EP0704967A3 - Akustische Oberflächenwellenanordnung - Google Patents

Akustische Oberflächenwellenanordnung Download PDF

Info

Publication number
EP0704967A3
EP0704967A3 EP95306381A EP95306381A EP0704967A3 EP 0704967 A3 EP0704967 A3 EP 0704967A3 EP 95306381 A EP95306381 A EP 95306381A EP 95306381 A EP95306381 A EP 95306381A EP 0704967 A3 EP0704967 A3 EP 0704967A3
Authority
EP
European Patent Office
Prior art keywords
acoustic wave
surface acoustic
wave device
wave
acoustic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP95306381A
Other languages
English (en)
French (fr)
Other versions
EP0704967A2 (de
EP0704967B1 (de
Inventor
Mitsuhiro Tanaka
Masao Takeuchi
Kazuhiko Yamanouchi
Hiroyuki Odagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP23355094A external-priority patent/JP3484237B2/ja
Priority claimed from JP6260488A external-priority patent/JP3014930B2/ja
Priority claimed from JP7008048A external-priority patent/JP3040928B2/ja
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of EP0704967A2 publication Critical patent/EP0704967A2/de
Publication of EP0704967A3 publication Critical patent/EP0704967A3/de
Application granted granted Critical
Publication of EP0704967B1 publication Critical patent/EP0704967B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14502—Surface acoustic wave [SAW] transducers for a particular purpose
    • H03H9/14505—Unidirectional SAW transducers

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
EP95306381A 1994-09-28 1995-09-12 Akustische Oberflächenwellenanordnung Expired - Lifetime EP0704967B1 (de)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
JP23355094A JP3484237B2 (ja) 1994-09-28 1994-09-28 弾性表面波デバイス
JP23355094 1994-09-28
JP233550/94 1994-09-28
JP6260488A JP3014930B2 (ja) 1994-10-25 1994-10-25 弾性表面波デバイス
JP260488/94 1994-10-25
JP26048894 1994-10-25
JP804895 1995-01-23
JP7008048A JP3040928B2 (ja) 1995-01-23 1995-01-23 弾性表面波トランスデューサ
JP8048/95 1995-01-23

Publications (3)

Publication Number Publication Date
EP0704967A2 EP0704967A2 (de) 1996-04-03
EP0704967A3 true EP0704967A3 (de) 1997-08-27
EP0704967B1 EP0704967B1 (de) 2001-08-08

Family

ID=27277852

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95306381A Expired - Lifetime EP0704967B1 (de) 1994-09-28 1995-09-12 Akustische Oberflächenwellenanordnung

Country Status (3)

Country Link
US (1) US5773911A (de)
EP (1) EP0704967B1 (de)
DE (1) DE69522066T2 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0704967B1 (de) * 1994-09-28 2001-08-08 Masao Takeuchi Akustische Oberflächenwellenanordnung
JP3268179B2 (ja) * 1995-11-08 2002-03-25 正男 竹内 弾性表面波変換器及びこの変換器を用いた弾性表面波フィルタ
DE69712654T2 (de) * 1996-02-22 2002-09-05 Seiko Epson Corp., Tokio/Tokyo Tintenstrahlaufzeichnungskopf, Tintenstrahlaufzeichnungsgerät damit versehen und Herstellungsverfahren eines Tintenstrahlaufzeichnungskopfes
JPH10256870A (ja) * 1997-03-14 1998-09-25 Ngk Insulators Ltd 弾性表面波デバイス
WO1999004488A1 (en) * 1997-07-16 1999-01-28 Sawtek Inc. An optimal cut for saw devices on quartz
DE19907640A1 (de) * 1998-03-25 1999-10-07 Dresden Ev Inst Festkoerper Akustisches Oberflächenwellenbauelement
JP3291255B2 (ja) * 1998-09-22 2002-06-10 日本碍子株式会社 弾性表面波デバイス
US6420815B1 (en) * 1999-09-16 2002-07-16 Sanyo Electric Co., Ltd. Substrate for surface acoustic wave device and surface acoustic wave device
US6242844B1 (en) * 1999-12-28 2001-06-05 Cts Corporation Wide-band single-phase unidirectional transducer
DE10041040A1 (de) * 2000-08-22 2002-03-07 Zeiss Carl Vorrichtung und Verfahren zur Belichtung einer strahlungsempfindlichen Schicht mittels geladener Teilchen sowie Maske hierfür
GB0024853D0 (en) * 2000-10-11 2000-11-22 Morgan David P Transducers for surface acoustic wave devices
DE10113788A1 (de) 2001-03-21 2002-09-26 Zeiss Carl Beugungsoptische Komponente, Beleuchtungssystem und Belichtungssystem mit einer solchen beugungsoptischen Komponente und Belichtungsverfahren unter Verwendung eines solchen Belichtungssystems
JP2003124778A (ja) * 2001-10-05 2003-04-25 Samsung Electro Mech Co Ltd 一方向性弾性表面波変換器
AU2003209209A1 (en) * 2002-01-25 2003-09-02 Michigan State University Surface acoustic wave devices based on unpolished nanocrystalline diamond
RU2195069C1 (ru) * 2002-04-08 2002-12-20 Зао Нпп "Элко" Однонаправленный преобразователь поверхностных акустических волн
CN100468966C (zh) * 2002-06-26 2009-03-11 Lg伊诺特有限公司 单晶衬底
JP4182157B2 (ja) * 2002-08-12 2008-11-19 株式会社村田製作所 表面波装置
EP1678823A2 (de) * 2003-10-08 2006-07-12 RF Saw Components, Incorporated Unidirektionaler einphasen-oberflächenwellenwandler und verbesserte reflektoren
DE102010041973B4 (de) * 2010-10-05 2015-04-16 Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. Bauelement auf der Basis akustischer Oberflächenwellen
CN205992889U (zh) * 2014-03-31 2017-03-01 株式会社村田制作所 声表面波滤波器
US12494768B2 (en) * 2021-12-28 2025-12-09 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with gap dielectric stripes in busbar-electrode gaps

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0560634A1 (de) * 1992-03-13 1993-09-15 Japan Energy Corporation Akustische Oberflächenwellenanordnung

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3686518A (en) * 1970-09-02 1972-08-22 Clinton S Hartmann Unidirectional surface wave transducers
US4087714A (en) * 1971-10-18 1978-05-02 Hazeltine Corporation Three phase unidirectional transducer
US3748603A (en) * 1972-03-27 1973-07-24 Zenith Radio Corp Surface wave filter with reflection suppression
FR2290786A1 (fr) * 1974-11-08 1976-06-04 Thomson Csf Dispositif a reflexion selective d'ondes elastiques de surface
US4006438A (en) * 1975-08-18 1977-02-01 Amp Incorporated Electro-acoustic surface-wave filter device
US4353046A (en) * 1980-11-04 1982-10-05 R F Monolithics, Inc. Surface acoustic wave device with reflectors
JPS57103420A (en) * 1980-12-18 1982-06-28 Toko Inc Grouped unidirectional surface acoustic wave transducer
US4521711A (en) * 1982-04-14 1985-06-04 Clarion Co., Ltd. Unidirectional transducer for a surface-acoustic-wave device and a method of making same
US4910839A (en) * 1984-12-03 1990-03-27 R.F. Monolithics, Inc. Method of making a single phase unidirectional surface acoustic wave transducer
US4818961A (en) * 1987-04-15 1989-04-04 Hitachi, Ltd. Surface acoustic wave filter with capacitive phase shifter
JPH0244169A (ja) * 1988-08-04 1990-02-14 Nippon Kentetsu Co Ltd 冷蔵オープンショーケースの運転制御方法
JP2709520B2 (ja) * 1988-10-16 1998-02-04 和彦 山之内 電極指間ギャップ微小な弾性表面波変換器の構造及びその製造方法
JP3107381B2 (ja) * 1989-05-26 2000-11-06 株式会社日立製作所 弾性表面波デバイス
US5051644A (en) * 1990-04-19 1991-09-24 R. F. Monolithics, Inc. Electrode structure with constant velocity and predetermined reflectivity
JP3096102B2 (ja) * 1991-08-29 2000-10-10 和彦 山之内 弾性表面波フィルタ装置
FR2682833B1 (fr) * 1991-10-18 1993-12-03 Thomson Csf Filtre a ondes de surface et a trajet acoustique replie.
JP3363937B2 (ja) * 1992-03-26 2003-01-08 日本碍子株式会社 弾性表面波フィルタ装置
JPH05328736A (ja) * 1992-05-15 1993-12-10 Yuasa Corp 三相インバータの制御回路
DE4330438B4 (de) * 1992-09-09 2010-07-01 Hitachi, Ltd. Oberflächenakustikwelleneinrichtung
FR2695771B1 (fr) * 1992-09-15 1994-10-28 Thomson Csf Transducteur d'ondes unidirectionnel.
EP0704967B1 (de) * 1994-09-28 2001-08-08 Masao Takeuchi Akustische Oberflächenwellenanordnung
US5545940A (en) * 1994-11-07 1996-08-13 Rf Monolithics, Inc. Multitrack transversely folded surface acoustic wave structure

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0560634A1 (de) * 1992-03-13 1993-09-15 Japan Energy Corporation Akustische Oberflächenwellenanordnung

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
LAM C S ET AL: "A LOW-LOSS SAW FILTER USING TWO-FINGER PER WAVELENTH ELECTRODES ON THE NSPUDT ORIENTATION OF QUARTZ", PROCEEDINGS OF THE ULTRASONICS SYMPOSIUM, BALTIMORE, OCT. 31 - NOV. 3, 1993, vol. 1, 31 October 1993 (1993-10-31), LEVY M;MCAVOY B R, pages 185 - 188, XP000473555 *
THORVALDSSON T ET AL: "LOW LOSS SAW FILTERS UTILIZING THE NATURAL SINGLE PHASE UNIDIRECTIONAL TRANSDUCER (NSPUDT)*", PROCEEDINGS OF THE ULTRASONICS SYMPOSIUM, HONOLULU, DEC. 4 - 7, 1990, vol. 1, 4 December 1990 (1990-12-04), MCAVOY B, pages 43 - 48, XP000290032 *
YAMANOUCHI K ET AL: "WIDE BANDWIDTH LOW LOSS FILTERS USING PIEZOELECTRIC LEAKY SAW UNIDIRECTIONAL TRANSDUCERS WITH FLOATING ELECTRODES", JAPANESE JOURNAL OF APPLIED PHYSICS, SUPPLEMENTS, vol. 30, no. SUPPL.30-1, 1 January 1991 (1991-01-01), pages 173 - 175, XP000305676 *

Also Published As

Publication number Publication date
EP0704967A2 (de) 1996-04-03
EP0704967B1 (de) 2001-08-08
DE69522066D1 (de) 2001-09-13
US5773911A (en) 1998-06-30
DE69522066T2 (de) 2002-03-28

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