EP0567183A1 - Tube à rayons X utilisamt la raie-M du spectre de rayonnement - Google Patents

Tube à rayons X utilisamt la raie-M du spectre de rayonnement Download PDF

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Publication number
EP0567183A1
EP0567183A1 EP93201081A EP93201081A EP0567183A1 EP 0567183 A1 EP0567183 A1 EP 0567183A1 EP 93201081 A EP93201081 A EP 93201081A EP 93201081 A EP93201081 A EP 93201081A EP 0567183 A1 EP0567183 A1 EP 0567183A1
Authority
EP
European Patent Office
Prior art keywords
ray tube
anode
radiation
ray
anode material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP93201081A
Other languages
German (de)
English (en)
Inventor
Johannes Jacobus De Koning
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV, Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Priority to EP93201081A priority Critical patent/EP0567183A1/fr
Publication of EP0567183A1 publication Critical patent/EP0567183A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes

Definitions

  • the invention relates to an X-ray tube, comprising a cathode and an anode for generating X-rays.
  • the invention also relates to an X-ray analysis apparatus comprising an X-ray tube in accordance with the invention.
  • An X-ray tube of this kind is known from US 4,205,251.
  • An X-ray tube described therein aims to generate X-rays in an effective spectral range for X-ray analysis of elements.
  • a tube described therein is particularly suitable for generating copper K- ⁇ radiation having a characteristic wavelength of approximately 0.15 nm.
  • the copper K- ⁇ wavelength is not very effective.
  • solutions have been proposed such as, for example the use of scandium as the anode material as described in US 4,583,243 for analysis of notably light elements, or a double-layer anode as described in US 4,622,688 for generating a radiation spectrum which can be controlled by the anode voltage and which can be used for analysis of light as well as heavier elements.
  • the anode thereof comprises a layer of scandium and, underneath the comparatively thin scandium layer, it comprises a layer of tungsten or molybdenum for analysis of heavier elements by means of an increased anode voltage.
  • an X-ray tube of the kind set forth in accordance with the invention is characterized in that in order to generate an X-ray spectrum with an effective wavelength range for X-ray analysis, the anode contains a material in which effectively usable M-radiation can also be generated.
  • the tube is suitable for analysis of light elements, to be excited notably by the M-radiation, as well as heavier elements, to be excited notably by means of, for example L-radiation and effective radiation from the continuous spectrum.
  • the X-ray tube very effectively utilizes the M-radiation, experienced as a nuissance thus far and situated in an attractive wavelength range for the analysis of light elements if the anode material is suitably chosen.
  • the anode contains an element from the group of heavy elements thorium (90), protactinium (91) and uranium (92) or mixtures thereof.
  • M-radiation of these elements has a wavelength of approximately 0.4 nm and is sufficiently energetic for fast analysis of elements having an atomic number of between, for example 4 (beryllium) and 18 (argon).
  • the continuous spectrum to be generated in such anode materials with the L-radiation of approximately 0.1 nm is sufficiently energetic for analysis of heavy elements as high as the anode material.
  • An additional advantage consists in that an exit window of beryllium with a customary thickness of, for example 150 ⁇ m exhibits a comparatively high transmission for the M-radiation to be generated in these tubes.
  • the anode material is notably low-radioactive U-238.
  • the anode material is deposited on a support, for example in the form of an anode body in a side-window tube or an end-window tube, as a comparatively thin layer of, for example from 0.2 to 2.0 ⁇ m thickness.
  • a thin layer of anode material is deposited on an exit window, preferably by sputtering or a CVD technique. Because of the necessary transmission for the X-rays to be generated therein, the layer then has a thickness of at the most, for example approximately 0.1 ⁇ m.
  • the layer of anode material can alternatively be provided on an anode body as a foil. The thickness of the layer is then again determined by the deposition technique and the temperature conditions and may also be substantially greater than approximately 0.1 ⁇ m.
  • An X-ray tube in accordance with the invention is particularly suitable for use in, for example an X-ray spectrometer because therein a wavelength range generated by a single, customary high voltage can be used for excitation of a wide range of elements.
  • An X-ray tube 1 as shown in Fig. 1 comprises, accommodated in an envelope 2 with a connector 4 and an exit window 6, an electron emitter 10, for example in the form of a filament which is accommodated in a cathode sleeve 8. Electrons emitted by the emitter 10 are directed towards an anode 14 along paths 12. The electron paths are determined by the geometry of the cathode sleeve, of the cathode itself, and of the anode and by the shape of a conical portion 16 of the tube envelope. On an anode body 18 of the anode, being made of, for example copper, there is provided an anode target plate 19 of, for example uranium 238.
  • an X-ray beam 20 is generated in a customary manner by the electrons incident along the paths 12, which beam emanates from the tube via the exit window 6 which consists of, for example a plate of beryllium having a thickness of 150 ⁇ m.
  • Fig. 2 shows an X-ray tube 1 mounted in an X-ray analysis apparatus 20, which is in this case formed as a simultaneous spectrometer comprising a specimen table 30, a mounting plate 32, and a housing 36 for a number of measuring channels.
  • the Figure shows two measuring channels 42 and 44 which are symmetrically arranged relative to an object or specimen 40 to be examined.
  • Each measuring channel comprises an entrance slit 46, an analysis crystal 48, and a detector 50.
  • Each of the measuring channels is oriented relative to the specimen in conformity with a respective element assigned thereto.
  • the specimen is irradiated by an X-ray beam 52 which, as a result of the use of an anode material in accordance with the invention, covers a wide effective wavelength range and is hence suitable for simultaneous excitation of a wide range of elements.
  • a first favourable effect consists in that this maximum, and hence the entire continuous spectrum, reaches a level which increases in proportion to the atomic number of the anode material.
  • Single lines in the continuous spectrum denote the line spectrum with N-lines at approximately 0.88 nm, M-lines at approximately 0.39 nm and L-lines at approximately 0.09 nm. In the case of 60 kV, K-lines in uranium of approximately 0.01 nm are not excited.

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  • X-Ray Techniques (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
EP93201081A 1992-04-21 1993-04-14 Tube à rayons X utilisamt la raie-M du spectre de rayonnement Withdrawn EP0567183A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP93201081A EP0567183A1 (fr) 1992-04-21 1993-04-14 Tube à rayons X utilisamt la raie-M du spectre de rayonnement

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP92201104 1992-04-21
EP92201104 1992-04-21
EP93201081A EP0567183A1 (fr) 1992-04-21 1993-04-14 Tube à rayons X utilisamt la raie-M du spectre de rayonnement

Publications (1)

Publication Number Publication Date
EP0567183A1 true EP0567183A1 (fr) 1993-10-27

Family

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Family Applications (1)

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EP93201081A Withdrawn EP0567183A1 (fr) 1992-04-21 1993-04-14 Tube à rayons X utilisamt la raie-M du spectre de rayonnement

Country Status (1)

Country Link
EP (1) EP0567183A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003065772A3 (fr) * 2002-01-31 2004-02-26 Univ Johns Hopkins Source de rayons x et procede pour la production plus efficace de frequences de rayons x au choix

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR690718A (fr) * 1929-03-30 1930-09-25 Philips Nv Tube à rayons chi
GB1184947A (en) * 1966-06-28 1970-03-18 Radiologie Cie Gle Improvements in or relating to a Method of Producing an X-Ray Picture of an Object
US3835341A (en) * 1973-06-25 1974-09-10 W Zingaro Selectable multi-window x-ray tube
US4477921A (en) * 1981-11-27 1984-10-16 Spire Corporation X-Ray lithography source tube
EP0127230A1 (fr) * 1983-05-25 1984-12-05 Koninklijke Philips Electronics N.V. Tube à rayons X comprenant deux couches successives de matériau anodique

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR690718A (fr) * 1929-03-30 1930-09-25 Philips Nv Tube à rayons chi
GB1184947A (en) * 1966-06-28 1970-03-18 Radiologie Cie Gle Improvements in or relating to a Method of Producing an X-Ray Picture of an Object
US3835341A (en) * 1973-06-25 1974-09-10 W Zingaro Selectable multi-window x-ray tube
US4477921A (en) * 1981-11-27 1984-10-16 Spire Corporation X-Ray lithography source tube
EP0127230A1 (fr) * 1983-05-25 1984-12-05 Koninklijke Philips Electronics N.V. Tube à rayons X comprenant deux couches successives de matériau anodique

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003065772A3 (fr) * 2002-01-31 2004-02-26 Univ Johns Hopkins Source de rayons x et procede pour la production plus efficace de frequences de rayons x au choix
US7186022B2 (en) 2002-01-31 2007-03-06 The Johns Hopkins University X-ray source and method for more efficiently producing selectable x-ray frequencies

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