EP0632482A3 - Source d'ions en phase gazeuse pour spectromètre de masse à temps de vol, présentant une résolution en masse élevée ainsi qu'une large gamme de masses. - Google Patents

Source d'ions en phase gazeuse pour spectromètre de masse à temps de vol, présentant une résolution en masse élevée ainsi qu'une large gamme de masses. Download PDF

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Publication number
EP0632482A3
EP0632482A3 EP94110274A EP94110274A EP0632482A3 EP 0632482 A3 EP0632482 A3 EP 0632482A3 EP 94110274 A EP94110274 A EP 94110274A EP 94110274 A EP94110274 A EP 94110274A EP 0632482 A3 EP0632482 A3 EP 0632482A3
Authority
EP
European Patent Office
Prior art keywords
ion source
mass
flight
range
gas phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP94110274A
Other languages
German (de)
English (en)
Other versions
EP0632482A2 (fr
EP0632482B1 (fr
Inventor
Thorald Dr Bergmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Individual filed Critical Individual
Publication of EP0632482A2 publication Critical patent/EP0632482A2/fr
Publication of EP0632482A3 publication Critical patent/EP0632482A3/fr
Application granted granted Critical
Publication of EP0632482B1 publication Critical patent/EP0632482B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/40—Time-of-flight spectrometers
    • H01J49/403—Time-of-flight spectrometers characterised by the acceleration optics and/or the extraction fields

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
  • Electron Sources, Ion Sources (AREA)
EP94110274A 1993-07-02 1994-07-01 Source d'ions en phase gazeuse pour spectromètre de masse à temps de vol, présentant une résolution en masse élevée ainsi qu'une large gamme de masses Expired - Lifetime EP0632482B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4322101A DE4322101C2 (de) 1993-07-02 1993-07-02 Ionenquelle für Flugzeit-Massenspektrometer
DE4322101 1993-07-02

Publications (3)

Publication Number Publication Date
EP0632482A2 EP0632482A2 (fr) 1995-01-04
EP0632482A3 true EP0632482A3 (fr) 1995-11-29
EP0632482B1 EP0632482B1 (fr) 2000-03-15

Family

ID=6491835

Family Applications (1)

Application Number Title Priority Date Filing Date
EP94110274A Expired - Lifetime EP0632482B1 (fr) 1993-07-02 1994-07-01 Source d'ions en phase gazeuse pour spectromètre de masse à temps de vol, présentant une résolution en masse élevée ainsi qu'une large gamme de masses

Country Status (6)

Country Link
US (1) US5543624A (fr)
EP (1) EP0632482B1 (fr)
JP (1) JPH0831370A (fr)
AT (1) ATE190751T1 (fr)
CA (1) CA2127185A1 (fr)
DE (2) DE4322101C2 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19655304B8 (de) * 1995-12-14 2007-05-31 Micromass Uk Ltd. Massenspektrometer und Verfahren zur Massenspektrometrie
GB9525507D0 (en) * 1995-12-14 1996-02-14 Fisons Plc Electrospray and atmospheric pressure chemical ionization mass spectrometer and ion source
US6137112A (en) * 1998-09-10 2000-10-24 Eaton Corporation Time of flight energy measurement apparatus for an ion beam implanter
US6831280B2 (en) * 2002-09-23 2004-12-14 Axcelis Technologies, Inc. Methods and apparatus for precise measurement of time delay between two signals
JP4691712B2 (ja) * 2005-03-17 2011-06-01 独立行政法人産業技術総合研究所 飛行時間質量分析計
US8772708B2 (en) * 2010-12-20 2014-07-08 National University Corporation Kobe University Time-of-flight mass spectrometer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5073713A (en) * 1990-05-29 1991-12-17 Battelle Memorial Institute Detection method for dissociation of multiple-charged ions

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3577165A (en) * 1968-05-31 1971-05-04 Perkin Elmer Corp Linear scanning arrangement for a cycloidal mass spectrometer
GB1302193A (fr) * 1969-04-18 1973-01-04
DE2242987B2 (de) * 1972-09-01 1980-06-12 Gesellschaft Fuer Strahlen- Und Umweltforschung Mbh, 8000 Muenchen Vorrichtung zur Trennung von neutralen Teilchen und schnellen Ionen von langsamen Ionen
DE2947542A1 (de) * 1979-11-26 1981-06-04 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur ueberwachung und/oder steuerung von plasmaprozessen
FR2514905A1 (fr) * 1981-10-21 1983-04-22 Commissariat Energie Atomique Dispositif de mesure d'un courant ionique produit par un faisceau d'ions
WO1989006044A1 (fr) * 1987-12-24 1989-06-29 Unisearch Limited Spectrometre de masse

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5073713A (en) * 1990-05-29 1991-12-17 Battelle Memorial Institute Detection method for dissociation of multiple-charged ions

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
CHUNG HANG SIN: "ATMOSPHERIC PRESSURE IONIZATION TIME-OF-FLIGHT MASS SPECTROMETRY WITH A SUPERSONIC BEAM", ANALYTICAL CHEMISTRY, vol. 63, no. 24, 15 December 1991 (1991-12-15), COLUMBUS US, pages 2897 - 2900, XP000242058, DOI: doi:10.1021/ac00024a018 *
CONOVER C W S ET AL: "A TIME-OF-FLIGHT MASS SPECTROMETER FOR LARGE MOLECULAR CLUSTERS PRODUCED IN SUPERSONIC EXPANSIONS", REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 60, no. 6, pages 1065 - 1070, XP000035873 *

Also Published As

Publication number Publication date
DE4322101C2 (de) 1995-06-14
US5543624A (en) 1996-08-06
ATE190751T1 (de) 2000-04-15
DE4322101A1 (de) 1995-01-19
EP0632482A2 (fr) 1995-01-04
DE59409199D1 (de) 2000-04-20
CA2127185A1 (fr) 1995-01-03
EP0632482B1 (fr) 2000-03-15
JPH0831370A (ja) 1996-02-02

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