EP0411346A3 - Precision grinding machine for lapping, precision grinding or polishing - Google Patents

Precision grinding machine for lapping, precision grinding or polishing Download PDF

Info

Publication number
EP0411346A3
EP0411346A3 EP19900113033 EP90113033A EP0411346A3 EP 0411346 A3 EP0411346 A3 EP 0411346A3 EP 19900113033 EP19900113033 EP 19900113033 EP 90113033 A EP90113033 A EP 90113033A EP 0411346 A3 EP0411346 A3 EP 0411346A3
Authority
EP
European Patent Office
Prior art keywords
precision grinding
lapping
polishing
grinding machine
machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19900113033
Other languages
English (en)
Other versions
EP0411346A2 (de
Inventor
Dieter Dr.-Ing. Simpfendoerfer
Alexander Dipl.-Ing. Hofsess
Klaus Biebesheimer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Diskus Werke Frankfurt am Main AG
Original Assignee
Diskus Werke Frankfurt am Main AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19893925274 external-priority patent/DE3925274A1/de
Priority claimed from DE8915458U external-priority patent/DE8915458U1/de
Application filed by Diskus Werke Frankfurt am Main AG filed Critical Diskus Werke Frankfurt am Main AG
Publication of EP0411346A2 publication Critical patent/EP0411346A2/de
Publication of EP0411346A3 publication Critical patent/EP0411346A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
EP19900113033 1989-07-31 1990-07-07 Precision grinding machine for lapping, precision grinding or polishing Withdrawn EP0411346A3 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE8915458U 1989-07-31
DE19893925274 DE3925274A1 (de) 1989-07-31 1989-07-31 Feinbearbeitungsmaschine zum laeppen, feinschleifen oder polieren
DE8915458U DE8915458U1 (de) 1989-07-31 1989-07-31 Feinbearbeitungsmaschine zum Läppen, Feinschleifen oder Polieren
DE3925274 1989-07-31

Publications (2)

Publication Number Publication Date
EP0411346A2 EP0411346A2 (de) 1991-02-06
EP0411346A3 true EP0411346A3 (en) 1991-04-10

Family

ID=25883567

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19900113033 Withdrawn EP0411346A3 (en) 1989-07-31 1990-07-07 Precision grinding machine for lapping, precision grinding or polishing

Country Status (2)

Country Link
US (1) US5197230A (de)
EP (1) EP0411346A3 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5329732A (en) 1992-06-15 1994-07-19 Speedfam Corporation Wafer polishing method and apparatus
US5733175A (en) 1994-04-25 1998-03-31 Leach; Michael A. Polishing a workpiece using equal velocity at all points overlapping a polisher
US5607341A (en) 1994-08-08 1997-03-04 Leach; Michael A. Method and structure for polishing a wafer during manufacture of integrated circuits
US5556322A (en) * 1995-09-05 1996-09-17 Sommer & Maca Industries, Inc. Pneumatic mechanism for the application of uniform pressure to a mechanically adjustable spindle
US5697832A (en) * 1995-10-18 1997-12-16 Cerion Technologies, Inc. Variable speed bi-directional planetary grinding or polishing apparatus
US5738568A (en) * 1996-10-04 1998-04-14 International Business Machines Corporation Flexible tilted wafer carrier
US5816892A (en) * 1997-02-06 1998-10-06 Cobra Machine Tool Co., Inc. Positioning control for combined milling machine and internally positioned grinding wheel
US5810648A (en) * 1997-03-05 1998-09-22 Hmt Technology Corporation Device for texturing a disc substrate
US5928067A (en) * 1997-10-14 1999-07-27 Beloit Technologies, Inc. Headbox apron finishing and lapping device
US6254463B1 (en) 1998-10-09 2001-07-03 International Business Machines Corporation Chemical planar head dampening system
JP2000127033A (ja) * 1998-10-27 2000-05-09 Speedfam-Ipec Co Ltd 研磨装置
KR100932741B1 (ko) * 2002-03-28 2009-12-21 신에쯔 한도타이 가부시키가이샤 웨이퍼의 양면연마장치 및 양면연마방법
US6875076B2 (en) 2002-06-17 2005-04-05 Accretech Usa, Inc. Polishing machine and method
IT1396287B1 (it) * 2009-09-28 2012-11-16 Biesse Spa Distributore in continuo
US20120003900A1 (en) * 2010-07-01 2012-01-05 Artisan Industries Inc. Apparatus and Method for Refinishing a Surface In-Situ
CN114888651B (zh) * 2022-04-25 2023-03-21 长春理工大学 一种飞轮盘半制品磨抛修复装置和修复方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH244291A (de) * 1943-11-27 1946-09-15 Ag Ryter Maschine zum Polieren der Stirnflächen von Werksteinen.
DE2442081A1 (de) * 1974-09-03 1976-03-18 Jmj Werkzeugmasch Gmbh Zweischeiben-laeppmaschine
DE2440978A1 (de) * 1974-08-27 1976-03-18 Jmj Werkzeugmaschinen Gmbh Verfahren und maschine zum plan-, planparallel- und aussenrundlaeppen
FR2564360A1 (fr) * 1984-05-21 1985-11-22 Crismatec Machine d'usinage double face et dispositif de transmission de courant et de fluide entre une structure tournante et une structure non tournante

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE218300C (de) *
US2973605A (en) * 1959-11-09 1961-03-07 Carman Lab Inc Lapping machine
DE1577322A1 (de) * 1966-11-26 1970-01-08 Deutsche Edelstahlwerke Ag Vorrichtung an Ein- oder Zweischeiben-Horizontallaeppmaschinen
JPS55144958A (en) * 1979-04-18 1980-11-12 Tsutomu Kimura Lapping machine
US4315383A (en) * 1980-05-13 1982-02-16 Spitfire Tool & Machine, Co. Inc. Inner gear drive for abrading machines
JPS63120077A (ja) * 1986-11-08 1988-05-24 Otani Reiji ロボツト装填・装出用ラツピング及びポリシングマシン駆動方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH244291A (de) * 1943-11-27 1946-09-15 Ag Ryter Maschine zum Polieren der Stirnflächen von Werksteinen.
DE2440978A1 (de) * 1974-08-27 1976-03-18 Jmj Werkzeugmaschinen Gmbh Verfahren und maschine zum plan-, planparallel- und aussenrundlaeppen
DE2442081A1 (de) * 1974-09-03 1976-03-18 Jmj Werkzeugmasch Gmbh Zweischeiben-laeppmaschine
FR2564360A1 (fr) * 1984-05-21 1985-11-22 Crismatec Machine d'usinage double face et dispositif de transmission de courant et de fluide entre une structure tournante et une structure non tournante

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 4, no. 96 (M-20)(578) 11 Juli 1980, & JP-A-55 54173 (NIPPON SHINKU GIJUTSU K.K.) 21 April 1980, *

Also Published As

Publication number Publication date
US5197230A (en) 1993-03-30
EP0411346A2 (de) 1991-02-06

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