP0424953B1 (fr) * 1989-10-27 1995-06-14 Sumitomo Electric Industries, Ltd. Lame fine à tranchant périphérique interne: méthode de production
US5218947A (en) * 1991-08-09 1993-06-15 Ajamian Hrant K Annular cutting disc
US6203416B1 (en) 1998-09-10 2001-03-20 Atock Co., Ltd. Outer-diameter blade, inner-diameter blade, core drill and processing machines using same ones
US20070023026A1 (en) * 2005-07-28 2007-02-01 Broyles Michelle Dicing blade
ITPD20120405A1 (it) * 2012-12-21 2014-06-22 Freni Brembo Spa Metodo per realizzare un disco freno e disco freno per freni a disco

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE669364C (de) * 1936-12-09 1938-12-23 Gustav Thome Steinsaege
US3205624A (en) * 1964-07-20 1965-09-14 Shirley I Weiss Annular cutting wheels
US3526999A (en) * 1968-08-08 1970-09-08 Leopold Jagers Cutting blades
GB1208408A (en) * 1968-11-29 1970-10-14 Hinmar Associates Inc Abrasive cutting tool and method
BE759534A (fr) * 1969-11-28 1971-04-30 Kayex Corp Element de decoupe abrasif
JPS4913981U (fr) * 1972-05-08 1974-02-05
JPS50119381A (fr) * 1974-03-06 1975-09-18

Also Published As

Publication number Publication date
DE3778832D1 (de) 1992-06-11
DE3639700A1 (de) 1988-06-01
US4850331A (en) 1989-07-25
EP0268152B1 (fr) 1992-05-06
JPS63200971A (ja) 1988-08-19
EP0268152A3 (en) 1990-01-17

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