EP0401399B1 - Pompe à vide élevé à deux ou plusieurs étages - Google Patents

Pompe à vide élevé à deux ou plusieurs étages Download PDF

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Publication number
EP0401399B1
EP0401399B1 EP89110196A EP89110196A EP0401399B1 EP 0401399 B1 EP0401399 B1 EP 0401399B1 EP 89110196 A EP89110196 A EP 89110196A EP 89110196 A EP89110196 A EP 89110196A EP 0401399 B1 EP0401399 B1 EP 0401399B1
Authority
EP
European Patent Office
Prior art keywords
high vacuum
stage
vacuum stage
oil
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP89110196A
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German (de)
English (en)
Other versions
EP0401399A1 (fr
Inventor
Berthold Fischer
Peter Müller
Dieter Vorberg
Hanns-Peter Dr. Berges
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to EP89110196A priority Critical patent/EP0401399B1/fr
Priority to DE89110196T priority patent/DE58907121D1/de
Priority to US07/533,535 priority patent/US5066202A/en
Publication of EP0401399A1 publication Critical patent/EP0401399A1/fr
Application granted granted Critical
Publication of EP0401399B1 publication Critical patent/EP0401399B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0007—Injection of a fluid in the working chamber for sealing, cooling and lubricating
    • F04C29/0014—Injection of a fluid in the working chamber for sealing, cooling and lubricating with control systems for the injection of the fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/50—Pumps with means for introducing gas under pressure for ballasting

Definitions

  • the invention relates to a method for supplying oil to the scoop of the high-vacuum stage of a two- or multi-stage high-vacuum pump, in which there is a constant oil supply which is sufficient for the operation of the high-vacuum stage in the final pressure range, and in which a function of a differential pressure additional oil is let into the scoop.
  • the invention also relates to a device suitable for carrying out this method.
  • oil-lubricated vacuum pumps it is known and customary to introduce a defined amount of oil into the pumping chamber at the beginning of each compression process.
  • the oil has several functions: it is used to lubricate the components in contact. It is also said to keep the surfaces of the inner parts wetted to prevent corrosion. Furthermore, the oil flow is able to transport both impurities (mechanical, chemical) and heat, that is, to rinse the pump chamber or to cool the pump. Finally, a special purpose of the oil is to improve the seal between the suction side and the outlet side.
  • the amounts of oil required for these different tasks are different. The choice of the amount of oil to be introduced into the scoop before each compression process is therefore based on a compromise. Each of the tasks is to make the oil as good as possible meet, and under different operating conditions. It is already known that the oil requirement of a vacuum pump is different under different operating conditions. With high delivery rates, larger amounts of oil are required in the first stage than with low delivery rates.
  • a single-stage rotary pump for vacuum generation is known, which is equipped with a control device.
  • the additional oil supply is controlled in such a way that a large amount of additional oil is let into the scooping chamber at high pressure in the compression chamber.
  • Such a control of the oil supply cannot be used for the cooking vacuum stage of a two- or multi-stage vacuum pump, since it works imprecisely.
  • the pressure in the compression chamber of modern vacuum pumps not only depends on the delivery rate; a pressure build-up can also take place with lower delivery rates, e.g. if downstream oil filters are contaminated with dirt. In such a case, a lot of oil would flow into the scooping chamber even in the final pressure mode, which is not exactly desired.
  • a method of the type mentioned is known from DE-A-20 28 603.
  • the oil supply is based on a differential pressure which exists between the intermediate vacuum (pressure in the connecting channel between the two stages of a two-stage pump) and the pressure in the oil box (oil tank 58) of this pump.
  • the pressure in the oil box of a vacuum pump can fluctuate considerably.
  • exhaust filters it can be between 1 and 1.5 bar, depending on the degree of contamination.
  • the differential pressure which is to serve for the operation-dependent actuation of the oil supply valve thus depends on circumstances which - at least in relation to the amount of gas quantities conveyed by the pump - are operation-independent. Since the possible pressure fluctuations in the oil box are relatively high, it also fluctuates the switching point of the oil supply valve considerably, so that an exact, operation-dependent control of the oil supply is not possible.
  • the present invention has for its object to provide a method and a device of the type mentioned, with the help of an exact, operation-dependent control of the oil supply to the high vacuum stage of a two or more stage vacuum pump is possible.
  • this object is achieved in a method of the type mentioned at the outset in that additional oil is let into the scoop chamber when the difference in pressures in the suction region and in the outlet region of the high vacuum stage exceeds a certain value.
  • a valve to which control means are assigned, which operate as a function of the operating state of the high vacuum stage.
  • control means can be designed electrically and include sensors and an electronic control.
  • a valve is provided which is equipped with a membrane as a control element. The spaces on the two sides of the membrane are connected to the suction area and outlet area of the high vacuum stage.
  • the membrane can for example be connected to a plunger which actuates a valve mechanism. Valves of this type are inexpensive.
  • control limits can be set using the properties of the membrane (size, flexibility, etc.).
  • a particular advantage of the invention is that the adjustment of the oil supply to the various operating conditions is particularly sensitive because of the special control dependent on suction pressure. It is therefore possible to admit gas ballast into the high-vacuum stage without risk to the pump if there is a risk of condensation of the pumped gas in the high-vacuum stage.
  • the sensitive control device "recognizes" such an operation immediately and causes an increased oil supply, which is required for gas ballast operation.
  • the high vacuum stage is denoted by 2 and the forevacuum stage by 3.
  • a recipient to be evacuated is connected to the inlet 4 of the high vacuum stage 2 during operation.
  • the outlet 5 of the high vacuum stage 2 is connected via a line 6 to the inlet 7 of the fore vacuum stage 3.
  • the outlet of the forevacuum stage 3 is designated 8.
  • an oil pump 11 which conveys oil from the oil sump 12 via the line sections 13 to 16 to the pump stages 2 and 3.
  • the amount of oil supplied to the fore-vacuum stage 3 is constant and determined by the narrow point 17 switched on in the line 14.
  • a valve 18 is switched on in the line 15, 16 and operates in dependence on the control device 19, which is generally shown as a block.
  • the control device 19 is assigned pressure sensors 21, 22 which register the suction pressure (sensor 21) and the pressure in the outlet region of the high vacuum stage (intermediate vacuum) and feed them in the form of electrical signals to the control device 19 via the lines 23, 24.
  • the difference between these two pressure values is formed in the control device 19 and compared with a target value. In the case of a two-stage vacuum pump with a step ratio of 4: 1, this setpoint is, for example, between 10 and 30 mbar. If the measured pressure difference is above this value, it is necessary to supply the high vacuum stage with additional oil.
  • the control line 25 Valve 18 opened. As soon as the measured pressure difference falls below the target value, the valve 18 closes, so that the high vacuum stage 2 is only operated with economical lubrication. For this operating state, for example, the amount of oil that reaches the scooping area of the high vacuum stage 2 via the bearings of the rotor shaft can be sufficient.
  • valves 26, 27 are also provided which serve to admit gas ballast into the forevacuum stage 3 or high vacuum stage 2.
  • the inlet of gas ballast into the high vacuum stage 2 can be automated, also depending on the difference in the pressures in the suction area and in the outlet area of the high vacuum stage 2.
  • the valve 27 is connected to the control device 19 via the control line 28.
  • This solution is expedient if, for example, the value for the differential pressure at which the gas ballast valve 27 is to open can be determined on an application-specific basis. Regardless of whether the valve 27 is opened automatically or by hand in this way, the supply of the high vacuum stage 2 with additional oil via the valve 18 will automatically adapt to the operating conditions.
  • FIG. 2 shows an embodiment for a mechanical control according to the proposal of the invention.
  • the valve 18 for the supply of the additional oil and also the valve 27 for the gas ballast supply into the high vacuum stage 2 can be designed in this way.
  • a control principle as explained with reference to FIG. 1 (control device 19, sensors 21, 22), is implemented mechanically with the valve 18, 27 shown in FIG.
  • the valve shown in Figure 2 comprises a valve housing 31 which consists of the three parts 32, 33 and 34.
  • a membrane 35 is clamped between the housing parts 33 and 34.
  • the Membrane 35 separates the spaces 36 and 37, which are formed in the housing parts 33 and 34, respectively.
  • the bore 38 leading to the space 36 is connected to the suction area 4 of the high vacuum pump stage 2 (cf. FIG. 1).
  • the bore 39 which is connected to the outlet region of the high vacuum stage 2, that is to say to the line 6 having an intermediate vacuum (FIG. 1), opens into the interior 37.
  • the housing part 32 there is a chamber 41 to which the line 15 (FIG. 1) is connected. Oil is supplied to the chamber 41 from the oil pump 11 via the line 15, at a pressure which is approximately 1.5 to 1.8 bar in modern vacuum pumps. A channel 42, through which the line part 16 is connected, opens into the chamber 41 and passes through the housing part 33. This leads to high vacuum level 2.
  • the mouth 43 of the channel 42 in the chamber 41 is associated with a closure piece 44 which is held in position by the compression spring 45.
  • the mouth 43 and the closure piece 44 form the actual closure member of the valve 18, 27.
  • the pressure of the spring 45 is small compared to the pressure caused by the oil in the chamber 41.
  • a metal tongue can also be provided, which keeps the mouth 43 closed in its rest position.
  • the valve 18, 27 can also be designed as a piston valve, as is known per se from DE-AS 117 966.
  • the membrane 35 is equipped with a plunger 46. With a section 47, this plunger is guided tightly in the housing part 33, so that the space 36 and the channel 42 are separated from one another in a sufficiently tight manner.
  • the tappet section 48 passes through part of the channel 42 and lies against the closure piece 44.
  • the membrane 35 assumes the position shown in FIG. H. that the closure piece 44 keeps the mouth 43 closed. If the pressure in the space 37 exceeds the pressure in the space 36 by a certain value, which is dependent on the physical properties of the diaphragm 35, then the plunger 46 moves in the direction of the chamber 41 and thus the closure piece 44 is lifted off the mouth 43. Oil from the chamber 41 then passes through the channel 42 and the line 16 and reaches the high vacuum stage 2 as an auxiliary oil supply.
  • the space 36 above the largest part of the membrane 35 has only a small height which is adapted to a still permissible shape of the membrane 35.
  • the membrane 35 or a membrane support designated by 49 rests against the inner wall of the space 36.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Reciprocating Pumps (AREA)

Claims (10)

  1. Procédé pour l'amenée d'huile dans l'étage de bon vide (2) d'une pompe à vide élevé à deux ou plus de deux étages (1), dans lequel il est prévu une amenée d'huile constante qui suffit pour le fonctionnement de la pompe à vide élevé (2) dans la région de pression finale, et dans lequel, une quantité additionnelle d'huile est admise dans la chambre d'épuisement en fonction d'une pression différentielle, caractérisé en ce qu'une quantité d'huile additionnelle est admise lorsque la différence des pressions régnant dans la région d'aspiration (4) et dans la région de sortie (6) de l'étage de vide élevé (2) devient supérieure à une certaine valeur.
  2. Procédé selon la revendication 1, caractérisé en ce que ladite certaine valeur de la pression différentielle à laquelle se déclenche l'amenée d'huile additionnelle est d'environ 10 à 30 mbar.
  3. Procédé selon la revendication 1 ou 2, caractérisé en ce que un ballast de gaz est amené à l'étage de vide élevé (2) dans les conditions de fonctionnement dans lesquelles il existe un risque de condensation.
  4. Procédé selon la revendication 3, caractérisé en ce que le ballast de gaz est amené lorsque la différence des pressions dans la région d'aspiration (4) et dans la région de sortie (6) de l'étage à vide élevé (2) devient supérieure à une certaine valeur.
  5. Pompe à vide élevé à deux ou plus de deux étages, appropriée pour la mise en oeuvre du procédé selon une des revendications 1 a 4, possédant une alimentation en huile pour la chambre d'épuisement de l'étage à vide élevé (2), dans laquelle il est prévu une amenée d'huile constante qui suffit pour le fonctionnement de l'étage de vide élevé (2) dans la région de pression finale, et dans lequel une quantité d'huile supplémentaire est admise dans l'espace d'épuisement en fonction d'une pression différentielle, caractérisée en ce qu'elle comprend une soupape (18, 27) à laquelle sont associés des moyens de commande qui entrent en action en fonction de l'état de fonctionnement de l'étage de vide élevé (2), et ceci de telle manière qu'une quantité d'huile additionnelle soit admise lorsque la différence des pressions dans la région d'aspiration (4) et dans la région de sortie (6) de l'étage de vide élevé (2) devient supérieure à une certaine valeur.
  6. Pompe selon la revendication 5, caractérisée en ce que les moyens de commande comprennent des capteurs (21, 22) et une commande électronique (19).
  7. Pompe selon la revendication 5, caractérisée en ce que les moyens de commande sont une partie constitutive de la soupape (18, 27) qui est équipée d'une membrane (35) en tant qu'élément de commande.
  8. Pompe selon la revendication 5, caractérisé en ce que la soupape (18, 27) comprend un corps (31) qui est relié à la région d'aspiration (4) et à la région de sortie (6) de l'étage de vide élevé (2) de telle manière que ces conduites de raccordement débouchent dans les chambres (36, 37) séparées par la membrane (35).
  9. Pompe selon la revendication 8, caractérisée en ce que le corps (31) de la soupape est raccordé à une pompe à huile (11) et à la chambre d'épuisement de l'étage de vide élevé (2) par des conduites de raccordement (15, 16) et en ce que l'organe obturateur (43, 44) de la soupape (18, 27) sépare ces conduites de raccordement l'une de l'autre.
  10. Pompe selon la revendication 8 ou 9, caractérisée en ce que la membrane (35) est équipée d'un pous-soir (46) servant à l'actionnement de l'organe obturateur (43, 44).
EP89110196A 1989-06-06 1989-06-06 Pompe à vide élevé à deux ou plusieurs étages Expired - Lifetime EP0401399B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP89110196A EP0401399B1 (fr) 1989-06-06 1989-06-06 Pompe à vide élevé à deux ou plusieurs étages
DE89110196T DE58907121D1 (de) 1989-06-06 1989-06-06 Zwei- oder mehrstufige Hochvakuumpumpe.
US07/533,535 US5066202A (en) 1989-06-06 1990-06-05 Method and apparatus for delivering oil to a multi-stage pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP89110196A EP0401399B1 (fr) 1989-06-06 1989-06-06 Pompe à vide élevé à deux ou plusieurs étages

Publications (2)

Publication Number Publication Date
EP0401399A1 EP0401399A1 (fr) 1990-12-12
EP0401399B1 true EP0401399B1 (fr) 1994-03-02

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ID=8201466

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89110196A Expired - Lifetime EP0401399B1 (fr) 1989-06-06 1989-06-06 Pompe à vide élevé à deux ou plusieurs étages

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US (1) US5066202A (fr)
EP (1) EP0401399B1 (fr)
DE (1) DE58907121D1 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2530765B2 (ja) * 1990-08-31 1996-09-04 株式会社神戸製鋼所 油冷式圧縮機の運転方法
GB9223804D0 (en) * 1992-11-13 1993-01-06 Boc Group Plc Improvements in vacuum pumps
DE4325283A1 (de) * 1993-07-28 1995-02-02 Leybold Ag Betriebsabhängig steuerbares Ventilsystem für eine Vakuumpumpe
DE4325281A1 (de) * 1993-07-28 1995-02-02 Leybold Ag Vakuumpumpe mit einer Gasballasteinrichtung
DE4327583A1 (de) * 1993-08-17 1995-02-23 Leybold Ag Vakuumpumpe mit Ölabscheider
DE19962445A1 (de) * 1999-12-22 2001-06-28 Leybold Vakuum Gmbh Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung
US6695591B2 (en) * 2002-05-20 2004-02-24 Grimmer Industries, Inc. Multi-stage gas compressor system
DE10255792C5 (de) * 2002-11-28 2008-12-18 Vacuubrand Gmbh + Co Kg Verfahren zur Steuerung einer Vakuumpumpe sowie Vakuumpumpensystem
GB0413776D0 (en) * 2004-06-18 2004-07-21 Boc Group Plc Vacuum pump
DK2296962T3 (da) * 2008-03-10 2012-03-05 Burckhardt Compression Ag Indretning og fremgangsmåde til behandling af naturgas (LNG)
DE102013203268A1 (de) * 2013-02-27 2014-08-28 Bitzer Kühlmaschinenbau Gmbh Kältemittelverdichteranlage
IT201800021148A1 (it) * 2018-12-27 2020-06-27 D V P Vacuum Tech S P A Pompa ausiliaria volumetrica per la generazione del vuoto.

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE228603C (fr) *
US2779533A (en) * 1953-12-22 1957-01-29 Leybolds Nachfolger E High-vacuum rotary oil pumps
US3395856A (en) * 1966-12-30 1968-08-06 Caterpillar Tractor Co Air compressor oil control system
GB1303430A (fr) * 1969-06-12 1973-01-17
US4063855A (en) * 1976-05-03 1977-12-20 Fuller Company Compressor capacity and lubrication control system
DE2854741A1 (de) * 1978-12-19 1980-06-26 Dienes Werke Entlastungsventil fuer verdichter
US4383802A (en) * 1981-07-06 1983-05-17 Dunham-Bush, Inc. Oil equalization system for parallel connected compressors
DE3315748C2 (de) * 1983-04-30 1987-02-19 Westfalia Separator Ag, 4740 Oelde Öldosiervorrichtung für Vakuumpumpen von Melkanlagen
US4605357A (en) * 1984-06-18 1986-08-12 Ingersoll-Rand Company Lubrication system for a compressor
DE3706583A1 (de) * 1987-02-25 1988-09-08 Mannesmann Ag Verteilung der schmier- und kuehlfluessigkeit in schraubenverdichtern

Also Published As

Publication number Publication date
US5066202A (en) 1991-11-19
EP0401399A1 (fr) 1990-12-12
DE58907121D1 (de) 1994-04-07

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