EP0389980A1 - Dispositif de rayonnement à haute puissance - Google Patents

Dispositif de rayonnement à haute puissance Download PDF

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Publication number
EP0389980A1
EP0389980A1 EP90105531A EP90105531A EP0389980A1 EP 0389980 A1 EP0389980 A1 EP 0389980A1 EP 90105531 A EP90105531 A EP 90105531A EP 90105531 A EP90105531 A EP 90105531A EP 0389980 A1 EP0389980 A1 EP 0389980A1
Authority
EP
European Patent Office
Prior art keywords
electrodes
radiator according
tube
power radiator
tubes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP90105531A
Other languages
German (de)
English (en)
Other versions
EP0389980B1 (fr
Inventor
Günter Dr. Mechtersheimer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Excelitas Noblelight GmbH
Original Assignee
ABB Asea Brown Boveri Ltd
Heraeus Noblelight GmbH
Asea Brown Boveri AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ABB Asea Brown Boveri Ltd, Heraeus Noblelight GmbH, Asea Brown Boveri AB filed Critical ABB Asea Brown Boveri Ltd
Publication of EP0389980A1 publication Critical patent/EP0389980A1/fr
Application granted granted Critical
Publication of EP0389980B1 publication Critical patent/EP0389980B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field

Definitions

  • the invention relates to a high-power radiator, in particular for ultraviolet light, with a discharge space filled with filling gas emitting radiation under discharge conditions, the wall of which is formed by a tubular dielectric which is provided with electrodes on its surface facing away from the discharge space, with a first one and second electrodes connected AC power source for feeding the discharge.
  • the invention relates to a state of the art, such as that derived from EP-A 054 111, US patent application 07/076 926 or EP patent application 88113593.3 from August 22, 1988 or US patent application 07 / 260,869 from October 21, 1988 or Swiss patent application 720/89 from February 27, 1989.
  • UV sources The industrial use of photochemical processes depends heavily on the availability of suitable UV sources.
  • the classic UV lamps deliver low to medium UV intensities at some discrete wavelengths, such as the low-pressure mercury lamps at 185 nm and especially at 254 nm.
  • Really high UV powers can only be obtained from high-pressure lamps (Xe, Hg), which then but distribute their radiation over a larger wavelength range.
  • the new excimer lasers have some new wavelengths for basic photochemical experiments are currently available. for cost reasons for an industrial process probably only suitable in exceptional cases.
  • the high-performance radiators mentioned are characterized by high efficiency, economical structure and enable the creation of large area radiators, with the restriction that large-area flat radiators require a rather large technical effort.
  • a not inconsiderable proportion of the radiation is not used due to the shadow effect of the inner electrode.
  • the object of the invention is to create a high-performance radiator, in particular for UV or VUV radiation, which is characterized in particular by high efficiency, is economical to manufacture and enables very large area radiators to be constructed.
  • the invention provides that the electrodes are designed as metal strips or layers which run in the longitudinal direction of the tube and are spatially spaced apart in the circumferential direction, one electrode with one pole and the other electrode with the other pole connected to the AC power source.
  • radiator elements designed in this way large-area radiators can be modularly constructed, in which any geometries can be composed of identical or similar discharge tubes, each of which is self-contained.
  • the individual elements are electrically contacted laterally on the outside of the tubes, so that light emission is hardly impeded.
  • the degree of utilization of the radiation generated can be improved by partial mirroring on the outside of the tubes.
  • the advantages of the invention are as follows: simple and inexpensive realization of the closed discharge volume is possible. Similar basic elements (tubes) for all geometries, large areas can be easily realized with the appropriate number of tubes. Good stability of the discharge volume when using relatively robust tubes with a small diameter. Due to the generally large number of self-contained tubes, the failure of individual elements (e.g. due to contamination of the gas or the quartz surface, leaks) is less critical.
  • the entire arrangement can cover a wide range of wavelengths by using tubes with different gas fillings. You only have to take the (quartz) quality for the individual tubes that is just necessary or optimal for the transmission of the generated radiation. Depending on the desired wavelength spectrum, this can lead to considerable savings in material costs.
  • the light is coupled out of the tubes at a point that is hardly affected by the discharge. No transparent electrodes are necessary.
  • pipes 1 are made of dielectric material, in particular glass or quartz, about half each in a casting compound 2 made of insulating material, e.g. Silicone rubber, embedded.
  • Each tube 1 is provided with two strip-shaped metallizations 3 and 4 running in the longitudinal direction of the tube and spaced apart from one another in the circumferential direction as electrodes. These consist e.g. made of soft aluminum and at the same time act as reflectors.
  • the metallizations 3, 4 lie entirely within the casting compound 2.
  • the electrical contact is made laterally on the outside of the tubes 1, e.g. by means of molded-in contact elements 5 (FIG. 2) which protrude beyond the tubes 1 in the longitudinal direction of the tube, the contact elements 5 of each electrode 3, 4 being located in each case on the opposite tube end.
  • Each module 6 on a tube 1 with electrodes 3, 4 as well as contact elements and casting compound is arranged close to one another packed on a carrier plate 7.
  • the carrier plate can be cooled directly or indirectly by a coolant which can be passed through cooling bores 8.
  • Another cooling option is the co-casting of cooling tubes 19 which touch the metallizations.
  • the individual radiators are fed from an alternating current source 9, the poles of which are alternately connected to the interconnected contact elements 5 on both pipe ends.
  • the tubes 1 are closed at both ends.
  • the interior of the tubes, the discharge space 10, is filled with a gas / gas mixture which emits radiation under discharge conditions.
  • the AC power source 9 basically corresponds to those used for feeding ozone generators. It typically provides an adjustable AC voltage in the order of magnitude of several 100 volts to 20,000 volts at frequencies in the Range of technical alternating current up to a few 1000 kHz - depending on the electrode geometry, pressure in the discharge space and composition of the filling gas.
  • the filling gas is e.g. Mercury, noble gas, noble gas-metal vapor mixture, noble gas-halogen mixture, optionally using an additional further noble gas, preferably Ar, He, Ne, as a buffer gas.
  • a substance / substance mixture according to the following table can be used: Filling gas radiation helium 60-100 nm neon 80 - 90 nm argon 107 - 165 nm Argon + fluorine 180-200 nm Argon + chlorine 165-190 nm Argon + krypton + chlorine 165-190, 200-240 nm xenon 160-190 nm nitrogen 337 - 415 nm krypton 124, 140-160 nm Krypton + fluorine 240 - 255 nm Krypton + chlorine 200-240 nm mercury 185, 254, 320-370, 390-420 nm selenium 196, 204, 206 nm deuterium 150-250 nm Xenon + fluorine 340 - 360 nm, 400 - 550 nm Xenon + chlorine 300-320 nm
  • a noble gas Ar, He, Kr, Ne, Xe
  • Hg A gas or vapor from F2, J2, Br2, Cl2 or a compound that splits off one or more atoms F, J, Br or Cl in the discharge
  • An inert gas Ar, He, Kr, Ne, Xe
  • Hg an inert gas
  • Ar, He, Kr, Ne, Xe an inert gas with Hg.
  • the electron energy distribution can be optimally adjusted by the thickness of the dielectrics and their properties, pressure and / or temperature in the discharge space.
  • FIG. 3 illustrates a variant with tubes 12 with a square cross section placed on one edge and embedded in casting compound 2 up to the adjacent edge.
  • the electrodes 13, 14 are not designed as strip-like metallizations, but rather as sheet-metal strips, which are also cast into the casting compound 2. This measure can of course also be taken in the arrangement according to FIG. 1.
  • cooling tubes 15, 16 are attached to the sides of the sheet metal strips 13, 14 facing away from the tubes 12, through which a coolant can be carried.
  • pipes 15, 16 made of metal can also take over the function of the electrodes 13, 14, and separate sheet metal strips 13, 14 are then unnecessary. In this way, the cooling of the radiator modules via the support plate 7, on which the modules 6 are fastened in close proximity to one another, can be omitted - but need not.
  • a further cooling option, which can also be used additionally, is to provide cooling channels running in the pipe length direction, for example by co-casting pipes 15a.
  • dielectric tubes 17 made of glass or quartz with a rectangular profile are embedded upright in the casting compound 2.
  • wires 18 which are cast tightly next to one another and run in the longitudinal direction of the pipe, and which are cast into the casting compound 2.
  • the modules 6 are electrically connected to one another and are connected to the AC power source 9 analogously to FIG. 2.
  • the support plate 7 can also be curved in one direction, e.g. Have a circular arc shape, or the modules are arranged on the inside or outside surface of a tube.
  • the tubes of the individual modules 6 can be filled with different gas fillings / gas pressure.

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Discharge Lamp (AREA)
EP90105531A 1989-03-29 1990-03-23 Dispositif de rayonnement à haute puissance Expired - Lifetime EP0389980B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH1140/89A CH677557A5 (fr) 1989-03-29 1989-03-29
CH1140/89 1989-03-29

Publications (2)

Publication Number Publication Date
EP0389980A1 true EP0389980A1 (fr) 1990-10-03
EP0389980B1 EP0389980B1 (fr) 1994-06-01

Family

ID=4203425

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90105531A Expired - Lifetime EP0389980B1 (fr) 1989-03-29 1990-03-23 Dispositif de rayonnement à haute puissance

Country Status (6)

Country Link
US (1) US5049777A (fr)
EP (1) EP0389980B1 (fr)
JP (1) JPH02288061A (fr)
AT (1) ATE106606T1 (fr)
CH (1) CH677557A5 (fr)
DE (1) DE59005866D1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0457745A3 (en) * 1990-05-17 1992-09-02 Potomac Photonics, Inc. Halogen-compatible high-frequency discharge apparatus
EP0518132A3 (fr) * 1991-05-31 1994-03-09 Mitsubishi Electric Corp
WO2002027761A1 (fr) * 2000-09-28 2002-04-04 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Lampe a decharge pour decharges delimitees dielectriquement avec elements d'appui places entre une plaque de fond et une plaque de couverture
EP1615257A3 (fr) * 2004-07-06 2007-12-26 General Electric Company Lampe a decharge a barriere dielectrique

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* Cited by examiner, † Cited by third party
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JP2577292Y2 (ja) * 1990-04-28 1998-07-23 日本電気ホームエレクトロニクス株式会社 希ガス放電灯
DE59009300D1 (de) * 1990-10-22 1995-07-27 Heraeus Noblelight Gmbh Hochleistungsstrahler.
EP0521553B1 (fr) * 1991-07-01 1996-04-24 Koninklijke Philips Electronics N.V. Lampe à décharge luminescente à haute pression
US5681380A (en) 1995-06-05 1997-10-28 Kimberly-Clark Worldwide, Inc. Ink for ink jet printers
US6017471A (en) 1993-08-05 2000-01-25 Kimberly-Clark Worldwide, Inc. Colorants and colorant modifiers
US5733693A (en) 1993-08-05 1998-03-31 Kimberly-Clark Worldwide, Inc. Method for improving the readability of data processing forms
US5645964A (en) 1993-08-05 1997-07-08 Kimberly-Clark Corporation Digital information recording media and method of using same
US6017661A (en) 1994-11-09 2000-01-25 Kimberly-Clark Corporation Temporary marking using photoerasable colorants
US5865471A (en) 1993-08-05 1999-02-02 Kimberly-Clark Worldwide, Inc. Photo-erasable data processing forms
US6211383B1 (en) 1993-08-05 2001-04-03 Kimberly-Clark Worldwide, Inc. Nohr-McDonald elimination reaction
US5773182A (en) 1993-08-05 1998-06-30 Kimberly-Clark Worldwide, Inc. Method of light stabilizing a colorant
US5721287A (en) 1993-08-05 1998-02-24 Kimberly-Clark Worldwide, Inc. Method of mutating a colorant by irradiation
US6071979A (en) 1994-06-30 2000-06-06 Kimberly-Clark Worldwide, Inc. Photoreactor composition method of generating a reactive species and applications therefor
US6242057B1 (en) 1994-06-30 2001-06-05 Kimberly-Clark Worldwide, Inc. Photoreactor composition and applications therefor
US5685754A (en) 1994-06-30 1997-11-11 Kimberly-Clark Corporation Method of generating a reactive species and polymer coating applications therefor
DE4430300C1 (de) * 1994-08-26 1995-12-21 Abb Research Ltd Excimerstrahler und dessen Verwendung
US6008268A (en) 1994-10-21 1999-12-28 Kimberly-Clark Worldwide, Inc. Photoreactor composition, method of generating a reactive species, and applications therefor
US5786132A (en) 1995-06-05 1998-07-28 Kimberly-Clark Corporation Pre-dyes, mutable dye compositions, and methods of developing a color
BR9608367A (pt) 1995-06-05 1998-08-18 Kimberly Clark Co Pré-corantes novos
JP2000506550A (ja) 1995-06-28 2000-05-30 キンバリー クラーク ワールドワイド インコーポレイテッド 新規な着色剤および着色剤用改質剤
US5855655A (en) 1996-03-29 1999-01-05 Kimberly-Clark Worldwide, Inc. Colorant stabilizers
US5782963A (en) 1996-03-29 1998-07-21 Kimberly-Clark Worldwide, Inc. Colorant stabilizers
ES2175168T3 (es) 1995-11-28 2002-11-16 Kimberly Clark Co Compuestos de colorantes estabilizados por la luz.
US6099628A (en) 1996-03-29 2000-08-08 Kimberly-Clark Worldwide, Inc. Colorant stabilizers
US5891229A (en) 1996-03-29 1999-04-06 Kimberly-Clark Worldwide, Inc. Colorant stabilizers
US6524379B2 (en) 1997-08-15 2003-02-25 Kimberly-Clark Worldwide, Inc. Colorants, colorant stabilizers, ink compositions, and improved methods of making the same
US5945790A (en) * 1997-11-17 1999-08-31 Schaefer; Raymond B. Surface discharge lamp
US6049086A (en) * 1998-02-12 2000-04-11 Quester Technology, Inc. Large area silent discharge excitation radiator
SK1552000A3 (en) 1998-06-03 2000-08-14 Kimberly Clark Co Novel photoinitiators and applications therefor
SK1542000A3 (en) 1998-06-03 2001-11-06 Kimberly Clark Co Neonanoplasts produced by microemulsion technology and inks for ink jet printing
JP2002520470A (ja) 1998-07-20 2002-07-09 キンバリー クラーク ワールドワイド インコーポレイテッド 改良されたインクジェットインク組成物
BR9914123B1 (pt) 1998-09-28 2010-11-30 fotoiniciadores e aplicações para os mesmos.
US6559599B1 (en) * 1998-11-17 2003-05-06 Corning Incorporated Internally channeled glass envelope with molded edge for affixing attachments
EP1144512B1 (fr) 1999-01-19 2003-04-23 Kimberly-Clark Worldwide, Inc. Nouveaux colorants,stabilisateurs de colorants, compositions d'encre, et leur procedes de preparation ameliores
US6331056B1 (en) 1999-02-25 2001-12-18 Kimberly-Clark Worldwide, Inc. Printing apparatus and applications therefor
US6294698B1 (en) 1999-04-16 2001-09-25 Kimberly-Clark Worldwide, Inc. Photoinitiators and applications therefor
US6368395B1 (en) 1999-05-24 2002-04-09 Kimberly-Clark Worldwide, Inc. Subphthalocyanine colorants, ink compositions, and method of making the same
US8734197B1 (en) * 2000-01-12 2014-05-27 Imaging Systems Technology, Inc. Manufacturing process for plasma-shell gas discharge device
DE10048186A1 (de) * 2000-09-28 2002-04-11 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Entladungslampe für dielektrisch behinderte Entladungen mit Anordnung von Stützelementen
JP2003045337A (ja) * 2001-07-31 2003-02-14 Fujitsu Ltd 表示管および表示装置
JP3929265B2 (ja) * 2001-07-31 2007-06-13 富士通株式会社 ガス放電管内への電子放出膜形成方法
DE10145648B4 (de) * 2001-09-15 2006-08-24 Arccure Technologies Gmbh Bestrahlungsvorrichtung mit veränderlichem Spektrum
JP3836025B2 (ja) * 2001-12-28 2006-10-18 富士通株式会社 ガス放電管を用いたカラー表示装置
US8736166B1 (en) * 2002-05-21 2014-05-27 Imaging Systems Technology, Inc. Plasma-shell gas discharge device
US7029637B2 (en) 2003-01-09 2006-04-18 H203, Inc. Apparatus for ozone production, employing line and grooved electrodes
US6872909B2 (en) * 2003-04-16 2005-03-29 Applied Science And Technology, Inc. Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel
JP2006286620A (ja) * 2005-03-09 2006-10-19 Ideal Star Inc 線状発光素子及び表示装置
WO2006097974A1 (fr) * 2005-03-11 2006-09-21 Shinoda Plasma Corporation Nappe de tubes a plasma
JPWO2007072565A1 (ja) * 2005-12-22 2009-05-28 篠田プラズマ株式会社 カラー表示装置
JP2014175294A (ja) * 2013-03-13 2014-09-22 Toppan Printing Co Ltd 発光管アレイ
US9722550B2 (en) 2014-04-22 2017-08-01 Hoon Ahn Power amplifying radiator (PAR)
JP6919753B1 (ja) * 2020-08-21 2021-08-18 ウシオ電機株式会社 紫外線照射装置

Citations (3)

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Publication number Priority date Publication date Assignee Title
US4038577A (en) * 1969-04-28 1977-07-26 Owens-Illinois, Inc. Gas discharge display device having offset electrodes
US4266167A (en) * 1979-11-09 1981-05-05 Gte Laboratories Incorporated Compact fluorescent light source and method of excitation thereof
EP0254111B1 (fr) * 1986-07-22 1992-01-02 BBC Brown Boveri AG Dispositif de rayonnement ultraviolet

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JPS61185857A (ja) * 1985-02-13 1986-08-19 Matsushita Electric Works Ltd 無電極放電灯
JPS62208540A (ja) * 1986-03-07 1987-09-12 Matsushita Electric Works Ltd 無電極放電灯
JPS6313257A (ja) * 1986-07-03 1988-01-20 Canon Inc 照明装置
JP2509621B2 (ja) * 1987-05-26 1996-06-26 ファナック株式会社 レ−ザ発振装置
JPS63314753A (ja) * 1987-06-17 1988-12-22 Matsushita Electric Works Ltd 無電極放電灯
CH675178A5 (fr) * 1987-10-23 1990-08-31 Bbc Brown Boveri & Cie

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4038577A (en) * 1969-04-28 1977-07-26 Owens-Illinois, Inc. Gas discharge display device having offset electrodes
US4266167A (en) * 1979-11-09 1981-05-05 Gte Laboratories Incorporated Compact fluorescent light source and method of excitation thereof
EP0254111B1 (fr) * 1986-07-22 1992-01-02 BBC Brown Boveri AG Dispositif de rayonnement ultraviolet

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0457745A3 (en) * 1990-05-17 1992-09-02 Potomac Photonics, Inc. Halogen-compatible high-frequency discharge apparatus
EP0518132A3 (fr) * 1991-05-31 1994-03-09 Mitsubishi Electric Corp
US5514934A (en) * 1991-05-31 1996-05-07 Mitsubishi Denki Kabushiki Kaisha Discharge lamp, image display device using the same and discharge lamp producing method
EP0766286A1 (fr) * 1991-05-31 1997-04-02 Mitsubishi Denki Kabushiki Kaisha Lampe à décharge et procédé de réalisation
WO2002027761A1 (fr) * 2000-09-28 2002-04-04 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Lampe a decharge pour decharges delimitees dielectriquement avec elements d'appui places entre une plaque de fond et une plaque de couverture
US6657392B2 (en) 2000-09-28 2003-12-02 Patent-Treuhand-Gesellschaft Fuer Elektrische Gluehlampen Mbh Discharge lamp for dielectrically impeded discharges comprising supporting elements between a bottom plate and a cover plate
EP1615257A3 (fr) * 2004-07-06 2007-12-26 General Electric Company Lampe a decharge a barriere dielectrique

Also Published As

Publication number Publication date
CH677557A5 (fr) 1991-05-31
EP0389980B1 (fr) 1994-06-01
JPH02288061A (ja) 1990-11-28
US5049777A (en) 1991-09-17
DE59005866D1 (de) 1994-07-07
ATE106606T1 (de) 1994-06-15

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