EP0504465A1 - Transducteur fluidique à entraînement piézo-électrique - Google Patents

Transducteur fluidique à entraînement piézo-électrique Download PDF

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Publication number
EP0504465A1
EP0504465A1 EP91104466A EP91104466A EP0504465A1 EP 0504465 A1 EP0504465 A1 EP 0504465A1 EP 91104466 A EP91104466 A EP 91104466A EP 91104466 A EP91104466 A EP 91104466A EP 0504465 A1 EP0504465 A1 EP 0504465A1
Authority
EP
European Patent Office
Prior art keywords
transducer according
drive device
adjustable element
converter
piezoelectric drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP91104466A
Other languages
German (de)
English (en)
Inventor
Anton Haumann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Moog GmbH
Original Assignee
Moog GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Moog GmbH filed Critical Moog GmbH
Priority to EP91104466A priority Critical patent/EP0504465A1/fr
Publication of EP0504465A1 publication Critical patent/EP0504465A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C3/00—Circuit elements having moving parts
    • F15C3/10—Circuit elements having moving parts using nozzles or jet pipes
    • F15C3/14—Circuit elements having moving parts using nozzles or jet pipes the jet the nozzle being intercepted by a flap
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C3/00—Circuit elements having moving parts
    • F15C3/10—Circuit elements having moving parts using nozzles or jet pipes
    • F15C3/12—Circuit elements having moving parts using nozzles or jet pipes the nozzle or jet pipe being movable

Definitions

  • the invention relates to an electrofluid converter based on the beam deflection principle for electrically controllable valves with continuous adjustment, comprising an adjustable element which causes beam deflection and an electrical drive device acting thereon.
  • Such continuous valves are generally known. They have been used in fluid technology (hydraulics, pneumatics) for a long time and serve to convert an electrical input signal of low power analogously into a fluidic output signal of comparatively high power. Depending on their performance, they are referred to as servo valves or proportional valves.
  • a two-stage known continuous valve essentially consists of an actuator with a fluidic converter as the first, amplifying stage (pilot stage) and a second stage, which often contains a piston valve.
  • the fluidic converter is advantageously designed according to the beam deflection principle. Mechanical or electrical feedback is used to control the position of the second stage spool.
  • the electric servomotor is usually a permanent magnet torque motor.
  • the disadvantage of this is that the masses to be moved of this servomotor limit the dynamics of the pilot control stage and thus the dynamics of the entire continuous valve. In certain applications, for example in material testing machines, this is not portable, where greater dynamics be requested.
  • the invention is therefore based on the object of specifying a converter of the type mentioned at the outset which is structurally simple and reliable and at the same time operates in a highly dynamic manner.
  • FIG. 1 shows in longitudinal section a first embodiment of the invention.
  • a hollow space 112 is formed in a sealed housing, consisting of a lower part 101 and a cover plate 111 secured thereon.
  • Extending in the cavity 112 is an L-shaped angled jet pipe 102, which is led through the lower part 101 and is fixed there on the lower part.
  • the jet pipe 102 is elastically bendable, which is indicated by the arrow A is indicated, and ends in a nozzle opening 104.
  • the nozzle opening 104 is opposed by a receiver block 113, through which two outlet channels 114 and 115 extend out of the housing, which have jet inlet openings 105 and 106, which are arranged adjacent to one another, and the nozzle opening 104 face each other.
  • a drain channel 107 extends through the lower part 101 of the housing and leads out of the cavity 112 to the outside.
  • a piezoelectric drive device 108 is supported on the lower part 101 and is connected to the jet pipe 102 via a plunger 109
  • the jet pipe 102 has an inlet 103 which forms a control connection P X , which is intended to be supplied with a fluid.
  • the outlets A and B of the outlet channels 114 and 115 are intended for connection to a device to be controlled, not shown here.
  • the electrical connection lines of the piezoelectric drive device 108 are not shown for the sake of simplicity.
  • the piezoelectric drive device 108 When the piezoelectric drive device 108 is subjected to a DC electrical voltage, it deforms in one direction or the other in accordance with the polarity of the voltage supplied. This deformation is transmitted to the jet pipe 102 via the punch 109, so that the latter is bent upwards or downwards in the direction of the arrow A.
  • the nozzle opening 104 of one or the other jet inlet opening 105 or 106 of the outlet channels 114 or 115 is more or less strongly opposed, so that the jet of the fluid which is supplied to the jet pipe 102 at its inlet 103, correspondingly into the jet inlet openings 105 and 106 occurs in different proportions. Quantities of fluid not received by the jet inlet openings 105 and 106 are discharged from the cavity via the outlet channel 107 112 removed.
  • the piezoelectric drive device 108 is preferably a disk translator, but it can also be a stack translator. As shown, it can act directly on the jet pipe 102 via a plunger 109, or via a lever transmission device (not shown) known per se, which increases the movement path generated on the jet pipe 102 compared to the change in shape of the piezoelectric drive device 108 caused by the applied electrical voltage .
  • a lever transmission device will be explained later on the basis of another exemplary embodiment of the invention.
  • Fig. 2 shows a second embodiment of the invention, which corresponds in its essential elements with that of FIG. 1.
  • the jet pipe 102 is U-shaped, and between the lower part 101 of the housing and the center leg of the jet pipe 102, a piezoelectric drive device 108 designed as a stack translator is clamped.
  • FIG. 3 and 4 show a third embodiment of the invention.
  • a housing can be seen, consisting of a lower part 201 and a cover plate 221, which enclose a cavity 232.
  • Two outlet lines 225 and 226 lead out of the cavity 232 and have jet inlet openings 205 and 206 which are adjacent to one another.
  • a jet inlet opening 204 of a fluid supply channel At a distance from the two jet inlet openings 205 and 206 is a jet inlet opening 204 of a fluid supply channel, the inlet 203 of which is formed on the lower housing part 201 and which runs through the lower housing part 201 and the cover plate 221.
  • the inlet and outlet areas are shown in the drawing.
  • Sufficient space is formed between the beam outlet opening 204 and the beam inlet openings 205 and 206 for a laterally movable beam deflection plate 202, which has a conical bore 210 in the area between the beam outlet opening 204 and the two beam inlet openings 205 and 206, the cross section of which extends in the direction of the beam inlet openings 205 and 206 is narrowed and the inlet diameter of which is larger than the outlet diameter of the jet outlet opening 204.
  • the beam deflection plate 202 is suspended from two piezoelectric drive devices 208 and 209, which are arranged opposite one another with respect to the beam deflection plate 202 and are supported on the lower housing part 101 in the cavity 232.
  • a drain channel 207 also leads outward from the cavity 232.
  • the piezoelectric drive devices 208 and 209 are controlled electrically via control lines (not shown) in such a way that, when excited, they undergo changes in shape simultaneously in corresponding directions. Through them, the beam deflection plate 202 depending on the polarity and size of the applied voltage is adjusted to the left or right so that the outlet of the bore 210 is juxtaposed with the jet inlet openings 205 and 206 of the outlet channels 224 and 225 to a correspondingly different extent.
  • Fig. 4 shows the internal structure of the converter of Fig. 3 without the housing parts.
  • the beam deflection plate 202 is suspended from the piezoelectric drive devices 208 and 209 at both ends, ie left and right in FIG. 4.
  • These drive devices are preferably piezo bending transducers, each consisting of a piezo stack 211 and a lever mechanism 212, 213 with flexible zones 214, 215 serving as joints, and a bending rod 217.
  • the piezo stack 211 is between a first fixed part 212 of the lever mechanism and a second movable part 213 of the lever mechanism and fixedly connected thereto. Between the two outer ends of the movable part 213, the bending bar 217 is arranged, which has a slightly arcuate shape. The bending bar 217 is deflected transversely to its longitudinal direction by axial pressure or tension exerted by the outer ends of the movable part 213. Each bending rod 217 is connected in its center to the beam deflection plate 202 via a plunger 218.
  • the fixed part 212 of the lever mechanism is supported in the lower housing part 201 by means of bolts 216. Because of the lever mechanism described, it becomes comparative Small change in length of the piezo stack implemented in an increased stroke of the plunger 218.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Reciprocating Pumps (AREA)
EP91104466A 1991-03-21 1991-03-21 Transducteur fluidique à entraînement piézo-électrique Withdrawn EP0504465A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP91104466A EP0504465A1 (fr) 1991-03-21 1991-03-21 Transducteur fluidique à entraînement piézo-électrique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP91104466A EP0504465A1 (fr) 1991-03-21 1991-03-21 Transducteur fluidique à entraînement piézo-électrique

Publications (1)

Publication Number Publication Date
EP0504465A1 true EP0504465A1 (fr) 1992-09-23

Family

ID=8206558

Family Applications (1)

Application Number Title Priority Date Filing Date
EP91104466A Withdrawn EP0504465A1 (fr) 1991-03-21 1991-03-21 Transducteur fluidique à entraînement piézo-électrique

Country Status (1)

Country Link
EP (1) EP0504465A1 (fr)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1229264A3 (fr) * 2001-01-26 2002-10-02 Hydraulik-Ring GmbH Dispositif de commande pour composants hydrauliques et/ou mécaniques
US7061161B2 (en) 2002-02-15 2006-06-13 Siemens Technology-To-Business Center Llc Small piezoelectric air pumps with unobstructed airflow
CN102242742A (zh) * 2011-07-11 2011-11-16 南京航空航天大学 两级射流喷嘴串联式超磁致伸缩射流伺服阀及工作方法
CN102242743A (zh) * 2011-07-11 2011-11-16 南京航空航天大学 多喷嘴挡板电液伺服阀及其工作方法
EP3242041A1 (fr) * 2016-05-03 2017-11-08 Zodiac Hydraulics Servovalve a actionneur piezo electrique redondant asymetrique
FR3051027A1 (fr) * 2016-05-03 2017-11-10 Zodiac Hydraulics Etage de pilotage de servovalve, pouvant servir de premier etage dans une servovalve a deux etages.
CN111237296A (zh) * 2020-01-08 2020-06-05 西安理工大学 一种基于压电作动器的液阻可调式毛细管节流装置
DE102020209593A1 (de) 2020-07-30 2022-02-03 Festo Se & Co. Kg Fluidgerät

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1750678A1 (de) * 1967-05-26 1971-08-12 Bendix Corp Steuerservoventil fuer ein Stroemungsmedium
US3939857A (en) * 1975-06-24 1976-02-24 Bernaerts Henry J Dual piezoelectric fluid jet transfer valve
EP0012743A1 (fr) * 1978-12-18 1980-06-25 United Technologies Corporation Soupape de commande piézo-électrique
GB2163877A (en) * 1982-09-30 1986-03-05 Gen Electric Servovalve actuation method
EP0205381A1 (fr) * 1985-06-10 1986-12-17 Centre Technique Des Industries Mecaniques Transducteur électro-fluidique du type buse/palette et servo-valve hydraulique équipée d'un tel transducteur
DE3714337A1 (de) * 1987-04-29 1988-11-10 Rexroth Mannesmann Gmbh Servoventil mit piezoansteuerung sowie piezoelektrischer steuermotor
DE3738630A1 (de) * 1987-11-13 1989-07-20 Rexroth Mannesmann Gmbh Servoventil mit piezoelement als steuermotor
EP0366605A1 (fr) * 1988-10-25 1990-05-02 GebràœDer Sulzer Aktiengesellschaft Dispositif de commande électrohydraulique ou -pneumatique
GB2225133A (en) * 1988-11-17 1990-05-23 Smc Corp Nozzle flapper mechanism

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1750678A1 (de) * 1967-05-26 1971-08-12 Bendix Corp Steuerservoventil fuer ein Stroemungsmedium
US3939857A (en) * 1975-06-24 1976-02-24 Bernaerts Henry J Dual piezoelectric fluid jet transfer valve
EP0012743A1 (fr) * 1978-12-18 1980-06-25 United Technologies Corporation Soupape de commande piézo-électrique
GB2163877A (en) * 1982-09-30 1986-03-05 Gen Electric Servovalve actuation method
EP0205381A1 (fr) * 1985-06-10 1986-12-17 Centre Technique Des Industries Mecaniques Transducteur électro-fluidique du type buse/palette et servo-valve hydraulique équipée d'un tel transducteur
DE3714337A1 (de) * 1987-04-29 1988-11-10 Rexroth Mannesmann Gmbh Servoventil mit piezoansteuerung sowie piezoelektrischer steuermotor
DE3738630A1 (de) * 1987-11-13 1989-07-20 Rexroth Mannesmann Gmbh Servoventil mit piezoelement als steuermotor
EP0366605A1 (fr) * 1988-10-25 1990-05-02 GebràœDer Sulzer Aktiengesellschaft Dispositif de commande électrohydraulique ou -pneumatique
GB2225133A (en) * 1988-11-17 1990-05-23 Smc Corp Nozzle flapper mechanism

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1229264A3 (fr) * 2001-01-26 2002-10-02 Hydraulik-Ring GmbH Dispositif de commande pour composants hydrauliques et/ou mécaniques
US7061161B2 (en) 2002-02-15 2006-06-13 Siemens Technology-To-Business Center Llc Small piezoelectric air pumps with unobstructed airflow
US7282837B2 (en) 2002-02-15 2007-10-16 Siemens Technology-To-Business Center Llc Small piezoelectric air pumps with unobstructed airflow
WO2003071132A3 (fr) * 2002-02-15 2007-12-21 Siemens Tech To Business Ct Petites pompes a air piezoelectriques avec ecoulement d'air non obstrue
US7358649B2 (en) 2002-02-15 2008-04-15 Siemens Technology-To-Business Center, Llc Small piezoelectric air pumps with unobstructed airflow
US7417359B2 (en) 2002-02-15 2008-08-26 Siemens Technology-To-Business Center, Llc Small piezoelectric air pumps with unobstructed airflow
CN102242742A (zh) * 2011-07-11 2011-11-16 南京航空航天大学 两级射流喷嘴串联式超磁致伸缩射流伺服阀及工作方法
CN102242743A (zh) * 2011-07-11 2011-11-16 南京航空航天大学 多喷嘴挡板电液伺服阀及其工作方法
CN102242742B (zh) * 2011-07-11 2013-08-21 南京航空航天大学 两级射流喷嘴串联式超磁致伸缩射流伺服阀及工作方法
CN102242743B (zh) * 2011-07-11 2013-08-21 南京航空航天大学 多喷嘴挡板电液伺服阀及其工作方法
EP3242041A1 (fr) * 2016-05-03 2017-11-08 Zodiac Hydraulics Servovalve a actionneur piezo electrique redondant asymetrique
FR3051026A1 (fr) * 2016-05-03 2017-11-10 Zodiac Hydraulics Servovalve a actionneur piezo electrique redondant asymetrique.
FR3051027A1 (fr) * 2016-05-03 2017-11-10 Zodiac Hydraulics Etage de pilotage de servovalve, pouvant servir de premier etage dans une servovalve a deux etages.
US10651364B2 (en) 2016-05-03 2020-05-12 Zodiac Hydraulics Servo valve with asymmetrical redundant piezoelectric actuator
CN111237296A (zh) * 2020-01-08 2020-06-05 西安理工大学 一种基于压电作动器的液阻可调式毛细管节流装置
DE102020209593A1 (de) 2020-07-30 2022-02-03 Festo Se & Co. Kg Fluidgerät
DE102020209593B4 (de) 2020-07-30 2022-02-17 Festo Se & Co. Kg Fluidgerät

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