EP0459092A1 - Pompe à vide à deux étages et son procédé de construction - Google Patents

Pompe à vide à deux étages et son procédé de construction Download PDF

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Publication number
EP0459092A1
EP0459092A1 EP91103263A EP91103263A EP0459092A1 EP 0459092 A1 EP0459092 A1 EP 0459092A1 EP 91103263 A EP91103263 A EP 91103263A EP 91103263 A EP91103263 A EP 91103263A EP 0459092 A1 EP0459092 A1 EP 0459092A1
Authority
EP
European Patent Office
Prior art keywords
pump
stage
vacuum
fore
anchor system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP91103263A
Other languages
German (de)
English (en)
Other versions
EP0459092B1 (fr
Inventor
Lutz Arndt
Winfried Kaiser
Peter Müller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Publication of EP0459092A1 publication Critical patent/EP0459092A1/fr
Application granted granted Critical
Publication of EP0459092B1 publication Critical patent/EP0459092B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01CROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10Outer members for co-operation with rotary pistons; Casings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49229Prime mover or fluid pump making
    • Y10T29/49236Fluid pump or compressor making
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49229Prime mover or fluid pump making
    • Y10T29/49236Fluid pump or compressor making
    • Y10T29/49245Vane type or other rotary, e.g., fan

Definitions

  • the invention relates to a method for producing a pump ring for a two-stage vacuum pump with a one-piece rotor system with three sections, the end sections of which form the two pump stages and the middle section of which is an intermediate bearing, the diameters of the bearing section and of the rotor section forming the fore-vacuum stage being the same.
  • the invention also relates to a vacuum pump equipped with a pump ring produced in this way.
  • the present invention is based on the object of proposing a method for producing a pump ring of the type mentioned at the outset and a vacuum pump equipped with such a pump ring, in which the tolerances occurring in the pump are significantly reduced with inexpensive production.
  • this object is achieved in that, in order to form the pump ring in a substantially cylindrical workpiece from one end face, two bores are made in one tension, one of which forms the anchor system of the fore-vacuum stage and the bearing bore and the other the anchor system of the cooking vacuum stage, and that before or after the execution of these holes further holes are made to form the scoops.
  • the bores both anchor systems, the intermediate storage
  • the tolerances that may still occur are very small.
  • the holes for the scoops must be made in other tensions because of their eccentric position relative to the axis of the rotor system; tolerances that occur do not affect the concentricity of the rotor system and an exact anchor system, they can only cause fluctuations in the area of the anchor system to occur. Such fluctuations have no significant influence on the properties of the pump.
  • the two-stage vacuum pump 1 shown in the figures as an exemplary embodiment comprises the actual pump housing 2, the oil box 3 surrounding the pump housing, the drive motor 4 and the outer housing or the hood 5.
  • the pump housing 2 and the drive motor 4 are fastened to a shield 6 , which is supported by a base plate 7 on the floor.
  • Part of the pump housing 2 is the one-piece pump ring 8, the opening of which has three areas 11, 12, 13 with different designs.
  • the rotor system 14 with the sections 14a, 14b and 14c is also formed in one piece within the pump ring 8.
  • the two outer sections 14a and 14c are equipped with slide slots 15, 16 accessible from the end faces and form the anchor of the high vacuum or fore-vacuum stage.
  • the length and diameter of the middle section 14b of the rotor system 14 correspond to the middle area 12 of the opening of the pump ring 8 in such a way that this area has the function of a sliding bearing for the rotor system 14.
  • the slide of the HV stage is designated by 18.
  • the area 11 of the pump ring 8 forms, together with the front plate 19, the scooping space 21 of the fore-vacuum (VV) stage.
  • the slide of the VV stage is designated 22.
  • the inlet channel of the HV stage is designated 23.
  • the channel leading from the outlet of the HV stage to the inlet of the VV stage is only shown in FIG. 2 and designated by 24.
  • the outlet valve 26 is assigned to the outlet channel 25 (FIG. 2) of the VV stage.
  • the outlet valve 26 is designed as a check valve and takes over the vacuum protection of the recipient in the event of a pump failure.
  • the valve 26 is arranged in the upper region of the pump housing 2. It is located at the bottom of a recess 27 which forms an intermediate oil sump during the operation of the vacuum pump.
  • the inlet connector 31 of the vacuum pump shown is attached to the intermediate plate 6. It is connected to the inlet duct 23 of the HV stage via a bore 32 in the shield 6.
  • the outlet connector 33 is also provided on the shield 6. It is connected to the interior of the oil box 3 via a hole corresponding to the hole 32.
  • a dome 35 arranged on the front side of the oil box. Its central section 36 is transparent and serves to check the oil level in the oil box 3.
  • the dome 35 has an approximately semicircular cross section, the broad side of which faces the oil box 3. It extends over the entire height of the oil box 3, so that it can be equipped with the oil fill opening 37 and the oil drain opening 38.
  • the motor 4 is equipped with a blower 41 on its free end face.
  • the cooling air flow generated by this fan serves not only to cool the engine, but also to cool the oil box 3.
  • Both the motor housing and the oil box 3 are equipped with axially or horizontally running cooling fins 42 and 43, respectively.
  • the one-piece rotor system 14 is shown in dashed lines in the pump ring 8 according to FIG.
  • two holes are first made from the high-vacuum side (FIG. 5), the order being arbitrary.
  • a bore has the diameter corresponding to the bearing bore 12 and at the same time forms the anchor system 51 of the fore-vacuum stage.
  • the second bore made in the same voltage forms the armature system 52 of the high vacuum stage.
  • the bores 11, 13 can be made for the scoops 17, 21. Because of the eccentricities e 1 and e 2, the voltage must be changed anyway.
  • the holes 11 and 13 are made from the respective end faces.
  • FIG. 6 shows, for example, that when the bore 11 is made for the scooping chamber 21 of the fore-vacuum stage 11, 14a, tolerances (bore 11 and dashed bore 11 ') no longer influence the position of the anchor system 51 itself. Only the area with which the rotor 14a of the armature system rests is different.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP91103263A 1990-05-29 1991-03-05 Pompe à vide à deux étages et son procédé de construction Expired - Lifetime EP0459092B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4017192A DE4017192A1 (de) 1990-05-29 1990-05-29 Verfahren zur herstellung eines pumpenringes fuer eine zweistufige vakuumpumpe sowie mit einem derartigen pumpenring ausgeruestete vakuumpumpe
DE4017192 1990-05-29

Publications (2)

Publication Number Publication Date
EP0459092A1 true EP0459092A1 (fr) 1991-12-04
EP0459092B1 EP0459092B1 (fr) 1995-06-21

Family

ID=6407367

Family Applications (1)

Application Number Title Priority Date Filing Date
EP91103263A Expired - Lifetime EP0459092B1 (fr) 1990-05-29 1991-03-05 Pompe à vide à deux étages et son procédé de construction

Country Status (4)

Country Link
US (1) US5155908A (fr)
EP (1) EP0459092B1 (fr)
JP (1) JPH04231695A (fr)
DE (2) DE4017192A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995004221A1 (fr) * 1993-07-28 1995-02-09 Leybold Aktiengesellschaft Pompe a vide a palette a deux etages
EP0705980A1 (fr) * 1994-10-04 1996-04-10 Robert Bosch Gmbh Groupe de pompage hydraulique

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9311986U1 (de) * 1993-08-11 1993-10-14 Leybold Ag, 63450 Hanau Zweistufige Drehschiebervakuumpumpe
KR101541848B1 (ko) * 2012-11-12 2015-08-13 현대모비스 주식회사 인휠 모터 시스템

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB158831A (en) * 1920-02-03 1921-07-21 Irwin & Jones Ltd Improvements in or relating to rotary pumps or motors
US1692473A (en) * 1928-01-04 1928-11-20 Vincent S Clymer Air compressor
US2628014A (en) * 1950-08-17 1953-02-10 Max Raskin Multiple stage nonslip vacuum pump
US2949924A (en) * 1958-02-03 1960-08-23 Jr Arthur Melvin Cochran Fluid proportioning device

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2246272A (en) * 1940-08-04 1941-06-17 Davidson William Ward Rotary pump
CH420471A (de) * 1963-11-28 1966-09-15 Lab Pristroje Narodni Podnik Zweistufige Drehschieber-Ölluftpumpe
DE2354039A1 (de) * 1973-10-29 1975-05-07 Leybold Heraeus Gmbh & Co Kg Drehschieberpumpe
JPS5847275Y2 (ja) * 1977-11-19 1983-10-28 株式会社ボッシュオートモーティブ システム ベ−ン型圧縮機
DE2920626C2 (de) * 1979-05-22 1987-02-05 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur Herstellung eines Rotors für eine Drehschiebervakuumpumpe
IT1182640B (it) * 1985-10-29 1987-10-05 Aspera Spa Procedimento e dispositivo per il montaggio di compressori rotativi particolarmente per gruppi motocompressori di macchine frigorifere ed affini
JPH081182B2 (ja) * 1987-02-19 1996-01-10 株式会社東芝 2シリンダロ−タリコンプレツサ
EP0290662B1 (fr) * 1987-05-15 1993-03-31 Leybold Aktiengesellschaft Pompe à vide à déplacement positif avec deux arbres
US4746270A (en) * 1987-07-20 1988-05-24 Deco-Grand, Inc. Engine water pump assembly and method of making same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB158831A (en) * 1920-02-03 1921-07-21 Irwin & Jones Ltd Improvements in or relating to rotary pumps or motors
US1692473A (en) * 1928-01-04 1928-11-20 Vincent S Clymer Air compressor
US2628014A (en) * 1950-08-17 1953-02-10 Max Raskin Multiple stage nonslip vacuum pump
US2949924A (en) * 1958-02-03 1960-08-23 Jr Arthur Melvin Cochran Fluid proportioning device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995004221A1 (fr) * 1993-07-28 1995-02-09 Leybold Aktiengesellschaft Pompe a vide a palette a deux etages
US5879138A (en) * 1993-07-28 1999-03-09 Balzers Und Leybold Deutschland Holding Ag Two-stage rotary vane vacuum pump
KR100335037B1 (ko) * 1993-07-28 2002-11-27 라이볼트 악티엔게젤샤프트 2단슬라이드베인진공펌프
EP0705980A1 (fr) * 1994-10-04 1996-04-10 Robert Bosch Gmbh Groupe de pompage hydraulique

Also Published As

Publication number Publication date
US5155908A (en) 1992-10-20
EP0459092B1 (fr) 1995-06-21
DE4017192A1 (de) 1991-12-05
DE59105766D1 (de) 1995-07-27
JPH04231695A (ja) 1992-08-20

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