EP0280984A1 - Rotationsvakuumpumpe - Google Patents

Rotationsvakuumpumpe Download PDF

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Publication number
EP0280984A1
EP0280984A1 EP88102560A EP88102560A EP0280984A1 EP 0280984 A1 EP0280984 A1 EP 0280984A1 EP 88102560 A EP88102560 A EP 88102560A EP 88102560 A EP88102560 A EP 88102560A EP 0280984 A1 EP0280984 A1 EP 0280984A1
Authority
EP
European Patent Office
Prior art keywords
stator
rotor
fins
vacuum pump
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP88102560A
Other languages
English (en)
French (fr)
Other versions
EP0280984B1 (de
Inventor
Claude Saulgeot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Nokia Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA, Nokia Inc filed Critical Alcatel CIT SA
Priority to AT88102560T priority Critical patent/ATE62531T1/de
Publication of EP0280984A1 publication Critical patent/EP0280984A1/de
Application granted granted Critical
Publication of EP0280984B1 publication Critical patent/EP0280984B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F04D29/526—Details of the casing section radially opposing blade tips
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps

Definitions

  • the present invention relates to a rotary vacuum pump comprising a stator and a rotor, the rotor being driven in rotation inside the stator and the stator comprising a suction inlet and a discharge outlet.
  • Such pumps for example molecular or turbomolecular pumps which maintain pressures between 1 mb and 10 ⁇ 10 mb, rotate at very high speeds and the rotor support bearings, as well as the air gap of the electric drive motor and the dynamic seal separating the active part of the pump, the part containing the motor and the bearings can thus be affected by the suction of physical particles of very small dimensions which can in the long run deteriorate these organs.
  • the present invention aims to overcome these drawbacks and relates to a vacuum pump, for example molecular or turbomolecular as defined above, characterized in that the rotor carries, suction side, at least one wheel provided with fins inclined so as to project radially any solid particles aspirated towards an annular stator collecting tank having a circular opening opening into the cavity of the stator and located in the plane of projection of said particles by said fins.
  • the turbomolecular pump shown comprises a stator 1 and a rotor 2 mounted in the stator and supported in rotation by bearings 3 and 4. It is driven in rotation by an electric motor 5.
  • the stator 1 is divided into two parts, the first part of which comprises a stator cavity 6 provided with a plurality of stages of fixed fins 7 and the second part of which comprises a recess 8 in which the bearings 3, 4 and the motor are located. 5.
  • the rotor 2 Inside the stator cavity 6, the rotor 2 carries a series of rotor finned discs 10 alternating with the stages of fixed stator fins 7.
  • the stator 1 further comprises a suction inlet 11 and a discharge outlet orifice 12.
  • the rotor 1 in order to avoid sucking solid material particles, is provided, on the suction side upstream of the finned discs 10, with a wheel 13 provided with inclined fins 14. Thanks to these fins 14 , the particles are projected radially by centrifugal force and are collected in an annular collecting tank 15 of the stator 1 comprising a circular opening 16 which opens into the stator cavity 6 at the plane of projection of the particles by the fins.
  • a wheel 13 has been placed, there could possibly be several superimposed.
  • the fins 14 can be inclined at a much greater angle than the fins of the suction stages 10.
  • the wheel 13 with fins 14 can be fixed at a variable distance of the first compression stage.
  • the inclination of the fins 14 also depends on these parameters.
  • the volume of the collecting tank 15 may be such that there is at most to empty it only once a year.
  • An indicator 17 makes it possible to assess the filling level of the collector 15.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Electrophonic Musical Instruments (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)
EP88102560A 1987-02-25 1988-02-22 Rotationsvakuumpumpe Expired - Lifetime EP0280984B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT88102560T ATE62531T1 (de) 1987-02-25 1988-02-22 Rotationsvakuumpumpe.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8702490 1987-02-25
FR8702490A FR2611819B1 (fr) 1987-02-25 1987-02-25 Pompe a vide, rotative

Publications (2)

Publication Number Publication Date
EP0280984A1 true EP0280984A1 (de) 1988-09-07
EP0280984B1 EP0280984B1 (de) 1991-04-10

Family

ID=9348301

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88102560A Expired - Lifetime EP0280984B1 (de) 1987-02-25 1988-02-22 Rotationsvakuumpumpe

Country Status (8)

Country Link
US (1) US4808067A (de)
EP (1) EP0280984B1 (de)
JP (1) JPH081190B2 (de)
AT (1) ATE62531T1 (de)
DE (1) DE3862319D1 (de)
ES (1) ES2021770B3 (de)
FR (1) FR2611819B1 (de)
GR (1) GR3002083T3 (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0775829A1 (de) * 1992-04-29 1997-05-28 Varian Associates, Inc. Turbomolekular-Vakuumpumpen
WO1998027342A1 (en) * 1996-12-19 1998-06-25 Varian Associates, Inc. Turbomolecular vacuum pumps with low susceptibility to particulate buildup
WO2000046508A1 (en) * 1999-02-02 2000-08-10 Varian, Inc. Dual inlet vacuum pumps
EP1811176A4 (de) * 2004-06-03 2008-11-19 Edwards Japan Ltd Vakuumabführvorrichtung

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3814721A1 (de) * 1988-04-30 1989-11-09 Asea Brown Boveri Radialluefter mit integriertem schmutzabscheider
US5217357A (en) * 1992-09-10 1993-06-08 Welch Robert E Rotary vane pump with removable particulate collection chamber
JPH0886298A (ja) * 1994-09-19 1996-04-02 Hitachi Ltd ドライターボ真空ポンプ
FR2736103B1 (fr) * 1995-06-30 1997-08-08 Cit Alcatel Pompe turbomoleculaire
GB0013491D0 (en) * 2000-06-02 2000-07-26 Boc Group Plc Improved vacuum pump
US6821099B2 (en) * 2002-07-02 2004-11-23 Tilia International, Inc. Rotary pump
JP4679119B2 (ja) * 2004-11-10 2011-04-27 株式会社大阪真空機器製作所 ターボ分子ポンプの軸封防塵構造
US7927066B2 (en) * 2005-03-02 2011-04-19 Tokyo Electron Limited Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
JP4760424B2 (ja) * 2006-02-09 2011-08-31 株式会社島津製作所 ターボ分子ポンプ
DE112015004587T5 (de) * 2015-03-20 2017-12-21 Mitsubishi Heavy Industries, Ltd. Kompressorsystem, und Befestigungsstruktur für Zentrifugalabscheider
DE102020209612A1 (de) 2020-07-30 2022-02-03 Robert Bosch Gesellschaft mit beschränkter Haftung Flüssigkeitspumpe

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH132105A (de) * 1927-12-17 1929-03-31 Kuendig B A Zentrifugal-Ventilatoranlage.
US1958145A (en) * 1932-05-23 1934-05-08 Jones William Anthony Fan
US3827482A (en) * 1972-12-21 1974-08-06 R Pope Radiator fan for earth movers
FR2310481A1 (fr) * 1975-05-06 1976-12-03 Rava Edoardo Perfectionnements aux pompes turbomoleculaires

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2732032A (en) * 1956-01-24 sandison
US2370778A (en) * 1943-05-24 1945-03-06 Pesco Products Co Booster pump
BE542540A (de) * 1954-11-05
US3066912A (en) * 1961-03-28 1962-12-04 Gen Electric Turbine erosion protective device
US3813854A (en) * 1972-07-07 1974-06-04 N Hortman Centrifugal separator having axial-flow vortex generator
DD109918A1 (de) * 1974-02-22 1974-11-20
JPS52147309A (en) * 1976-06-02 1977-12-07 Hitachi Zosen Corp Inlet casing of turbo machine
JPS5420207A (en) * 1977-07-15 1979-02-15 Mitsui Eng & Shipbuild Co Ltd Construction for preventing dust of axial flow turbine
CH633454A5 (de) * 1978-12-01 1982-12-15 Bbc Brown Boveri & Cie Staubabscheider zur abscheidung von staeuben aus stroemenden gasen.
JPS618240Y2 (de) * 1979-08-09 1986-03-13
FR2521650A1 (fr) * 1982-02-16 1983-08-19 Cit Alcatel Pompe rotative a vide eleve
JPS62107292A (ja) * 1985-11-01 1987-05-18 Hitachi Ltd 微小粒子除去機構付の真空ポンプ
JPS6321394A (ja) * 1986-07-15 1988-01-28 Hitachi Ltd 多段型オイルフリ−真空ポンプ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH132105A (de) * 1927-12-17 1929-03-31 Kuendig B A Zentrifugal-Ventilatoranlage.
US1958145A (en) * 1932-05-23 1934-05-08 Jones William Anthony Fan
US3827482A (en) * 1972-12-21 1974-08-06 R Pope Radiator fan for earth movers
FR2310481A1 (fr) * 1975-05-06 1976-12-03 Rava Edoardo Perfectionnements aux pompes turbomoleculaires

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0775829A1 (de) * 1992-04-29 1997-05-28 Varian Associates, Inc. Turbomolekular-Vakuumpumpen
WO1998027342A1 (en) * 1996-12-19 1998-06-25 Varian Associates, Inc. Turbomolecular vacuum pumps with low susceptibility to particulate buildup
WO2000046508A1 (en) * 1999-02-02 2000-08-10 Varian, Inc. Dual inlet vacuum pumps
US6193461B1 (en) 1999-02-02 2001-02-27 Varian Inc. Dual inlet vacuum pumps
EP1811176A4 (de) * 2004-06-03 2008-11-19 Edwards Japan Ltd Vakuumabführvorrichtung

Also Published As

Publication number Publication date
US4808067A (en) 1989-02-28
GR3002083T3 (en) 1992-12-30
ATE62531T1 (de) 1991-04-15
EP0280984B1 (de) 1991-04-10
ES2021770B3 (es) 1991-11-16
FR2611819B1 (fr) 1989-05-05
DE3862319D1 (de) 1991-05-16
JPH081190B2 (ja) 1996-01-10
JPS63227990A (ja) 1988-09-22
FR2611819A1 (fr) 1988-09-09

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