EP0676772A1 - Fenêtres pour rayons - Google Patents

Fenêtres pour rayons Download PDF

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Publication number
EP0676772A1
EP0676772A1 EP95301965A EP95301965A EP0676772A1 EP 0676772 A1 EP0676772 A1 EP 0676772A1 EP 95301965 A EP95301965 A EP 95301965A EP 95301965 A EP95301965 A EP 95301965A EP 0676772 A1 EP0676772 A1 EP 0676772A1
Authority
EP
European Patent Office
Prior art keywords
diamond
layer
ribs
substrate
array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP95301965A
Other languages
German (de)
English (en)
Other versions
EP0676772B1 (fr
Inventor
Paul Raymond Chalker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricardo AEA Ltd
Original Assignee
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority
Publication of EP0676772A1 publication Critical patent/EP0676772A1/fr
Application granted granted Critical
Publication of EP0676772B1 publication Critical patent/EP0676772B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/10—Scattering devices; Absorbing devices; Ionising radiation filters

Definitions

  • an X-ray window comprising a membrane of diamond one surface of which has formed upon it an array of diamond ribs so as to provide an integral supporting structure.

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Physical Vapour Deposition (AREA)
EP95301965A 1994-04-09 1995-03-24 Méthode de fabrication de fenêtres pour rayons X Expired - Lifetime EP0676772B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9407073 1994-04-09
GB9407073A GB9407073D0 (en) 1994-04-09 1994-04-09 X-Ray windows

Publications (2)

Publication Number Publication Date
EP0676772A1 true EP0676772A1 (fr) 1995-10-11
EP0676772B1 EP0676772B1 (fr) 1997-10-29

Family

ID=10753296

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95301965A Expired - Lifetime EP0676772B1 (fr) 1994-04-09 1995-03-24 Méthode de fabrication de fenêtres pour rayons X

Country Status (4)

Country Link
EP (1) EP0676772B1 (fr)
JP (1) JPH07294700A (fr)
DE (1) DE69500941T2 (fr)
GB (1) GB9407073D0 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001008195A1 (fr) * 1999-07-26 2001-02-01 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Anode a rayons x et procede de fabrication de cette anode
US7443958B2 (en) 2004-03-19 2008-10-28 Ge Homeland Protection, Inc. Electron window for a liquid metalanode, liquid metal anode, X-ray emitter and method for operating such an X-ray emitter of this type
US7515688B2 (en) 2004-03-30 2009-04-07 Ge Homeland Protection, Inc. Anode module for a liquid metal anode X-ray source, and X-ray emitter comprising an anode module
EP2105944A1 (fr) * 2008-03-28 2009-09-30 FEI Company "Cellule environnementale" pour appareil optique à particules chargées
CN101449353B (zh) * 2006-05-18 2010-12-15 浜松光子学株式会社 X射线管及使用其的x射线照射装置

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4797252B2 (ja) * 2001-02-09 2011-10-19 住友電気工業株式会社 Ｘ線光学素子およびその製造方法
JP4792639B2 (ja) * 2001-02-14 2011-10-12 住友電気工業株式会社 窓材、光学用窓、および窓材の製造方法
JP4248248B2 (ja) * 2001-03-20 2009-04-02 アドバンスト・エレクトロン・ビームズ・インコーポレーテッド Ｘ線照射装置
WO2005029531A1 (fr) * 2003-09-16 2005-03-31 Hamamatsu Photonics K.K. Tube a rayons x
US8498381B2 (en) 2010-10-07 2013-07-30 Moxtek, Inc. Polymer layer on X-ray window
US9305735B2 (en) 2007-09-28 2016-04-05 Brigham Young University Reinforced polymer x-ray window
JP2010185665A (ja) * 2009-02-10 2010-08-26 Kobe Steel Ltd Ｘ線透過窓材及びその窓材を備えたｘ線透過窓
US8247971B1 (en) 2009-03-19 2012-08-21 Moxtek, Inc. Resistively heated small planar filament
US8526574B2 (en) 2010-09-24 2013-09-03 Moxtek, Inc. Capacitor AC power coupling across high DC voltage differential
US8804910B1 (en) 2011-01-24 2014-08-12 Moxtek, Inc. Reduced power consumption X-ray source
US8750458B1 (en) 2011-02-17 2014-06-10 Moxtek, Inc. Cold electron number amplifier
US8929515B2 (en) 2011-02-23 2015-01-06 Moxtek, Inc. Multiple-size support for X-ray window
US8989354B2 (en) 2011-05-16 2015-03-24 Brigham Young University Carbon composite support structure
US9174412B2 (en) 2011-05-16 2015-11-03 Brigham Young University High strength carbon fiber composite wafers for microfabrication
US9076628B2 (en) 2011-05-16 2015-07-07 Brigham Young University Variable radius taper x-ray window support structure
US8761344B2 (en) 2011-12-29 2014-06-24 Moxtek, Inc. Small x-ray tube with electron beam control optics
JP5580843B2 (ja) * 2012-03-05 2014-08-27 双葉電子工業株式会社 Ｘ線管
US9173623B2 (en) 2013-04-19 2015-11-03 Samuel Soonho Lee X-ray tube and receiver inside mouth

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5039203A (en) * 1989-02-08 1991-08-13 Seiko Instruments Inc. Optical window member and method for production thereof
EP0476827A1 (fr) * 1990-09-18 1992-03-25 Sumitomo Electric Industries, Limited Fenêtre à rayons X et procédé pour fabriquer celle-ci
WO1993000685A1 (fr) * 1991-06-25 1993-01-07 MUELLER, Margherita, T. Membranes en diamant pour lithographie par rayons x

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5039203A (en) * 1989-02-08 1991-08-13 Seiko Instruments Inc. Optical window member and method for production thereof
EP0476827A1 (fr) * 1990-09-18 1992-03-25 Sumitomo Electric Industries, Limited Fenêtre à rayons X et procédé pour fabriquer celle-ci
WO1993000685A1 (fr) * 1991-06-25 1993-01-07 MUELLER, Margherita, T. Membranes en diamant pour lithographie par rayons x

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
DATABASE INSPEC INSTITUTE OF ELECTRICAL ENGINEERS, STEVENAGE, GB; RAVET M F ET AL: "Realization of x-ray lithography masks based on diamond membranes" *
MATERIALS ASPECTS OF X-RAY LITHOGRAPHY. SYMPOSIUM, MATERIALS ASPECTS OF X-RAY LITHOGRAPHY. SYMPOSIUM, SAN FRANCISCO, CA, USA, 12-14 APRIL 1993, 1993, PITTSBURGH, PA, USA, MATER. RES. SCO, USA, pages 103 - 109 *

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001008195A1 (fr) * 1999-07-26 2001-02-01 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Anode a rayons x et procede de fabrication de cette anode
US6850598B1 (en) 1999-07-26 2005-02-01 Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. X-ray anode and process for its manufacture
US7443958B2 (en) 2004-03-19 2008-10-28 Ge Homeland Protection, Inc. Electron window for a liquid metalanode, liquid metal anode, X-ray emitter and method for operating such an X-ray emitter of this type
US7515688B2 (en) 2004-03-30 2009-04-07 Ge Homeland Protection, Inc. Anode module for a liquid metal anode X-ray source, and X-ray emitter comprising an anode module
CN101449353B (zh) * 2006-05-18 2010-12-15 浜松光子学株式会社 X射线管及使用其的x射线照射装置
EP2105944A1 (fr) * 2008-03-28 2009-09-30 FEI Company "Cellule environnementale" pour appareil optique à particules chargées
EP2105943A3 (fr) * 2008-03-28 2011-05-11 Fei Company Cellule environnementale pour appareil optique corpusculaire
US8093558B2 (en) 2008-03-28 2012-01-10 Fei Company Environmental cell for a particle-optical apparatus
US8658974B2 (en) 2008-03-28 2014-02-25 Fei Company Environmental cell for a particle-optical apparatus

Also Published As

Publication number Publication date
EP0676772B1 (fr) 1997-10-29
DE69500941T2 (de) 1998-03-05
JPH07294700A (ja) 1995-11-10
GB9407073D0 (en) 1994-06-01
DE69500941D1 (de) 1997-12-04

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