EP0277521A2 - Source de radiation synchrotron avec fixation de ses bobines courbées - Google Patents
Source de radiation synchrotron avec fixation de ses bobines courbées Download PDFInfo
- Publication number
- EP0277521A2 EP0277521A2 EP88100522A EP88100522A EP0277521A2 EP 0277521 A2 EP0277521 A2 EP 0277521A2 EP 88100522 A EP88100522 A EP 88100522A EP 88100522 A EP88100522 A EP 88100522A EP 0277521 A2 EP0277521 A2 EP 0277521A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- synchrotron radiation
- radiation source
- source according
- synchrotron
- coil windings
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005469 synchrotron radiation Effects 0.000 title claims abstract description 37
- 238000004804 winding Methods 0.000 claims abstract description 34
- 239000002245 particle Substances 0.000 claims abstract description 17
- 230000005855 radiation Effects 0.000 claims abstract description 12
- 239000006100 radiation absorber Substances 0.000 claims abstract description 6
- 230000002093 peripheral effect Effects 0.000 claims abstract description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 230000001133 acceleration Effects 0.000 description 6
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 239000006096 absorbing agent Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 241001663154 Electron Species 0.000 description 1
- 238000001015 X-ray lithography Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/04—Magnet systems, e.g. undulators, wigglers; Energisation thereof
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
Definitions
- the invention relates to a synchrotron radiation source with at least one curved section of its particle path, in which are provided a magnetic device with superconducting coil windings which are located on both sides of the particle path surrounded by a beam guiding chamber and are arranged in at least one cryostat with a vacuum housing, - At least one radially or tangentially outwardly leading exit opening of the beam guide chamber for the synchronous radiation and - A device for mechanically fixing the superconducting coil windings.
- Such a synchrotron radiation source is known from DE-OS 35 30 446.
- a synchrotron In a synchrotron, as is known, electrically charged particles such as electrons or protons can be accelerated to high energy by circulating them on a curved path and repeatedly passing them through a high-frequency acceleration cavity of an acceleration path.
- the electrons In the case of an electron synchrotron, the electrons are introduced into the acceleration path at almost the speed of light; thus only their energy changes at a fixed orbital frequency.
- the synchrotron radiation ie the relative radiation emission of the elec Trons, which circulate almost at the speed of light and are held on a circular path by deflection in a magnetic field of a magnetic device, provide X-rays with parallel radiation characteristics and great intensity.
- This synchrotron radiation can advantageously be used for an X-ray lithography, which is suitable in the production of integrated circuits for producing structures that are smaller than 0.5 ⁇ m.
- an embodiment of an electron synchrotron of the so-called racetrack type which has a particle track with alternating straight and curved track sections.
- the radius of curvature is determined by the equilibrium between centrifugal force and Lorentz force in the magnetic field of dipole magnetic devices, which each contain curved superconducting coil windings on both sides of the particle path.
- the individual dipole coil windings are arranged together with a gradient coil in a cryostat, which also keeps the evacuated beam guiding chamber, in which the electrons circulate, at low temperature in the curved path section.
- the straight sections of the acceleration path are assigned an electron injector, with which the electrons are introduced into the acceleration path, and devices for electron acceleration.
- the beam guiding chamber is curved in each Each section of the particle track is provided with a slit-shaped exit opening for the synchrotron radiation.
- the Lorentz forces of the opposing superconducting coil windings which try to compress the slot-shaped outlet opening, must therefore be absorbed by the legs of a mechanical, C-shaped or U-shaped support structure. Since a change in the position of these superconducting coil windings under the action of the Lorentz forces with a corresponding field distortion must be practically ruled out, a correspondingly complex mechanical fixation of these windings is essential. However, this is extremely difficult in the slot area. For example, according to DE-PS 35 11 282, the forces compressing the slot are compensated for by particularly prestressed clamp and tensioning elements.
- the invention is therefore based on the object of improving the synchrotron radiation source of the type mentioned in such a way that a relatively simple fixation of the superconducting dipole coil windings of their magnetic devices is to be ensured in the exit region of the synchrotron radiation.
- the figure shows a cross section through the synchrotron radiation source according to the invention in the region of its particle path 2 curved by 180 ° with a corresponding magnet device 3.
- the radius of curvature is designated R.
- This magnetic device contains on both sides of the equatorial plane spanned by the particle path 2 and lying in the xy direction of a right-angled xyz coordinate system, a curved superconducting dipole coil winding 4 or 5 and possibly additional superconducting coil windings such as correction coil windings 4a and 5a.
- the superconducting windings are advantageously held in structurally identical upper and lower frame structures 7 and 8, which are joined together in the equatorial plane and thereby accommodate a beam guiding chamber 10 surrounding the particle path 2.
- the particle web 2 extends through an approximately rectangular aperture area 11, in which a dipole field B of sufficient quality is formed.
- the chamber 10 merges radially or tangentially outward into an equatorial outlet chamber 12 which is open on one side and has an outlet opening or opening 13 for the synchrotron radiation indicated by an arrow 14.
- the exit chamber with a vertical, i.e. Extension a pointing in the z direction can in particular be slit-shaped, the corresponding slit being able to make up the entire 180 ° arc of the curved particle path section. According to the illustrated embodiment, such an exit chamber is assumed.
- the individual superconducting dipole coil windings 4 and 5 are located in azimuth-rotating coil bodies 16, which are fitted into an upper or lower frame piece 17 or 18 of the respective frame structure 7 or 8 and in the z direction perpendicular to the equatorial xy plane with screws 19 being held.
- the winding structure can advantageously take place from the respective slot base of the coil body in the direction of the equatorial plane and in the opposite direction.
- a graduated bracket part 21 or 22 secures the exact distances between the respective winding edges to the equatorial plane on the one hand and on the other hand increases the rigidity of the entire construction with regard to the radially directed Lorentz forces by means of a positive connection with the coil formers 16 and the frame pieces 17 and 18.
- the clamp parts 21 and 22 can also compress the individual windings with the aid of screws 23 and 24 and thus conductor movements during the operation of the magnet device 3, which lead to a premature, undesirable transition of the superconducting material into the normal conducting state, ie to a so-called quenching of the windings can prevent.
- pressure strips 37 on the respective slot base also serve, which are to be pressed against the respective winding parts by means of screws 38.
- the frame pieces 17 and 18 of the frame structures 7 and 8 are fixed with the aid of dowel pins 25 and screws 26 on a respective upper or lower plate element 28 or 29 in grooves milled there. This ensures a very precise positioning of the individual superconducting coil windings 4, 5 and optionally 4a, 5a relative to the particle path 2.
- the non-positive assembly of the upper and lower frame structures 7 and 8 takes place in the area of direct mutual vertical force support with the aid of screws 31 and threaded rods 32.
- the upper and lower plate elements 28 and 29 of the frame structures 7 and 8 are clamped against ring-like, force-transmitting distributor pieces 34 and 35 with screws 36.
- the slot-like outlet chamber 12 extends with its outlet opening 13 to the outside between the mutually facing parts of these distributor pieces 34 and 35.
- the mutual distance and a force support between the distributor pieces 34 and 35 and thus also between the coil windings is ensured via at least one, in particular columnar, support element 40.
- this support element is to be located radially further outside in the insulating vacuum of a cryostat, not shown in the figure, than the mouth of the outlet opening 13. Since the distributor pieces 34 and 35 in the cryostat represent parts of a cold helium housing 42 for receiving liquid helium cooling the superconducting coil windings, the support element 40 running between them is also at this temperature.
- the force-transmitting distributor pieces 34 and 35 and the at least one Support element 40 designed mechanical fixing device is consequently to ensure a relatively simple and secure support and support of the superconducting coil windings lying on both sides of the equatorial plane.
- Vertical Lorentz forces of the windings can be introduced into the respective upper and lower plate elements 28 and 29 of the corresponding frame structures 7 and 8 via threaded rods 44.
- the vertical forces are absorbed in short ways via the at least one cold support element 40 located on the outside.
- a noticeable hindrance of the synchrotron radiation 14 emerging from the outlet opening 13 does not have to be accepted, since there is only a relatively small space requirement for sufficient support via the one support element 40 or a small number of such support elements.
- the power part of the synchrotron radiation to be dissipated in this way is therefore only a fraction of the total radiation.
- the portion of the synchrotron radiation 14 striking the at least one support element 40 is advantageously intercepted by a radiation absorber 46, which is expediently cooled.
- the preferred cryogenic refrigerant is liquid nitrogen, which is passed through a corresponding cooling channel 47 of the absorber.
- the absorber can surround the support element 40 in a ring shape.
- a radiation-absorbing shield wall 48 On its side facing the synchrotron radiation, it has a radiation-absorbing shield wall 48, which advantageously consists of a good heat-conducting material such as e.g. Copper is executed.
- the design according to the invention ensures the mechanical fixation device tion a relatively small radial span w on the two plate elements 28 and 29 of the frame structures 7 and 8. This has the consequence that only correspondingly small plate thicknesses of these parts are required and thus the overall height of the magnetic device 3 is limited.
- the mass of the magnetic device to be cooled is advantageously also to be kept correspondingly small.
- Another advantage of this construction is the possibility of attaching the suspension and positioning elements of the magnetic device (not shown in the figure) directly to the distribution pieces 34 and 35 within a vacuum housing (also not shown) and thus in close proximity to the superconducting coil windings. This brings a correspondingly high positioning accuracy of the windings to the particle path and allows the use of thin housing walls in the top and bottom area of the helium housing 42.
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Particle Accelerators (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3702388 | 1987-01-28 | ||
| DE3702388 | 1987-01-28 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP0277521A2 true EP0277521A2 (fr) | 1988-08-10 |
| EP0277521A3 EP0277521A3 (en) | 1989-04-26 |
| EP0277521B1 EP0277521B1 (fr) | 1991-11-06 |
Family
ID=6319640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP88100522A Expired - Lifetime EP0277521B1 (fr) | 1987-01-28 | 1988-01-15 | Source de radiation synchrotron avec fixation de ses bobines courbées |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4843333A (fr) |
| EP (1) | EP0277521B1 (fr) |
| JP (1) | JPH0711998B2 (fr) |
| DE (1) | DE3865977D1 (fr) |
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| US5341104A (en) * | 1990-08-06 | 1994-08-23 | Siemens Aktiengesellschaft | Synchrotron radiation source |
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| US9681531B2 (en) | 2012-09-28 | 2017-06-13 | Mevion Medical Systems, Inc. | Control system for a particle accelerator |
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| JPH02138900U (fr) * | 1989-04-25 | 1990-11-20 | ||
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| CN115397087B (zh) * | 2022-10-27 | 2023-03-14 | 合肥中科离子医学技术装备有限公司 | 线圈调节装置及回旋加速器 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA966893A (en) * | 1973-06-19 | 1975-04-29 | Her Majesty In Right Of Canada As Represented By Atomic Energy Of Canada Limited | Superconducting cyclotron |
| DE3148100A1 (de) * | 1981-12-04 | 1983-06-09 | Uwe Hanno Dr. 8050 Freising Trinks | "synchrotron-roentgenstrahlungsquelle" |
| US4641104A (en) * | 1984-04-26 | 1987-02-03 | Board Of Trustees Operating Michigan State University | Superconducting medical cyclotron |
| GB2165988B (en) * | 1984-08-29 | 1988-08-24 | Oxford Instr Ltd | Improvements in devices for accelerating electrons |
| DE3511282C1 (de) * | 1985-03-28 | 1986-08-21 | Brown, Boveri & Cie Ag, 6800 Mannheim | Supraleitendes Magnetsystem fuer Teilchenbeschleuniger einer Synchrotron-Strahlungsquelle |
| EP0208163B1 (fr) * | 1985-06-24 | 1989-01-04 | Siemens Aktiengesellschaft | Dispositif à champ magnétique pour un appareil d'accélération et/ou de stockage de particules chargées |
| DE3704442A1 (de) * | 1986-02-12 | 1987-08-13 | Mitsubishi Electric Corp | Ladungstraegerstrahlvorrichtung |
| DE3703938A1 (de) * | 1986-02-12 | 1987-09-10 | Mitsubishi Electric Corp | Teilchenbeschleuniger |
| US4808941A (en) * | 1986-10-29 | 1989-02-28 | Siemens Aktiengesellschaft | Synchrotron with radiation absorber |
-
1988
- 1988-01-15 DE DE8888100522T patent/DE3865977D1/de not_active Expired - Lifetime
- 1988-01-15 EP EP88100522A patent/EP0277521B1/fr not_active Expired - Lifetime
- 1988-01-19 US US07/145,229 patent/US4843333A/en not_active Expired - Fee Related
- 1988-01-25 JP JP63015720A patent/JPH0711998B2/ja not_active Expired - Lifetime
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| US5341104A (en) * | 1990-08-06 | 1994-08-23 | Siemens Aktiengesellschaft | Synchrotron radiation source |
| USRE48047E1 (en) | 2004-07-21 | 2020-06-09 | Mevion Medical Systems, Inc. | Programmable radio frequency waveform generator for a synchrocyclotron |
| US9925395B2 (en) | 2005-11-18 | 2018-03-27 | Mevion Medical Systems, Inc. | Inner gantry |
| US10279199B2 (en) | 2005-11-18 | 2019-05-07 | Mevion Medical Systems, Inc. | Inner gantry |
| US10722735B2 (en) | 2005-11-18 | 2020-07-28 | Mevion Medical Systems, Inc. | Inner gantry |
| USRE48317E1 (en) | 2007-11-30 | 2020-11-17 | Mevion Medical Systems, Inc. | Interrupted particle source |
| US10155124B2 (en) | 2012-09-28 | 2018-12-18 | Mevion Medical Systems, Inc. | Controlling particle therapy |
| US9681531B2 (en) | 2012-09-28 | 2017-06-13 | Mevion Medical Systems, Inc. | Control system for a particle accelerator |
| US9723705B2 (en) | 2012-09-28 | 2017-08-01 | Mevion Medical Systems, Inc. | Controlling intensity of a particle beam |
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| US10254739B2 (en) | 2012-09-28 | 2019-04-09 | Mevion Medical Systems, Inc. | Coil positioning system |
| US10368429B2 (en) | 2012-09-28 | 2019-07-30 | Mevion Medical Systems, Inc. | Magnetic field regenerator |
| US9730308B2 (en) | 2013-06-12 | 2017-08-08 | Mevion Medical Systems, Inc. | Particle accelerator that produces charged particles having variable energies |
| US10258810B2 (en) | 2013-09-27 | 2019-04-16 | Mevion Medical Systems, Inc. | Particle beam scanning |
| US10456591B2 (en) | 2013-09-27 | 2019-10-29 | Mevion Medical Systems, Inc. | Particle beam scanning |
| US9962560B2 (en) | 2013-12-20 | 2018-05-08 | Mevion Medical Systems, Inc. | Collimator and energy degrader |
| US10675487B2 (en) | 2013-12-20 | 2020-06-09 | Mevion Medical Systems, Inc. | Energy degrader enabling high-speed energy switching |
| US10434331B2 (en) | 2014-02-20 | 2019-10-08 | Mevion Medical Systems, Inc. | Scanning system |
| US11717700B2 (en) | 2014-02-20 | 2023-08-08 | Mevion Medical Systems, Inc. | Scanning system |
| US9661736B2 (en) | 2014-02-20 | 2017-05-23 | Mevion Medical Systems, Inc. | Scanning system for a particle therapy system |
| US9950194B2 (en) | 2014-09-09 | 2018-04-24 | Mevion Medical Systems, Inc. | Patient positioning system |
| US10646728B2 (en) | 2015-11-10 | 2020-05-12 | Mevion Medical Systems, Inc. | Adaptive aperture |
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| US11213697B2 (en) | 2015-11-10 | 2022-01-04 | Mevion Medical Systems, Inc. | Adaptive aperture |
| US11786754B2 (en) | 2015-11-10 | 2023-10-17 | Mevion Medical Systems, Inc. | Adaptive aperture |
| US12150235B2 (en) | 2016-07-08 | 2024-11-19 | Mevion Medical Systems, Inc. | Treatment planning |
| US10925147B2 (en) | 2016-07-08 | 2021-02-16 | Mevion Medical Systems, Inc. | Treatment planning |
| US11103730B2 (en) | 2017-02-23 | 2021-08-31 | Mevion Medical Systems, Inc. | Automated treatment in particle therapy |
| US10653892B2 (en) | 2017-06-30 | 2020-05-19 | Mevion Medical Systems, Inc. | Configurable collimator controlled using linear motors |
| US11717703B2 (en) | 2019-03-08 | 2023-08-08 | Mevion Medical Systems, Inc. | Delivery of radiation by column and generating a treatment plan therefor |
| US11311746B2 (en) | 2019-03-08 | 2022-04-26 | Mevion Medical Systems, Inc. | Collimator and energy degrader for a particle therapy system |
| US11291861B2 (en) | 2019-03-08 | 2022-04-05 | Mevion Medical Systems, Inc. | Delivery of radiation by column and generating a treatment plan therefor |
| US12161885B2 (en) | 2019-03-08 | 2024-12-10 | Mevion Medical Systems, Inc. | Delivery of radiation by column and generating a treatment plan therefor |
| US12168147B2 (en) | 2019-03-08 | 2024-12-17 | Mevion Medical Systems, Inc. | Collimator and energy degrader for a particle therapy system |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63200500A (ja) | 1988-08-18 |
| JPH0711998B2 (ja) | 1995-02-08 |
| EP0277521B1 (fr) | 1991-11-06 |
| EP0277521A3 (en) | 1989-04-26 |
| DE3865977D1 (de) | 1991-12-12 |
| US4843333A (en) | 1989-06-27 |
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