EP0481935A3 - Method and apparatus for the post-process check of the workpieces in a double-plate lapping machine - Google Patents

Method and apparatus for the post-process check of the workpieces in a double-plate lapping machine Download PDF

Info

Publication number
EP0481935A3
EP0481935A3 EP19910830440 EP91830440A EP0481935A3 EP 0481935 A3 EP0481935 A3 EP 0481935A3 EP 19910830440 EP19910830440 EP 19910830440 EP 91830440 A EP91830440 A EP 91830440A EP 0481935 A3 EP0481935 A3 EP 0481935A3
Authority
EP
European Patent Office
Prior art keywords
workpieces
post
double
lapping machine
process check
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19910830440
Other languages
English (en)
Other versions
EP0481935A2 (fr
Inventor
Michele Melchiorre
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MELCHIORRE OFFICINA MECCANICA Srl
Original Assignee
MELCHIORRE OFFICINA MECCANICA Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MELCHIORRE OFFICINA MECCANICA Srl filed Critical MELCHIORRE OFFICINA MECCANICA Srl
Publication of EP0481935A2 publication Critical patent/EP0481935A2/fr
Publication of EP0481935A3 publication Critical patent/EP0481935A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • B24B49/03—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent according to the final size of the previously ground workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
EP19910830440 1990-10-19 1991-10-16 Method and apparatus for the post-process check of the workpieces in a double-plate lapping machine Withdrawn EP0481935A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT4838990 1990-10-19
IT04838990A IT1243537B (it) 1990-10-19 1990-10-19 Metodo e dispositivo per il controllo al termine di ogni ciclo (post process) dei pezzi lavorati in una macchina lappatrice a doppio plateau

Publications (2)

Publication Number Publication Date
EP0481935A2 EP0481935A2 (fr) 1992-04-22
EP0481935A3 true EP0481935A3 (en) 1992-09-02

Family

ID=11266266

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19910830440 Withdrawn EP0481935A3 (en) 1990-10-19 1991-10-16 Method and apparatus for the post-process check of the workpieces in a double-plate lapping machine

Country Status (2)

Country Link
EP (1) EP0481935A3 (fr)
IT (1) IT1243537B (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001501545A (ja) * 1996-10-04 2001-02-06 オブシディアン，インコーポレイテッド 化学機械的研磨の厚さ除去を制御する方法およびシステム
US6111634A (en) * 1997-05-28 2000-08-29 Lam Research Corporation Method and apparatus for in-situ monitoring of thickness using a multi-wavelength spectrometer during chemical-mechanical polishing
US6146248A (en) * 1997-05-28 2000-11-14 Lam Research Corporation Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisher
US6108091A (en) * 1997-05-28 2000-08-22 Lam Research Corporation Method and apparatus for in-situ monitoring of thickness during chemical-mechanical polishing
US6068539A (en) 1998-03-10 2000-05-30 Lam Research Corporation Wafer polishing device with movable window
US7125313B2 (en) 2003-02-25 2006-10-24 Novellus Systems, Inc. Apparatus and method for abrading a workpiece
JP2020015105A (ja) * 2018-07-23 2020-01-30 東京エレクトロン株式会社 基板処理装置および基板処理方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5715668A (en) * 1980-06-27 1982-01-27 Fujikoshi Kikai Kogyo Kk Lapping process and lapping device
DE3213252A1 (de) * 1981-04-10 1982-12-09 Naoetsu Electronics Co., Ltd., Kubiki, Niigata Verfahren zur staerkenkontrolle waferartiger werkstuecke und laeppvorrichtung hierfuer
EP0241433A2 (fr) * 1986-03-07 1987-10-14 MELCHIORRE Off. Mecc.-S.r.l. Machine de rodage à deux disques avec comparateur pour mesurer de manière continue l'épaisseur des pièces
US4860498A (en) * 1988-08-15 1989-08-29 General Signal Corp. Automatic workpiece thickness control for dual lapping machines

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5715668A (en) * 1980-06-27 1982-01-27 Fujikoshi Kikai Kogyo Kk Lapping process and lapping device
DE3213252A1 (de) * 1981-04-10 1982-12-09 Naoetsu Electronics Co., Ltd., Kubiki, Niigata Verfahren zur staerkenkontrolle waferartiger werkstuecke und laeppvorrichtung hierfuer
EP0241433A2 (fr) * 1986-03-07 1987-10-14 MELCHIORRE Off. Mecc.-S.r.l. Machine de rodage à deux disques avec comparateur pour mesurer de manière continue l'épaisseur des pièces
US4860498A (en) * 1988-08-15 1989-08-29 General Signal Corp. Automatic workpiece thickness control for dual lapping machines

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 6, no. 76 (M-128)(954) 13 May 1982 & JP-A-57 015 668 ( FUJIKOSHI KIKAI KOGYO KK ) 27 January 1982 *

Also Published As

Publication number Publication date
IT9048389A1 (it) 1992-04-19
IT1243537B (it) 1994-06-16
EP0481935A2 (fr) 1992-04-22
IT9048389A0 (it) 1990-10-19

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