EP0460357A3 - Device for optical measurement of pressure differences - Google Patents

Device for optical measurement of pressure differences Download PDF

Info

Publication number
EP0460357A3
EP0460357A3 EP19910102912 EP91102912A EP0460357A3 EP 0460357 A3 EP0460357 A3 EP 0460357A3 EP 19910102912 EP19910102912 EP 19910102912 EP 91102912 A EP91102912 A EP 91102912A EP 0460357 A3 EP0460357 A3 EP 0460357A3
Authority
EP
European Patent Office
Prior art keywords
optical measurement
pressure differences
differences
pressure
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19910102912
Other languages
English (en)
Other versions
EP0460357A2 (de
Inventor
Haelg Beat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electrowatt Technology Innovation AG
Original Assignee
Landis and Gyr Betriebs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Landis and Gyr Betriebs AG filed Critical Landis and Gyr Betriebs AG
Publication of EP0460357A2 publication Critical patent/EP0460357A2/de
Publication of EP0460357A3 publication Critical patent/EP0460357A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Measuring Fluid Pressure (AREA)
EP19910102912 1990-06-08 1991-02-28 Device for optical measurement of pressure differences Withdrawn EP0460357A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH1928/90 1990-06-08
CH192890 1990-06-08

Publications (2)

Publication Number Publication Date
EP0460357A2 EP0460357A2 (de) 1991-12-11
EP0460357A3 true EP0460357A3 (en) 1992-07-29

Family

ID=4221869

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19910102912 Withdrawn EP0460357A3 (en) 1990-06-08 1991-02-28 Device for optical measurement of pressure differences

Country Status (4)

Country Link
US (1) US5128537A (de)
EP (1) EP0460357A3 (de)
JP (1) JPH04232435A (de)
NO (1) NO912178L (de)

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US5252826A (en) * 1991-12-30 1993-10-12 Honeywell Inc. Differential pressure utilizing opto-reflective sensor
US5280173A (en) * 1992-01-31 1994-01-18 Brown University Research Foundation Electric and electromagnetic field sensing system including an optical transducer
FI98094C (fi) * 1992-05-19 1997-04-10 Vaisala Technologies Inc Oy Fabry-Perot resonaattoriin perustuva optinen voima-anturi
SE511634C2 (sv) * 1996-05-07 1999-11-01 Samba Sensors Ab Anordning för elektrooptisk mätning av tryck
US5693889A (en) * 1996-08-27 1997-12-02 The United States Of America As Represented By The Secretary Of The Navy Method for monitoring surface stress
GB2338059B (en) * 1998-05-20 2000-03-08 Bookham Technology Ltd An optically addressed sensing system
EP0962744B1 (de) * 1998-06-02 2005-10-12 European Community Differenzieller Krümmungswandler
US6118534A (en) * 1998-07-30 2000-09-12 B. F. Goodrich Company Sensor and method for measuring changes in environmental conditions
WO2001059418A1 (en) * 2000-02-11 2001-08-16 Rosemount, Inc. Oil-less differential pressure sensor
US6856399B2 (en) * 2001-04-11 2005-02-15 Modern Optical Technologies L.L.C. Method and apparatus for measuring pressure
NO315177B1 (no) * 2001-11-29 2003-07-21 Sinvent As Optisk forskyvnings-sensor
JP2005291945A (ja) * 2004-03-31 2005-10-20 Masaki Esashi センサ装置
US7492463B2 (en) 2004-04-15 2009-02-17 Davidson Instruments Inc. Method and apparatus for continuous readout of Fabry-Perot fiber optic sensor
US7835598B2 (en) 2004-12-21 2010-11-16 Halliburton Energy Services, Inc. Multi-channel array processor
US7864329B2 (en) 2004-12-21 2011-01-04 Halliburton Energy Services, Inc. Fiber optic sensor system having circulators, Bragg gratings and couplers
US7689071B2 (en) * 2004-12-22 2010-03-30 Opsens Inc. Fiber optic pressure sensor for catheter use
DE102005001097A1 (de) * 2005-01-08 2006-07-27 Abb Patent Gmbh Drucksensor (I)
EP1869737B1 (de) 2005-03-16 2021-05-12 Davidson Instruments, Inc. Hochintensitäts-fabry-perot-sensor
WO2007033069A2 (en) 2005-09-13 2007-03-22 Davidson Instruments Inc. Tracking algorithm for linear array signal processor for fabry-perot cross-correlation pattern and method of using same
US7583390B2 (en) * 2006-03-02 2009-09-01 Symphony Acoustics, Inc. Accelerometer comprising an optically resonant cavity
US7355723B2 (en) * 2006-03-02 2008-04-08 Symphony Acoustics, Inc. Apparatus comprising a high-signal-to-noise displacement sensor and method therefore
US7359067B2 (en) * 2006-04-07 2008-04-15 Symphony Acoustics, Inc. Optical displacement sensor comprising a wavelength-tunable optical source
US7684051B2 (en) * 2006-04-18 2010-03-23 Halliburton Energy Services, Inc. Fiber optic seismic sensor based on MEMS cantilever
US7743661B2 (en) 2006-04-26 2010-06-29 Halliburton Energy Services, Inc. Fiber optic MEMS seismic sensor with mass supported by hinged beams
US7409867B2 (en) * 2006-05-23 2008-08-12 Rosemount Inc. Pressure sensor using light source
US7554666B2 (en) 2006-05-25 2009-06-30 Ric Investments, Llc. Sensor with optical pressure transducer and method of manufacturing a sensor component
US7551295B2 (en) * 2006-06-01 2009-06-23 Symphony Acoustics, Inc. Displacement sensor
US7894618B2 (en) * 2006-07-28 2011-02-22 Symphony Acoustics, Inc. Apparatus comprising a directionality-enhanced acoustic sensor
US8115937B2 (en) 2006-08-16 2012-02-14 Davidson Instruments Methods and apparatus for measuring multiple Fabry-Perot gaps
US7787128B2 (en) 2007-01-24 2010-08-31 Halliburton Energy Services, Inc. Transducer for measuring environmental parameters
US7559701B2 (en) * 2007-03-19 2009-07-14 General Electric Company High-temperature pressure sensor and method of assembly
US7626707B2 (en) * 2007-10-29 2009-12-01 Symphony Acoustics, Inc. Dual cavity displacement sensor
US8007609B2 (en) * 2007-10-31 2011-08-30 Symphony Acoustics, Inc. Parallel plate arrangement and method of formation
NL2003266A1 (nl) * 2008-08-11 2010-02-15 Asml Holding Nv Multi nozzle proximity sensor employing common sensing and nozzle shaping.
CH701500A1 (de) * 2009-07-24 2011-01-31 Inficon Gmbh Druckmesszellenanordnung mit einer optischen Membrandruckmesszelle.
CA2808202C (en) 2010-11-09 2013-11-05 Opsens Inc. Guidewire with internal pressure sensor
DE102011077499A1 (de) * 2011-06-14 2012-12-20 CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH Interferometrische Druckmesszelle
DE102011081651A1 (de) * 2011-08-26 2013-02-28 Endress + Hauser Gmbh + Co. Kg Interferometrischer Drucksensor
GB2508908B (en) 2012-12-14 2017-02-15 Gen Electric Resonator device
US10823592B2 (en) 2013-09-26 2020-11-03 Rosemount Inc. Process device with process variable measurement using image capture device
DE102014205459A1 (de) * 2014-03-24 2015-10-08 Rolls-Royce Deutschland Ltd & Co Kg Druckmessvorrichtung zur Messung dynamischer Drücke sowie Gasturbinenbrennkammer mit einer Druckmessvorrichtung
US9829307B2 (en) * 2015-03-20 2017-11-28 Kulite Semiconductor Products, Inc. Silicon based pressure and acceleration optical interferometric sensors with housing assembly
PT3353517T (pt) * 2015-09-21 2020-05-20 Opsens Solutions Inc Sensor de pressão óptico com tensões mecânicas reduzidas
NO343314B1 (no) * 2015-11-29 2019-01-28 Tunable As Optisk trykksensor
JP6885950B2 (ja) * 2015-12-30 2021-06-16 アルコン インコーポレイティド 眼科手術流体用の光学圧力測定
IL253799B (en) 2017-08-02 2018-06-28 Igal Igor Zlochin Retroreflective interferometer
US12228459B2 (en) * 2020-04-21 2025-02-18 Kidde Technologies, Inc. Fabry-perot based advanced pneumatic fire/overheat detector
CN114152385B (zh) * 2021-12-03 2022-09-09 西安交通大学 一种基于法布里-珀罗差压式传感器的气电转换器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0172623A2 (de) * 1984-07-06 1986-02-26 Metricor, Inc. Optische Messvorrichtung mit Verwendung eines spektralmodulierenden Sensors mit optisch resonierender Struktur
EP0196784A2 (de) * 1985-03-14 1986-10-08 Imperial Chemical Industries Plc Fabry Perot Druckwandler mit Membran
GB2202936A (en) * 1987-03-31 1988-10-05 Plessey Co Plc Optical fibre pressure or displacement sensor

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4329058A (en) * 1979-01-22 1982-05-11 Rockwell International Corporation Method and apparatus for a Fabry-Perot multiple beam fringe sensor
JPS61235731A (ja) * 1985-04-11 1986-10-21 Sharp Corp 感圧素子
GB8530809D0 (en) * 1985-12-13 1986-01-22 Gen Electric Co Plc Sensor
US4933545A (en) * 1985-12-30 1990-06-12 Metricor, Inc. Optical pressure-sensing system using optical resonator cavity
US4926696A (en) * 1986-11-19 1990-05-22 Massachusetts Institute Of Technology Optical micropressure transducer
EP0309643B1 (de) * 1987-09-28 1992-11-25 Landis & Gyr Business Support AG Stellglied zur Beeinflussung der Durchflussmenge eines gasförmigen oder flüssigen Mediums
US4983824A (en) * 1989-07-06 1991-01-08 Metricor Inc. Optically resonant sensor with increased monotonic range

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0172623A2 (de) * 1984-07-06 1986-02-26 Metricor, Inc. Optische Messvorrichtung mit Verwendung eines spektralmodulierenden Sensors mit optisch resonierender Struktur
EP0196784A2 (de) * 1985-03-14 1986-10-08 Imperial Chemical Industries Plc Fabry Perot Druckwandler mit Membran
GB2202936A (en) * 1987-03-31 1988-10-05 Plessey Co Plc Optical fibre pressure or displacement sensor

Also Published As

Publication number Publication date
NO912178L (no) 1991-12-09
US5128537A (en) 1992-07-07
NO912178D0 (no) 1991-06-06
EP0460357A2 (de) 1991-12-11
JPH04232435A (ja) 1992-08-20

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