EP0414736A1 - Agencement de pre-ionisation, notamment de pre-ionisation par rayons x, pour des lasers a gaz pompes par decharge, notamment des lasers excimer - Google Patents

Agencement de pre-ionisation, notamment de pre-ionisation par rayons x, pour des lasers a gaz pompes par decharge, notamment des lasers excimer

Info

Publication number
EP0414736A1
EP0414736A1 EP89905054A EP89905054A EP0414736A1 EP 0414736 A1 EP0414736 A1 EP 0414736A1 EP 89905054 A EP89905054 A EP 89905054A EP 89905054 A EP89905054 A EP 89905054A EP 0414736 A1 EP0414736 A1 EP 0414736A1
Authority
EP
European Patent Office
Prior art keywords
voltage
ionization
pulse transformer
pulse
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP89905054A
Other languages
German (de)
English (en)
Inventor
Dirk Friede
Willi Bette
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of EP0414736A1 publication Critical patent/EP0414736A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
    • H01S3/09713—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation

Definitions

  • Device for pre-ionization in particular for X-ray pre-ionization on discharge-pumped gas lasers, in particular excimer lasers
  • the invention relates to a device for pre-ionization, in particular for X-ray pre-ionization, on discharge-pumped gas lasers, in particular excimer lasers, with a pulse-generating network of the laser excitation circuit and with a high-voltage pulse transformer, which has a primary winding between a storage capacity and a high voltage switch in the pulse generating network of the laser excitation circuit is switched on.
  • the task of such a device is to obtain the pre-ionization high-voltage pulses, in particular for pre-ionization by means of an X-ray tube, in an effective, inexpensive manner.
  • the pulse transformer which is used to generate the pre-ionization high voltages, must be able to be inserted into the pulse-generating network without its function being disturbed; on the contrary, the overall function should be supported and a simple timing, i.e. the desired advance of the pre-ionization high-voltage pulse before the actual ignition of the laser glow discharge can be achieved.
  • the object is achieved in a generic device in that the high-voltage pulse transformer is a saturable inductor with at least one secondary winding, in which the high-voltage pulse is induced to control the pre-ionization device.
  • the high-voltage pulse transformer is a saturable inductor with at least one secondary winding, in which the high-voltage pulse is induced to control the pre-ionization device.
  • Advantageous further developments are specified in subclaims 2 to 6.
  • the advantages that can be achieved with the invention can be seen primarily in the fact that it is a saturable inductor, ie with a saturable core material.
  • high-voltage pulse transformer is a component which, on the one hand, leads the high-voltage gives impulses for the supply of laser X-ray preionization and on the other hand in saturated state becomes so low inductive that the function of the laser excitation circuit is not impaired.
  • the high-voltage switch of the laser excitation circuit is protected because it is during its
  • Closing does not have to carry the full current due to the initially high inductance of the primary winding of the HS pulse transformer.
  • circuit diagram according to FIG. 1 circuit diagram according to FIG. 1
  • Effective pre-ionization is of particular importance for the operation of discharge-pumped excimer lasers.
  • This can e.g. be formed as UV pre-ionization by auxiliary spark discharges or corona discharges in the vicinity of the laser discharge path or as X-ray pre-ionization, in which X-rays are radiated into the laser electrode interspace.
  • the X-ray tube is then expediently integrated into the laser head, the X-ray radiation e.g. enters the laser room through one of the laser electrodes.
  • the acceleration voltage for the X-ray tube of 50-100 kV should be generated with as little effort as possible for cost reasons.
  • FIG. 1 shows in simplified form the electrical circuit with which an excitation laser LK with laser electrodes E 1 , E 1 is excited via an LC inversion circuit.
  • C, and C 2 are capacitors
  • S is a switching element in the form of a high-voltage switch, simply called a switch, for example a spark gap or a thyratron. Both capacitors are charged in parallel from an external high voltage source.
  • the laser is turned on during the Charging process from the throttle L, short-circuited.
  • Lp is an inductor lying in series with switch S, which can be embodied by an equivalent inductor and / or a separate choke.
  • the invention relates to a device for Vorionisierun with a pulse transformer, which is also inserted into the laser excitation circuit, but the core material is saturable in contrast to the arrangements known from the literature.
  • a circuit according to the invention is shown in Figure 2.
  • the same parts as in FIG. 1 have the same reference numbers.
  • a saturable magnetic inductor in the form of a pulse transformer PT is provided which, in addition to its primary winding W, has at least one winding W 2 on the secondary side.
  • the high-voltage pulse for driving the pre-ionization device VE is induced in this.
  • the latter as shown schematically, includes an X-ray tube
  • Cathode K and brake anode A which is attached to the housing of the laser chamber LK in such a way that its X-ray radiation (indicated by arrows) shines into the laser discharge volume.
  • This X-ray tube is connected via lines 1 and 2 to the high-voltage X-rays
  • KM denotes the saturable core material
  • Lp the inductance of the saturable pulse transformer PT.
  • B in FIG. 2 also denotes a ground connection for the lower, side-side potential rail b, with a the upper high-voltage side potential rail ne.
  • the circuits according to FIG. 2 and FIGS. 4 to 6 also work if the potential is reversed.
  • the core of the pulse transformer is unsaturated (measures to achieve this, and other circuit variants are described below).
  • the primary winding W, of the pulse transformer PT thus has its maximum inductance L, so that due to the law of induction there is a secondary one at this time
  • Voltage pulse results, the amount of which can be influenced by the number of secondary windings and which is suitable for controlling the X-ray tube RR, which emits X-rays for pre-ionizing the laser gas. Because of the high inductance, only a relatively weak current flows and the voltage rise across the electrodes is slowed down. By choosing the core material and the geometric dimensions, the core can be saturated after a certain time, for example 50-100 ns. The inductance L of the primary winding W- ⁇ thus drops to a low residual value, so that the full current now flows in the inversion circuit and the voltage across the laser electrodes E, E 2 - as is necessary for the operation of excimer lasers - increases rapidly. At the same time, because of the greatly reduced inductance, no voltage is induced on the secondary side and the high-voltage pulse is thus terminated.
  • the primary winding W is formed by the current supply and return lines resulting from the geometric dimensions, see FIG. 3 with a thyratron Thy as a switch, and the high-voltage bushing D through a wall of the laser housing G, where the saturable core material KM is introduced in a ring shape into the normally unused space between the current-carrying parts.
  • the secondary winding W 2 which can consist of several turns, is placed around the core material KM and carried out at a suitable point between the current leads h.
  • Such a construction is extremely compact and uses the area around the current flow between the current conductors, which is always present, by introducing a core as the primary winding of a high-voltage pulse transformer.
  • the process described above assumes that the magnetic core material has little or no remanence.
  • the core would remain in the saturated state after the processes had run once.
  • the core would have to be reset, i. H. are brought into the unsaturated or the opposite saturated state.
  • This can be done by Application of an additional reset winding or by connecting the high voltage supply in front of the transformer (FIG. 4).
  • the charging current from the high-voltage supply HV flows in the opposite direction to the swinging process through the primary winding of the pulse transformer PT and thereby brings the core or the core material KM into the opposite saturated state.
  • the core After the switch is closed, the core must first change from the saturated to the unsaturated state before the process described above can take place. This allows the bipolar induction stroke of the
  • Kerns are exploited, and the high voltage pulse is also delayed.
  • the fill factor i.e. of the ratio of the core area to the area of the primary winding
  • FIG. 5 shows the so-called charge transfer circuit
  • Figure 6 shows the so-called inversion charge transfer circuit.
  • EP-B1-0 130 443 in particular in FIG. 5, the aforementioned two types of circuit together with an LC inversion circuit, as is the basis of FIG. 2 and FIG. 4 of the present application, are explained in more detail, so that they are not mentioned here can.
  • the point at which the pulse transformer is inserted is not defined in advance. It is essential that a significant voltage drop across the primary winding W is generated during the switching process. This also enables laser excitation circuits that are equipped with so-called magnetic switches (see, for example, magazine Appl. Phys. Lett. 40 (7) from April 1, 1982, pages 547, 548. The work published here by I. Silanski et al reads: "Electrical excitation of an XeCl laser using magnetic pulse compression" by applying a second winding to the core material with a saturable one Equip pulse transformer in the sense of this invention. Here, too, it is immaterial at which point of the circuit the magnetic switch designed as a pulse transformer is located.
  • switch can be used as the primary switching element S in the circuits described, e.g. Thyratrons, spark gaps, pseudo spark gaps and photoconductive switches.
  • Thyratrons e.g. Thyratrons, spark gaps, pseudo spark gaps and photoconductive switches.
  • the principle of operation of the saturable pulse transformer on which the invention is based only presupposes the presence of a switching operation, regardless of what causes it to be generated.
  • the core material can be insulated from the windings and the turns from one another by means of solid dielectrics. Given the high electric field strengths that occur, however, corona effects can also occur in carefully processed dielectrics, which can cause destruction of the pulse transformer. In addition, at high repetition rates and high average outputs, a solid dielectric makes it extremely difficult to remove inevitable heat loss from the magnetic core.
  • the pulse transformer can therefore be operated with a liquid dielectric (for example oil or fluorinated hydrocarbons).
  • the secondary windings are designed to be self-supporting, as described in German Offenlegungsschrift DE-Al-3529 915.
  • the insulating liquid enables the heat loss from the core, dielectric and windings to be easily removed, for example by convection or circulation.
  • FIG. 7 An exemplary embodiment of a saturable pulse transformer with self-supporting secondary winding 2 is shown in cross section in FIG. 7, the annular core KM of a conductor for the primary winding W having a relatively large cross section is permeated.
  • the preionization device VE which preferably has an X-ray tube RR, is only shown in detail in FIG. 2; in the remaining Figures 4 to 6 only the terminals 3, 4 are shown on the secondary side of the pulse transformer PT, to which the pre-ionization device can be connected.
  • preionization rods can also be used as the preionization device, which operate according to the principle of corona discharge and generate ultraviolet light within the laser chamber.
  • Auxiliary spark discharge paths are also suitable as the preionization device, by means of whose discharge sparks ultraviolet light can be generated.
  • the voltage pulses on the secondary side of the pulse transformer PT do not need to be as high as when operating an X-ray tube RR, which works, for example, with voltage pulses from 50 to 100 kV; voltage pulses of, for example, 25 to 30 kV are sufficient.
  • the transmission ratio W, / W 2 of the pulse transformer PT must be adapted accordingly.
  • Preionization devices which generate the required charge charge carrier density within the laser charge volume by generating ultraviolet light are described, for example, in DE-Al-30 35 702, DE-Al-30 35 730 and DE-Al-33 14 157, so that a detailed explanation can be dispensed with here. It should also be mentioned that in the inversion charge circuit (ITC circuit) according to FIG.
  • the capacitance C has been added, which is connected in parallel to the laser electrode path E- ⁇ -E 2 , whereby the capacitances C 1 , C 2 , C, are inserted into the pulse-generating network in the manner of the letter i, ie the two capacitances C 1 , C 2 , each located in a transverse branch, are high-voltage side due to the “longitudinal branch capacitance” C 2 and ground end connected to each other by the ground rail.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

Un agencement de pré-ionisation, notamment de pré-ionisation par rayons X, pour des lasers à gaz pompés par décharge, notamment des lasers excimer, est raccordé au réseau générateur d'impulsions d'un circuit excitateur d'un laser à gaz. Un transformateur (PT) d'impulsions de haute tension est connecté à un enroulement primaire (W1) entre une capacitance d'accumulation (C1) et un commutateur de haute tension (S) dans le réseau générateur d'impulsions. Ce transformateur d'impulsions (PT) transmet secondairement des impulsions de pré-ionisation à un agencement de pré-ionisation (VE), notamment un tube à rayons X (RR), ces impulsions précipitant le déclenchement de la décharge lumineuse du laser. A cet effet, le transformateur d'impulsions (PT) forme un inducteur magnétique saturable avec au moins un enroulement secondaire (W2). Lorsque le commutateur de haute tension (S) est fermé, l'enroulement primaire du transformateur d'impulsions (PT) non saturé atteinte son inductivité maximale, de façon à générer à ce moment, conformément à la loi d'induction, une impulsion secondaire de tension. Après un délai prédéterminé de 50 à 100 ns par exemple, le noyau est saturé, l'inductivité (Lp) de l'enroulement primaire diminue rapidement et le plein courant s'écoule dans le circuit d'inversion, entraînant l'accumulation de la haute tension dans son intégralité au niveau des électrodes du laser (E1, E2) qui déclenchent la décharge.
EP89905054A 1988-04-22 1989-04-24 Agencement de pre-ionisation, notamment de pre-ionisation par rayons x, pour des lasers a gaz pompes par decharge, notamment des lasers excimer Withdrawn EP0414736A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3813715 1988-04-22
DE3813715 1988-04-22

Publications (1)

Publication Number Publication Date
EP0414736A1 true EP0414736A1 (fr) 1991-03-06

Family

ID=6352714

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89905054A Withdrawn EP0414736A1 (fr) 1988-04-22 1989-04-24 Agencement de pre-ionisation, notamment de pre-ionisation par rayons x, pour des lasers a gaz pompes par decharge, notamment des lasers excimer

Country Status (4)

Country Link
US (1) US5138627A (fr)
EP (1) EP0414736A1 (fr)
JP (1) JPH03504550A (fr)
WO (1) WO1989010645A1 (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5268921A (en) * 1989-07-03 1993-12-07 Mclellan Edward J Multiple discharge gas laser apparatus
US5040184A (en) * 1990-06-04 1991-08-13 Raytheon Company Starter circuit for an RF laser
FR2672163A1 (fr) * 1991-01-30 1992-07-31 Commissariat Energie Atomique Source d'alimentation electrique pour laser.
US5377215A (en) * 1992-11-13 1994-12-27 Cymer Laser Technologies Excimer laser
WO1999037581A2 (fr) * 1998-01-22 1999-07-29 Moeny William M Systeme a haut rendement de traitement de gaz par decharge luminescente pour la production de peroxyde d'oxygene et autres traitements chimiques de gaz
US6650679B1 (en) 1999-02-10 2003-11-18 Lambda Physik Ag Preionization arrangement for gas laser
US6456643B1 (en) 1999-03-31 2002-09-24 Lambda Physik Ag Surface preionization for gas lasers
JP3892589B2 (ja) * 1998-07-14 2007-03-14 株式会社小松製作所 可飽和リアクトルおよびこれを用いたパルスレーザ用電源装置
US6757315B1 (en) 1999-02-10 2004-06-29 Lambda Physik Ag Corona preionization assembly for a gas laser
US6671302B2 (en) 2000-08-11 2003-12-30 Lambda Physik Ag Device for self-initiated UV pre-ionization of a repetitively pulsed gas laser
CN102706912A (zh) * 2012-06-21 2012-10-03 丹东奥龙射线仪器有限公司 X射线晶体定向仪高压发生器
CN109981082B (zh) * 2019-04-30 2023-09-12 中国工程物理研究院流体物理研究所 一种基于光导开关的核电磁脉冲模拟器脉冲源
CN111146678B (zh) * 2019-05-06 2021-04-23 南京瑞贻电子科技有限公司 大功率光纤激光器线性补偿的动态耦合控制装置及方法
CN113709957B (zh) * 2021-08-27 2022-04-01 泛华检测技术有限公司 一种小型高能x射线装置及方法

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CA1016641A (en) * 1975-02-28 1977-08-30 Michel Blanchard Driving circuit for double discharge grid tea co2 lasers
DE3314157A1 (de) * 1982-04-19 1983-12-08 Kraftwerk Union AG, 4330 Mülheim Anregungskreis fuer lasersysteme, insbesondere fuer te-hochenergielaser, mit einstellung der vorionisierung
DE3240372A1 (de) * 1982-11-02 1984-05-03 Kraftwerk Union AG, 4330 Mülheim Anregungssystem zur erzeugung einer schnellen, gepulsten hochspannungsentladung, insbesondere zur anregung eines hochleistungslasers
US4611327A (en) * 1983-11-25 1986-09-09 Amoco Corporation Gas transport laser system
DE3705165A1 (de) * 1986-02-18 1987-08-20 Mitsubishi Electric Corp Mit entladungserregung arbeitende laservorrichtung fuer kurze impulse
US4975921A (en) * 1989-03-29 1990-12-04 Lasertechnics, Inc. Integrated prepulse circuits for efficient excitation of gas lasers

Non-Patent Citations (1)

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Title
See references of WO8910645A1 *

Also Published As

Publication number Publication date
US5138627A (en) 1992-08-11
WO1989010645A1 (fr) 1989-11-02
JPH03504550A (ja) 1991-10-03

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