EP0541388A1 - Dispositif d'affichage à cristal liquide et son procédé de fabrication - Google Patents

Dispositif d'affichage à cristal liquide et son procédé de fabrication Download PDF

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Publication number
EP0541388A1
EP0541388A1 EP92310185A EP92310185A EP0541388A1 EP 0541388 A1 EP0541388 A1 EP 0541388A1 EP 92310185 A EP92310185 A EP 92310185A EP 92310185 A EP92310185 A EP 92310185A EP 0541388 A1 EP0541388 A1 EP 0541388A1
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Prior art keywords
film
angle
alignment
glass substrate
homeotropic
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EP92310185A
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German (de)
English (en)
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EP0541388B1 (fr
Inventor
Masanobu Shigeta
Tadayuki Shimada
Masanao Asami
Hiroyuki Natsuhori
Shigeo Shimizu
Toshio Konno
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Victor Company of Japan Ltd
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Victor Company of Japan Ltd
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/225—Oblique incidence of vaporised material on substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133734—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by obliquely evaporated films, e.g. Si or SiO2 films
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133742—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers for homeotropic alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/137—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering
    • G02F1/139—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering based on orientation effects in which the liquid crystal remains transparent
    • G02F1/1393—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering based on orientation effects in which the liquid crystal remains transparent the birefringence of the liquid crystal being electrically controlled, e.g. ECB-, DAP-, HAN-, PI-LC cells

Definitions

  • the present invention relates to a homeotropic-alignment liquid crystal display device for use in a flat panel display, an optical computer, or a video projector, and a method of producing such homeotropic-alignment liquid crystal display device. More particularly, it relates to improvements in the display quality and mass production capability of the homeotropic-alignment liquid crystal display device.
  • a nematic crystal liquid of negative dielectric anisotropy is used in the homeotropic-alignment liquid crystal display devices.
  • Liquid crystal molecules homeotropically aligned with respect to substrate surfaces are caused to tilt by a drive voltage, whereupon a display operation begins.
  • a drive voltage whereupon a display operation begins.
  • a small pre-tilt angle is given when a liquid crystal homeotropic-alignment is achieved.
  • the pre-tilt angle increases, the difficulty in obtaining the homeotropic alignment increases.
  • the contrast ratio and the threshold level decrease with an increase in pre-tilt angle.
  • the pre-tilt angle may be given by using an angle-deposited film, i.e., a film formed by an angle vapor deposition process also called as an oblique evaporation process.
  • the angle vapor deposition process is an outstanding process used theretofore for aligning liquid crystal molecules, wherein the vapor of an oxide such as an SiO is deposited on a substrate surface from an oblique direction.
  • the liquid crystal molecules may tilt in diametrically opposite directions. This phenomenon is observed as a dynamic alignment defect.
  • a two-step angle vapor deposition process such as disclosed in Japanese Patent Publication No. 55-13338, has been proposed as a process which is suitable for controlling the molecule tilt direction of the liquid crystal.
  • an SiO2 film deposited on a substrate is etched off by an Ar ion beam directed obliquely onto the SiO2 film so as to produce a surface profile change which in turn is used for liquid crystal alignment. Due to a large etch-off amount, the disclosed alignment method is time-consuming.
  • a simple ion beam etching effected in an oblique direction is likely to cause an alignment non-uniformity problem in the activated state, which problem is particularly significant for a high resolution spatial light modulator constructed to display dynamic images.
  • Another object of the present invention is to provide a method of making the photostable homeotropic-alignment liquid crystal display unit which makes it possible to use these materials which cannot be used in a conventional method, and is able to control adverse effects caused by variation of film thickness and incident light angle while maintaining an outstanding alignment effect attributed to the angle vapor deposition process.
  • a homeotropic-alignment liquid crystal display device of the type having a glass substrate coated with a homeotropic-alignment undercoat film, characterized in that the homeotropic-alignment undercoat film is a film of oxide deposited on the substrate by ion beam assisted angle vapor deposition of an oxide gas.
  • a method of producing a homeotropic-alignment liquid crystal display device of the type having a glass substrate coated with a homeotropic-alignment undercoat film comprising the steps of: providing a thin-film deposition system having an evaporation source and an ion source; holding a glass substrate obliquely within the thin-film deposition system such that the normal line on the glass substrate and the evaporation source form a first angle, and the normal line on the glass substrate and the ion source form a second angle; activating the evaporation source and the ion source, thereby forming a film of oxide deposited on the glass substrate by ion beam assisted angle vapor deposition of an oxide gas; and thereafter, again activating the ion source to irradiate the oxide film with an ion beam, the oxide film forming the homeotropic-alignment undercoat film.
  • a method of producing a homeotropic-alignment liquid crystal display device of the type having a glass substrate coated with a homeotropic-alignment undercoat film comprising the steps of: providing a thin-film deposition system having an evaporation source and an ion source; holding a glass substrate obliquely within the thin-film deposition system such that the normal line on the glass substrate and the evaporation source form a first angle, and the normal line on the glass substrate and the ion source form a second angle; activating the evaporation source and the ion source, thereby forming a first film of oxide deposited on the glass substrate by ion beam assisted angle vapor deposition of an oxide gas; thereafter, setting the glass substrate in a oblique position such that the normal line on the glass substrate and the evaporation source form a third angle; and subsequently, activating the evaporation source and the ion source again, thereby forming a second oxide
  • FIG. 1 shows the general construction of a liquid crystal display device according to the present invention.
  • a and B are oppositely disposed glass substrates.
  • the inside surface of each of the glass substrates A and B is laminated with a transparent electrode 1, an alignment undercoat film 2, and a homeotropic-alignment film 3 that are arranged in the order named.
  • a liquid crystal 4 is filled in a space defined between the homeotropic-alignment films 3, 3.
  • Numerals 5 are spacers, and 6 is a power supply.
  • FIG. 2 shows a thin-film deposition system or apparatus used for forming an angle-deposited film according to the present invention.
  • two glass substrates A, B each coated with a transparent electrode (indium tin oxide: ITO) treated by a desired patterning were set obliquely in the apparatus, with an angle ⁇ 1 formed between the normal line on each glass-ITO substrate A, B and an evaporation source 7, and a first SiO2 film was deposited on the obliquely supported glass-ITO substrates A, B while irradiating the substrate surface with an ion beam 10 emitted from an ion gun 8.
  • Conditions for a first step of ion beam assisted angle vapor deposition process were as follows. Deposition Rate: 10 ⁇ /sec.
  • Ion Beam Power 500 V, 40 mA
  • Ionized Gas O2 Gas Pressure: 1.5 - 3.5 x 10 ⁇ 5 Torr
  • Substrate Temperature Room temperature ⁇ 1: 50 - 60 degrees SiO2 Film
  • Thickness 100 - 500 ⁇
  • the substrates A, B were twisted or turned in a plane of the substrates A, B over an angle of 90° (in-plane rotation), and after that they were set in an oblique position, with an angle ⁇ 2 formed between the normal line on each substrate A, B and the evaporation source 7.
  • a second SiO2 film was deposited over the first SiO2 film during that time the first SiO2 film was irradiated with an ion beam 10 emitted from the ion gun 8.
  • Conditions for the second step of ion beam assisted angle vapor deposition process were the same as those used in the first step of ion beam assisted vapor deposition process with the exception given below.
  • Deposition Rate 2 ⁇ /sec. ⁇ 2: 75 - 85 degrees SiO2 Film Thickness: 25 - 50 ⁇
  • the glass-ITO substrates A, B overcoated with an alignment undercoat film 2 of a double-layer structure were thus produced.
  • the glass-ITO substrates A, B coated with the alignment undercoat film 2 were coated with a homeotropic-alignment film 3.
  • a homeotropic-alignment agent (AY43-021 available from the Dow Corning Toray Silicone Co., Ltd.) composed of a silan coupling agent was coated over the alignment undercoat film 2, followed by baking at 110°C for 1 hour.
  • the substrates A, B were then bonded together with spacers 5 disposed therebetween, and after that a liquid crystal (EN38 available from Chisso Corp.) was filled in a space defined between the substrates A, B and the spacers 5.
  • a homeotropic-alignment liquid crystal display device or cells having a 6 ⁇ m cell thickness was produced.
  • the foregoing procedure was repeated to produce eight sample cells (Sample Nos. 1 - 8) having different homeotropic-alignment undercoat film 2 sets.
  • sample Nos. 9 and 10 were produced by repeating the procedure of Example 1 except that ⁇ 1 and ⁇ 2 were fixed at 60° and 85°, respectively, the two-step angle vapor deposition process was carried out without the assistance of ion beam irradiation, and the evaporation material used in the production of one sample cell (Sample No. 10) was SiO.
  • sample Nos. 11 and 12 Two sample cells (Sample Nos. 11 and 12) were produced for comparative purposes by repeating the procedure of Example 1 except that ⁇ 1 and ⁇ 2 were fixed at 60° and 85°, respectively, and the in-plane rotation or twisting was omitted for one sample cell (Sample No. 11) while effected at a 180° angle for the other sample cell (Sample No. 12).
  • sample cells (Sample Nos. 1 - 12) were measured for contrast ratio (CR) and ⁇ value.
  • the CR is the ratio of the maximum intensity of transmitted light in the electric-field activated state to the intensity of transmitted light in the electric-field unactivated state under crossed Nicol prisms.
  • the ⁇ value is the ratio of the applied voltage observed when the intensity of transmitted light becomes equal to 99% of the maximum, to the applied voltage observed when the intensity of transmitted light becomes equal to 1% of the maximum. The occurrence of alignment non-uniformity was also inspected visually. Results thus obtained are shown in Table 1.
  • the in-plane rotation or twist made before the second angled vapor deposition step has no adverse effect on the CR, ⁇ and alignment non-uniformity of the cells (See Sample Nos. 11 and 12). It was found that the in-plane rotation over a 0° angle or a 180° angle successfully controlled the off-state alignment non-uniformity and temperature-induced changes in alignment direction.
  • two glass substrates A, B each coated with a transparent electrode (indium tin oxide: ITO) treated by a desired patterning were set obliquely in the apparatus, with an angle ⁇ 1 formed between the normal line on each glass-ITO substrate A, B and an evaporation source 7, and an SiO2 film was deposited on the obliquely supported glass-ITO substrates A, B while irradiating the substrate surface with an ion beam 10 emitted from an ion gun 8.
  • Conditions for the ion beam assisted angle vapor deposition process were as follows. Deposition Rate: 10 ⁇ /sec.
  • Ion Beam Power 500 V, 40 mA
  • Ionized Gas O2 Gas Pressure: 1.5 - 3.5 x 10 ⁇ 5 Torr
  • Substrate Temperature Room temperature ⁇ 1: 50 - 60 degrees ⁇ a : 60 - 70 degrees
  • SiO2 Film Thickness 500 ⁇
  • the substrates A, B were twisted or turned in a plane of the substrates A, B over an angle of 90° and then set in an oblique position, with an angle ⁇ a formed between the normal line on each substrate A, B and the ion gun 8. Thereafter, the ion beam 10 of the same power as described above was irradiated over the SiO2 film for 2 minutes.
  • the glass-ITO substrates A, B overcoated with an alignment undercoat film 2 of a single-layer structure were thus produced.
  • the glass-ITO substrates A, B coated with the alignment undercoat film 2 were coated with a homeotropic-alignment film 3.
  • a homeotropic-alignment agent (AY43-021 available from the Dow Corning Toray Silicone Co., Ltd.) composed of a silan coupling agent was coated over the alignment undercoat film 2, followed by baking at 110°C for 1 hour.
  • the substrates A, B were then bonded together with spacers 5 disposed therebetween, and after that a liquid crystal (EN38 available from Chisso Corp.) was filled in a space defined between the substrates A, B and the spacers 5.
  • a homeotropic-alignment liquid crystal display device or cell was produced. The foregoing procedure was repeated to produce five sample cells (Sample Nos. 13 - 17) having different homeotropic-alignment undercoat film 2 sets.
  • sample cell (Sample No 18) was produced by repeating the procedure of Example 3 except that ⁇ 1 was fixed at 60°, and the second ion beam irradiation step was omitted.
  • sample Nos. 19 and 20 Two sample cells (Sample Nos. 19 and 20) were produced for comparative purposes by repeating the procedure of Example 3 except that ⁇ 1 and ⁇ a were both fixed at 60°, and the in-plane rotation or twisting was omitted for one sample cell (Sample No. 19) while effected at a 180° angle for the other sample cell (Sample No. 20).
  • sample Nos. 21 and 22 were produced by repeating the procedure of Example 1 except that ⁇ 1 and ⁇ 2 were fixed at 60° and 85°, respectively, the gas pressure was less than 2 x 10 ⁇ 5 Torr, the two-step angle vapor deposition process was carried out without the assistance of ion beam irradiation, and the evaporation material used in the production of one sample cell (Sample No. 21) was SiO.
  • sample cells For purposes of performance evaluation, the sample cells (Sample Nos. 13 - 22) were measured for contrast ratio (CR) and ⁇ value. The CR and the ⁇ value are as specified above. The occurrence of alignment non-uniformity was also inspected visually. Results thus obtained are shown in Table 2. In Table 2, the marks " ⁇ ”, “ ⁇ ”, “ ⁇ ” and "X” used for evaluation of the alignment uniformity are as specified above.
  • sample No. 18 It is evidenced from Table 2 that omission of the second ion beam irradiation brings about a low CR and a large ⁇ value which deteriorate the directivity of homeotropic-alignment (Sample No. 18). Excepting this No. 18, all the sample cells (Sample Nos. 13 - 17 and 19 -20) according to the present invention have contrast ratios (CR) which are considerably higher than those of the conventional cells (Sample Nos. 21 and 22). Further, excepting one sample (Sample No. 13), they are free from the alignment non-uniformity problem and have ⁇ values which are comparable to those of the conventional cells (Sample Nos. 21 and 22).
  • the performance characteristics of the inventive cells are stable and not influenced very much by changes in film thickness and incident angle.
  • the Sample No. 22 when compared with other Samples indicates that the ion beam assist process makes it possible to use the SiO2 as a material for forming an alignment film. As described previously, this is particular advantageous because the SiO2 has been considered as being highly chemically stable but inadequate as a material for the alignment film.
  • the in-plane rotation or twist made before the second angled vapor deposition step has no adverse effect on the CR, ⁇ and alignment non-uniformity of the cells (See Sample Nos. 19 and 20). It was found that the in-plane rotation over a 0° angle or a 180° angle successfully controlled the off-state alignment non-uniformity and temperature-induced changes in alignment direction.
  • a spatial light modulator (SLM) of a construction shown in FIG. 3 was produced and incorporated in an optical projection system shown in FIG. 4. Using this projection system, written images were projected as 50-times enlarged dynamic images on a screen for visual inspection of the display qualities.
  • SLM spatial light modulator
  • the SLM was produced in a manner described below. Using a plasma chemical vapor deposition (CVD) system, a hydrogenerated amorphous silicon (a-Si:H) layer of 15 ⁇ m thick was deposited on a glass-ITO substrate as a photoconductive layer. Then, an Si film of 2 ⁇ m was formed by vapor deposition over the photoconductive layer, thus forming a light blocking layer. On the light blocking layer were laminated five layers of alternating SiO2 and TiO2 films with ⁇ /4 unit layer thick so as to form a dielectric mirror.
  • CVD plasma chemical vapor deposition
  • Example A Using the thus treated substrate in combination with a glass-ITO substrate, a cell (Sample A) was produced by repeating the procedure of Example 1 and under the conditions set for producing Sample No. 3 described above.
  • Example B Another cell (Sample B) was produced by repeating the procedure of Example 3 and under the conditions set for producing Sample No. 15 described above.
  • sample A and Sample B were separately assembled with the optical projection system shown in FIG. 4, and the qualities of dynamic images projected on the screen were inspected visually. No non-uniformity was observed by the visual inspection at the boundary between the bright and dark areas of the dynamic images, and hence the qualities of the displayed images were quite satisfactory.
  • the evaporation material may include oxides other than SiO2.
  • the ionized gas may include Ar, Ar-O2 or the like.
  • the present invention is not limited to reflection read-out type liquid crystal display devices but also applicable to the transmission type liquid crystal display devices. It is therefore to be understood that within the scope of the appended claims the invention may be practiced otherwise than as specifically described.

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
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  • Physical Vapour Deposition (AREA)
  • Transforming Electric Information Into Light Information (AREA)
EP92310185A 1991-11-08 1992-11-06 Procédé de fabrication d'un dispositif d'affichage à crystal liquide Expired - Lifetime EP0541388B1 (fr)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP32102691 1991-11-08
JP321026/91 1991-11-08
JP32102691 1991-11-08
JP28095492 1992-09-25
JP280954/92 1992-09-25
JP04280954A JP3132193B2 (ja) 1991-11-08 1992-09-25 液晶表示デバイス及び液晶表示デバイスの製造方法

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EP0541388A1 true EP0541388A1 (fr) 1993-05-12
EP0541388B1 EP0541388B1 (fr) 2000-01-26

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EP92310185A Expired - Lifetime EP0541388B1 (fr) 1991-11-08 1992-11-06 Procédé de fabrication d'un dispositif d'affichage à crystal liquide

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US (1) US5268781A (fr)
EP (1) EP0541388B1 (fr)
JP (1) JP3132193B2 (fr)
DE (1) DE69230608T2 (fr)

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US6103318A (en) * 1997-06-06 2000-08-15 Corning Incorporated Method for making an optical waveguide component using a low-stress silicon photomask
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EP1515182A3 (fr) * 2003-09-11 2005-03-23 Sony Corporation Dispositif d'affichage à cristaux liquides du type réflectif et son procédé de sa fabrication
EP1541661A1 (fr) * 2003-12-11 2005-06-15 Sony International (Europe) GmbH Composé comprenant un matériau liquide cristalline et un additif
WO2008108477A1 (fr) * 2007-03-02 2008-09-12 Canon Kabushiki Kaisha Procédé de formation de couche et processus de fabrication de dispositif d'affichage à cristaux liquides

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US6346975B2 (en) 1998-08-04 2002-02-12 International Business Machines Corporation Liquid crystal display having alignment layer using ion bombarded amorphous material 100Å thickness or less
JP2000056297A (ja) 1998-08-07 2000-02-25 Victor Co Of Japan Ltd 液晶表示デバイス
US6519018B1 (en) 1998-11-03 2003-02-11 International Business Machines Corporation Vertically aligned liquid crystal displays and methods for their production
US6426786B1 (en) 1999-06-01 2002-07-30 International Business Machines Corporation Method of homeotropic alignment or tilted homeotropic alignment of liquid crystals by single oblique evaporation of oxides and liquid crystal display device formed thereby
US6313896B1 (en) * 1999-08-31 2001-11-06 International Business Machines Corporation Method for forming a multi-domain alignment layer for a liquid crystal display device
US6724449B1 (en) * 2000-03-27 2004-04-20 International Business Machines Corporation Vertical aligned liquid crystal display and method using dry deposited alignment layer films
US6632483B1 (en) * 2000-06-30 2003-10-14 International Business Machines Corporation Ion gun deposition and alignment for liquid-crystal applications
JP3510845B2 (ja) 2000-08-29 2004-03-29 Ｈｏｙａ株式会社 反射防止膜を有する光学部材
AU756842B2 (en) 2000-08-29 2003-01-23 Hoya Corporation Optical element having antireflection film
US6791648B2 (en) * 2001-03-15 2004-09-14 Seiko Epson Corporation Liquid crystal device, projection display device and, manufacturing method for substrate for liquid crystal device
CN1267777C (zh) * 2001-06-26 2006-08-02 索尼公司 反射液晶显示装置、显示设备、投影光学系统和投影显示系统
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US20040156004A1 (en) * 2002-10-23 2004-08-12 Jvc (Victor Company Of Japan, Ltd.) Liquid crystal display element and method of forming alignment layer of the liquid crystal element
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DE69230608D1 (de) 2000-03-02
US5268781A (en) 1993-12-07
DE69230608T2 (de) 2000-09-21
JP3132193B2 (ja) 2001-02-05
EP0541388B1 (fr) 2000-01-26

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