EP0478912A2 - Disque d'usinage pour machines de superfinition, rodage et polissage - Google Patents

Disque d'usinage pour machines de superfinition, rodage et polissage Download PDF

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Publication number
EP0478912A2
EP0478912A2 EP91112294A EP91112294A EP0478912A2 EP 0478912 A2 EP0478912 A2 EP 0478912A2 EP 91112294 A EP91112294 A EP 91112294A EP 91112294 A EP91112294 A EP 91112294A EP 0478912 A2 EP0478912 A2 EP 0478912A2
Authority
EP
European Patent Office
Prior art keywords
segments
working
disc
working disc
disc according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP91112294A
Other languages
German (de)
English (en)
Other versions
EP0478912A3 (en
Inventor
Gerhard Wittstock
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Peter Wolters AG
Original Assignee
Peter Wolters AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Peter Wolters AG filed Critical Peter Wolters AG
Publication of EP0478912A2 publication Critical patent/EP0478912A2/fr
Publication of EP0478912A3 publication Critical patent/EP0478912A3/de
Withdrawn legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/06—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/12—Lapping plates for working plane surfaces

Definitions

  • the invention relates to a working disc for lapping, honing and polishing machines according to the preamble of claim 1.
  • Such working disks have a disk-like or disk-ring-like covering made of a suitable material, which is fastened to a supporting disk, for example by screw fastening.
  • the work surface is removed during operation and must be replaced by another when the wear has reached a predetermined level.
  • the heat inevitably generated in the process is in essentially derived from the mostly cooled carrier disc.
  • the resulting temperature difference between the working and fastening sides creates thermal stresses in the work surface, which deform the surface.
  • the degree of deformation is proportional to the temperature gradient, and even very small temperature differences generate large deformation forces. Since the working side is generally warmer than the screw-on side, the former will deform convexly. The fastening screws cannot withstand such deformation forces.
  • the work surface is made from a special casting with great expertise according to special regulations. With large work surfaces in particular, it cannot be prevented that harmful pores occur and the distribution of hardness and structure becomes uneven. This inevitably affects the quality of the machined workpieces.
  • the invention has for its object to provide a working disc for lapping, honing and polishing machines, the work surface is insensitive to thermal expansion and can also be manufactured with high quality and large diameters.
  • the work surface consists of individual disc segments, which are ring-shaped in several rows at a small, predetermined distance from one another on the supporting disc fixed, but releasably attached.
  • the working disk is therefore divided into a plurality of segments which are arranged at a short distance from one another.
  • Thermal expansion therefore only affects the segments themselves and does not transfer to neighboring segments.
  • Deformations of the work surface, as described at the beginning for known machines, cannot therefore occur.
  • the deformations, which are inevitable even with the relatively small work surfaces of the segments, are practically negligible.
  • Another advantage of the invention is that the relatively small disc segments can be manufactured with high quality in terms of non-pores, uniform structure and hardness distribution, at least with a much higher quality than large coherent work surfaces.
  • the overall construction of the working disk according to the invention also has the advantage that it leads to a simplification of the storage.
  • the working disks can be produced on the modular principle from segments of the same type, the manufacturing and assembly of the disk segments taking place in a manner similar to that in turbine blade construction can.
  • the working disk segments have a hammer head on the underside, which is received by a dovetail-shaped groove in the supporting disk.
  • the segments can be fastened to the support plate on the underside by means of screw fastening.
  • the outer and / or inner segments can also be guided in grooves in the support disks and thereby secured.
  • an embodiment of the invention provides that spacers are arranged between adjacent segments, preferably near the support disk.
  • the spacers can be formed, for example, by spacer plates.
  • the segments themselves can be shaped in such a way that they abut against one another by an undercut in the lower region and thereby largely form a slot between them over their entire height.
  • the segments can be easily formed using the continuous casting process or from sintered metal.
  • An embodiment of the invention provides that the segments are formed from sintered bronze with diamond inclusions.
  • an embodiment of the invention provides that the segments consist of different material with different wear properties and segments with the same wear properties are arranged on a common circular ring. For example, more wear-resistant and harder segments with a lower number of strains can be provided for the interior of the working disc.
  • the shape of the working disk covering according to the invention also enables a composite structure of the segments, in that according to one embodiment of the invention the segments are coated on their working side with a material which has good abrasion properties.
  • the working disk segments can be given a dirt-repellent coating on the lateral surfaces, which, for example, consists of PTFE exists. Furthermore, according to another embodiment of the invention, the working disk segments can have a rust-protecting coating on the lateral surfaces.
  • the slots provided between the segments in the working disk according to the invention have the advantage that the lapping agent distribution and the sludge separation improve, which also has a favorable effect on the desired flatness of the workpieces to be machined.
  • the working disc constructed according to the invention also eliminates or reduces the floating effect, which would otherwise impair the removal quality.
  • the support plate can have at least one connection for a coolant and / or flushing agent, which is connected to the underside of the segments so that the medium can escape through the gaps between the segments.
  • the coolant and / or flushing agent connection can communicate with all the gaps between the disc segments by means of a suitable bore or channel system in the supporting disk, so that the medium can get into and exit from all gaps.
  • an upper working wheel 10 and a lower working wheel 12 are provided for lapping workpieces 14, which are received in so-called rotor disks 16, which roll on an outer pin ring 18 and an inner pin ring 19 when these are driven by an electric motor 20 or 22 are driven.
  • the upper working disk 10 is connected to a shaft 24 which is set in rotation by an electric motor 26.
  • the latter two parts are located in an upper part 28 of the lapping machine, which is pivotably mounted on the lower part 30.
  • the lower working disc 12 is driven by an electric motor 34 via a shaft 32.
  • Each work disk 10, 12 consists of a support section 36 or 38, which is connected to the associated shaft 24 or 32, and a ring-like work surface 40 or 42.
  • the structure of the lower work disk 12 is explained in more detail below with reference to FIGS. 2 4 to 4, it being noted that the structure of the upper working plate 10 is the same.
  • the support section 38 consists of a disc-like continuous work disc carrier 44 and a support disc 46.
  • the support disc 46 is a relatively thin flat disc which has dovetail grooves 48.
  • the support disc 46 holds working disc segments 50 which form the working surface 42.
  • the disk segments 50 have hammer head feet 52 on the underside, which sit in the grooves 48.
  • the segments 50 can be fastened to the support disk 46 by means of screws, as indicated by the dot-dash line at 54.
  • the disc segments 50 form three rows of rings.
  • the segments 50 have between them a relatively narrow gap 56 which runs from top to bottom and which is produced in the groove direction by means of spacer plates 58 which are arranged at an angle on the lower edges.
  • the gap 56 is passed through transverse to the grooves 48 the appropriate recording of the hammerhead feet 56 in the grooves 48 generated.
  • the segments 50 are shaped and arranged such that they have approximately the same working surface and the gaps 56 are radially offset from one another.
  • the disk segments 50 made by extrusion or sintered metal can be made of the same material or with the same hardness for each row (corresponding to e.g. Fig. 1). However, they can have a different hardness radially from the inside to the outside in order to compensate for the different wear in the radial direction.
  • the disk segments 50 can have slots which are formed into the segments in the circumferential or radial direction from the working side. As a result, the effect of the thermal expansions is further reduced, at least over the height of the slots.
  • the segments can also have a separate ablation layer, as shown at 60 in FIG. 3.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
EP19910112294 1990-08-31 1991-07-23 Working disc for lapping, honing and polishing machine Withdrawn EP0478912A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4027627 1990-08-31
DE19904027627 DE4027627A1 (de) 1990-08-31 1990-08-31 Arbeitsscheibe fuer laepp-, hon- und poliermaschinen

Publications (2)

Publication Number Publication Date
EP0478912A2 true EP0478912A2 (fr) 1992-04-08
EP0478912A3 EP0478912A3 (en) 1992-06-03

Family

ID=6413339

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19910112294 Withdrawn EP0478912A3 (en) 1990-08-31 1991-07-23 Working disc for lapping, honing and polishing machine

Country Status (2)

Country Link
EP (1) EP0478912A3 (fr)
DE (1) DE4027627A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0706856A1 (fr) * 1994-10-11 1996-04-17 Ontrak Systems, Inc. Groupe de patins de polissage pour le polissage d'une plaquette semi-conductrice
EP1077111A1 (fr) * 1999-08-19 2001-02-21 Wacker Siltronic Gesellschaft für Halbleitermaterialien Aktiengesellschaft Procédé et outil pour l'usinage abrasif d'une surface substantiellement plane

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10060967B4 (de) * 2000-12-06 2006-05-11 Nagel Maschinen- Und Werkzeugfabrik Gmbh Verfahren und Honvorrichtung zur Honbearbeitung sowie Referenzeinrichtung

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3343306A (en) * 1965-01-11 1967-09-26 Engelhard Hanovia Inc Surfacing system
US3369330A (en) * 1965-08-24 1968-02-20 Barnes Drill Co Automatic abrading machine
GB2038214A (en) * 1978-12-21 1980-07-23 Dianite Coatings Ltd Abrasive tool
DE2922776A1 (de) * 1979-06-05 1980-12-11 Walter Hunger Honstein

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0706856A1 (fr) * 1994-10-11 1996-04-17 Ontrak Systems, Inc. Groupe de patins de polissage pour le polissage d'une plaquette semi-conductrice
US5575707A (en) * 1994-10-11 1996-11-19 Ontrak Systems, Inc. Polishing pad cluster for polishing a semiconductor wafer
EP0919330A1 (fr) * 1994-10-11 1999-06-02 Ontrak Systems, Inc. Groupe de patins de polissage pour le polissage d'une plaquette semi-conductrice
EP1077111A1 (fr) * 1999-08-19 2001-02-21 Wacker Siltronic Gesellschaft für Halbleitermaterialien Aktiengesellschaft Procédé et outil pour l'usinage abrasif d'une surface substantiellement plane
US6439987B1 (en) 1999-08-19 2002-08-27 Wacker-Siltronic Gesellschaft für Halbleitermaterialien AG Tool and method for the abrasive machining of a substantially planar surface

Also Published As

Publication number Publication date
EP0478912A3 (en) 1992-06-03
DE4027627A1 (de) 1992-03-05

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